CN101570897A - Corrosive liquid used for monocrystal line silicon matte preparation and monocrystal line silicon matte preparation method - Google Patents
Corrosive liquid used for monocrystal line silicon matte preparation and monocrystal line silicon matte preparation method Download PDFInfo
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- CN101570897A CN101570897A CNA2009100858986A CN200910085898A CN101570897A CN 101570897 A CN101570897 A CN 101570897A CN A2009100858986 A CNA2009100858986 A CN A2009100858986A CN 200910085898 A CN200910085898 A CN 200910085898A CN 101570897 A CN101570897 A CN 101570897A
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Abstract
The invention relates to a corrosive liquid used for monocrystal line silicon matte preparation and a use method thereof. The components of the corrosive liquid are 1-5% (mass ratio) of NaOH or KOH aqueous solution, 1-50mg/L sodium dodecyl sulfate and 0-6% (mass ratio) of sodium silicate. Monocrystal line silicon slice is immerged in the corrosive liquid when preparing the matte and corroded for 10-60 minutes at the temperature of 70-95 DEG C, and the matte is obtained. The method of the invention is simple, inexpensive and stable and is applicable to mass industrialization.
Description
Technical field
The present invention relates to a kind of corrosive fluid and prepare monocrystalline silicon sued method that is used for the monocrystalline silicon suede preparation.
Background technology
Under the background of energy dilemma, renewable energy sources such as solar cell more and more are subject to the people's attention.Sun power is inexhaustible, is a kind of clean energy that has very much development potentiality.From the seventies in last century solar cell appear at the laboratory, solar cell is used widely on space, ground till now, solar cell has obtained significant progress.Especially monocrystalline silicon battery because its cheap relatively price and higher efficient, with and simple relatively, technology reliably, extensively be subject to people's attention in the last few years.
Among the preparation technology of monocrystalline silicon battery, the first step is exactly a surface wool manufacturing.Can effectively reduce the reflectivity of battery surface by surface wool manufacturing, improve battery absorption of incident light.Its average reflectance of monocrystalline silicon surface as surface finish is about 35%, and the monocrystalline silicon surface of preparation matte, its reflectivity can drop to about 10%.The monocrystalline silicon suede preparation method has chemical corrosion method, plasma etching method, mechanical carving groove method etc.Because chemical corrosion method is cheap, be applicable to industrialization thereby be extensive use of in present monocrystalline silicon production.The corrosive fluid that chemical corrosion method is commonly used is NaOH or the KOH solution of 1-5% (mass ratio), is equipped with the Virahol of 3-8% (volume ratio) or the water glass of ethanol and 0.5-3%, at corrosion of silicon between 75-90 ℃ about 30 minutes.Because of NaOH is cheap than KOH, Virahol is stable than ethanol, use the mixed solution of NaOH and Virahol and water glass to do corrosive fluid to most enterprise on the industry.
In this corrosive fluid, Virahol has good reduction surface tension and eliminates reaction product H
2The effect of bubble.If H
2Bubble is the silicon chip surface desorption from reacting well, the H that adheres to
2Bubble can stop further carrying out of reaction, and then causes the inhomogeneous of reaction.Therefore but the Virahol boiling point is 82.5 ℃, and volatilization is very severe in reaction process, causes the unstable of solution ratio, and cause extensive industry produce in repeatability very poor, production is impacted.
From the quality of matte own, small and dense pyramid more helps industrialization production in addition.Though angle from reflectivity, pyramidion and Great Pyramid there is no obvious difference, but in industry, pyramidion more helps follow-up silk-screen process, the metal of silk-screen is contacted with pyramid is tightr, be difficult for causing problems such as the big or electric leakage of series resistance.And little pyramid is also few because of the silicon that corrodes at every turn, thereby more helps keeping the stability of corrosive fluid proportioning, because of the corrosive fluid proportioning changes the liquid that changes that causes, has improved production efficiency in the minimizing industry.
For improving the matte quality and improving technology stability, people have made a lot of useful explorations.As, Chinese patent 200810122243.7,200510111453.2 and 200810163097.2 has proposed to add the method for promoting agent respectively on used corrosive fluid (being mixed with ethanol or Virahol and water glass in NaOH or the KOH solution) basis, that they propose respectively is the Pb (NO of adding 0.02 ‰～0.1 ‰
3)
2Or Pb, glucose and meta-aluminate, though the adding of promoting agent can improve the matte quality, because also will depend on pure based additive (ethanol or Virahol) reduces surface tension and froth breaking, so do not solve the unstable of corrosive fluid.And China apply for a patent 200810163098.7 propose on the basis of the NaOH aqueous solution, to add ultrasonic, reach the effect of eliminating bubble by ultransonic vibration, it is remarkable that this method is eliminated bubble aspect effect, but can not reduce solution surface tension, improve because on the homogeneity of matte, be still waiting.Chinese patent 200510029562.X is equipped with matte with acid corrosion corrosion legal system after adopting the SiC sand-blast, cost height and be not suitable for industrialization production.In addition, Chinese patent 200810020206.5 is with sodium hydroxide or potassium hydroxide 1.5%～10%, tensio-active agent 1～200ppm, water glass 0.5%～5%, deionized water 85.0%～98.0% mixes the back as corrosive fluid, has also avoided Virahol or alcoholic acid to add, but preparation method's complexity, need in dispersion pot, stir 10～30 minutes, after making tensio-active agent it dissolving fully, filter discharging.
Figure 1 shows that the typical monocrystalline silicon suede shape appearance figure that adopts existing industrial technology to prepare, the preparation method is: 2% the NaOH aqueous solution, add 5% Virahol, 2% water glass, and the corrosive fluid preparation is finished.Described corrosive fluid constant temperature in 85 ℃, after bubbling mixes, is put in the described corrosive fluid corrosion 30 minutes with monocrystalline silicon piece, obtains mean sizes and be the pyramid about 10 μ m.
Summary of the invention
The objective of the invention is to overcome the shortcoming of prior art, propose a kind of corrosive fluid and matte preparation method who is used for the monocrystalline silicon suede preparation.Present method substitutes Virahol or ethanol as the reactive behavior agent with industrial common sodium lauryl sulphate, plays and reduces solution surface tension and eliminate reaction product H
2The effect of bubble.Because sodium lauryl sulphate has better stability than Virahol or ethanol, well realized the repeatability of making herbs into wool process, highly beneficial to the stability and the repeatability that improve technology in the production.In addition, sodium lauryl sulphate is lower than Virahol or ethanol price, and the addition that uses is considerably less in the scope of every liter of a few to tens of milligram, and therefore to compare expense lower with adding Virahol or ethanol.
The corrosive fluid component that the present invention relates to is as follows: the NaOH of 1%～5% (mass ratio) or KOH solution, the sodium lauryl sulphate of 1mg/L-50mg/L, the water glass of 0-6% (mass ratio).
It is as follows to utilize corrosive fluid of the present invention to prepare the method for monocrystalline silicon suede:
The NaOH of preparation 1%～5% (mass ratio) or the aqueous solution of KOH add the sodium lauryl sulphate of 1mg/L-50mg/L and the water glass of 0-6% (mass ratio), the preparation corrosive fluid.Described corrosive fluid is placed under the 70-95 ℃ of temperature, after bubbling mixes, monocrystalline silicon piece is placed in the described corrosive fluid corrosion 10-60 minute.
Present method replaces alcohols additive in the conventional corrosive fluid with the common sodium lauryl sulphate that is dirt cheap of industry, ethanol or Virahol, effectively overcome the unstable of corrosive fluid commonly used, and can prepare the pyramid that size is even, be covered with the whole silicon wafer surface, and the pyramid size distributes between 2-6 μ m, less than conventional pyramid.
Present method is simple, stability and repeated high, cheap, is highly suitable for industrialization production.
Description of drawings
The typical monocrystalline silicon suede shape appearance figure of Fig. 1 for adopting existing industrial technology to prepare;
The monocrystalline silicon suede shape appearance figure of Fig. 2 for adopting the technology of the present invention to prepare;
Embodiment
The corrosive fluid component of monocrystalline silicon suede of the present invention is: the NaOH of 1%～5% (mass ratio) or KOH solution, the sodium lauryl sulphate of 1mg/L-50mg/L, the water glass of 0-6% (mass ratio).
Specify content of the present invention below in conjunction with embodiment.
Embodiment 1: the NaOH aqueous solution of preparation 1%, add the sodium lauryl sulphate of 1mg/L, 6% water glass, and the corrosive fluid preparation is finished.Described corrosive fluid under 95 ℃ of constant temperature, after bubbling mixes, is put in the described corrosive fluid corrosion 30 minutes with monocrystalline silicon piece, obtains mean sizes and be the pyramid about 5 μ m.
Embodiment 2: the KOH aqueous solution of preparation 5%, add the sodium lauryl sulphate of 100mg/L, 0% water glass, and the corrosive fluid preparation is finished.Described corrosive fluid constant temperature in 90 ℃, after bubbling mixes, is put in the described corrosive fluid corrosion 25 minutes with monocrystalline silicon piece, obtains mean sizes and be the pyramid about 6 μ m.
Embodiment 3: the NaOH aqueous solution of preparation 2%, add the sodium lauryl sulphate of 10mg/L, 0.5% water glass, and the corrosive fluid preparation is finished.Described corrosive fluid constant temperature in 85 ℃, after bubbling mixes, is put in the described corrosive fluid corrosion 15 minutes with monocrystalline silicon piece, obtains mean sizes and be the pyramid about 5 μ m, as shown in Figure 2, pyramid is covered with silicon chip surface and size evenly.
Embodiment 4: the NaOH aqueous solution of preparation 2%, add the sodium lauryl sulphate of 20mg/L, 2% water glass, and the corrosive fluid preparation is finished.Described corrosive fluid constant temperature in 70 ℃, after bubbling mixes, is put in the described corrosive fluid corrosion 60 minutes with monocrystalline silicon piece, obtains mean sizes and be the pyramid about 3 μ m.
As shown in Figure 2, do not having Virahol or ethanol to do under the situation of additive, adopt corrosive fluid of the present invention and preparation method prepared big or small evenly, be covered with the ideal pyramid on whole silicon wafer surface.And the pyramid size that the present invention prepares does the pyramid (see figure 1) that additive preparation goes out less than conventional Virahol, so the present invention more helps the preparation of battery and the stability that industrialization is produced.
Claims (2)
1, a kind of corrosive fluid that is used for the monocrystalline silicon suede preparation is characterized in that described corrosive fluid component is: the NaOH of 1～5% (mass ratio) or KOH solution, the sodium lauryl sulphate of 1-50mg/L, the water glass of 0-6% (mass ratio).
2, adopt the described corrosive fluid of claim 1 to prepare the method for monocrystalline silicon suede, it is characterized in that according to described corrosive fluid component configuration corrosive fluid, then described corrosive fluid is placed under the 70-95 ℃ of temperature, after mixing, monocrystalline silicon piece is placed in the described corrosive fluid corrosion 10-60 minute.
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101818378A (en) * | 2010-04-26 | 2010-09-01 | 江苏林洋新能源有限公司 | Velvet manufacturing solution of monocrystalline silicon additive |
| CN101864599A (en) * | 2010-05-31 | 2010-10-20 | 江西赛维Ldk太阳能高科技有限公司 | Preparation method of suede of silicon wafer |
| CN102005504A (en) * | 2010-10-15 | 2011-04-06 | 锦州华昌光伏科技有限公司 | Silicon wafer fine hair making method capable of improving solar cell conversion efficiency |
| CN102154710A (en) * | 2010-12-09 | 2011-08-17 | 扬州瀚源新材料科技有限公司 | Monocrystal silicon wafer flocking process liquid and preparation method thereof |
| CN102912450A (en) * | 2012-10-22 | 2013-02-06 | 江苏荣马新能源有限公司 | Monocrystalline silicon flocking additive |
| CN104411797A (en) * | 2012-07-09 | 2015-03-11 | 摄津制油株式会社 | Etching fluid, etching force recovery agent, method for manufacturing semiconductor substrate for solar cell, and semiconductor substrate for solar cell |
| CN105133029A (en) * | 2015-08-25 | 2015-12-09 | 合肥中南光电有限公司 | Energy-saving environmental-friendly silicon wafer texture-etchant and preparation method therefor |
| CN106012028A (en) * | 2016-07-08 | 2016-10-12 | 合肥中南光电有限公司 | Single crystalline silicon solar cell piece surface texture solution containing peach gum and preparation method thereof |
| CN106012031A (en) * | 2016-07-08 | 2016-10-12 | 合肥中南光电有限公司 | Single crystalline silicon solar cell surface texture solution containing notoginsenoside and preparation method thereof |
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| CN106087068A (en) * | 2016-07-08 | 2016-11-09 | 合肥中南光电有限公司 | A kind of amino of chitosan sulfonic acid monocrystaline silicon solar cell sheet surface texture liquid and preparation method thereof |
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| CN106119974A (en) * | 2016-07-07 | 2016-11-16 | 合肥中南光电有限公司 | A kind of monocrystaline silicon solar cell sheet surface texture liquid containing extract from pine needles and preparation method thereof |
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| CN117438502A (en) * | 2023-11-28 | 2024-01-23 | 江苏润阳世纪光伏科技有限公司 | Preparation method of monocrystalline silicon wafer textured surface with light conversion and full-angle light trapping |
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2009
- 2009-06-03 CN CNA2009100858986A patent/CN101570897A/en active Pending
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101818378A (en) * | 2010-04-26 | 2010-09-01 | 江苏林洋新能源有限公司 | Velvet manufacturing solution of monocrystalline silicon additive |
| CN101818378B (en) * | 2010-04-26 | 2011-11-09 | 韩华新能源（启东）有限公司 | Velvet manufacturing solution of monocrystalline silicon additive |
| CN101864599A (en) * | 2010-05-31 | 2010-10-20 | 江西赛维Ldk太阳能高科技有限公司 | Preparation method of suede of silicon wafer |
| CN101864599B (en) * | 2010-05-31 | 2012-07-18 | 江西赛维Ldk太阳能高科技有限公司 | Preparation method of suede of silicon wafer |
| CN102005504A (en) * | 2010-10-15 | 2011-04-06 | 锦州华昌光伏科技有限公司 | Silicon wafer fine hair making method capable of improving solar cell conversion efficiency |
| CN102154710A (en) * | 2010-12-09 | 2011-08-17 | 扬州瀚源新材料科技有限公司 | Monocrystal silicon wafer flocking process liquid and preparation method thereof |
| CN102154710B (en) * | 2010-12-09 | 2013-09-11 | 扬州瀚源新材料科技有限公司 | Monocrystal silicon wafer flocking process liquid and preparation method thereof |
| CN104411797A (en) * | 2012-07-09 | 2015-03-11 | 摄津制油株式会社 | Etching fluid, etching force recovery agent, method for manufacturing semiconductor substrate for solar cell, and semiconductor substrate for solar cell |
| CN102912450A (en) * | 2012-10-22 | 2013-02-06 | 江苏荣马新能源有限公司 | Monocrystalline silicon flocking additive |
| CN102912450B (en) * | 2012-10-22 | 2015-07-01 | 江苏荣马新能源有限公司 | Monocrystalline silicon flocking additive |
| CN105133029A (en) * | 2015-08-25 | 2015-12-09 | 合肥中南光电有限公司 | Energy-saving environmental-friendly silicon wafer texture-etchant and preparation method therefor |
| CN106119974A (en) * | 2016-07-07 | 2016-11-16 | 合肥中南光电有限公司 | A kind of monocrystaline silicon solar cell sheet surface texture liquid containing extract from pine needles and preparation method thereof |
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| CN106012030A (en) * | 2016-07-08 | 2016-10-12 | 合肥中南光电有限公司 | Single crystalline silicon solar cell piece surface texture solution containing cinnamomum camphora leaf extract and preparation method thereof |
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| CN106087069A (en) * | 2016-07-08 | 2016-11-09 | 合肥中南光电有限公司 | A kind of behenyl alcohol sodium lignin sulfonate monocrystaline silicon solar cell sheet surface texture liquid and preparation method thereof |
| CN106119975A (en) * | 2016-07-08 | 2016-11-16 | 合肥中南光电有限公司 | A kind of monocrystaline silicon solar cell sheet surface texture liquid containing hydrolytic collagen and preparation method thereof |
| CN107400926A (en) * | 2017-08-14 | 2017-11-28 | 通威太阳能（安徽）有限公司 | A kind of battery slice etching corrosive liquid and its preparation technology |
| CN117438502A (en) * | 2023-11-28 | 2024-01-23 | 江苏润阳世纪光伏科技有限公司 | Preparation method of monocrystalline silicon wafer textured surface with light conversion and full-angle light trapping |
| CN117438502B (en) * | 2023-11-28 | 2024-05-28 | 江苏润阳世纪光伏科技有限公司 | Preparation method of monocrystalline silicon wafer textured surface with light conversion and full-angle light trapping |
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