CN101918804B - 压电振动型力传感器 - Google Patents

压电振动型力传感器 Download PDF

Info

Publication number
CN101918804B
CN101918804B CN2009801025766A CN200980102576A CN101918804B CN 101918804 B CN101918804 B CN 101918804B CN 2009801025766 A CN2009801025766 A CN 2009801025766A CN 200980102576 A CN200980102576 A CN 200980102576A CN 101918804 B CN101918804 B CN 101918804B
Authority
CN
China
Prior art keywords
piezoelectric body
force
piezoelectric
vibration
sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009801025766A
Other languages
English (en)
Chinese (zh)
Other versions
CN101918804A (zh
Inventor
佐藤修一
染谷雄一
西田秀之
横松孝夫
中村健太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN101918804A publication Critical patent/CN101918804A/zh
Application granted granted Critical
Publication of CN101918804B publication Critical patent/CN101918804B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)
CN2009801025766A 2008-01-22 2009-01-20 压电振动型力传感器 Expired - Fee Related CN101918804B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2008-011626 2008-01-22
JP2008011626 2008-01-22
JP2009007768A JP4677493B2 (ja) 2008-01-22 2009-01-16 圧電振動型力センサ
JP2009-007768 2009-01-16
PCT/JP2009/051147 WO2009093727A1 (en) 2008-01-22 2009-01-20 Piezoelectric vibration type force sensor

Publications (2)

Publication Number Publication Date
CN101918804A CN101918804A (zh) 2010-12-15
CN101918804B true CN101918804B (zh) 2012-04-18

Family

ID=40901226

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009801025766A Expired - Fee Related CN101918804B (zh) 2008-01-22 2009-01-20 压电振动型力传感器

Country Status (7)

Country Link
US (1) US8365615B2 (https=)
EP (1) EP2240750B1 (https=)
JP (1) JP4677493B2 (https=)
KR (1) KR101247087B1 (https=)
CN (1) CN101918804B (https=)
TW (1) TWI392860B (https=)
WO (1) WO2009093727A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550468B2 (ja) 2010-06-30 2014-07-16 キヤノン株式会社 力覚センサの校正方法
JP5936374B2 (ja) * 2011-02-15 2016-06-22 キヤノン株式会社 圧電振動型力センサ及びロボットハンド並びにロボットアーム
LU91833B1 (en) * 2011-06-30 2012-12-31 Iee Sarl Film-type pressure sensor e.g. for article of footwear
JP6317568B2 (ja) 2013-11-15 2018-04-25 キヤノン株式会社 比較回路およびそれを用いた撮像素子並びに比較回路の制御方法
US10201901B2 (en) 2015-01-29 2019-02-12 Canon Kabushiki Kaisha Robot apparatus, method for controlling robot, program, and recording medium
US10620063B2 (en) 2015-07-31 2020-04-14 Sikorsky Aircraft Corporation Multifunctional piezoelectric load sensor assembly
EP3344968B1 (en) 2015-08-31 2018-12-26 Koninklijke Philips N.V. Electroactive polymer sensors and sensing methods
JP6824764B2 (ja) 2017-01-27 2021-02-03 キヤノン株式会社 センサ、ロボット装置及び物品の製造方法
JP2019011982A (ja) * 2017-06-29 2019-01-24 住友理工株式会社 センサシート、静電容量型センサ、およびセンサシートの製造方法
KR102486453B1 (ko) 2017-12-08 2023-01-09 삼성디스플레이 주식회사 표시 장치
US11045950B2 (en) 2018-11-02 2021-06-29 Canon Kabushiki Kaisha Driving device and detecting device
CN112716475B (zh) * 2020-12-24 2026-03-20 浙江清华柔性电子技术研究院 一种基于柔性压电传感技术的表面阻抗识别方法和装置
CN116460662A (zh) * 2023-04-18 2023-07-21 华中科技大学 一种高频率紧凑型三分量测力装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034293A (ja) 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
JP2000205934A (ja) * 1999-01-08 2000-07-28 Matsushita Electric Ind Co Ltd 重量検出装置
CN1800797A (zh) * 2005-01-06 2006-07-12 台达电子工业股份有限公司 应用薄膜体声波共振器的感测装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5278483A (en) 1975-12-25 1977-07-01 Toray Industries Method of measuring force
JPS60187834A (ja) 1984-03-07 1985-09-25 Hitachi Ltd 力検出装置
JPS60222734A (ja) 1984-04-20 1985-11-07 Hitachi Ltd 力の検出方法および装置
JPS62230071A (ja) * 1986-03-31 1987-10-08 Ngk Spark Plug Co Ltd 同軸状機械電気変換素子
US4798987A (en) * 1986-08-25 1989-01-17 Canon Kabushiki Kaisha Surface acoustic wave generator
JPH0167768U (https=) * 1987-10-26 1989-05-01
DE68917231T2 (de) * 1988-05-18 1994-12-15 Canon Kk Sondenkarte, Verfahren zur Messung eines zu messenden Teiles mit derselben und elektrischer Schaltungsteil.
US5200663A (en) * 1990-08-29 1993-04-06 Canon Kabushiki Kaisha Surface acoustic wave device provided with output transducer split into a plurality of portions, and communication system using the same
US5367216A (en) * 1991-08-02 1994-11-22 Canon Kabushiki Kaisha Surface acoustic wave element and communication system using the same
DE4324692A1 (de) * 1993-07-23 1995-01-26 Bosch Gmbh Robert Piezoelektrischer Kraftsensor
KR100243078B1 (ko) 1997-05-12 2000-02-01 윤종용 압전진동형 회전각센서시스템 및 압전진동형 회전각센서의 출력계측방법
KR100473842B1 (ko) * 2001-10-11 2005-03-07 주식회사 나이콤 진동센서
JP2007017420A (ja) * 2004-10-28 2007-01-25 Matsushita Electric Ind Co Ltd 圧電素子とその製造方法
JP2006126120A (ja) * 2004-11-01 2006-05-18 Canon Inc 地中探査装置
JP4933775B2 (ja) * 2005-12-02 2012-05-16 独立行政法人理化学研究所 微小表面形状測定プローブ
US7915787B2 (en) * 2007-07-20 2011-03-29 Canon Kabushiki Kaisha Actuator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6034293A (ja) 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
JP2000205934A (ja) * 1999-01-08 2000-07-28 Matsushita Electric Ind Co Ltd 重量検出装置
CN1800797A (zh) * 2005-01-06 2006-07-12 台达电子工业股份有限公司 应用薄膜体声波共振器的感测装置

Also Published As

Publication number Publication date
KR20100113115A (ko) 2010-10-20
CN101918804A (zh) 2010-12-15
WO2009093727A1 (en) 2009-07-30
EP2240750B1 (en) 2015-06-24
EP2240750A4 (en) 2013-11-27
US8365615B2 (en) 2013-02-05
KR101247087B1 (ko) 2013-03-25
JP2009198496A (ja) 2009-09-03
TWI392860B (zh) 2013-04-11
EP2240750A1 (en) 2010-10-20
JP4677493B2 (ja) 2011-04-27
TW200946885A (en) 2009-11-16
US20110113898A1 (en) 2011-05-19

Similar Documents

Publication Publication Date Title
CN101918804B (zh) 压电振动型力传感器
US11297406B2 (en) Acoustic transducers with a low pressure zone and diaphragms having a pressure sensor
US10972098B2 (en) Tunable device including tunable member responsible to electric field applied thereto, transducer including the tunable device, and method of changing one of stiffness and damping coefficient of tuning the tunable device
CN1204788C (zh) 具有受控振动特性的电路卡装置
US11338325B2 (en) Touch feedback and sensing device
CN102362162A (zh) 物理量传感器
US10656729B2 (en) Pressing detector and electronic device
CN103787266B (zh) 机械部件、机械系统和用于运行机械部件的方法
JP2006226858A (ja) 変動荷重センサ及びこれを用いた触覚センサ
US12057790B2 (en) Control system and control method for controlling displacement of Base
US7343802B2 (en) Dynamic-quantity sensor
JP2011209270A (ja) 角速度センサ素子
JP2005291927A (ja) センサ
WO2012063477A1 (ja) 圧力センサ
JP2016121955A (ja) 燃焼圧センサ
JP2004132882A (ja) 静圧動圧検知センサ
JP2004056450A (ja) 超音波センサ
JPH08297138A (ja) 圧電加速度センサ
WO2014136388A1 (ja) 歪検出装置
CN120303539A (zh) 设备状态监视系统
CN114787578A (zh) 弯曲传感器以及电子设备
JP2019191688A (ja) 操作入力装置
JP2005265421A (ja) 加速度センサ
JP2004226295A (ja) 静圧動圧検知センサ
JPS63168525A (ja) 感圧導電ゴムによる荷重測定方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120418