CN114823943A - Textured structure, monocrystalline silicon wafer including the same, texturing method and application - Google Patents
Textured structure, monocrystalline silicon wafer including the same, texturing method and application Download PDFInfo
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- CN114823943A CN114823943A CN202210281252.0A CN202210281252A CN114823943A CN 114823943 A CN114823943 A CN 114823943A CN 202210281252 A CN202210281252 A CN 202210281252A CN 114823943 A CN114823943 A CN 114823943A
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- textured structure
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- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 22
- 238000000034 method Methods 0.000 title claims description 24
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 48
- 229910052710 silicon Inorganic materials 0.000 claims description 48
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- QZHDEAJFRJCDMF-UHFFFAOYSA-N perfluorohexanesulfonic acid Chemical compound OS(=O)(=O)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F QZHDEAJFRJCDMF-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/70—Surface textures, e.g. pyramid structures
- H10F77/703—Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/121—The active layers comprising only Group IV materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/40—Optical elements or arrangements
- H10F77/42—Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
本发明涉及单晶硅电池制造领域,尤其涉及一种绒面结构,所述绒面结构包含随机分布且呈八棱锥结构的单体制绒结构,其底面呈八边形,且位于底面以上部分呈八棱锥形。本发明克服了现有技术中普通四面体的金字塔结构的比表面积较小,导致其光程较短,反射率较高,陷光效果较差的缺陷。本发明中的绒面结构中包含有呈八棱锥结构的单体制绒结构,因此在底面面积一致的前提下,其八棱锥结构的表面积能够得到有效的提升,从而增加了光程,降低了对于光线的反射率,使得该绒面结构对于光线的陷光效果更好。
The present invention relates to the field of monocrystalline silicon cell manufacturing, and in particular to a textured structure. The textured structure includes a single textured structure that is randomly distributed and is an octagonal pyramid structure. Octagonal pyramid. The invention overcomes the defects in the prior art that the specific surface area of the common tetrahedral pyramid structure is small, resulting in short optical path, high reflectivity and poor light trapping effect. The textured structure of the present invention includes a single textured structure in the form of an octagonal pyramid structure. Therefore, on the premise of the same bottom surface area, the surface area of the octagonal pyramid structure can be effectively improved, thereby increasing the optical path and reducing the impact on The reflectivity of light makes the suede structure better for trapping light.
Description
技术领域technical field
本发明涉及单晶硅电池制造领域,尤其涉及一种绒面结构、包含其的单晶硅片、制绒方法及应用。The present invention relates to the field of single crystal silicon cell manufacturing, in particular to a textured structure, a single crystal silicon wafer containing the same, a texture making method and application.
背景技术Background technique
世界各国的经济迅速增长,人类对能源的需求日益増加,导致石油,天然气,煤矿等不可再生资源的迅速短缺,环境污染以及能源短缺已经成为严重制约社会发展的因素。The rapid economic growth of all countries in the world and the increasing demand for energy by humans have led to the rapid shortage of non-renewable resources such as oil, natural gas, and coal mines. Environmental pollution and energy shortages have become factors that seriously restrict social development.
太阳能资源是一种真正的绿色环保能源,因其取之不尽、用之不竭成为人类社会的迫切需要。而将太阳能应用到生活当中的一个重要途径是光伏发电,硅晶片是光伏发电产业最重要的原材料。通过增加硅片表面对光的吸收,不仅可提高晶体硅太阳电池的效率,还可降低晶体硅太阳电池的生产成本。采用化学法制绒技术对硅片表面腐蚀,制造出大小均匀、粗糙度较好和反射率合适的绒面,可有效提高太阳电池的光电转换效率,其中碱制绒是现阶段单晶主要制绒手段。Solar energy is a real green energy, because it is inexhaustible and has become an urgent need of human society. An important way to apply solar energy to life is photovoltaic power generation. Silicon wafers are the most important raw materials in the photovoltaic power generation industry. By increasing the absorption of light on the surface of the silicon wafer, not only the efficiency of the crystalline silicon solar cell can be improved, but also the production cost of the crystalline silicon solar cell can be reduced. The chemical texturing technology is used to corrode the surface of the silicon wafer to produce a textured surface with uniform size, good roughness and suitable reflectivity, which can effectively improve the photoelectric conversion efficiency of solar cells. means.
对于我国的光伏市场,近些年也发生了巨大的变化,部分企业已经掌握先进的单晶生产工艺,成为全球光伏市场的翘楚。其中在制绒过程中用到的制绒添加剂在单晶制绒中起到非常重要的作用,一方面辅助制绒工艺,控制反应速率和调整绒面形貌,另一方面解决制绒工艺中的问题,如绒面不均匀,雨点印,花斑等。my country's photovoltaic market has also undergone tremendous changes in recent years. Some companies have mastered advanced single crystal production processes and become leaders in the global photovoltaic market. Among them, the texturing additives used in the texturing process play a very important role in the single crystal texturing process. problems, such as uneven suede, raindrops, mottled, etc.
传统碱制绒添加剂得到的绒面结构均为金字塔型绒面,包括正向金字塔以及倒金字塔,其区别只在金字塔的尺寸以及高度。The textured textures obtained by the traditional alkali texturing additives are all pyramid textured textures, including forward pyramids and inverted pyramids, the difference is only in the size and height of the pyramids.
例如申请号为CN201910160490.4的一种晶体硅表面类倒金字塔绒面结构的制备方法,先通过预处理在硅片表面形成一层氧化铝颗粒层,再对预处理后的硅片进行碱制绒,得到类倒金字塔绒面结构;所述氧化铝颗粒层主要由分散的氧化铝颗粒组成。该发明晶体硅表面类倒金字塔绒面结构的制备方法,既适用于单晶硅片,又适用于多晶硅片,能在硅片表面形成均匀、细小、密集的类倒金字塔绒面结构。For example, the preparation method of a crystalline silicon surface inverted pyramid textured structure with the application number of CN201910160490.4, firstly forms a layer of alumina particles on the surface of the silicon wafer through pretreatment, and then alkali-processes the pretreated silicon wafer fleece to obtain an inverted pyramid textured structure; the alumina particle layer is mainly composed of dispersed alumina particles. The preparation method of the inverted pyramid textured surface structure on the surface of the crystalline silicon of the invention is suitable for both monocrystalline silicon wafers and polycrystalline silicon wafers, and can form a uniform, fine and dense inverted pyramid textured textured structure on the surface of the silicon wafer.
申请号为CN202110953879.1的一种用于快速制绒的制绒添加剂及应用,所述制绒添加剂包括如下质量百分比含量的各组分:成核剂0.5%~10%,绒面催化剂1%~10%,表面活性剂0.01%~0.05%,脱泡剂0.05%~0.5%,余量为去离子水。该发明制绒添加剂的单面腐蚀深度达1.5um时便可以实现正金字塔的完全生长,可获得2um的绒面尺寸。Application No. CN202110953879.1 A texturing additive for rapid texturing and its application, the texturing additive includes the following components by mass percentage: 0.5% to 10% of nucleating agent, 1% of texturing catalyst ~10%, surfactant 0.01%~0.05%, defoamer 0.05%~0.5%, and the balance is deionized water. When the single-sided corrosion depth of the texturing additive of the invention reaches 1.5um, the complete growth of the normal pyramid can be realized, and the texture size of 2um can be obtained.
现有这些金字塔型绒面虽然其电池效率依然能够保持在一个较高的水平,但是由于普通四面体的金字塔结构的比表面积较小,导致其光程较短,使得其反射率较高,陷光效果较差。Although the cell efficiency of these existing pyramid-shaped suede surfaces can still be maintained at a high level, due to the small specific surface area of the pyramidal structure of the ordinary tetrahedron, its optical path is short, which makes its reflectivity high and trapped in the surface. The light effect is poor.
发明内容SUMMARY OF THE INVENTION
本发明是为了克服现有技术中普通四面体的金字塔结构的比表面积较小,导致其光程较短,使得其反射率较高,陷光效果较差的缺陷,提供了一种绒面结构、包含其的单晶硅片、制绒方法及应用以克服上述缺陷。The present invention provides a textured structure in order to overcome the defects in the prior art that the specific surface area of the common tetrahedral pyramid structure is small, resulting in a short optical path, high reflectivity and poor light trapping effect. , A single crystal silicon wafer comprising the same, a texturing method and an application to overcome the above-mentioned defects.
为实现本发明目的,本发明通过以下技术方案实现:In order to realize the object of the present invention, the present invention is realized through the following technical solutions:
本发明的第一个目的在于,提供了一种绒面结构,The first object of the present invention is to provide a suede structure,
所述绒面结构包含随机分布且呈八棱锥结构的单体制绒结构;The textured structure comprises a single textured structure that is randomly distributed and is an octagonal pyramid structure;
所述单体制绒结构的底面呈八边形,且位于底面以上部分呈八棱锥形。The bottom surface of the single flocking structure is octagonal, and the part above the bottom surface is octagonal.
本发明中的绒面结构中包含有呈八棱锥结构的单体制绒结构,因此在底面面积一致的前提下,其八棱锥结构的表面积能够得到有效的提升,从而增加了光程,降低了对于光线的反射率,使得该绒面结构对于光线的陷光效果更好。The textured structure in the present invention includes a single textured structure in the form of an octagonal pyramid structure. Therefore, on the premise of the same bottom surface area, the surface area of the octagonal pyramid structure can be effectively improved, thereby increasing the optical path and reducing the impact on The reflectivity of light makes the suede structure better for trapping light.
并且相比传统的四棱锥结构的正金字塔绒面,其绒面结构更加平坦,因而在后续的钝化阶段,硅片与浆料的接触更好。Moreover, compared with the normal pyramid textured surface of the traditional quadrangular pyramid structure, the textured surface structure is flatter, so in the subsequent passivation stage, the contact between the silicon wafer and the slurry is better.
此外,在电性能方面,八棱锥结构的单体制绒结构还增加了短路电流,增加了填充因子,从而提高了太阳能电池的转化效率。In addition, in terms of electrical properties, the single-textured structure of the octagonal pyramid structure also increases the short-circuit current and fill factor, thereby improving the conversion efficiency of the solar cell.
作为优选,所述单体制绒结构的底面边长为0.3-1μm;Preferably, the side length of the bottom surface of the single-textured structure is 0.3-1 μm;
所述单体制绒结构的高度为0.7-1.0μm;The height of the single textured structure is 0.7-1.0 μm;
所述单体制绒结构各侧边顶部夹角为45°—60°。The included angle of the top of each side edge of the single flocking structure is 45°-60°.
作为优选,所述绒面结构的比表面积≥1.5。Preferably, the specific surface area of the textured structure is greater than or equal to 1.5.
本发明的第二个目的在于,提供了一种单晶硅片,The second object of the present invention is to provide a single crystal silicon wafer,
所述单晶硅片表面分布有如上所述的绒面结构。The above-mentioned textured structure is distributed on the surface of the single crystal silicon wafer.
作为优选,所述单晶硅片表面的绒面结构中单体制绒结构的分布密度为104—106个/mm²。Preferably, the distribution density of the single textured structure in the textured structure on the surface of the single crystal silicon wafer is 10 4 -10 6 pieces/mm².
本发明的第三个目的在于,提供了一种单晶硅片制绒方法,The third object of the present invention is to provide a single crystal silicon wafer texturing method,
包括以下步骤:Include the following steps:
(1)配制碱液,然后向碱液中加入制绒添加剂,搅拌均匀得到制绒液;(1) Prepare the lye solution, then add the texturing additive to the lye solution, and stir evenly to obtain the texturing solution;
(2)将硅片置于制绒液中进行制绒,制得具有如上项所述绒面结构的制绒硅片;(2) placing the silicon wafer in a texturing solution for texturing to obtain a texturing silicon wafer having the textured surface structure described in the above item;
所述制绒添加剂按照重量百分比计算包括:烷基磺酸盐1-5 wt %、聚丙烯酰胺0.15-1 wt %、烷基酚聚氧乙烯醚0.5-5 wt %,余量为水。The texturing additives, calculated by weight percentage, include: 1-5 wt % of alkyl sulfonate, 0.15-1 wt % of polyacrylamide, 0.5-5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
本发明的发明人在日常试验中偶然得知,当在制绒液中添加上述制绒添加剂后,能够在制绒过程中诱导硅片表面形成呈八棱锥结构的单体制绒结构。The inventor of the present invention discovered by chance in daily experiments that when the above-mentioned texturing additive is added to the texturing liquid, the surface of the silicon wafer can be induced to form a single textured structure with an octagonal pyramid structure during the texturing process.
推测原因在于,本发明中的制绒添加剂,其同时含有多种不同的表面活性剂,这些表面活性剂能够对硅晶体的不同晶面进行诱导,使得硅晶体在制绒过程中不同晶面在受到氢氧化钠腐蚀时,其腐蚀效果能够呈现出各向异性,从而在制绒结束后形成结构均匀稳定的八棱锥结构绒面。The reason is speculated that the texturing additive in the present invention contains a variety of different surfactants at the same time, and these surfactants can induce different crystal planes of the silicon crystals, so that the different crystal planes of the silicon crystals are in the texturing process during the texturing process. When corroded by sodium hydroxide, its corrosion effect can show anisotropy, so that a textured surface with a uniform and stable structure of octagonal pyramid structure is formed after the texturing is completed.
通过本发明中的制绒添加剂形成的八棱锥结构绒面相较于传统的四面体正金字塔结构,八棱锥绒面结构其表面积有效提升,从而增加了光程,降低了对于光线的反射率,使得该绒面结构对于光线的陷光效果更好。并且相比传统的正金字塔绒面,其绒面结构更加平坦,因而在后续的钝化阶段,硅片与浆料的接触更好。此外,在电性能方面,八棱锥绒面结构还增加了短路电流,增加了填充因子,从而提高了太阳能电池的转化效率。Compared with the traditional tetrahedral regular pyramid structure, the textured surface of the octagonal pyramid structure formed by the texturing additive in the present invention effectively increases the surface area of the octagonal pyramid textured structure, thereby increasing the optical path and reducing the reflectivity for light, so that the The suede structure has better trapping effect for light. And compared with the traditional positive pyramid texture, the texture structure is flatter, so in the subsequent passivation stage, the contact between the silicon wafer and the slurry is better. In addition, in terms of electrical properties, the octagonal suede structure also increases the short-circuit current and fill factor, thereby improving the conversion efficiency of solar cells.
此外,现有技术中倒金字塔结构绒面由于在制绒过程中往往需要金属离子的参与,这些金属离子在制绒结束后一部分金属离子残留会进入到倒金字塔结构内部,难以清洗,并且这些残留的金属离子在进入到硅晶体内部后会与晶体硅形成复合中心,从而影响电池效率。而本发明由于在制绒过程中不需要金属离子的参与,因此能够有效避免上述缺陷。In addition, the textured surface of the inverted pyramid structure in the prior art often requires the participation of metal ions during the texturing process. After the texturing is completed, a part of the residual metal ions will enter the interior of the inverted pyramid structure, which is difficult to clean, and these residues After the metal ions enter the silicon crystal, they will form a recombination center with the crystalline silicon, thereby affecting the cell efficiency. However, since the present invention does not require the participation of metal ions in the texturing process, the above-mentioned defects can be effectively avoided.
此外,经过本发明的发明人的试验发现,上述制绒添加剂中的各组分的含量对于最终的制绒效果有着明显的影响。当烷基磺酸盐的含量小于1%后,虽然能够形成呈八棱锥结构的单体制绒结构,但是其无法布满整个硅片表面,在八棱锥结构的单体制绒结构之间仍然会存在较多的空隙,使得其性能无法满足实际应用需求。而当烷基磺酸盐的含量大于5%后,则会导致八棱锥绒面结构的消失,反而变成普通的四面体金字塔结构。In addition, the inventors of the present invention found that the content of each component in the above-mentioned texturing additive has a significant influence on the final texturing effect. When the content of alkyl sulfonate is less than 1%, although it can form a single textured structure with an octagonal pyramid structure, it cannot cover the entire surface of the silicon wafer, and there will still exist between the single textured structures of the octagonal pyramid structure. More voids make its performance unable to meet practical application requirements. When the content of alkyl sulfonate is greater than 5%, it will cause the disappearance of the octagonal suede structure, and instead become an ordinary tetrahedral pyramid structure.
而聚丙烯酰胺的含量低于0.15%后,则会导致硅片表面无法出绒,而高于1%会导致绒面过小,不利于提升硅片陷光效果的提升。When the content of polyacrylamide is lower than 0.15%, the surface of the silicon wafer cannot be velvet, and if it is higher than 1%, the suede surface is too small, which is not conducive to improving the light trapping effect of the silicon wafer.
而当烷基酚聚氧乙烯醚含量低于0.5%后,也会导致硅片表面无法出绒的问题,而当烷基酚聚氧乙烯醚含量高于0.5%后则会导致绒面出现脏污情况。When the alkylphenol polyoxyethylene ether content is lower than 0.5%, it will also cause the problem that the surface of the silicon wafer cannot be velvet, and when the alkylphenol polyoxyethylene ether content is higher than 0.5%, it will cause the suede to appear dirty. pollution situation.
作为优选,所述烷基磺酸盐的烷基碳数在12以上。Preferably, the alkyl carbon number of the alkyl sulfonate is 12 or more.
本发明的发明人发现,烷基磺酸盐中的碳链长度对于整体的制绒效果有着明显的影响。经过发明人试验发现,当烷基磺酸盐中的碳原子数量小于12时,会导致烷基磺酸盐的临界胶束浓度较高,导致其去污能力下降,因此在制绒过程中腐蚀生成的产物无法迅速除去,延缓了碱与硅片之间的反应,导致对于硅片的诱导效果较差,无法形成完整的八棱锥绒面结构。而本发明在选用烷基碳数在12以上的烷基磺酸盐后,使得其去污能力大大提升,因而制绒过程中生成的副产物能够迅速被烷基磺酸盐包裹从而脱离硅片表面,使得硅片与碱之间的反应能够更加迅速,有利于在硅片表面诱导形成八棱锥绒面结构。The inventors of the present invention found that the carbon chain length in the alkyl sulfonate has a significant effect on the overall texturing effect. The inventor's experiments found that when the number of carbon atoms in the alkyl sulfonate is less than 12, the critical micelle concentration of the alkyl sulfonate will be higher, resulting in a decrease in its decontamination ability, so corrosion during the texturing process will occur. The generated product cannot be quickly removed, which delays the reaction between the alkali and the silicon wafer, resulting in poor induction effect on the silicon wafer and unable to form a complete octagonal suede structure. In the present invention, after the alkyl sulfonate with the alkyl carbon number of 12 or more is selected, its decontamination ability is greatly improved, so the by-products generated during the texturing process can be quickly wrapped by the alkyl sulfonate to be separated from the silicon wafer surface, so that the reaction between the silicon wafer and the alkali can be more rapid, which is beneficial to induce the formation of an octagonal suede structure on the surface of the silicon wafer.
作为优选,所述烷基磺酸盐为十二烷基磺酸钠、十二烷基苯磺酸钠、十三烷基磺酸钠、十六烷基磺酸钠、正十八烷基磺酸钠盐中的一种或多种的组合。Preferably, the alkyl sulfonate is sodium dodecyl sulfonate, sodium dodecyl benzene sulfonate, sodium tridecyl sulfonate, sodium hexadecyl sulfonate, n-octadecyl sulfonate A combination of one or more of the sodium salts.
作为优选,所述聚丙烯酰胺为非离子型聚丙烯酰胺。Preferably, the polyacrylamide is a nonionic polyacrylamide.
作为优选,所述聚丙烯酰胺的分子量为500-1000万。Preferably, the molecular weight of the polyacrylamide is 5-10 million.
本发明的发明人在实验中发现,聚丙烯酰胺的分子量对于最终形成的绒面具有较大的影响,其中当聚丙烯酰胺的分子量小于500万之后,其对于制绒过程中产生的硅酸钠的吸附以及沉降效果较差,不利于最终碱液与硅片之间的反应。而当聚丙烯酰胺的分子量大于1000万后,会导致整体制绒液的粘度较大,在制绒过程中硅片表面的氢气无法及时脱除,因而导致制绒结束后的硅片的缺陷较多。因此,当聚丙烯酰胺的分子量选择为500-1000万后,会使得制绒液中的碱能够迅速与硅片发生反应,同时还能够使得反应过程中形成的氢气能够迅速排出,防止在硅片表面形成雨点印,花斑等缺陷。The inventors of the present invention found in experiments that the molecular weight of polyacrylamide has a great influence on the finally formed suede, wherein when the molecular weight of polyacrylamide is less than 5 million, it has a great influence on the sodium silicate produced in the texturing process. The adsorption and sedimentation effect of the ion is poor, which is not conducive to the reaction between the final lye and the silicon wafer. However, when the molecular weight of polyacrylamide is greater than 10 million, the viscosity of the overall texturing solution will be high, and the hydrogen on the surface of the silicon wafer cannot be removed in time during the texturing process, resulting in more defects in the silicon wafer after texturing. many. Therefore, when the molecular weight of polyacrylamide is selected to be 5-10 million, the alkali in the texturing solution can quickly react with the silicon wafer, and at the same time, the hydrogen formed in the reaction process can be quickly discharged, preventing the silicon wafer from being damaged. Defects such as raindrops and mottles are formed on the surface.
作为优选,所述步骤(1)中制绒添加剂的添加质量占整体制绒液的0.2~0.5%。Preferably, the added mass of the texturing additive in the step (1) accounts for 0.2-0.5% of the entire texturing solution.
作为优选,所述步骤(2)中制绒温度为70~90℃,制绒时间5~10min。Preferably, in the step (2), the texturing temperature is 70-90° C., and the texturing time is 5-10 minutes.
本发明的第四个目的在于,提供了所述绒面结构或者所述单晶硅片在太阳能电池中的应用。The fourth object of the present invention is to provide the application of the textured structure or the single crystal silicon wafer in a solar cell.
因此,本发明具有以下有益效果:Therefore, the present invention has the following beneficial effects:
(1)本发明制备得到的八棱锥结构的单体制绒结构相较于传统的金字塔结构而言,其比表面积更大,从而增加了光程,降低了对于光线的反射率,使得该绒面结构对于光线的陷光效果更好。(1) Compared with the traditional pyramid structure, the single textured textured structure of the octagonal pyramid structure prepared by the present invention has a larger specific surface area, thereby increasing the optical path and reducing the reflectivity for light, so that the textured surface has a larger specific surface area. The structure is better for trapping light.
(2)相比传统的四棱锥结构的正金字塔绒面,其绒面结构更加平坦,因而在后续的钝化阶段,硅片与浆料的接触更好。(2) Compared with the normal pyramid textured surface of the traditional quadrangular pyramid structure, the textured surface structure is flatter, so in the subsequent passivation stage, the contact between the silicon wafer and the slurry is better.
(3)在电性能方面,八棱锥结构的单体制绒结构还增加了短路电流,增加了填充因子,从而提高了太阳能电池的转化效率。(3) In terms of electrical properties, the single-textured structure of the octagonal pyramid structure also increases the short-circuit current and fill factor, thereby improving the conversion efficiency of solar cells.
附图说明Description of drawings
图1为单晶制绒硅片表面八棱锥绒面结构的电子显微图片。Fig. 1 is an electron micrograph of the textured structure of the octagonal pyramid on the surface of a single crystal textured silicon wafer.
图2为八棱锥结构的单体制绒结构的放大图。FIG. 2 is an enlarged view of the single-textured structure of the octagonal pyramid structure.
图3 为烷基磺酸盐的含量小于1%后形成的绒面结构图片。Figure 3 is a picture of the textured surface formed when the content of alkyl sulfonate is less than 1%.
图4 为烷基磺酸盐的含量大于5%后形成的绒面结构图片。Figure 4 is a picture of the textured texture formed when the content of alkyl sulfonate is greater than 5%.
图5为聚丙烯酰胺的含量低于0.15%后形的成绒面结构图片。Figure 5 is a picture of the textured structure formed when the content of polyacrylamide is less than 0.15%.
图6 为聚丙烯酰胺的含量高于1%后形成的绒面结构图片。Figure 6 is a picture of the textured texture formed when the content of polyacrylamide is higher than 1%.
图7 为当烷基酚聚氧乙烯醚含量低于0.5%后形成的绒面结构图片。Figure 7 is a picture of the textured texture formed when the content of alkylphenol ethoxylate is less than 0.5%.
图8 为当烷基酚聚氧乙烯醚含量高于5%后形成的绒面结构图片。Figure 8 is a picture of the textured texture formed when the content of alkylphenol ethoxylate is higher than 5%.
具体实施方式Detailed ways
下面结合说明书附图以及具体实施例对本发明做进一步描述。本领域普通技术人员在基于这些说明的情况下将能够实现本发明。此外,下述说明中涉及到的本发明的实施例通常仅是本发明一部分的实施例,而不是全部的实施例。因此,基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都应当属于本发明保护的范围。The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Those of ordinary skill in the art will be able to implement the present invention based on these descriptions. In addition, the embodiments of the present invention referred to in the following description are generally only some embodiments of the present invention, not all of the embodiments. Therefore, based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
实施例1Example 1
一种制绒添加剂,十二烷基磺酸钠1 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 1 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例2Example 2
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例3Example 3
一种制绒添加剂,十二烷基磺酸钠3 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 3 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例4Example 4
一种制绒添加剂,十二烷基磺酸钠5 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 5 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例5Example 5
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.15 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.15 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例6Example 6
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.8 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.8 wt % of nonionic polyacrylamide with a molecular weight of 5 to 10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例7Example 7
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺1 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 1 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例8Example 8
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5wt %、烷基酚聚氧乙烯醚0.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 0.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例9Example 9
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5wt %、烷基酚聚氧乙烯醚2.5wt %,余量为水。A texturing additive, comprising 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5 to 10 million, 2.5 wt % of alkylphenol polyoxyethylene ether, and the remainder being water.
实施例10Example 10
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5wt %、烷基酚聚氧乙烯醚4wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 4 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例11Example 11
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5wt %、烷基酚聚氧乙烯醚5wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例12Example 12
一种制绒添加剂,十二烷基苯磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive, 2 wt % of sodium dodecyl benzene sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5 to 10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water .
实施例13Example 13
一种制绒添加剂,十六烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium cetyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例14Example 14
一种制绒添加剂,正十八烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive, 2 wt % of sodium n-octadecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5 to 10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water .
对比例1Comparative Example 1
一种制绒添加剂,十二烷基磺酸钠0.5 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 0.5 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
对比例2Comparative Example 2
一种制绒添加剂,十二烷基磺酸钠8 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 8 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
对比例3Comparative Example 3
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.1wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.1 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
对比例4Comparative Example 4
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺1.5wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 1.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
对比例5Comparative Example 5
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5wt %、烷基酚聚氧乙烯醚0.3wt %,余量为水。A texturing additive, comprising 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5 to 10 million, 0.3 wt % of alkylphenol polyoxyethylene ether, and the balance of water.
对比例6Comparative Example 6
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5wt %、烷基酚聚氧乙烯醚5.5wt %,余量为水。A texturing additive, comprising 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 5.5 wt % of alkylphenol polyoxyethylene ether, and the balance of water.
对比例7Comparative Example 7
一种制绒添加剂,正辛烷磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium n-octane sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
对比例8Comparative Example 8
一种制绒添加剂,1-癸烷磺酸钠2 wt %、分子量为500-1000万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium 1-decane sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 5-10 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
对比例9Comparative Example 9
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为200-400万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 2 to 4 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
对比例10Comparative Example 10
一种制绒添加剂,十二烷基磺酸钠2 wt %、分子量为1000-1500万的非离子型聚丙烯酰胺0.5 wt %、烷基酚聚氧乙烯醚1.5 wt %,余量为水。A texturing additive comprises 2 wt % of sodium dodecyl sulfonate, 0.5 wt % of nonionic polyacrylamide with a molecular weight of 10-15 million, 1.5 wt % of alkylphenol polyoxyethylene ether, and the balance is water.
实施例1~14以及对比例1~10中制备得到的制绒添加剂的配方汇总如下表1所示。The formulas of the texturing additives prepared in Examples 1 to 14 and Comparative Examples 1 to 10 are summarized in Table 1 below.
表1Table 1
按照实施例1~14以及对比例1~10中的配方依次称取各组分,在60℃水浴中搅拌3h;接着静置直至泡沫完全消失,最后用孔径为10μm的滤芯过滤,制得制绒添加剂。According to the formulas in Examples 1-14 and Comparative Examples 1-10, each component was weighed in turn, stirred in a 60°C water bath for 3 hours; then left to stand until the foam completely disappeared, and finally filtered with a filter element with a pore size of 10 μm to obtain a fleece additives.
制绒液的配制及制绒方法如下所示:The preparation of the texturing liquid and the texturing method are as follows:
在单晶硅片制绒时加入0.93 wt %的NaOH,0.4wt%的制绒添加剂,形成制绒液,搅拌均匀后在80℃反应7min,制得单晶制绒硅片。0.93 wt % NaOH and 0.4 wt % texturing additives were added during texturing of single crystal silicon wafers to form a texturing solution, which was stirred evenly and reacted at 80°C for 7 min to obtain single crystal texturing silicon wafers.
(本申请文件中,选择中选择使用0.4 wt %作为参照添加计量,但是经过发明人的试验,制绒添加剂的添加量在0.2~0.5wt%范围内,制绒温度在70~90℃范围内,均可在硅片表面形成八棱锥绒面结构)。(In this application document, 0.4 wt % is selected as the reference addition measurement in the selection, but after the experiment of the inventor, the addition amount of the texturing additive is in the range of 0.2~0.5wt%, and the texturing temperature is in the range of 70~90℃. , can form an octagonal suede structure on the surface of the silicon wafer).
通过加入本发明实施例1~14中的制绒添加剂,其均可在单晶制绒硅片表面形成八棱锥的绒面结构,通过实施例2中的制绒添加剂制备得到的单晶制绒硅片其表面的电子显微图片如图1所示,图2为八棱锥绒面结构的放大图。By adding the texturing additives in Examples 1 to 14 of the present invention, all of them can form a textured structure of an octagonal pyramid on the surface of the single-crystal texturing silicon wafer. The single-crystal texturing prepared by the texturing additives in Example 2 The electron micrograph of the surface of the silicon wafer is shown in Fig. 1, and Fig. 2 is an enlarged view of the textured structure of the octagonal pyramid.
从图1~2中可知,本发明制备得到的八棱锥结构绒面结构稳定,并且能够紧密均匀分布在硅片表面,单体制绒结构的底面边长在0.3-1μm范围中,单体制绒结构的高度在0.7-1.0μm范围中,单体制绒结构各侧边顶部夹角为45°—60°。It can be seen from Figures 1 and 2 that the textured textured structure of the octagonal pyramid structure prepared by the present invention is stable and can be closely and evenly distributed on the surface of the silicon wafer. The height is in the range of 0.7-1.0 μm, and the angle between the tops of each side of the single-textured structure is 45°-60°.
将实施例1~4与对比例1~2进行比较,我们发现烷基磺酸盐的添加量对于八棱锥绒面结构的形成具有重要的影响。当烷基磺酸盐的含量小于1%后,虽然能够形成八棱锥结构的绒面,但是其无法布满整个硅片表面(如图3所示),在八棱锥绒面结构之间仍然会存在较多的空隙,使得其性能无法满足实际应用需求。而当烷基磺酸盐的含量大于5%后,则会导致八棱锥绒面结构会消失,反而变成普通的四面体金字塔结构(如图4所示)。Comparing Examples 1 to 4 with Comparative Examples 1 to 2, we found that the addition amount of alkyl sulfonate has an important influence on the formation of the octagonal pyramid textured structure. When the content of alkyl sulfonate is less than 1%, although the texture of the octagonal pyramid structure can be formed, it cannot cover the entire surface of the silicon wafer (as shown in Figure 3), and there will still be suede between the octagonal pyramid textured structure. There are many voids, which makes its performance unable to meet practical application requirements. However, when the content of alkyl sulfonate is greater than 5%, the octagonal suede structure will disappear, and instead it will become an ordinary tetrahedral pyramid structure (as shown in Figure 4).
将实施例2、5~7与对比例3~4进行比较,我们发现聚丙烯酰胺的添加量对于八棱锥绒面结构的形成也具有重要的影响。聚丙烯酰胺的含量低于0.15%后,则会导致硅片表面无法出绒(如图5所示),而高于1%会导致绒面过小(如图6所示),不利于提升硅片表面陷光效果的提升。Comparing Examples 2, 5-7 with Comparative Examples 3-4, we found that the addition amount of polyacrylamide also has an important influence on the formation of the octagonal pyramid textured structure. When the content of polyacrylamide is lower than 0.15%, the surface of the silicon wafer cannot be velvet (as shown in Figure 5), and if the content of polyacrylamide is higher than 1%, the velvet surface will be too small (as shown in Figure 6), which is not conducive to improvement. The improvement of the light trapping effect on the surface of the silicon wafer.
将实施例2、8~11与对比例5~6进行比较,我们发现烷基酚聚氧乙烯醚的添加量对于八棱锥绒面结构的形成也具有重要的影响。当烷基酚聚氧乙烯醚含量低于0.5%后,也会导致硅片表面无法出绒的问题(如图7所示),而当烷基酚聚氧乙烯醚含量高于5%后则会导致绒面出现脏污情况(如图8所示)。Comparing Examples 2, 8-11 with Comparative Examples 5-6, we found that the addition amount of alkylphenol polyoxyethylene ether also has an important influence on the formation of the octagonal pyramid textured structure. When the content of alkylphenol polyoxyethylene ether is lower than 0.5%, it will also cause the problem that the surface of the silicon wafer cannot be lint (as shown in Figure 7), and when the content of alkylphenol polyoxyethylene ether is higher than 5%, the This will cause the suede to become dirty (as shown in Figure 8).
将实施例2、12~14与对比例7~8进行比较,我们发现烷基磺酸盐中碳链的长度对于八棱锥绒面结构的形成也具有重要的影响。当碳量长度低于12后,也会导致无法形成完整的八棱锥结构,只能形成普通的四面体金字塔结构。Comparing Examples 2, 12-14 with Comparative Examples 7-8, we found that the length of the carbon chain in the alkyl sulfonate also has an important influence on the formation of the octagonal pyramid suede structure. When the carbon length is less than 12, it will also lead to the failure to form a complete octagonal pyramid structure, and only a common tetrahedral pyramid structure can be formed.
我们还发现聚丙烯酰胺的分子量对于八棱锥绒面结构的形成也具有重要的影响。当聚丙烯酰胺的分子量小于500万之后,其对于制绒过程中产生的硅酸钠的吸附以及沉降效果较差,不利于最终碱液与硅片之间的反应。而当聚丙烯酰胺的分子量大于1000万后,会导致整体制绒液的粘度较大,在制绒过程中硅片表面的氢气无法及时脱除,因而导致制绒结束后的硅片的缺陷较多。因此,当聚丙烯酰胺的分子量选择为500-1000万后,会使得制绒液中的碱能够迅速与硅片发生反应,同时还能够使得反应过程中形成的氢气能够迅速排出,防止在硅片表面形成雨点印,花斑等缺陷。We also found that the molecular weight of polyacrylamide also has an important effect on the formation of the octagonal pyramid textured structure. When the molecular weight of polyacrylamide is less than 5 million, its adsorption and sedimentation effect on the sodium silicate produced in the texturing process is poor, which is not conducive to the reaction between the final lye and the silicon wafer. However, when the molecular weight of polyacrylamide is greater than 10 million, the viscosity of the overall texturing solution will be high, and the hydrogen on the surface of the silicon wafer cannot be removed in time during the texturing process, resulting in more defects in the silicon wafer after texturing. many. Therefore, when the molecular weight of polyacrylamide is selected to be 5-10 million, the alkali in the texturing solution can quickly react with the silicon wafer, and at the same time, the hydrogen formed in the reaction process can be quickly discharged, preventing the silicon wafer from being damaged. Defects such as raindrops and mottles are formed on the surface.
最后,以本发明实施例2中的制绒添加剂与市面上几种可以生成同样尺寸和高度的普通金字塔绒面添加剂在同样温度、水中、NaOH用量、添加剂用量、反应同样时间进行制绒实验,后在显微镜上随机取5个点测试比表面积大小,取平均值。同时还对制绒结束后得到的硅片的反射率进行测试。Finally, with the texturing additive in Example 2 of the present invention and several ordinary pyramid textured additives that can generate the same size and height on the market at the same temperature, water, NaOH dosage, additive dosage, and reaction time, the texturing experiment was carried out, Then, randomly select 5 points on the microscope to test the specific surface area and take the average value. At the same time, the reflectivity of the silicon wafers obtained after texturing was also tested.
其中:in:
添加剂①配方如下:纤维素磺酸钠0.01%、羧甲基纤维素钠0.1%、单宁酸0.01%、超支化聚丙烯酰胺0.05%、氢氧化钾1%,余量为水。Additive ① The formula is as follows: sodium cellulose sulfonate 0.01%, sodium carboxymethyl cellulose 0.1%, tannic acid 0.01%, hyperbranched polyacrylamide 0.05%, potassium hydroxide 1%, and the balance is water.
添加剂②配方如下:0.1%的木质素磺酸钠、0.01%的甘油聚醚、0.3%的羟乙基-β-环糊精、0.5%的1,4-双(2-羟基乙基)哌嗪,余量为水。The formulation of additive ② is as follows: 0.1% sodium lignosulfonate, 0.01% glycerol polyether, 0.3% hydroxyethyl-β-cyclodextrin, 0.5% 1,4-bis(2-hydroxyethyl)piperidine oxazine, the balance being water.
添加剂③配方如下:将1%聚乙二醇-600、0.1%苯甲酸钠、1%柠檬酸、1%水解聚马来酸酐、0.1%g乙酸钠,余量为水。The formula of additive ③ is as follows: 1% polyethylene glycol-600, 0.1% sodium benzoate, 1% citric acid, 1% hydrolyzed polymaleic anhydride, 0.1% g sodium acetate, and the balance is water.
添加剂④配方如下:5%水解聚丙烯腈钠盐,2%胆碱,0.02%十二烷基硫酸钠,0.15%粘度为12000mPa•s的甲苯二胺聚醚多元醇,余量为水。The formula of additive ④ is as follows: 5% hydrolyzed polyacrylonitrile sodium salt, 2% choline, 0.02% sodium lauryl sulfate, 0.15% toluenediamine polyether polyol with a viscosity of 12000mPa•s, and the balance is water.
添加剂⑤配方如下:木质素磺酸钠0.05%,聚萘甲醛磺酸钠0.0001%,聚乙二醇1.3%,二乙二醇丁醚3.5%,全氟己基磺酸钾1.5%,余量为水。Additive ⑤ The formula is as follows: sodium lignosulfonate 0.05%, sodium polynaphthalene formaldehyde sulfonate 0.0001%, polyethylene glycol 1.3%, diethylene glycol butyl ether 3.5%, potassium perfluorohexyl sulfonate 1.5%, the balance is water.
在反应槽中加入10L水、93gNaOH、40g添加剂、待水温升至80℃时放入单晶硅片,反应7分钟,结束后将硅片冲洗干净,烘干表面水分,进行比表面积测试以及反射率测试,测试结果如下表2所示。Add 10L of water, 93g of NaOH, 40g of additives to the reaction tank, put in a single-crystal silicon wafer when the water temperature rises to 80°C, and react for 7 minutes. Reflectance test, the test results are shown in Table 2 below.
表2Table 2
其中:比表面积定义如下:制绒后表面积(μm2)/制绒前表面积(μm2)。Wherein: the specific surface area is defined as follows: surface area after texturing (μm 2 )/surface area before texturing (μm 2 ).
从上表数据中可知,通过本发明制备得到的八棱锥结构的绒面结构其在尺寸接近的情况下,其比表面积明显增加,从而使得光线照射到硅片表面后的光程明显增加,从而降低了对于光线的反射率,使得该绒面结构对于光线的陷光效果更好。It can be seen from the data in the above table that the suede structure of the octagonal pyramid structure prepared by the present invention has a significantly increased specific surface area when the size is close, so that the optical path after the light is irradiated on the surface of the silicon wafer is significantly increased, thereby The reflectivity for light is reduced, so that the suede structure has better trapping effect for light.
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