CN101829946B - Technology for machining two surfaces of infrared window piece - Google Patents
Technology for machining two surfaces of infrared window piece Download PDFInfo
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- CN101829946B CN101829946B CN 201010185783 CN201010185783A CN101829946B CN 101829946 B CN101829946 B CN 101829946B CN 201010185783 CN201010185783 CN 201010185783 CN 201010185783 A CN201010185783 A CN 201010185783A CN 101829946 B CN101829946 B CN 101829946B
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- infrared window
- window piece
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- infrared
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Abstract
The invention relates to a technology for machining two surfaces of an infrared window piece, which performs the grinding with a two-surfaces grinding machine and performs the polishing with the two-surfaces grinding machine, wherein the grinding is firstly performed and the polishing is sequentially preformed. The technology comprises the following steps of: putting an infrared window piece in a loose pulley; primarily grinding on an iron-cast flat mould; fine grinding after the infrared window piece is detected to achieve the quality requirement, wherein the fine grinding is performed by a special flat disc; grinding with refined grinding materials, wherein the position is continually changed during grinding; putting the fine grinded infrared window piece on a polyurethane polishing disc to coarsely polish, so that the surface of the infrared window piece achieves the required precision; and fine polishing the eligible infrared window piece after coarse polishing with a polishing disc which is made from synthetic material of asphalt and rosin to guarantee the quality of the machined product through fine correction. The technology can improve the quality of the smooth finish of the infrared window piece, can improve the quality of the parallelism degree thereof, and can improve the machining efficiency thereof.
Description
Technical field
The present invention relates to a kind of semicon industry and infrared optics instrument infrared window piece, especially a kind of two-sided processing technology of infrared window piece.
Background technology
Germanium, silicon, zinc selenide are several special materials of infrared light, and it mainly is used on semicon industry and the various infrared optics instrument, for example: various infrared radiation thermometers, various infrared thermographies are on night vision device and the high-power carbon dioxide laser.Be widely used in the fields such as high-end science and technology, national defence, aviation, have epochmaking effect.
If the client needs two plain film eyeglasses, according to glossing in the past, we will polish at twice, i.e. throw reverse side after positive throwing is good again.Produce according to such method, not only efficient is low, and is easy to damage the side of having thrown when throwing another side, and the depth of parallelism of plain film just can't be guaranteed at all.It is better that experienced workman's possibility depth of parallelism is controlled, and it is many that workman's this respect of lack of experience just is short of, so it is very urgent to seek in addition a kind of new finishing method.
Summary of the invention
In order to overcome above defective, the technical problem to be solved in the present invention is: propose the two-sided processing technology that a kind of high-efficient grinding polishing can guarantee again the infrared window piece of the product depth of parallelism.
The technical solution adopted in the present invention is: a kind of two-sided processing technology of infrared window piece, and adopt twin grinder to grind, adopt the Twp-sided polishing machine polishing, grind afterwards first and polish, this processing step is as follows:
Correct grinding, infrared window piece is put in the pleasure boat, then carry out elementary grinding at the cast iron flat-die, finish grind again after reaching quality requirement, adopt special dish during correct grinding, grind with refined abrasive, in process of lapping, constantly change the position, make infrared window piece in grinding, adjust the precision of self;
Rough polishing is roughly ground with lead oxide the infrared window piece that correct grinding is good, so that the infrared window piece surface reaches precision prescribed at polishing disk;
The smart throwing, the polishing disk that the qualified infrared window piece of rough polishing is made with pitch, rosin synthetic material carries out the essence throwing, by accurate correction, then with polishing powder the infrared window piece surface is polished.
According to another preferred embodiment, the infrared window piece quality index was after the two-sided processing technology of infrared window piece further comprised described rough polishing: fineness 60/40, aperture face shape error are 4 circles, the depth of parallelism≤10 ".
According to another preferred embodiment, infrared window sheet pulp index was after the two-sided processing technology of infrared window piece further comprised described smart the throwing: fineness 40/20, aperture face shape error are 0.5～1 circle, the depth of parallelism≤5 ".
According to another preferred embodiment, the two-sided processing technology of infrared window piece further is included in the smart throwing process, the infrared window piece surface temperature control is at 20～35 ℃, and the infrared window piece velocity of rotation is 10～20r/min, and the surface pressing of infrared window piece is 0.3～0.5Mpa.
According to another preferred embodiment, the two-sided processing technology of infrared window piece is put into single side polishing machine again and carries out the single face finishing polish after comprising that further the planetary polisher lapper of employing carries out Two sides milling and polishing.
The invention has the beneficial effects as follows: the depth of parallelism that can obviously improve infrared window piece by the present invention, save operation, reduced operation easier and labour intensity, improved output and efficient, overcome and thought operation factors, be convenient to the adjustment of technique and the stability of technique.
The specific embodiment
The present invention is further detailed explanation with preferred embodiment by reference to the accompanying drawings now.These accompanying drawings are the schematic diagram of simplification, basic structure of the present invention only is described in a schematic way, so it only show the formation relevant with the present invention.
A kind of two-sided processing technology of infrared window piece adopts twin grinder to grind, and adopts the polishing machine polishing, grinds afterwards first and polishes, and this processing step is as follows:
Correct grinding is put in infrared window piece in the pleasure boat, then carries out elementary grinding at the cast iron fingerprint, finish grind again after reaching quality requirement, adopt setting stick during correct grinding, grind with refined abrasive, in process of lapping, constantly change the position, make infrared window piece in grinding, adjust the precision of self;
Rough polishing, the infrared window piece that correct grinding is good is roughly ground at polishing disk with lead oxide, so that the infrared window piece surface reaches precision prescribed, the infrared window piece quality index is after the described rough polishing: fineness 60/40, the aperture face shape error is 4 circles, the depth of parallelism≤10 ".
The smart throwing, the polishing disk that the qualified infrared window piece of rough polishing is made with pitch, rosin synthetic material carries out the essence throwing, by accurate correction, then with polishing powder the infrared window piece surface is polished.In essence throwing process, the infrared window piece surface temperature control is at 20～35 ℃, the infrared window piece velocity of rotation is 10～20r/min, the surface pressing of infrared window piece is 0.3～0.5Mpa, and the infrared window piece quality index is after smart the throwing: fineness 40/20, the aperture face shape error is 0.5～1 circle, the depth of parallelism≤5 ".
After the present invention preferably adopts planetary polisher lapper to carry out Two sides milling and polishing, be put into again single side polishing machine and carry out the single face finishing polish.
Take above-mentioned foundation desirable embodiment of the present invention as enlightenment, by above-mentioned description, the relevant staff can in the scope that does not depart from this invention technological thought, carry out various change and modification fully.The technical scope of this invention is not limited to the content on the specification, must determine its technical scope according to the claim scope.
Claims (2)
1. the two-sided processing technology of an infrared window piece adopts twin grinder to grind, and adopts the Twp-sided polishing machine polishing, grinds afterwards first and polishes, and it is characterized in that this processing step is as follows:
Correct grinding, infrared window piece is put in the pleasure boat, then carry out elementary grinding at the cast iron flat-die, elementary milling time is 25 minutes～35 minutes, finish grindes after infrared window piece reaches quality requirement by detecting again, and adopts the square position during correct grinding, grind with refined abrasive, in process of lapping, constantly change the position, infrared window piece is adjusted by continuous in process of lapping, reach precision;
Rough polishing is carried out rough polishing to the infrared window piece that correct grinding is good with lead oxide at polishing disk, so that the infrared window piece surface reaches precision prescribed;
The smart throwing, the polishing disk that the qualified infrared window piece of rough polishing is made with pitch, rosin synthetic material carries out the essence throwing, and this polishing disk need by accurately revising, then polish the infrared window piece surface with polishing powder.
2. the two-sided processing technology of infrared window piece according to claim 1, it is characterized in that in essence throwing process, the infrared window piece surface temperature control is at 20～35 ℃, the infrared window piece velocity of rotation is 10～20r/min, and the surface pressing of infrared window piece is 0.3～0.5Mpa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010185783 CN101829946B (en) | 2010-05-28 | 2010-05-28 | Technology for machining two surfaces of infrared window piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010185783 CN101829946B (en) | 2010-05-28 | 2010-05-28 | Technology for machining two surfaces of infrared window piece |
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| Publication Number | Publication Date |
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| CN101829946A CN101829946A (en) | 2010-09-15 |
| CN101829946B true CN101829946B (en) | 2013-01-09 |
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| CN 201010185783 Expired - Fee Related CN101829946B (en) | 2010-05-28 | 2010-05-28 | Technology for machining two surfaces of infrared window piece |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104551926A (en) * | 2015-01-09 | 2015-04-29 | 西安应用光学研究所 | Hard optical material polishing die combined structure and manufacturing method |
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| CN104924196A (en) * | 2014-03-20 | 2015-09-23 | 六晶金属科技（苏州）有限公司 | Method for grinding metal substrate for LED chip scale packaging |
| CN105538131A (en) * | 2015-12-02 | 2016-05-04 | 珠海东精大电子科技有限公司 | Sapphire diaphragm machining process |
| CN108237442B (en) * | 2016-12-23 | 2020-08-04 | 蓝思科技（长沙）有限公司 | Processing technology of ultrathin ceramic fingerprint identification sheet |
| CN108247431B (en) * | 2017-12-05 | 2019-09-20 | 佛山华国光学器材有限公司 | The infrared efficient polishing process of chalcogenide glass |
| CN109454542A (en) * | 2018-11-23 | 2019-03-12 | 湖南航天环宇通信科技股份有限公司 | A kind of method of surface finish and its process equipment of infrared polycrystalline thin-walled parts |
| CN110389395A (en) * | 2019-03-04 | 2019-10-29 | 合肥嘉东光学股份有限公司 | Small light classes and grades in school Ge diaphragm development technology |
| CN110727040A (en) * | 2019-09-06 | 2020-01-24 | 合肥嘉东光学股份有限公司 | Processing technology of small optical-grade Ge window piece |
| CN111993189B (en) * | 2020-08-27 | 2021-11-05 | 马鞍山市江南光学有限公司 | Processing technology of large-caliber plane mirror |
| CN115070516B (en) * | 2022-06-21 | 2024-04-12 | 安徽光智科技有限公司 | Method for controlling net aperture of infrared window lens |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101130229A (en) * | 2006-08-22 | 2008-02-27 | 北京有色金属研究总院 | Double-side polishing method for gallium phosphide wafer |
| CN100469531C (en) * | 2007-09-14 | 2009-03-18 | 中国科学院上海光学精密机械研究所 | Polishing method of zinc oxide single crystal substrate level substrate |
| CN101659027A (en) * | 2008-08-27 | 2010-03-03 | 硅电子股份公司 | Method for producing a semiconductor wafer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002307286A (en) * | 2001-04-10 | 2002-10-23 | Disco Abrasive Syst Ltd | Grinding device |
| US20090008794A1 (en) * | 2007-07-03 | 2009-01-08 | Weng-Jin Wu | Thickness Indicators for Wafer Thinning |
-
2010
- 2010-05-28 CN CN 201010185783 patent/CN101829946B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101130229A (en) * | 2006-08-22 | 2008-02-27 | 北京有色金属研究总院 | Double-side polishing method for gallium phosphide wafer |
| CN100469531C (en) * | 2007-09-14 | 2009-03-18 | 中国科学院上海光学精密机械研究所 | Polishing method of zinc oxide single crystal substrate level substrate |
| CN101659027A (en) * | 2008-08-27 | 2010-03-03 | 硅电子股份公司 | Method for producing a semiconductor wafer |
Non-Patent Citations (3)
| Title |
|---|
| JP特开2002-307286A 2002.10.23 |
| 刘春香等.锗晶片化学机械抛光的条件分析.《中国电子科学研究院学报》.2008,(第01期), * |
| 孙家龙等.红外探测器用蓝宝石窗口片研制.《功能材料》.1998,(第10期), * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104551926A (en) * | 2015-01-09 | 2015-04-29 | 西安应用光学研究所 | Hard optical material polishing die combined structure and manufacturing method |
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| CN101829946A (en) | 2010-09-15 |
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