TWI589655B - An additive for crystalline silicon alkaline polishing liquid and use thereof - Google Patents

An additive for crystalline silicon alkaline polishing liquid and use thereof Download PDF

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TWI589655B
TWI589655B TW105106755A TW105106755A TWI589655B TW I589655 B TWI589655 B TW I589655B TW 105106755 A TW105106755 A TW 105106755A TW 105106755 A TW105106755 A TW 105106755A TW I589655 B TWI589655 B TW I589655B
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polishing liquid
additive
alkaline
polishing
mass
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TW201731992A (en
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章圓圓
符黎明
史文龍
宋衛平
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常州時創能源科技有限公司
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Description

結晶矽鹼性拋光液的添加劑及其應用 Additive of crystalline bismuth alkaline polishing liquid and application thereof

本發明涉及結晶矽鹼性拋光液的添加劑及其應用。 This invention relates to additives for crystalline bismuth alkaline polishing fluids and their use.

矽片表面的絨面製作對於太陽電池來說至關重要,不僅可以顯著降低矽的反射率,而且可以通過增加光在矽中的光程來增加矽對光的吸收。目前輔助出絨的方法很多,包括各種製絨添加劑,可以保證絨面出絨率達到100%,讓製絨工藝變成一個可控的生產環節。隨著製絨工藝的發展,絨面的均勻性是提升電池效率的方法之一。絨面的均勻性越好,則電池片的開壓越高,從而效率也越高。然而,目前習知製絨後的絨面均勻性不佳,如金字塔的尺寸不均一,同時亦有金字塔塔肩上再生長小金字塔的現象。而經過先拋光後製絨工藝的矽片,可以實現均勻的金字塔結構,從而提升電池片的開壓和效率。很多公司採用高濃度的鹼溶液進行拋光後,再在低濃度鹼液中製絨,電池效率獲得了明顯的提升。但這種預處理經常帶來外觀方面的困擾,這是因為在高溫高鹼濃度的溶液中進行拋光時,矽酸鈉極易在表面殘留,並且矽酸鈉在進入製絨槽前就會固化,嚴重干擾矽片後續的製絨過程,導致矽酸 鈉覆蓋的區域沒有金字塔絨面,在矽片表面呈現發亮的白斑,嚴重影響電池的外觀和成品率。 The suede finish on the surface of the batt is critical to the solar cell, not only can significantly reduce the reflectivity of the plutonium, but also increase the absorption of light by increasing the optical path of the light in the crucible. At present, there are many methods for assisting cashmere, including various kinds of texturing additives, which can ensure that the suede rate reaches 100%, and the texturing process becomes a controllable production link. With the development of the texturing process, the uniformity of the suede is one of the methods to improve the efficiency of the battery. The better the uniformity of the suede, the higher the opening pressure of the cell, and the higher the efficiency. However, it is currently known that the uniformity of the suede after the velvet is not good, such as the size of the pyramid is not uniform, and there is also a phenomenon of regenerating a small pyramid on the pyramid tower shoulder. The ruthenium after the first polishing and the velvet process can realize a uniform pyramid structure, thereby improving the opening pressure and efficiency of the battery. Many companies use high-concentration alkali solution for polishing, and then soften in low-concentration lye, the battery efficiency has been significantly improved. However, this pretreatment often causes an appearance problem because sodium citrate is easily left on the surface during polishing in a solution of high temperature and high alkali concentration, and sodium citrate solidifies before entering the velvet tank. , severely interfere with the subsequent texturing process of the bracts, resulting in tannic acid The area covered by sodium has no pyramidal suede, and it has bright white spots on the surface of the bracts, which seriously affects the appearance and yield of the battery.

實現低溫低鹼濃度的矽片拋光,同時避免相應的外觀問題,這將是拋光添加劑的機會和挑戰。 The realization of low temperature and low alkali concentration of enamel polishing while avoiding corresponding appearance problems will be an opportunity and challenge for polishing additives.

另一方面,目前流行的PERC電池(鈍化射極及背接觸式電池,Passivated emitter rear contact solar cells)工藝需要比較平整的背面進行氧化鋁鈍化,優化的方案是背面選用鹼溶液拋光,這樣表面態密度更低,鈍化效果更好。但一般的鹼溶液拋光形成的背面平整度不高,台階面過多,導致後續的鈍化效果降低。如何提升鹼拋光效果以獲得滿意的鈍化結果,對於PERC電池來說有著重要的意義。 On the other hand, the current popular PERC battery (passivated emitter rear contact solar cells) process requires a relatively flat back side for alumina passivation. The optimized solution is to use an alkali solution to polish the back surface. Lower density and better passivation. However, the flatness of the back surface formed by the polishing of the alkali solution is not high, and the step surface is excessive, resulting in a decrease in the subsequent passivation effect. How to improve the alkali polishing effect to obtain satisfactory passivation results is of great significance for PERC batteries.

本發明的目的在於提供一種結晶矽鹼性拋光液的添加劑及其應用,在對矽片進行製絨前的拋光預處理時,將本發明的添加劑加入到鹼性溶液中,可達到優異的拋光效果,可在低鹼濃度下實現矽片拋光,提高絨面的均勻性,從而顯著提高電池開路電壓和電池效率;且本發明添加劑也適用於矽片擴散後的單面拋光,能夠獲得相對平整、均勻的背拋光表面,特別適用於PERC電池工藝,能輔助實現對PERC電池鈍化效果的提高。 The object of the present invention is to provide an additive for a crystalline bismuth alkaline polishing liquid and an application thereof, which can be excellently polished by adding the additive of the present invention to an alkaline solution during polishing pretreatment before the crepe sheet is subjected to texturing. The effect is that the bract polishing can be achieved at a low alkali concentration, the uniformity of the suede surface is improved, thereby significantly improving the open circuit voltage and the battery efficiency of the battery; and the additive of the invention is also suitable for single-side polishing after the diffusion of the bracts, and can be relatively flat. The uniform back polishing surface is especially suitable for the PERC battery process, which can help improve the passivation effect of the PERC battery.

為實現上述目的,本發明提供一種結晶矽鹼性拋光液的添加劑,由0.5~2%聚乙二醇、0.5~2%烷基糖苷、0.5~2%硬酯酸銨、1~3%的乙二胺、1~5%的硫酸銨、2~8%的尿素和餘量的水組成。 In order to achieve the above object, the present invention provides an additive for a crystalline bismuth alkaline polishing liquid, which comprises 0.5 to 2% polyethylene glycol, 0.5 to 2% alkyl glycoside, 0.5 to 2% ammonium stearate, and 1 to 3%. Ethylenediamine, 1~5% ammonium sulfate, 2~8% urea and the balance of water.

優選的,所述的結晶矽鹼性拋光液的添加劑,由1~1.5%聚 乙二醇、1~1.5%烷基糖苷、0.5~1%硬酯酸銨、1~2%的乙二胺、2~4%的硫酸銨、3~6%的尿素和餘量的水組成。 Preferably, the additive of the crystalline alkaline alkaline polishing liquid is polymerized by 1 to 1.5%. Ethylene glycol, 1~1.5% alkyl glycoside, 0.5~1% ammonium stearate, 1-2% ethylenediamine, 2~4% ammonium sulfate, 3~6% urea and the balance of water .

優選的,所述水為去離子水。 Preferably, the water is deionized water.

本發明還提供一種結晶矽鹼性拋光液,通過如下步驟配製:1)將氫氧化鈉、氫氧化鉀或四甲基氫氧化銨溶於去離子水中,得到鹼性溶液;所述氫氧化鈉、氫氧化鉀的品質百分含量為1~5%;所述四甲基氫氧化銨的品質百分含量為2~6%;2)將上述的添加劑加入上述步驟1)中的鹼性溶液中,得到結晶矽鹼性拋光液;其中,添加劑與鹼性溶液的品質比為1~6:100。 The invention also provides a crystalline bismuth alkaline polishing liquid prepared by the following steps: 1) dissolving sodium hydroxide, potassium hydroxide or tetramethylammonium hydroxide in deionized water to obtain an alkaline solution; The potassium hydroxide has a mass percentage of 1 to 5%; the tetramethylammonium hydroxide has a mass percentage of 2 to 6%; 2) the above additive is added to the alkaline solution in the above step 1) In the middle, a crystalline cerium alkaline polishing liquid is obtained; wherein the mass ratio of the additive to the alkaline solution is 1 to 6:100.

一種優選的方案,所述氫氧化鈉、氫氧化鉀的品質百分含量為2~3%;所述四甲基氫氧化銨的品質百分含量為3~5%。 In a preferred embodiment, the sodium hydroxide and potassium hydroxide have a mass percentage of 2 to 3%; and the tetramethylammonium hydroxide has a mass percentage of 3 to 5%.

另一種優選的方案,所述氫氧化鈉、氫氧化鉀的品質百分含量為1~1.5%;所述四甲基氫氧化銨的品質百分含量為2~2.5%。 In another preferred embodiment, the sodium hydroxide and potassium hydroxide have a mass percentage of 1 to 1.5%; and the tetramethylammonium hydroxide has a mass percentage of 2 to 2.5%.

優選的,所述添加劑與鹼性溶液的品質比為2~4:100。 Preferably, the quality ratio of the additive to the alkaline solution is 2 to 4:100.

本發明還提供一種結晶矽拋光方法,將單晶或多晶矽片浸入到上述的拋光液中進行拋光,溫度控制在攝氏60~80度,時間控制在0.5~5分鐘。 The invention also provides a crystallization enamel polishing method, wherein a single crystal or polycrystalline ruthenium sheet is immersed in the above polishing liquid for polishing, the temperature is controlled at 60 to 80 degrees Celsius, and the time is controlled at 0.5 to 5 minutes.

本發明的優點和有益效果在於:提供一種結晶矽鹼性拋光液的添加劑及其應用,在對矽片進行表面拋光時,將本發明的添加劑加入到鹼性溶液中,可達到優異的拋光效果,可在低鹼濃度下實現拋光,且本發明添加劑能適用於先拋光後製絨的工藝,能使矽片的拋光效果提高,同時降低成本,縮短反應時間,降低電池 片碎片率,提高電池片的產能,同時提高電池片的光電轉換效率。 The invention has the advantages and advantageous effects of providing an additive of a crystalline bismuth alkaline polishing liquid and an application thereof, and adding the additive of the invention to an alkaline solution during surface polishing of the enamel sheet, thereby achieving an excellent polishing effect The polishing can be achieved at a low alkali concentration, and the additive of the invention can be applied to the process of first polishing and then velvet, which can improve the polishing effect of the enamel sheet, reduce the cost, shorten the reaction time, and reduce the battery. The chip fragmentation rate increases the productivity of the cell while improving the photoelectric conversion efficiency of the cell.

添加劑中的硬酯酸銨、硫酸銨能使矽片在較小減重下即可獲得穩定的均勻金字塔結構;選擇將乙二胺、尿素添加在拋光體系中,可以使後道製絨的絨面尺寸和反射率可控,從而滿足不同的需求。 The ammonium stearate and ammonium sulfate in the additive can obtain a stable uniform pyramid structure under the small weight loss of the bracts; the choice of adding ethylenediamine and urea to the polishing system can make the fleece of the subsequent fleece Face size and reflectivity are controllable to meet different needs.

採用本發明添加劑,能使拋光反應速度加快,並可在低鹼濃度下實現拋光,節約鹼用量15-30%。本發明添加劑應用範圍廣,既能應用於單晶矽片的拋光,亦能應用於多晶矽片的拋光。本發明添加劑更能適用於先拋光後製絨的工藝,經過先拋光後製絨工藝後獲得的絨面相對只經過製絨的絨面更加均勻,金字塔沒有疊加的狀態,從而提升開壓,提升電池效率0.2%以上,並且減重可控制在0.5-0.7公克(156單晶矽片),與習知鹼製絨工藝相當。當然,本發明添加劑也能適用於先製絨後背拋光的工藝,矽片經過背拋光後能獲得均勻平整的絨面。 By using the additive of the invention, the polishing reaction speed can be accelerated, and the polishing can be achieved at a low alkali concentration, and the alkali consumption is reduced by 15-30%. The additive of the invention has wide application range, and can be applied to polishing of single crystal enamel sheet and polishing of polycrystalline enamel sheet. The additive of the invention is more suitable for the process of first polishing and then velveting. After the first polishing and the velvet process, the suede surface is relatively uniform with respect to the only suede, and the pyramid has no superimposed state, thereby improving the opening pressure and lifting. The battery efficiency is 0.2% or more, and the weight loss can be controlled at 0.5-0.7 g (156 single crystal ruthenium), which is equivalent to the conventional alkali velvet process. Of course, the additive of the present invention can also be applied to the process of first-stage velvet back polishing, and the crepe sheet can obtain a uniform flat suede after back polishing.

圖1是習知背拋光矽片表面拋光面的顯微鏡照片;圖2是實施例1得到的矽片表面拋光面的顯微鏡照片;圖3是習知製絨絨面的掃描電鏡照片;圖4是實施例2得到的先拋光後製絨絨面的掃描電鏡照片。 1 is a micrograph of a surface polishing surface of a conventional back-polished cymbal; FIG. 2 is a micrograph of the surface polished surface of the cymbal obtained in Example 1; FIG. 3 is a scanning electron micrograph of a conventional velvet surface; A scanning electron micrograph of the velvet surface obtained by polishing in Example 2 was obtained.

下面結合附圖和實施例,對本發明的具體實施方式作進一步描述。以下實施例僅用於更加清楚地說明本發明的技術方案,而不能以此來限制本發明的保護範圍。 The specific embodiments of the present invention are further described below in conjunction with the drawings and embodiments. The following examples are only intended to more clearly illustrate the technical solutions of the present invention, and are not intended to limit the scope of the present invention.

本發明具體實施的技術方案是: The technical solution specifically implemented by the present invention is:

實施例1 Example 1

先拋光後製絨,其中拋光工藝採取如下步驟:1)配製結晶矽鹼性拋光液的添加劑:以去離子水為溶劑,將2公克聚乙二醇(PEG)、2公克烷基糖苷(Alkyl polygylcosides)、2公克硬脂酸銨(Ammonium stearate)、3公克的乙二胺(Ethylenediamine)、5公克的硫酸銨(Ammonium sulfate)、8公克的尿素(Urea)溶解於去離子水中,製得100公克添加劑;2)配製鹼性溶液:將50公克氫氧化鈉溶解於去離子水中,得到1000公克鹼性溶液;3)在1000公克鹼性溶液中加入60公克添加劑;4)將單晶矽片浸入拋光液中進行拋光,溫度控制在攝氏80度,時間控制在5分鐘。 First polishing and then velvet, wherein the polishing process takes the following steps: 1) preparing an additive for the crystalline bismuth alkaline polishing solution: using deionized water as a solvent, 2 g of polyethylene glycol (PEG), 2 g of alkyl glycoside (Alkyl) Polygylcosides), 2 grams of Ammonium stearate, 3 grams of ethylenediamine (Ethylenediamine), 5 grams of ammonium sulfate (Ammonium sulfate), 8 grams of urea (Urea) dissolved in deionized water to make 100 Gram additives; 2) preparation of alkaline solution: 50 grams of sodium hydroxide dissolved in deionized water to obtain 1000 grams of alkaline solution; 3) 60 grams of additive in 1000 grams of alkaline solution; 4) single crystal enamel It is immersed in a polishing solution for polishing, the temperature is controlled at 80 degrees Celsius, and the time is controlled at 5 minutes.

習知背拋光矽片表面拋光面的顯微鏡照片如圖1所示,可以看到,習知背拋後拋光面方塊尺寸不均一,且拋光面不平整。圖2給出了本實施例得到的矽片表面拋光面的顯微鏡照片,從圖2中可以看到矽片表面形成了均勻平滑的方塊結構,尺寸約為20~30μm(微米)。 A micrograph of the polished surface of the back-polished bracts is shown in Fig. 1. It can be seen that the size of the polished face is not uniform after the back throwing, and the polished surface is not flat. Fig. 2 is a photomicrograph showing the polished surface of the ruthenium surface obtained in the present embodiment. It can be seen from Fig. 2 that the surface of the ruthenium sheet has a uniform and smooth square structure with a size of about 20 to 30 μm (micrometer).

實施例2 Example 2

先拋光後製絨,其中拋光工藝採取如下步驟:1)配製結晶矽鹼性拋光液的添加劑: 以去離子水為溶劑,將0.5公克聚乙二醇、0.5公克烷基糖苷、0.5公克硬脂酸銨、1公克的乙二胺、1公克的硫酸銨、2公克的尿素溶解於去離子水中,製得100公克添加劑;2)配製鹼性溶液:將20公克四甲基氫氧化銨溶解於去離子水中,得到1000公克鹼性溶液;3)在1000公克鹼性溶液中加入10公克添加劑;4)將單晶矽片浸入拋光液中進行拋光,溫度控制在攝氏60度,時間控制在0.5分鐘。 First polishing and then texturing, wherein the polishing process takes the following steps: 1) preparing an additive for the crystalline bismuth alkaline polishing liquid: Dissolve 0.5 g of polyethylene glycol, 0.5 g of alkyl glycoside, 0.5 g of ammonium stearate, 1 g of ethylenediamine, 1 g of ammonium sulfate, and 2 g of urea in deionized water using deionized water as solvent. , 100 grams of additives are prepared; 2) alkaline solution is prepared: 20 grams of tetramethylammonium hydroxide is dissolved in deionized water to obtain 1000 grams of alkaline solution; 3) 10 grams of additive is added to 1000 grams of alkaline solution; 4) The single crystal crucible is immersed in a polishing liquid for polishing, the temperature is controlled at 60 degrees Celsius, and the time is controlled at 0.5 minutes.

習知製絨絨面的掃描電鏡照片如圖3所示,圖4給出了本實施得到的先拋光後製絨絨面的掃描電鏡照片,從圖4中可以看到經過拋光-製絨工藝後獲得的絨面相對只經過製絨的絨面更加均勻,金字塔沒有疊加的狀態。 A scanning electron micrograph of a conventional velvet surface is shown in Fig. 3. Fig. 4 shows a scanning electron micrograph of the velvet surface after polishing in this embodiment. From Fig. 4, a polishing-texturing process can be seen. The suede obtained afterwards has a more uniform fleece-like suede, and the pyramid has no superimposed state.

實施例3 Example 3

先製絨後背拋光,其中拋光工藝採取如下步驟:1)配製結晶矽鹼性拋光液的添加劑:以去離子水為溶劑,將1.5公克聚乙二醇、1.5公克烷基糖苷、1公克硬脂酸銨、2公克的乙二胺、4公克的硫酸銨、6公克的尿素溶解於去離子水中,製得100公克添加劑;2)配製鹼性溶液:將30公克氫氧化鉀溶解於去離子水中,得到1000公克鹼性溶液;3)在1000公克鹼性溶液中加入40公克添加劑; 4)將多晶矽片浸入拋光液中進行拋光,溫度控制在攝氏70度,時間控制在2.5分鐘。 The first step is to polish the back, wherein the polishing process takes the following steps: 1) preparing an additive for the crystalline bismuth alkaline polishing solution: using deionized water as a solvent, 1.5 g of polyethylene glycol, 1.5 g of alkyl glycoside, 1 g of stearin Ammonium acid, 2 grams of ethylenediamine, 4 grams of ammonium sulfate, 6 grams of urea dissolved in deionized water to make 100 grams of additives; 2) Preparation of alkaline solution: 30 grams of potassium hydroxide dissolved in deionized water , obtaining 1000 grams of alkaline solution; 3) adding 40 grams of additive to 1000 grams of alkaline solution; 4) The polycrystalline silicon flakes are immersed in a polishing liquid for polishing, the temperature is controlled at 70 degrees Celsius, and the time is controlled at 2.5 minutes.

實施例4 Example 4

在實施例1的基礎上,改氫氧化鈉為10公克,聚乙二醇為1公克。 On the basis of Example 1, the sodium hydroxide was changed to 10 g, and the polyethylene glycol was 1 g.

實施例5 Example 5

在實施例1的基礎上,改氫氧化鈉為12公克,烷基糖苷為1公克。 On the basis of Example 1, the sodium hydroxide was changed to 12 g, and the alkyl glycoside was 1 g.

實施例6 Example 6

在實施例1的基礎上,改氫氧化鈉為15公克,硬脂酸銨為0.7公克。 On the basis of Example 1, sodium hydroxide was changed to 15 g, and ammonium stearate was 0.7 g.

實施例7 Example 7

在實施例1的基礎上,改氫氧化鈉為18公克,乙二胺為1.5公克。 On the basis of Example 1, the sodium hydroxide was changed to 18 g, and the ethylenediamine was 1.5 g.

實施例8 Example 8

在實施例1的基礎上,改氫氧化鈉為20公克,硫酸銨為1.4公克。 On the basis of Example 1, the sodium hydroxide was changed to 20 g and the ammonium sulfate was 1.4 g.

實施例9 Example 9

在實施例1的基礎上,改氫氧化鈉為25公克,尿素為2.5公克。 On the basis of Example 1, the sodium hydroxide was changed to 25 g, and the urea was 2.5 g.

實施例10 Example 10

在實施例1的基礎上,改氫氧化鈉為30公克,在1000公克鹼性溶液中加入15公克添加劑。 On the basis of Example 1, sodium hydroxide was changed to 30 g, and 15 g of an additive was added to 1000 g of an alkaline solution.

實施例11 Example 11

在實施例1的基礎上,改氫氧化鈉為40公克,聚乙二醇為1.8公克。 On the basis of Example 1, the sodium hydroxide was changed to 40 g, and the polyethylene glycol was 1.8 g.

實施例12 Example 12

在實施例2的基礎上,改四甲基氫氧化銨為23公克,聚乙二醇為0.7公克。 On the basis of Example 2, tetramethylammonium hydroxide was changed to 23 g, and polyethylene glycol was 0.7 g.

實施例13 Example 13

在實施例2的基礎上,改四甲基氫氧化銨為25公克,烷基糖苷為0.6公克。 On the basis of Example 2, tetramethylammonium hydroxide was changed to 25 g, and alkyl glycoside was 0.6 g.

實施例14 Example 14

在實施例2的基礎上,改四甲基氫氧化銨為27公克,硬脂酸銨為1.5公克。 On the basis of Example 2, tetramethylammonium hydroxide was changed to 27 g, and ammonium stearate was 1.5 g.

實施例15 Example 15

在實施例2的基礎上,改四甲基氫氧化銨為30公克,乙二胺為2.5公克。 On the basis of Example 2, tetramethylammonium hydroxide was changed to 30 g, and ethylenediamine was 2.5 g.

實施例16 Example 16

在實施例2的基礎上,改四甲基氫氧化銨為40公克,硫酸銨為2公克。 On the basis of Example 2, 40 g of tetramethylammonium hydroxide was changed, and ammonium sulfate was 2 g.

實施例17 Example 17

在實施例2的基礎上,改四甲基氫氧化銨為50公克,尿素為3公克。 On the basis of Example 2, 50 g of tetramethylammonium hydroxide was changed, and urea was 3 g.

實施例18 Example 18

在實施例2的基礎上,改四甲基氫氧化銨為55公克,在1000 公克鹼性溶液中加入20公克添加劑。 On the basis of Example 2, the change of tetramethylammonium hydroxide was 55 grams at 1000. 20 grams of the additive was added to the gram alkaline solution.

實施例19 Example 19

在實施例2的基礎上,改四甲基氫氧化銨為60公克,烷基糖苷為1.7公克。 On the basis of Example 2, the amount of tetramethylammonium hydroxide was changed to 60 g, and the alkyl glycoside was 1.7 g.

實施例20 Example 20

在實施例3的基礎上,改氫氧化鉀為10公克,聚乙二醇為1.3公克。 On the basis of Example 3, potassium hydroxide was changed to 10 g, and polyethylene glycol was 1.3 g.

實施例21 Example 21

在實施例3的基礎上,改氫氧化鉀為13公克,烷基糖苷為1.4公克。 On the basis of Example 3, potassium hydroxide was changed to 13 g, and alkyl glycoside was 1.4 g.

實施例22 Example 22

在實施例3的基礎上,改氫氧化鉀為15公克,硫酸銨為2.5公克。 On the basis of Example 3, potassium hydroxide was changed to 15 g, and ammonium sulfate was 2.5 g.

實施例23 Example 23

在實施例3的基礎上,改氫氧化鉀為17公克,尿素為4公克。 On the basis of Example 3, potassium hydroxide was changed to 17 g, and urea was 4 g.

實施例24 Example 24

在實施例3的基礎上,改氫氧化鉀為20公克,在1000公克鹼性溶液中加入30公克添加劑。 On the basis of Example 3, potassium hydroxide was changed to 20 g, and 30 g of an additive was added to 1000 g of an alkaline solution.

實施例25 Example 25

在實施例3的基礎上,改氫氧化鉀為25公克,硫酸銨為4.5公克。 On the basis of Example 3, potassium hydroxide was changed to 25 g and ammonium sulfate was 4.5 g.

實施例26 Example 26

在實施例3的基礎上,改氫氧化鉀為40公克,尿素為7公克。 On the basis of Example 3, potassium hydroxide was changed to 40 g, and urea was 7 g.

實施例27 Example 27

在實施例3的基礎上,改氫氧化鉀為50公克,在1000公克鹼性溶液中加入50公克添加劑。 On the basis of Example 3, 50 parts of potassium hydroxide was changed, and 50 g of an additive was added to 1000 g of an alkaline solution.

以上所述僅是本發明的優選實施方式,應當指出,對於本技術領域的普通技術人員來說,在不脫離本發明技術原理的前提下,還可以做出若干改進和潤飾,這些改進和潤飾也應視為本發明的保護範圍。 The above description is only a preferred embodiment of the present invention, and it should be noted that those skilled in the art can make several improvements and retouchings without departing from the technical principles of the present invention. It should also be considered as the scope of protection of the present invention.

Claims (8)

一種結晶矽鹼性拋光液的添加劑,其特徵在於,以質量為基準,由0.5~2%聚乙二醇、0.5~2%烷基糖苷、0.5~2%硬脂酸銨、1~3%的乙二胺、1~5%的硫酸銨、2~8%的尿素和餘量的水組成。 An additive for a crystalline bismuth alkaline polishing liquid characterized by being 0.5 to 2% polyethylene glycol, 0.5 to 2% alkyl glycoside, 0.5 to 2% ammonium stearate, and 1 to 3% by mass. Ethylenediamine, 1~5% ammonium sulfate, 2~8% urea and the balance of water. 如申請專利範圍第1項所述的結晶矽鹼性拋光液的添加劑,其特徵在於,以質量為基準,由1~1.5%聚乙二醇、1~1.5%烷基糖苷、0.5~1%硬脂酸銨、1~2%的乙二胺、2~4%的硫酸銨、3~6%的尿素和餘量的水組成。 An additive for a crystalline cerium-base polishing liquid according to claim 1, which is characterized in that it is composed of 1 to 1.5% polyethylene glycol, 1 to 1.5% alkyl glycoside, 0.5 to 1% by mass. Ammonium stearate, 1~2% ethylenediamine, 2~4% ammonium sulfate, 3~6% urea and the balance of water. 如申請專利範圍第1項或第2項所述的結晶矽鹼性拋光液的添加劑,其特徵在於,該水為去離子水。 An additive for a crystalline cerium-base polishing liquid according to claim 1 or 2, wherein the water is deionized water. 一種結晶矽鹼性拋光液,其特徵在於,以質量為基準,通過如下步驟配製:1)將氫氧化鈉、氫氧化鉀或四甲基氫氧化銨溶於去離子水中,得到鹼性溶液;該氫氧化鈉、該氫氧化鉀的品質百分含量為1~5%;該四甲基氫氧化銨的品質百分含量為2~6%;2)將申請專利範圍第1項至第3項其中任一項所述的結晶矽鹼性拋光液的添加劑加入該步驟1)中的該鹼性溶液中,得到結晶矽鹼性拋光液;其中,該結晶矽鹼性拋光液的添加劑與該鹼性溶液的品質比為1~6:100。 A crystalline bismuth alkaline polishing liquid characterized by being prepared by the following steps on the basis of mass: 1) dissolving sodium hydroxide, potassium hydroxide or tetramethylammonium hydroxide in deionized water to obtain an alkaline solution; The sodium hydroxide and the potassium hydroxide have a mass percentage of 1 to 5%; the tetramethylammonium hydroxide has a mass percentage of 2 to 6%; 2) the patent application range is 1 to 3 Adding the additive of the crystalline cerium alkaline polishing liquid according to any one of the steps to the alkaline solution in the step 1) to obtain a crystalline cerium alkaline polishing liquid; wherein the crystallization alkaline alkaline polishing liquid additive and the The quality ratio of the alkaline solution is 1 to 6:100. 如申請專利範圍第4項所述的結晶矽鹼性拋光液,其特徵在於,以質量為基準,該氫氧化鈉、該氫氧化鉀的品質百分含量為2~3%;該四甲基氫氧化銨的品質百分含量為3~5%。 The crystalline cerium-base polishing liquid according to claim 4, wherein the sodium hydroxide and the potassium hydroxide have a mass percentage of 2 to 3% based on the mass; the tetramethyl group. The mass percentage of ammonium hydroxide is 3 to 5%. 如申請專利範圍第4項所述的結晶矽鹼性拋光液,其特徵在 於,以質量為基準,該氫氧化鈉、該氫氧化鉀的品質百分含量為1~1.5%;該四甲基氫氧化銨的品質百分含量為2~2.5%。 The crystalline bismuth alkaline polishing liquid according to claim 4, which is characterized in that The mass percentage of the sodium hydroxide and the potassium hydroxide is 1 to 1.5% based on the mass; and the mass percentage of the tetramethylammonium hydroxide is 2 to 2.5%. 如申請專利範圍第4項至第6項任一項所述的結晶矽鹼性拋光液,其特徵在於,以質量為基準,該結晶矽鹼性拋光液的添加劑與該鹼性溶液的品質比為2~4:100。 The crystalline bismuth-based polishing liquid according to any one of claims 4 to 6, wherein the quality ratio of the additive of the crystalline cerium alkaline polishing liquid to the alkaline solution is based on mass. It is 2~4:100. 一種結晶矽拋光方法,其特徵在於,將單晶或多晶矽片浸入到申請專利範圍第4項至第7項其中任一項所述的結晶矽鹼性拋光液中進行拋光,溫度控制在攝氏60~80度,時間控制在0.5~5分鐘。 A method for polishing a crystallization ruthenium, characterized in that a single crystal or a polycrystalline ruthenium sheet is immersed in a crystallization alkaline kiln polishing liquid according to any one of claims 4 to 7, and the temperature is controlled at 60 ° C. ~80 degrees, time control is 0.5~5 minutes.
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Publication number Priority date Publication date Assignee Title
CN115873509A (en) * 2022-11-23 2023-03-31 嘉兴市小辰光伏科技有限公司 Alkali polishing additive and polishing method for high-flatness silicon wafer

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CN111560249A (en) * 2020-05-26 2020-08-21 翟伟俊 Preparation method of PERC battery alkali polishing additive

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115873509A (en) * 2022-11-23 2023-03-31 嘉兴市小辰光伏科技有限公司 Alkali polishing additive and polishing method for high-flatness silicon wafer

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