CN101893373A - 立卧式可连续生产的高效、节能真空可控气氛炉 - Google Patents
立卧式可连续生产的高效、节能真空可控气氛炉 Download PDFInfo
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- CN101893373A CN101893373A CN201010238603.7A CN201010238603A CN101893373A CN 101893373 A CN101893373 A CN 101893373A CN 201010238603 A CN201010238603 A CN 201010238603A CN 101893373 A CN101893373 A CN 101893373A
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CN2010102386037A CN101893373B (zh) | 2010-07-23 | 2010-07-23 | 立卧式可连续生产的高效、节能真空可控气氛炉 |
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CN2010102386037A CN101893373B (zh) | 2010-07-23 | 2010-07-23 | 立卧式可连续生产的高效、节能真空可控气氛炉 |
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CN101893373A true CN101893373A (zh) | 2010-11-24 |
CN101893373B CN101893373B (zh) | 2012-04-25 |
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Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102288024A (zh) * | 2011-07-21 | 2011-12-21 | 常熟皮爱尔奇磁性科技有限公司 | 铁氧体烧结窑炉烧结气氛无损耗排障装置 |
CN102288023A (zh) * | 2011-07-21 | 2011-12-21 | 常熟皮爱尔奇磁性科技有限公司 | 清障时保护气体无损耗的电子产品烧结窑炉 |
CN102515139A (zh) * | 2011-11-10 | 2012-06-27 | 青岛科技大学 | 气相法连续生产纳米材料两室立式真空可控气氛炉 |
CN102607263A (zh) * | 2012-03-22 | 2012-07-25 | 上海海事大学 | 一种连续生产化真空气氛炉及其生产方法 |
CN103423994A (zh) * | 2013-09-11 | 2013-12-04 | 盐城市盛逸化纤机械有限公司 | 高频感应式真空清洁炉 |
CN106610218A (zh) * | 2015-10-26 | 2017-05-03 | 陕西华银科技有限公司 | 竖式大容量高效中频炉及其生产方法 |
CN111172369A (zh) * | 2019-12-25 | 2020-05-19 | 武汉恒精电热设备有限公司 | 全自动齿条立式淬火卧式回火设备 |
CN114086153A (zh) * | 2021-11-24 | 2022-02-25 | 山东力冠微电子装备有限公司 | Cvd真空设备及立卧切换实现方法 |
CN117604505A (zh) * | 2024-01-24 | 2024-02-27 | 江苏迈纳德微纳技术有限公司 | 一种原子层沉积设备 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2375937Y (zh) * | 1999-06-10 | 2000-04-26 | 孙立言 | 推舟式真空电阻直热式热压连续烧结炉 |
JP2002356705A (ja) * | 2001-05-29 | 2002-12-13 | Daido Steel Co Ltd | 真空炉 |
CN1670270A (zh) * | 2004-12-30 | 2005-09-21 | 湖南大学 | 纳米材料可控生长真空管式反应设备 |
CN100432609C (zh) * | 2005-11-08 | 2008-11-12 | 青岛科技大学 | 三室式智能周期性可控气氛炉及连续生产纳米材料的方法 |
JP2010145046A (ja) * | 2008-12-19 | 2010-07-01 | Mitsubishi Heavy Ind Ltd | 真空熱処理炉及び熱処理対象物支持装置 |
-
2010
- 2010-07-23 CN CN2010102386037A patent/CN101893373B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2375937Y (zh) * | 1999-06-10 | 2000-04-26 | 孙立言 | 推舟式真空电阻直热式热压连续烧结炉 |
JP2002356705A (ja) * | 2001-05-29 | 2002-12-13 | Daido Steel Co Ltd | 真空炉 |
CN1670270A (zh) * | 2004-12-30 | 2005-09-21 | 湖南大学 | 纳米材料可控生长真空管式反应设备 |
CN100432609C (zh) * | 2005-11-08 | 2008-11-12 | 青岛科技大学 | 三室式智能周期性可控气氛炉及连续生产纳米材料的方法 |
JP2010145046A (ja) * | 2008-12-19 | 2010-07-01 | Mitsubishi Heavy Ind Ltd | 真空熱処理炉及び熱処理対象物支持装置 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102288024A (zh) * | 2011-07-21 | 2011-12-21 | 常熟皮爱尔奇磁性科技有限公司 | 铁氧体烧结窑炉烧结气氛无损耗排障装置 |
CN102288023A (zh) * | 2011-07-21 | 2011-12-21 | 常熟皮爱尔奇磁性科技有限公司 | 清障时保护气体无损耗的电子产品烧结窑炉 |
CN102288023B (zh) * | 2011-07-21 | 2012-11-07 | 常熟皮爱尔奇磁性科技有限公司 | 清障时保护气体无损耗的电子产品烧结窑炉 |
CN102288024B (zh) * | 2011-07-21 | 2012-11-21 | 常熟皮爱尔奇磁性科技有限公司 | 铁氧体烧结窑炉烧结气氛无损耗排障装置 |
CN102515139A (zh) * | 2011-11-10 | 2012-06-27 | 青岛科技大学 | 气相法连续生产纳米材料两室立式真空可控气氛炉 |
CN102607263A (zh) * | 2012-03-22 | 2012-07-25 | 上海海事大学 | 一种连续生产化真空气氛炉及其生产方法 |
CN103423994A (zh) * | 2013-09-11 | 2013-12-04 | 盐城市盛逸化纤机械有限公司 | 高频感应式真空清洁炉 |
CN106610218A (zh) * | 2015-10-26 | 2017-05-03 | 陕西华银科技有限公司 | 竖式大容量高效中频炉及其生产方法 |
CN106610218B (zh) * | 2015-10-26 | 2020-03-13 | 陕西华银科技股份有限公司 | 竖式大容量高效中频炉及其生产方法 |
CN111172369A (zh) * | 2019-12-25 | 2020-05-19 | 武汉恒精电热设备有限公司 | 全自动齿条立式淬火卧式回火设备 |
CN114086153A (zh) * | 2021-11-24 | 2022-02-25 | 山东力冠微电子装备有限公司 | Cvd真空设备及立卧切换实现方法 |
CN117604505A (zh) * | 2024-01-24 | 2024-02-27 | 江苏迈纳德微纳技术有限公司 | 一种原子层沉积设备 |
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