CN115070516B - Method for controlling net aperture of infrared window lens - Google Patents
Method for controlling net aperture of infrared window lens Download PDFInfo
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- CN115070516B CN115070516B CN202210703082.0A CN202210703082A CN115070516B CN 115070516 B CN115070516 B CN 115070516B CN 202210703082 A CN202210703082 A CN 202210703082A CN 115070516 B CN115070516 B CN 115070516B
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- film
- infrared
- window lens
- infrared window
- carbon film
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- 238000000034 method Methods 0.000 title claims abstract description 33
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 40
- 238000005498 polishing Methods 0.000 claims abstract description 39
- 238000000576 coating method Methods 0.000 claims abstract description 15
- 238000004140 cleaning Methods 0.000 claims abstract description 12
- 239000007888 film coating Substances 0.000 claims abstract description 10
- 238000009501 film coating Methods 0.000 claims abstract description 10
- 238000007747 plating Methods 0.000 claims description 21
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical group CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 17
- 239000002390 adhesive tape Substances 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000012459 cleaning agent Substances 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 238000007517 polishing process Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000002002 slurry Substances 0.000 claims 1
- 238000012545 processing Methods 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004886 process control Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000010985 leather Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000004297 night vision Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention belongs to the field of infrared lens processing, and discloses a method for controlling a net aperture of an infrared window lens. The method comprises the following steps: (1) Simultaneously polishing the front and back surfaces of the infrared window lens, and controlling the surface type diaphragms of the front and back surfaces of the infrared window lens obtained after polishing to be-1 fr; (2) Cleaning the polished infrared window lens, and controlling the smoothness of the front surface and the back surface of the cleaned infrared window lens to be at least 60-40 levels; (3) One side of the infrared window lens is coated with a carbon film, and the other side is coated with an infrared film. The invention adopts the double-sided polishing and then the coating process, thereby effectively ensuring the surface type change generated after carbon film coating and infrared film coating.
Description
Technical Field
The invention belongs to the field of infrared lens processing, and particularly relates to a method for controlling a net aperture of an infrared window lens.
Background
The infrared window lens is used as a main product of an infrared lens, has wide application, and is mainly used in infrared security monitoring, cameras, vehicle-mounted infrared night vision, fire protection, electric power detection, medical thermometers and the like, wherein the wave is mainly applied to the military field, and the long wave is mainly applied to the civil field. The infrared window lens needs to be coated before use, the types of the coating include a double-sided infrared film, a double-sided carbon film, an infrared film and a carbon film (namely, one side is coated with the carbon film and the other side is coated with the infrared film), and the like, the coating structure of the infrared film and the carbon film is the most mainstream use mode, the net aperture of the lens is a numerical value obtained by canceling the positive and negative of the double-sided aperture, and the net aperture parameter after the infrared window lens is one of the most important indexes for the quality of products, and the imaging and the use effect of the products are affected.
The processing method adopted by the coating film of the infrared film and the carbon film commonly used at present is as follows: one side of the film is coated with a carbon film after polishing, and the other side of the film is polished to be coated with an infrared film. However, the processing method has certain disadvantages: because the carbon film stress is large, the carbon film surface deformation is large when the other surface is polished after the film plating, and when the other surface is polished, the surface type of specific numerical value of the polishing control of the other surface is difficult to find out to ensure the control of the net aperture, the net aperture control of the product has uncontrollability, and the quality problem is caused to be repaired back and forth.
Disclosure of Invention
The invention aims to provide a method for controlling the net aperture of an infrared window lens, which adopts a process of coating after double-sided polishing, can effectively ensure the surface type change of the two sides of the lens, and finally ensures that the positive and negative apertures of the two sides of the lens are counteracted to achieve the effect of ensuring the double-sided net aperture.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
a method of controlling the net aperture of an infrared window lens comprising the steps of:
(1) Simultaneously polishing the front and back surfaces of the infrared window lens, and controlling the surface type diaphragms of the front and back surfaces of the infrared window lens obtained after polishing to be-1 fr;
(2) Cleaning the polished infrared window lens, and controlling the smoothness of the front surface and the back surface of the cleaned infrared window lens to be at least 60-40 levels;
(3) Carbon film plating is carried out on one surface of the infrared window lens, and then infrared film plating is carried out on the other surface, wherein: the thickness of the carbon film is 1-1.5 mu m, and the uniformity of the film layer of the carbon film is less than 50nm; the thickness of the infrared film is 2-3 mu m, the uniformity of the film layer of the infrared film is less than 20nm, and the film thickness of the infrared film is 1.5-2 times of that of the carbon film.
Further, in the step (1), the polishing process uses a diamond polishing liquid of 0.25 μm.
Further, in the step (1), the polishing rotation speed is 500-1200 r/min.
Further, in the step (2), an ultrasonic cleaning mode is adopted; preferably, the ultrasonic cleaning agent is isopropanol; the ultrasonic cleaning frequency is 67-80 kHz, and the cleaning time is 0.5-1 h.
Further, in the step (3), when one surface of the infrared window lens is coated with a carbon film, the other surface of the infrared window lens is protected by using a high-temperature-resistant adhesive tape; after the carbon film plating is finished, tearing off the high-temperature-resistant adhesive tape, cleaning the adhesive tape with alcohol, and then plating an infrared film.
Further, in the step (3), the specific method of plating the carbon film is as follows: placing one surface of an infrared window material upwards into a tray of a carbon film machine, vacuumizing until the pressure reaches a set value by a CVD deposition method, opening radio frequency to bombard, and plating a carbon film after the time and the power are set; further preferably, the vacuum degree is 3X 10 -3 ~6×10 -3 Pa; the time is 3-4 hours; the power is 500-1500W.
Further, in the step (3), the specific method for plating the infrared film comprises the following steps: the infrared film plating machine is used for carrying out the infrared film plating, and parameters in the film plating process are set as follows: vacuum degree of 1X 10 -3 ~3×10 -3 Pa, the rotating speed of the workpiece disc is 10-15 rpm, the temperature is 130-160 ℃, the film layer is 9-12 layers, the film coating time is 2-3 h, and the film coating frequency is 8-15 Hz.
Compared with the prior art, the invention has the beneficial effects that:
(1) The method for controlling the net aperture of the infrared window lens, disclosed by the invention, adopts a double-sided polishing and then carries out a coating process, so that the surface type change can be effectively ensured, and the method specifically comprises the following steps: the carbon film can generate stress to cause the surface to become a positive diaphragm, the polished surface of the other surface is correspondingly changed into a negative diaphragm, and the surface is not changed when the film is coated with infrared film, so that the effect of ensuring the double-sided net diaphragm is finally ensured by canceling the double-sided positive and negative diaphragms.
(2) Compared with single-sided polishing, the double-sided polishing process can finish the polishing process at one time, and can better control the parallelism of products; and the damage of the film layer caused by polishing the product on the machine after the product is coated on one surface can also be avoided.
(3) The invention has simple and efficient process flow and improves the production efficiency and the yield.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a process flow diagram of a method of controlling the net aperture of an infrared window lens according to the present invention;
FIG. 2 is an AR face light ring test pattern of the product of example 1;
FIG. 3 is a graph of DLC surface optical ring test patterns of the product obtained in example 1;
FIG. 4 is an AR face light ring test chart of the product of comparative example 1;
FIG. 5 is a graph of DLC surface optical ring test patterns of the product obtained in comparative example 1.
Detailed Description
The present invention will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments are shown, for the purpose of illustrating the invention, but the scope of the invention is not limited to the specific embodiments shown.
Unless defined otherwise, all technical and scientific terms used hereinafter have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the scope of the present invention.
Unless otherwise specifically indicated, the various raw materials, reagents, instruments, equipment and the like used in the present invention are commercially available or may be prepared by existing methods.
Example 1
The present embodiment provides a method for controlling the net aperture of an infrared window lens, and for germanium window products, see fig. 1, the process control procedure is as follows:
(1) The product is placed on the free star wheel in a double-sided polishing mode, then the product is placed in a lower polishing disc, then the upper polishing disc with the bonded polishing leather is pressed against the free star wheel, then diamond polishing liquid with the thickness of 0.25 mu m is dripped on the polishing disc, the polishing rotating speed is 1000r/min, the polishing time is 8h, the polishing is finished, the polishing is carried out by using alcohol, the polishing grade is 60-40, the MIL-PRF-13830B finish of the American standard is achieved, and the surface diaphragms (powers) on the two sides after polishing are respectively 0.4fr and 0.6fr.
(2) Ultrasonic cleaning with IPA (isopropyl alcohol) as cleaning agent, wherein the ultrasonic cleaning frequency is 70kHz, the cleaning time is 0.5h, and the cleaning degree reaches 60-40 grade in American standard MIL-PRF-13830B, and then drying;
(3) Sticking the surface with aperture (power) of 0.6fr from edge to middle with high temperature resistant adhesive tape for protection, placing the other surface upward onto tray of carbon film machine, and vacuum-pumping when the pressure reaches 4×10 vacuum degree by CVD deposition method -3 After Pa, the radio frequency is opened for bombardment, DLC film is plated after the film plating time is set to 3h and the power is set to 750W, the thickness of the carbon film layer is 1 mu m, and the uniformity of the film layer is less than 50nm; after the carbon film is finished, tearing off the high-temperature adhesive tape, wiping the high-temperature adhesive tape with clean alcohol, then loading the high-temperature adhesive tape into an annular tool, and placing the annular tool on an infrared coating machine for AR coating, wherein parameters in the coating process are set as follows: vacuum degree of 3X 10 -3 Pa, the rotating speed of the workpiece disc is 12 rpm, the temperature is 160 ℃, the film layer is 10 layers, the film coating time is 3h, and the film coating frequency is 8-15 Hz. The thickness of the carbon film layer is 2 mu m, the uniformity of the film layer is less than 20nm, and the carbon film layer is cooled to 80 ℃ after being coated, and then the carbon film layer is taken out of the furnace to obtain the product.
The test results are shown in fig. 2 and 3: product AR face aperture (power): 9.186fr, DLC surface aperture (power) -9.544fr, clear aperture 0.358fr < clear aperture 1fr, finish 60-40, the product meets the requirements.
Comparative example 1
This comparative example provides a method of controlling the net aperture of an infrared window lens, for germanium window products, see fig. 1, which process control is as follows:
(1) The method comprises the steps of adopting a double-sided polishing mode, placing a product on a free star wheel, then placing the product in a lower polishing disc, pressing the free star wheel by using an upper polishing disc with a bonded polishing skin, then dripping diamond polishing liquid with the polishing speed of 0.25 mu m on the polishing disc, wherein the polishing rotating speed is 1000r/min, the polishing time is 8.5h, and wiping and cleaning the polishing disc by using alcohol after polishing is finished, so that the U.S. Pat. No. MIL-PRF-13830B finish is 60-40, and the polished double-sided diaphragms (powers) are respectively 1.5fr and 1.7fr;
(2) Ultrasonic cleaning with IPA (isopropyl alcohol) as cleaning agent, wherein the ultrasonic cleaning frequency is 70kHz, the cleaning time is 0.5h, and the cleaning degree reaches 60-40 grade in American standard MIL-PRF-13830B, and then drying;
(3) Sticking the surface with the surface aperture (power) of 1.7fr from edge to middle by using a high temperature resistant adhesive tape for protection, putting the other surface upwards on a tray of a carbon film machine, vacuumizing firstly, opening radio frequency for bombardment after the pressure reaches 4 x 10 < -3 > Pa, setting the coating time to 3h and the power to 750W, and coating DLC film with the thickness of 1 mu m and the uniformity of the film layer of less than 50nm; after the carbon film is finished, tearing off the high-temperature adhesive tape, wiping the high-temperature adhesive tape with clean alcohol, then loading the high-temperature adhesive tape into an annular tool, and placing the annular tool on an infrared coating machine for AR coating, wherein parameters in the coating process are set as follows: the vacuum degree is 3 multiplied by 10 < -3 > Pa, the rotating speed of the workpiece disc is 12 rpm, the temperature is 160 ℃, the film layer is 10 layers, the film coating time is 3h, and the film coating frequency is 8-15 Hz. The thickness of the carbon film layer is 2 mu m, the uniformity of the film layer is less than 20nm, and the carbon film layer is cooled to 80 ℃ after being coated, and then the carbon film layer is taken out of the furnace to obtain the product.
The test results are shown in fig. 4 and 5: product AR face aperture (power): 7.133fr, DLC face aperture (power) -9.410fr, clear aperture 2.277fr > clear aperture 1fr, finish 60-40, product is not satisfactory.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (9)
1. A method of controlling the net aperture of an infrared window lens comprising the steps of:
(1) Simultaneously polishing the front and back surfaces of the infrared window lens, and controlling the surface type diaphragms of the front and back surfaces of the infrared window lens obtained after polishing to be-1 fr;
(2) Cleaning the polished infrared window lens, and controlling the smoothness of the front surface and the back surface of the cleaned infrared window lens to be at least 60-40 levels;
(3) Carbon film plating is carried out on one surface of the infrared window lens, and then infrared film plating is carried out on the other surface, wherein: the thickness of the carbon film is 1-1.5 mu m, and the uniformity of the film layer of the carbon film is less than 50nm; the thickness of the infrared film is 2-3 mu m, the uniformity of the film layer of the infrared film is less than 20nm, and the film thickness of the infrared film is 1.5-2 times of that of the carbon film.
2. The method of claim 1, wherein in step (1), the polishing process uses a 0.25 μm diamond slurry.
3. The method of claim 1, wherein in step (1), the polishing speed is 500 to 1200r/min.
4. The method of claim 1, wherein in step (2), ultrasonic cleaning is used.
5. The method of claim 4, wherein in step (2), the ultrasonic cleaning agent is isopropyl alcohol; the ultrasonic cleaning frequency is 67-80 kHz, and the cleaning time is 0.5-1 h.
6. The method of claim 1, wherein in step (3), when one surface of the infrared window lens is coated with a carbon film, the other surface of the infrared window lens is protected by using a high temperature resistant adhesive tape; after the carbon film plating is finished, tearing off the high-temperature-resistant adhesive tape, cleaning the adhesive tape with alcohol, and then plating an infrared film.
7. The method of claim 1, wherein in step (3), the specific method of carbon film plating is: placing one surface of the infrared window material upwards into a tray of a carbon film machine, vacuumizing until the pressure reaches a set value by a CVD deposition method, opening radio frequency to bombard, and plating a carbon film after the time and the power are set.
8. The method of claim 7, wherein in the step (3), the degree of vacuum is 3X 10 -3 ~6×10 -3 Pa; the time is 3-4 hours; the power is 500-1500W.
9. The method of claim 1, wherein in step (3), the specific method of coating the infrared film is as follows: the infrared film plating machine is used for carrying out the infrared film plating, and parameters in the film plating process are set as follows: vacuum degree of 1X 10 -3 ~3×10 -3 Pa, the rotating speed of the workpiece disc is 10-15 rpm, the temperature is 130-160 ℃, the film layer is 9-12 layers, the film coating time is 2-3 h, and the film coating frequency is 8-15 Hz.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210703082.0A CN115070516B (en) | 2022-06-21 | 2022-06-21 | Method for controlling net aperture of infrared window lens |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210703082.0A CN115070516B (en) | 2022-06-21 | 2022-06-21 | Method for controlling net aperture of infrared window lens |
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| CN115070516B true CN115070516B (en) | 2024-04-12 |
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| CN116497310B (en) * | 2023-04-04 | 2023-12-05 | 北京创思镀膜有限公司 | Optical film element and preparation method thereof |
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