CN107932198B - A kind of aspherical mirror processing method for the edge effect that disappears - Google Patents
A kind of aspherical mirror processing method for the edge effect that disappears Download PDFInfo
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- CN107932198B CN107932198B CN201711295260.6A CN201711295260A CN107932198B CN 107932198 B CN107932198 B CN 107932198B CN 201711295260 A CN201711295260 A CN 201711295260A CN 107932198 B CN107932198 B CN 107932198B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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Abstract
The invention discloses a kind of aspherical mirror processing methods of edge effect that disappears, first prepare the cylindrical mirror embryo that a bore is greater than aspherical bore, the first circular groove is first processed in the first end face of cylindrical mirror embryo, then milling forming is aspherical in first end face, forming it is aspherical on still remain with the first circular groove of certain depth, annular region of the control except aspherical upper first circular groove in the range of generating edge effect in aspherical lapping polishing, then the annular region except aspherical bore is cut off, remaining part is the reflecting mirror of not edge effect, technical solution effective solution edge effect problem and stress deformation problem, and it is not easy to generate chipping and chipping at aspherical edge.
Description
Technical field
The present invention relates to a kind of processing methods of optical element, and in particular to a kind of processing method of aspherical mirror.
Background technique
With computer numerical control single-point diamond Stone technique, superfine grinding technology, computer control optical surface formation skill
The further development of the aspheric surface processing technologies such as art, at present the manufacturing technology of aspherical optical element oneself from traditional craft modification
Spherical surface develops to computer and controls deterministic process.However either traditional classic polishing technology still calculates
Machine control small abrasive nose polishing technology all there is no quickly and effectively method solve the problems, such as non-spherical reflector edge effect.Edge effect
Generation be maximum in polishing center removal rate due to removal function, and in edge removal rate minimum, therefore will cause alice
Edge effect.And at edge, bistrique is understood some area and is disengaged with reflecting mirror, cause edge pressure and bistrique and
Pressure when reflecting mirror entirely contacts is not identical, will also result in theoretical calculation and actual processing result and different edge is imitated
It answers.
It is serious to hinder face shape error convergence rate just because of the presence of edge effect, it affects to a certain extent non-
The efficiency and increase difficulty of processing that spherical surface is processed.The technical solution that edge effect is handled in traditional technique has three
Kind, 1. directly grind, as the size of abrasive disk is gradually reduced in the outer shifting of most low strap on mirror surface, outside multiple reprocessabilty
The error of edge gradually reduces, this processing method can processing edge on take a substantial amount of time, and the mill due to using by
Step, which becomes smaller, is easy to grind the broken band that more height rise and fall, and seriously affects the convergence rate of polishing stage edge face shape error；2.
Splicing, the patent of invention of Patent No. 2016109502587 provide a kind of connection scheme, process an internal diameter and aspheric to be processed
Retaining ring and workpiece to be processed are bonded as an entirety by bonding process by the identical annular retaining ring of face bore, when grinding and polishing
Retaining ring bears the influence of edge effect, takes down retaining ring after process finishing, and this processing method will increase the difficulty of processing technology
Degree, and be easy to generate non-uniform stress distribution on workpiece after bonding, process to be processed terminate to unload after retaining ring due to bonding
The stress release of generation, the specular surface processed generate very big local error, repair again to the mirror surface processed
Positive local error certainly will extend the process-cycle.3. ball changes non-, patent 201610083727X provides a kind of elimination edge effect
Method, spherical radius is originated by design, it is minimum that traditional W-shaped error curve is designed as intermediate high rim, however this
Mode increases material removal amount, and even if the spherical surface error curved edge of design is minimum, in practical polishing process, error
Curved edge lowermost portion still needs to be thrown bright, so if dealing with improperly or can be influenced by edge effect, still having can
It can handle and make troubles to marginal portion.4. trimming removes, the extra material removal in edge is fallen using skive, is needed
A large amount of experimental data is grasped, if without experience abundant, it will be difficult to control margins of excision, be easy to cause reflecting mirror
Outside surface damage, furthermore when using diamond wheel grinding, skive sends out glass surface by way of grinding
Raw brittle fracture, the distribution of aspherical mirror edge stress are concentrated, and the face shape alice at aspherical mirror edge can be caused after grinding.
Summary of the invention
The purpose of the present invention is to provide a kind of methods, overcome deficiency in the prior art, eliminate edge effect and solve simultaneously
Certainly stress deformation problem.
The committed step of specific technical solution of the present invention is successively as follows:
A kind of aspherical mirror processing method for the edge effect that disappears, includes the following steps:
Step 1 prepares cylindrical mirror embryo step: can be with envelope aspherical mirror according to aspherical structural parameters processing
Cylindrical mirror embryo；Wherein the cylindrical mirror embryo is made of first end face, second end face, cylinder side wall, and first end face is used for
Process non-spherical structure, cylindrical mirror embryo diameter be greater than aspherical mirror bore, first end face it is parallel with second end face and with
The cylinder side wall of cylindrical mirror embryo is vertical；
Step 2 is processed the first circular groove step: the first end face processed being fixed on upwards on the turntable of vertical machine；
Wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, the axis of vertical machine turret axis and cylindrical mirror embryo
It is overlapped, the first end face of cylindrical mirror embryo is parallel with turntable surface；Boart boart wheel sleeve is mounted on vertical machine main shaft,
Skive sleeve diameter is not less than the bore of aspherical mirror, processes the first circular groove using boart boart wheel sleeve, processes
It is downward to continuing behind non-spherical structure position along cylindrical mirror embryo axis direction since first end face when the first circular groove
Certain depth is processed, the first circular groove total depth is started from first end face and is less than cylindrical mirror flake thickness degree；The continuation adds downwards
Work certain depth is the slot bottom of the first circular groove between non-spherical structure position and second end face, cannot beat the first circular groove
Wear, when may insure that subsequent milling is aspherical in this way, the first circular groove will not all be ground away, milling go out it is aspherical on still protect
Stay the first circular groove；
Milling non-spherical structure step: step 3 diamond milling grinding wheel is mounted on vertical machine main shaft, in cylinder
Milling goes out non-spherical structure in the first end face of shape mirror embryo；
Grinding and polishing step: step 4 will obtain non-spherical structure grinding and polishing into aspherical mirror in step 3；
Step 5, trimming take mirror step: specifically: acquisition aspherical mirror in step 4 is fixed on to the turntable of vertical machine
On, wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine turret axis and cylindrical mirror embryo
Axis is overlapped, and the boart boart wheel sleeve is mounted on vertical machine main shaft, is extracted out with the boart boart wheel sleeve
Aspherical mirror.
Due to the application of the above technical scheme, technical solution of the present invention has the advantage that compared with prior art
1. first processing the first circular groove in first end face, then milling is aspherical again, Buddha's warrior attendant when advantage is later period trimming
Stone sand wheel sleeve set will not directly be ground aspherics face, avoid the alice phenomenon that stress is concentrated and generated.
2. aspherical being extracted using boart boart wheel sleeve due to processing the first circular groove in first end face in advance
When, being either ground from the first circular groove to second end face all will not be in aspherical light or be ground from second end face to first end face
Occur chipping or chipping on face.
3. solving the problems, such as edge effect, also avoids the stress deformation that tradition splicing retaining ring method is generated by gluing and ask
Topic.
Detailed description of the invention
Fig. 1: the aspherical mirror machining sketch chart for the edge effect that disappears；
Fig. 2: second end face and cylindrical bottom plate gluing schematic diagram；
Fig. 3: the cylindrical mirror embryo top view of the first circular groove is processed；
Fig. 4: the cylindrical mirror proembryo view of the first circular groove, second end face circular groove, non-spherical structure is processed；
Fig. 5: the cylindrical mirror embryo cross-sectional view of the first circular groove, second end face circular groove, non-spherical structure is processed；
Wherein 1- cylindrical mirror embryo；The first circular groove of 2-；3- second end face circular groove；4 cylindrical bottom plates；5- cylindrical mirror embryo
Axis；6- non-spherical structure；7- boart boart wheel sleeve；H0- aspherical mirror center is thick；H1- cylindrical mirror flake thickness degree h1；h2-
First circular groove total depth；H3- second end face circular groove depth；Edge thickness at the aspherical bore of h6-；The aspherical bore of D-；D2-
Skive sleeve diameter.
Specific embodiment
In order to illustrate more clearly of the technical solution of invention, it is further described with reference to the accompanying drawings and embodiments
Embodiment one: in conjunction with attached drawing 1, to process bore for D, for center thickness is the revolution concave aspherical surface reflecting mirror of h0
The technical program is discussed in detail,
Step 1: can be with the cylindrical mirror embryo 1 of envelope aspherical mirror according to aspherical structural parameters processing；It is wherein described
Cylindrical mirror embryo 1 be made of first end face, second end face, cylinder side wall, first end face is for processing non-spherical structure 6, circle
Cylindricality mirror embryo diameter is greater than the bore D of aspherical mirror, and first end face is parallel with second end face and cylinder with cylindrical mirror embryo
Side wall is vertical；
Step 2: the first end face processed is fixed on upwards on the turntable of vertical machine；Wherein vertical machine main shaft
Axis is overlapped with vertical machine turret axis, and vertical machine turret axis is overlapped with the axis 5 of cylindrical mirror embryo, cylindrical mirror embryo
First end face it is parallel with turntable surface；Boart boart wheel sleeve 7 is mounted on vertical machine main shaft, boart boart wheel sleeve
Internal diameter D2 is not less than the bore D of aspherical mirror, the first circular groove 2 is processed using boart boart wheel sleeve, when processing the first circular groove
One is processed to continuation is downward after 6 position h6 of non-spherical structure along 5 direction of cylindrical mirror plumular axis line since first end face
Depthkeeping degree starts the first circular groove total depth h2 from first end face and is less than cylindrical mirror flake thickness degree h1.
Step 3: diamond milling grinding wheel is mounted on vertical machine main shaft, in the first end face of cylindrical mirror embryo
Milling goes out non-spherical structure 6；
Step 4: by 6 grinding and polishing of non-spherical structure at aspherical mirror；
Step 5: aspherical mirror is extracted with the boart boart wheel sleeve；Specific steps are as follows: aspheric will be obtained in step 4
Face mirror is fixed on the turntable of vertical machine, and wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine
Bed turret axis is overlapped with the axis of cylindrical mirror embryo, and the boart boart wheel sleeve is mounted on vertical machine main shaft, is used
The boart boart wheel sleeve extracts out aspherical mirror.
The first circular groove is first processed on mirror embryo before milling is aspherical, is had the benefit that, boart boart wheel sleeve is in circle
When processing the first circular groove in cylindricality mirror embryo first end face, since first end face is relatively rough surface, hard rock when cutting at this time
Wheel sleeve and first end face are not easy chipping when contacting, and have a little chipping that can also be gone when subsequent milling is aspherical in time
It removes, non-spherical surface will not be had an impact；And when processing the first circular groove, directly by deep processing to aspherical position it
Under do not got through with second end face, in this way after subsequent milling is aspherical, just except aspherical mirror bore formed one annular
Region, the region are used for the edge effect generated when carrying grinding and polishing.
Embodiment two: on the basis of embodiment one, when processing the first circular groove in the step 2 since first end face along
5 direction of cylindrical mirror plumular axis line is more than or equal to 2mm to processing certain depth downwards is continued after 6 position h6 of non-spherical structure,
In this way in later period trimming it is possible to prevente effectively from aspherical edge chipping.
Embodiment three: it as shown in attached drawing 1- attached drawing 5, on the basis of embodiment one, in the step 2, stays in first end face
After processing the first circular groove 2, second end face is fixed on upwards on vertical machine turntable, adjusts vertical machine turret axis and circle
The axis 5 of cylindricality mirror embryo is overlapped, and the second end face of cylindrical mirror embryo is parallel with turntable surface, is existed with above-mentioned boart boart wheel sleeve
Process second end face circular groove 3 in second end face, 3 depth of second end face circular groove is h3, and when processing will meet h2+h3 < h1, i.e., not
First circular groove 2 can be beaten with second end face circular groove 3 and be connected to.Beaten in the second end face of cylindrical mirror embryo second end face circular groove it
Afterwards, it only needs to be ground on a small quantity when more convenient subsequent trimming and can be taken off aspherical mirror, while further decreasing grinding stress deformation.
Example IV: on the basis of embodiment three, in the step 2, on cylindrical mirror embryo 1 process the first circular groove 2 with
Afterwards after second end face circular groove 3, second end face is glued on the cylindrical bottom plate 4 greater diameter than the bore of aspherical mirror.
The cylinder bottom plate can play a protective role to the second end face of cylindrical mirror embryo, prevent from knocking during post-production because unexpected
It touches and damages cylindrical mirror embryo.When negated spherical mirror cylinder can be removed by the techniques such as heating or organic solvent immersion
Bottom plate 4.
Embodiment five: on the basis of example IV, the cylinder bottom plate is equipped with several through-holes and round with second end face
Slot connection.Second end face circular groove after the glued cylindrical bottom plate of second end face is connected to by the through-hole of setting with outside air,
Solve the problems, such as that gas varies with temperature the stress deformation generated to aspherical mirror body in second end face circular groove.
The wall thickness of preferred boart boart wheel sleeve is 0.5~2mm.Wall thickness is too wide, and it is big to will lead to the first circular groove width, grinds
Polishing bistrique can collide with the annular boundary of the first circular groove when grinding and polishing light, be easy to cause aspherical edge chipping.
In preferred step 4, paraffin is filled in the first circular groove when to non-spherical structure grinding and polishing.Paraffin filling first
After circular groove gap, grinding agent or polishing powder would not be fallen into the first circular groove；It is possible to prevente effectively from the first circle in polishing process
The grinding agent or polishing powder fallen into the line of rabbet joint takes to aspherical upper and scratches non-spherical surface by polishing bistrique, simultaneously because paraffin
Molten point is not fixed, glued power also very little will not generate stress to mirror body around substantially, nor affect on later period trimming and take mirror.
It is machined to since the second end face of cylindrical mirror embryo in preferred step 5 with the boart boart wheel sleeve set
First circular groove；Or second end face is machined to since the first circular groove of cylindrical mirror embryo with the boart boart wheel sleeve set.
After preferred step 4, several layers protective film first is covered to the non-spherical surface after polishing, is then walked
Rapid five.Protective film can be optics protective film, adhesive tape, lacca etc., prevents when trimming sundries to fall and damages mirror surface.
The preferred bore that the aspherical diameter of taking-up is ground to aspherical mirror using cylindrical grinding Carborundum wheel.Trimming takes
The cylinder side wall of aspherical mirror may be not smooth enough after mirror, select cylindrical grinding skive to the cylinder side wall of aspherical mirror into
Row micro cutting further decreases aspherical mirror side wall cylindricity error.
Principle is eliminated in the edge effect that method of the invention uses are as follows: edge effect is often concentrated in side when optical manufacturing
In edge a certain range, preparation one in advance is greater than the cylindrical mirror embryo of aspherical bore, first in the first end face of cylindrical mirror embryo
Process the first circular groove, then in first end face milling forming it is aspherical, forming it is aspherical on still remain with certain depth
The first circular groove, aspherical lapping polishing when edge effect is generated in the range of control except aspherical upper first circular groove
Annular region, then the annular region except aspherical bore is cut off, is left the reflection that part is not no edge effect
Mirror, technical solution effective solution edge effect problem and stress deformation problem, and bring and be not easy to produce at aspherical edge
The effect of raw chipping and chipping.
Unspecified part of the present invention belongs to technology well known to those skilled in the art.The technical program can be also used for
Except the aspherical mirror edge effect for having inner hole, it is less than or equal to the region processing one of diameter of bore at the aspherical center with inner hole
The circular groove of depthkeeping degree, principle is identical as the technical program, which can effectively solve the edge effect and stress around inner hole
Problem on deformation.The technical program can be used for processing the aspherical of rotational symmetry structure, while can be also used for by being suitably modified
Process off-axis aspheric surface.
Claims (10)
1. a kind of aspherical mirror processing method for the edge effect that disappears, includes the following steps:
Step 1 prepares cylindrical mirror embryo step: can be with the cylinder of envelope aspherical mirror according to aspherical structural parameters processing
Shape mirror embryo；Wherein the cylindrical mirror embryo is made of first end face, second end face, cylinder side wall, and first end face is for processing
Non-spherical structure, cylindrical mirror embryo diameter are greater than the bore of aspherical mirror, and first end face is parallel with second end face and and cylinder
The cylinder side wall of shape mirror embryo is vertical；
Step 2 is processed the first circular groove step: the first end face processed being fixed on upwards on the turntable of vertical machine；Wherein
Vertical machine main-shaft axis is overlapped with vertical machine turret axis, the axis weight of vertical machine turret axis and cylindrical mirror embryo
It closes, the first end face of cylindrical mirror embryo is parallel with turntable surface；Boart boart wheel sleeve is mounted on vertical machine main shaft, gold
Hard rock wheel sleeve internal diameter is not less than the bore of aspherical mirror, processes the first circular groove using boart boart wheel sleeve, processing the
Add along cylindrical mirror embryo axis direction to continuation is downward behind non-spherical structure position since first end face when one circular groove
Work certain depth starts the first circular groove total depth from first end face and is less than cylindrical mirror flake thickness degree；
Milling non-spherical structure step: step 3 diamond milling grinding wheel is mounted on vertical machine main shaft, in cylindrical mirror
Milling goes out non-spherical structure in the first end face of embryo；
Step 4, grinding and polishing step: by non-spherical structure grinding and polishing at aspherical mirror；
Step 5, trimming take mirror step: specifically: it is fixed on aspherical mirror is obtained in step 4 on the turntable of vertical machine,
Wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, the axis of vertical machine turret axis and cylindrical mirror embryo
It is overlapped, the boart boart wheel sleeve is mounted on vertical machine main shaft, extracts out aspheric with the boart boart wheel sleeve
Face mirror.
2. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 1, it is characterised in that the step 2
It is subsequent that middle boart boart wheel sleeve is machined to non-spherical structure position along cylindrical mirror embryo axis direction since first end face
The continuous depth processed downwards is not less than 2mm.
3. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 1, it is characterised in that the step 2
In, after processing the first circular groove in first end face, second end is processed in second end face with above-mentioned boart boart wheel sleeve
Face circular groove.
4. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 3, it is characterised in that the step 2
In, after the first circular groove and second end face circular groove are processed on cylindrical mirror embryo, by second end face be glued at greater diameter than
On the cylindrical bottom plate of the bore of aspherical mirror.
5. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 4, it is characterised in that the cylinder
Bottom plate is equipped with several through-holes and is connected to second end face circular groove.
6. a kind of aspherical mirror processing method for the edge effect that disappears described in one of -5 according to claim 1, it is characterised in that described
The wall thickness of boart boart wheel sleeve is 0.5~2mm.
7. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 6, it is characterised in that right in step 4
Paraffin is filled in the first circular groove when non-spherical structure grinding and polishing.
8. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 6, it is characterised in that used in step 5
The boart boart wheel sleeve set is machined to the first circular groove since the second end face of cylindrical mirror embryo；Or with the diamond
Wheel sleeve is machined to second end face since the first circular groove of cylindrical mirror embryo.
9. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 8, it is characterised in that step 4 terminates
Afterwards, several layers protective film first is covered to the non-spherical surface after polishing, then carries out step 5.
10. a kind of aspherical mirror processing method for the edge effect that disappears according to claim 9, it is characterised in that use cylindrical grinding
The aspherical diameter of taking-up is ground to the bore of aspherical mirror by Carborundum wheel.
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| CN113579917B (en) * | 2019-12-25 | 2022-05-03 | 苏州大学 | Numerical control milling and grinding forming method for off-axis aspherical mirror |
| CN113021172A (en) * | 2021-03-25 | 2021-06-25 | 中国电子科技集团公司第五十四研究所 | Grinding and polishing method of LTCC substrate with cavity |
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| EP1352708A1 (en) * | 2002-04-12 | 2003-10-15 | ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) | Method for polishing an eyeglass lens comprising non-contacting measurement |
| CN1684796A (en) * | 2003-01-27 | 2005-10-19 | 精工爱普生株式会社 | Adhesive tape and edging method using same |
| CN105643374A (en) * | 2016-02-06 | 2016-06-08 | 苏州大学 | Processing method for aspherical mirror |
| CN205643756U (en) * | 2016-02-06 | 2016-10-12 | 苏州大学 | A mirror body for processing rectangle off -axis aspherical mirror |
| CN106392817A (en) * | 2016-09-07 | 2017-02-15 | 东旭科技集团有限公司 | Grinding method and device for edge of plate |
| CN106475866A (en) * | 2016-10-26 | 2017-03-08 | 北京空间机电研究所 | A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect |
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2017
- 2017-12-08 CN CN201711295260.6A patent/CN107932198B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1352708A1 (en) * | 2002-04-12 | 2003-10-15 | ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) | Method for polishing an eyeglass lens comprising non-contacting measurement |
| CN1684796A (en) * | 2003-01-27 | 2005-10-19 | 精工爱普生株式会社 | Adhesive tape and edging method using same |
| CN105643374A (en) * | 2016-02-06 | 2016-06-08 | 苏州大学 | Processing method for aspherical mirror |
| CN205643756U (en) * | 2016-02-06 | 2016-10-12 | 苏州大学 | A mirror body for processing rectangle off -axis aspherical mirror |
| CN106392817A (en) * | 2016-09-07 | 2017-02-15 | 东旭科技集团有限公司 | Grinding method and device for edge of plate |
| CN106475866A (en) * | 2016-10-26 | 2017-03-08 | 北京空间机电研究所 | A kind of large-diameter non-spherical reflecting mirror processing method eliminating edge effect |
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