CN103192305A - Point contact polishing device and method of aspheric-surface optical element - Google Patents

Point contact polishing device and method of aspheric-surface optical element Download PDF

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Publication number
CN103192305A
CN103192305A CN2013100872922A CN201310087292A CN103192305A CN 103192305 A CN103192305 A CN 103192305A CN 2013100872922 A CN2013100872922 A CN 2013100872922A CN 201310087292 A CN201310087292 A CN 201310087292A CN 103192305 A CN103192305 A CN 103192305A
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grinding
polishing
matrix
polished film
workpiece
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Chinese (zh)
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陈耀龙
张川
陈晓燕
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BEIJING LONG ORIGINAL TECHNOLOGY Co Ltd
Suzhou Academy of Xian Jiaotong University
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BEIJING LONG ORIGINAL TECHNOLOGY Co Ltd
Suzhou Academy of Xian Jiaotong University
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Priority to CN2013100872922A priority Critical patent/CN103192305A/en
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Abstract

The invention discloses a point contact polishing device of an aspheric-surface optical element, which comprises a tool handle and a polishing plate matrix, wherein the tool handle is used for connecting the polishing plate matrix and can be mounted on a tool shaft of a numerical control processing equipment; or the polishing plate matrix is combined with the tool handle into a whole to serve as an independent polishing device; and a polishing film is stuck to the polishing plate matrix; the invention discloses a point contact polishing method of the aspheric-surface optical element; the polishing plate is enabled to be contacted with a to-be-processed workpiece in a point contact manner; and the position of the polishing plate during polishing process is positioned accurately by the numerical control processing equipment, and constancy of contact pressure between the polishing plate and the to-be-processed workpiece is ensured, so that processing according to certain amount is realized. The device is applied to the grinder mentioned in the Chinese patent (ZL200810103309.8), and is matched with an exclusive technology software for use, so that purposes of improving processing precision and processing efficiency and lowering production cost can be achieved.

Description

A kind of some contact burnishing device and method of aspherical optical element
Technical field
The present invention relates to a kind of some contact burnishing device and polishing process method of aspherical optical element.
Background technology
Aspherical optical element has huge advantage with respect to the spherical optics element, all aspherical optical element is had huge demand in the every field of modern society.Therefore, how high-accuracy high-efficiency rate ground carries out the current social problem demanding prompt solution of being processed into of non-spherical element.
At present, ripe aspherical optical element numerical control polishing technology is mainly used in the bigbore optical element processing, such as based on the numerical control optical surface forming technique of little polishing disc tool, strain disc polishing technology, ion beam polishing technology, Technique of Magnetorheological Finishing etc.Aforesaid Computerized Numerical Control processing technology, the surface figure accuracy of its processing is very high, all can reach the precision that is better than λ/10, but its processing cost but is unaffordable for range of application aspherical optical element processing more and more widely.The mode of manual processing has been broken away from the processing of aperture aspherical optical elements basically.
For in small-bore aspherical optical element, that present stage is still manual processing and digital control processing and deposit state.Manual processing has higher requirement to workman's experience, machining accuracy is higher, surface figure accuracy with element that the processing workman of rich experiences processes can reach the degree of λ/10 equally, but working (machining) efficiency is low, is difficult to adapt to society to the demand of aspherical optical element; And in the Computerized Numerical Control processing technology of small-bore aspherical optical element generally adopt technology such as die forming, injection molded, the working (machining) efficiency of these Numeric Control Technologies is quite high, but because its process principle all belongs to and copies the processing category, machining accuracy is the precision of limited mould to a great extent, and its machinable material also has certain limitation.
Summary of the invention
The present invention seeks to: provide a kind of processing technology of aspherical optical element numerical control polishing processing that is applicable to reach corresponding with it grinding and polishing apparatus, on the grinding machine of in Chinese patent (ZL 200810103309.8), mentioning, be used the purpose that to reach raising machining accuracy and working (machining) efficiency, reduces production costs with proprietary process software.
Technical scheme of the present invention is: a kind of some contact burnishing device of aspherical optical element, comprise pad and grinding and polishing dish matrix, the tool spindle that described pad is used for connecting grinding and polishing dish matrix and can be installed in numerically controlled processing equipment, perhaps close grinding and polishing dish matrix and pad as a whole, as a burnishing device independently, be pasted with polished film on the described grinding and polishing dish matrix, described grinding and polishing dish matrix can be bowl mill matrix or the pot mill matrix of dumping of dumping.
Preferably, outstanding grinding and polishing brace rod is arranged at described pad bottom, be used for cooperating with the grinding and polishing dish locating interface of described grinding and polishing dish matrix top depression, after pad and grinding and polishing dish matrix be connected and fixed, described grinding and polishing brace rod is pressed in the grinding and polishing dish locating interface, does not occur the space between the two.Thereby guarantee the axiality of described grinding and polishing dish matrix, pad.
Preferably, all be provided with hickey on described pad and the grinding and polishing dish matrix, both are connected and fixed by screw.Described screw is preferably soket head cap screw.Both guarantee connection reliability between the two, made things convenient for installation and maintenance again.
Preferably, described grinding and polishing dish matrix can be the bowl mill matrix of dumping, and profile is cylindrical shape, and the bottom is circular-arc, the described bowl mill matrix of dumping comprises the top to the bowl mill of the lower recess locating interface of dumping, and the bowl mill matrix underpart circular arc place that dumps is used for pasting polished film; The dump radius of curvature of matrix bottom circular arc of described bowl mill is r 1 , the polished film surface sections curve after the finishing is an accurate circular arc, the circular arc radius of curvature is r 2 , polished film thickness is h, satisfies r 2 =r 1 + h.
Preferably, described grinding and polishing dish matrix can be the pot mill matrix of dumping, and profile is sphere or the part of ball, and the described pot mill matrix of dumping comprises the top to the pot mill of the lower recess locating interface of dumping, and described polished film sticks on the sphere; The dump sphere curvature radius of matrix of described pot mill is r 3 , the polished film sphere curvature radius after the finishing is r 4 , polished film thickness is h, satisfies r 4 =r 3 + h.
A kind of some contact finishing method of aspherical optical element is characterized in that may further comprise the steps:
(1) the grinding and polishing brace rod is pressed in the grinding and polishing dish locating interface, and by screw both is fixed, make between grinding and polishing brace rod and the grinding and polishing dish locating interface gap not occur;
(2) adopt binding agent that polished film is pasted on the grinding and polishing dish matrix, to be pasted dose solidifies the back circular arc radius of curvature of polished film is repaired;
When (3) repairing, grinding and polishing apparatus is installed on the workpiece spindle of numerically controlled processing equipment, trimming wheel is installed on the tool spindle of numerically controlled processing equipment, adopts the some way of contact that the circular arc radius of curvature of polished film is repaired, make the circular arc radius of curvature on the polished film consistent everywhere;
When (4) using, grinding and polishing apparatus is installed on the tool spindle of numerical control device, workpiece to be processed is installed on the workpiece spindle of numerical control device, in the process of grinding and polishing, at first the sized data of aspheric relevant parameter to be processed and grinding and polishing apparatus is imported process software, and generation numerical control NC file, grinding and polishing apparatus and workpiece to be processed can be under the controls of numerical control device, make on any Working position, grinding and polishing apparatus and workpiece to be processed are all realized at P point place contacting, and the P point fits like a glove in aspheric meridian cross section curve to be processed with respect to the movement locus of workpiece to be processed.
Preferably, carry out grinding and polishing processing if workpiece to be processed is convex surface and the outer throwing mode of employing, then only need repair the outer arc of polished film; If workpiece to be processed is convex surface and adopts interior throwing mode to carry out grinding and polishing processing, then only needs the inner arc of polished film is repaired; If workpiece to be processed is concave surface, then only need the outer arc of polished film is repaired; Also can repair outer arc and the inner arc of polished film simultaneously.Described dressing tool can be the facing cutter that the uncertain emery wheel of cutting edge geometry or cutting edge geometry are determined.Described polished film can be chosen according to the material of workpiece to be processed, and polished film cutting shape can be any, with paste conveniently, fastening be criterion.
Preferably, during use, grinding and polishing apparatus is installed on the tool spindle of numerical control device, can rotate around the tool spindle axis, and around tool spindle oscillation center B spot wobble, and grinding and polishing apparatus feeding in the horizontal direction; Workpiece to be processed is installed on the workpiece spindle of numerical control device, can rotate around the workpiece spindle axis, but the feeding of workpiece to be processed in the vertical direction is controlled the feed speed of grinding and polishing dish matrix on each Working position and the rotating speed of workpiece to be processed by numerically controlled processing equipment.Namely can guarantee the constant pressure that contacts between grinding and polishing dish on each Working position and workpiece, guarantee constant removal amount, and then realize determining amount processing.
Preferably, the dump radius of curvature of matrix bottom circular arc of described bowl mill is r 1 , the polished film surface sections curve after the finishing is an accurate circular arc, the circular arc radius of curvature is r 2 , polished film thickness is h, satisfies r 2 =r 1 + h; The dump sphere curvature radius of matrix of described pot mill is r 3 , the polished film sphere curvature radius after the finishing is r 4 , polished film thickness is h, satisfies r 4 =r 3 + h.
Advantage of the present invention is:
1. the radius of curvature on the polished film surface in apparatus of the present invention can be implemented in accurately finishing of position; The processing mode of some contact can guarantee that various curved surfaces all can process.
2. the present invention controls the feed speed of grinding and polishing dish matrix on each Working position and the rotating speed of workpiece to be processed by numerically controlled processing equipment, namely can guarantee the constant pressure that contacts between grinding and polishing dish on each Working position and workpiece, guarantee constant removal amount, and then realized determining amount processing.
Among the present invention independently pad have versatility, thereby reduced the processing cost of device.
Description of drawings
Below in conjunction with drawings and Examples the present invention is further described:
Fig. 1 is the structure chart of first embodiment of grinding and polishing apparatus of the present invention;
Fig. 2 is the structure chart of pad;
Fig. 3 is the dump structure chart of matrix of bowl mill;
Fig. 4 is that bowl mill is dumped and carried out the schematic diagram of polished film finishing;
Fig. 5 adopts the concave curved component of first embodiment to carry out the outer schematic diagram of throwing processing;
Fig. 6 adopts the concave curved component of first embodiment to carry out the interior schematic diagram of throwing processing;
Fig. 7 adopts the concave surface element of first embodiment to carry out the schematic diagram of grinding and polishing processing;
Fig. 8 is the structure chart of second embodiment of grinding and polishing apparatus of the present invention;
Fig. 9 is the dump structure chart of matrix of pot mill among Fig. 8;
Figure 10 adopts the concave curved component of second embodiment to carry out the schematic diagram of grinding and polishing processing;
Figure 11 adopts the concave surface element of second embodiment to carry out the schematic diagram of grinding and polishing processing.
Wherein: 1, pad; 11, grinding and polishing brace rod; 2, the bowl mill matrix of dumping; 21, the bowl mill locating interface of dumping; 3, polished film; 31, outer arc; 32, inner arc; 4, screw; 5, the pot mill matrix of dumping; 51, the pot mill locating interface of dumping; 6, trimming wheel; 7, workpiece to be processed; 100, grinding and polishing apparatus.
The specific embodiment
Embodiment one: as shown in Figure 1, pad 1 bottom is provided with grinding and polishing brace rod 11, can be pressed into the dump bowl mill on matrix 2 tops of bowl mill and dump in the locating interface 21.During installation, grinding and polishing brace rod 11 is pressed into bowl mill dumps in the locating interface 21, and fixing with the bowl mill matrix 2 of dumping, make grinding and polishing brace rod 11 and bowl mill dump and do not occur the gap between the locating interface 21.Wherein, pad 1 is by any one spanner interface, and is fastening as interior triangle, Nei Sijiao, interior hexagonal, diplopore interface etc. and the bowl mill matrix 2 of dumping, and both guaranteed connection reliability between the two thus, makes things convenient for installation and maintenance again.
Bowl mill is dumped circular arc place, matrix 2 bottom for pasting polished film 3.Polished film 3 can be chosen according to the material of workpiece to be processed 7, and polished film 3 cutting shapes can be any, with paste conveniently, fastening be criterion.Adopt binding agent that polished film 3 is pasted on the dump circular arc place of matrix 2 bottoms of bowl mill, pasting height is criterion to paste fastening.
During assembling, at first grinding and polishing brace rod 11 is pressed into bowl mill and dumps in the locating interface 21, preferably fixing by soket head cap screw and the bowl mill matrix 2 of dumping, make grinding and polishing brace rod 11 and bowl mill dump and do not occur the gap between the locating interface 21; Smear binding agent in the polished film that cuts 3 one sides again and be pasted on the dump circular arc place of matrix 2 bottoms of bowl mill, to be bonded dose solidify after, namely finish processing and prepare.
After said structure and assembling, can carry out the finishing of polished film 3 to grinding and polishing apparatus 100.Grinding and polishing apparatus 100 is installed on the workpiece spindle of numerically controlled processing equipment, trimming wheel 6 is installed on the tool spindle of numerically controlled processing equipment, adopt the some way of contact that polished film 3 circular arc radius of curvature are repaired.If workpiece to be processed 7 is for convex surface and adopt outer throwing mode to carry out grinding and polishing processing, then only need the outer arc 31 of polished film 3 is repaired; If workpiece to be processed 7 is for convex surface and adopt interior throwing mode to carry out grinding and polishing processing, then only need the inner arc 32 of polished film 3 is repaired; If workpiece to be processed 7 is concave surface, then only need the outer arc 31 of polished film 3 is repaired; Also can repair outer arc 31 and the inner arc 32 of polished film 3 simultaneously.Circular arc radius of curvature through the polished film 3 after the finishing is consistent everywhere, improved positioning accuracy and machining accuracy that grinding and polishing adds man-hour.
Be illustrated in figure 5 as and adopt a pair of concave curved component of present embodiment to carry out the outer schematic diagram of throwing processing.In use, grinding and polishing apparatus 100 is installed on the tool spindle of numerical control device, can rotate around the tool spindle axis, and around tool spindle oscillation center B spot wobble, and grinding and polishing apparatus 100 feeding in the horizontal direction; Workpiece to be processed 7 is installed on the workpiece spindle of numerical control device, can rotate around the workpiece spindle axis, but the feeding of workpiece in the vertical direction.In the processing mode of Paoing, the P point is positioned at polished film 3 exterior lateral area outside.In the process of grinding and polishing, at first the sized data of aspheric relevant parameter to be processed and grinding and polishing apparatus 100 is imported process software, and generation numerical control NC file, grinding and polishing apparatus 100 and workpiece to be processed 7 can be under the controls of numerical control device, make on any Working position, grinding and polishing apparatus 100 and workpiece to be processed 7 are all realized at P point place contacting, and the P point fits like a glove in aspheric meridian cross section curve to be processed with respect to the movement locus of workpiece.
Be illustrated in figure 6 as and adopt a pair of concave curved component of present embodiment to carry out the interior schematic diagram of throwing processing.Be that in the processing mode of interior throwing, the P point is positioned at the medial region of polished film 3 with outer throwing processing mode difference.
Be illustrated in figure 7 as the schematic diagram that adopts a pair of concave surface element of present embodiment to carry out grinding and polishing processing.
Embodiment two: as shown in Figure 8, the grinding and polishing apparatus 100 of present embodiment comprises pad 1 and the pot mill matrix 5 of dumping, identical among described pad 1 and the embodiment one, described pot mill is dumped matrix 5 as shown in Figure 9, and described pad 1 is used for installing the pot mill matrix 5 of dumping; Described pot mill is dumped matrix 5 for attaching polished film 3; Described polished film 3 is used for realizing grinding and polishing processing with the P point as specifying contact point to contact with the workpiece (not shown).The assemble flow of present embodiment and identical with first embodiment to the finishing of polished film.
In the present embodiment, the pot mill matrix 5 of dumping has adopted spherical design, and the advantage of this profile is to specify the position range of choice of contact point P big than first embodiment, so the linear velocity scope that P is ordered is also bigger, is conducive to grinding and polishing processing.Different with first embodiment is, adopts second embodiment to add man-hour, and concave curved component can only adopt outer mode of throwing to process.
As Figure 10, shown in Figure 11, be respectively and adopt two pairs of concave curved component of present embodiment, concave surface element to carry out the schematic diagram of grinding and polishing processing.
No matter be understandable that, be to adopt first embodiment or second embodiment, owing to be the processing mode of a contact, the wearing and tearing that the meeting appearance continues in specifying contact point P place and near zone thereof, after wearing and tearing occurring, decline will inevitably appear in machining accuracy.At this moment, can by change to specify contact point P on polished film 3 the position or again polished film 3 is repaired to recover machining accuracy.Preferably adopt the position of change contact point P, because by finishing, the circular shape of polished film 3 is circles of standard, P point optional position on circular arc, the distance relation of itself and center of arc all is well-determined.The finishing repeatedly to polished film 3 can be avoided in the position of change contact point P, improves the utilization rate of polished film 3.After repeatedly the position of contact point P is specified in change, in order to guarantee machining accuracy, then must repair again polished film 3.
Certainly above-described embodiment only is explanation technical conceive of the present invention and characteristics, and its purpose is to allow the people who is familiar with this technology can understand content of the present invention and enforcement according to this, can not limit protection scope of the present invention with this.All modifications that the spiritual essence of main technical schemes is done according to the present invention all should be encompassed within protection scope of the present invention.

Claims (9)

1. the point of an aspherical optical element contacts burnishing device, it is characterized in that: comprise pad (1) and grinding and polishing dish matrix, the tool spindle that described pad (1) is used for connecting grinding and polishing dish matrix and can be installed in numerically controlled processing equipment, be pasted with polished film (3) on the described grinding and polishing dish matrix, described grinding and polishing dish matrix can be bowl mill matrix (2) or the pot mill matrix (5) of dumping of dumping.
2. the point of a kind of aspherical optical element according to claim 1 contacts burnishing device, it is characterized in that: outstanding grinding and polishing brace rod (11) is arranged at described pad (1) bottom, be used for cooperating with the grinding and polishing dish locating interface of described grinding and polishing dish matrix top depression, after pad (1) and grinding and polishing dish matrix be connected and fixed, described grinding and polishing brace rod (11) is pressed in the grinding and polishing dish locating interface, does not occur the space between the two.
3. the point of a kind of aspherical optical element according to claim 1 contacts burnishing device, and it is characterized in that: all be provided with hickey on described pad (1) and the grinding and polishing dish matrix, both are connected and fixed by screw (4).
4. the point of a kind of aspherical optical element according to claim 1 contacts burnishing device, it is characterized in that: described grinding and polishing dish matrix can be the bowl mill matrix (2) of dumping, profile is cylindrical shape, the bottom is circular-arc, the described bowl mill matrix (2) of dumping comprises that the top is to the bowl mill of the lower recess locating interface (21) of dumping, polished film (3) be used for is pasted at the bowl mill circular arc place, matrix (2) bottom that dumps, and the dump radius of curvature of matrix (2) bottom circular arc of described bowl mill is r 1, the polished film after the finishing (3) surface sections curve is an accurate circular arc, the circular arc radius of curvature is r 2, polished film (3) thickness is h, satisfies r 2=r 1+ h.
5. the point of a kind of aspherical optical element according to claim 1 contacts burnishing device, it is characterized in that: described grinding and polishing dish matrix can be the pot mill matrix (5) of dumping, profile is sphere or the part of ball, the described pot mill matrix (5) of dumping comprises that the top is to the pot mill of the lower recess locating interface (51) of dumping, described polished film (3) sticks on the sphere, and the dump sphere curvature radius of matrix (5) of described pot mill is r 3, the polished film after the finishing (3) sphere curvature radius is r 4, polished film (3) thickness is h, satisfies r 4=r 3+ h.
6. the point of an aspherical optical element contacts finishing method, it is characterized in that may further comprise the steps:
(1) grinding and polishing brace rod (11) is pressed in the grinding and polishing dish locating interface, and by screw (4) both is fixed, make between grinding and polishing brace rod (11) and the grinding and polishing dish locating interface gap not occur;
(2) adopt binding agent that polished film (3) is pasted on the circular arc place of grinding and polishing dish matrix underpart, to be pasted dose solidifies the back circular arc radius of curvature of polished film (3) is repaired;
When (3) repairing, grinding and polishing apparatus (100) is installed on the workpiece spindle of numerically controlled processing equipment, trimming wheel (6) is installed on the tool spindle of numerically controlled processing equipment, adopt the some way of contact that the circular arc radius of curvature of polished film (3) is repaired, make the circular arc radius of curvature on the polished film (3) consistent everywhere;
When (4) using, grinding and polishing apparatus (100) is installed on the tool spindle of numerical control device, workpiece to be processed (7) is installed on the workpiece spindle of numerical control device, in the process of grinding and polishing, at first the sized data of aspheric relevant parameter to be processed and grinding and polishing apparatus (100) is imported process software, and generation numerical control NC file, grinding and polishing apparatus (100) and workpiece to be processed (7) can be under the controls of numerical control device, make on any Working position, grinding and polishing apparatus (100) and workpiece to be processed (7) are all realized at P point place contacting, and the P point fits like a glove in aspheric meridian cross section curve to be processed with respect to the movement locus of workpiece to be processed (7).
7. the point of a kind of aspherical optical element according to claim 6 contacts finishing method, it is characterized in that: carry out grinding and polishing processing if workpiece to be processed (7) is convex surface and the outer throwing mode of employing, then only need the outer arc (31) of polished film (3) is repaired; If workpiece to be processed (7) is for convex surface and adopt interior throwing mode to carry out grinding and polishing processing, then only need the inner arc (32) of polished film (3) is repaired; If workpiece to be processed (7) is concave surface, then only need the outer arc (31) of polished film (3) is repaired; Also can repair outer arc (31) and the inner arc (32) of polished film (3) simultaneously.
8. the point of a kind of aspherical optical element according to claim 6 contacts finishing method, it is characterized in that: during use, grinding and polishing apparatus (100) is installed on the tool spindle of numerical control device, can rotate around the tool spindle axis, and around tool spindle oscillation center B spot wobble, and grinding and polishing apparatus (100) feeding in the horizontal direction; Workpiece to be processed (7) is installed on the workpiece spindle of numerical control device, can rotate around the workpiece spindle axis, workpiece to be processed (7) but the in the vertical direction feeding is controlled the feed speed of grinding and polishing dish matrix on each Working position and the rotating speed of workpiece to be processed (7) by numerically controlled processing equipment.
9. the point of a kind of aspherical optical element according to claim 6 contact finishing method is characterized in that: the dump radius of curvature of matrix (2) bottom circular arc of described bowl mill is r 1, the polished film after the finishing (3) surface sections curve is an accurate circular arc, the circular arc radius of curvature is r 2, polished film (3) thickness is h, satisfies r 2=r 1+ h; The dump sphere curvature radius of matrix (5) of described pot mill is r 3, the polished film after the finishing (3) sphere curvature radius is r 4, polished film (3) thickness is h, satisfies r 4=r 3+ h.
CN2013100872922A 2013-03-19 2013-03-19 Point contact polishing device and method of aspheric-surface optical element Pending CN103192305A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014146620A1 (en) * 2013-03-19 2014-09-25 西安交通大学 Optical element polishing device and method
CN107414632A (en) * 2017-08-21 2017-12-01 中国科学院长春光学精密机械与物理研究所 The burnishing device and method of surface figure accuracy amendment and Ultra-smooth machining are carried out to tubular optical element
CN111843629A (en) * 2020-07-31 2020-10-30 长春博信光电子有限公司 Aspherical mirror polishing process and polishing disk thereof
CN113305653A (en) * 2021-07-07 2021-08-27 胡靖烯 Optical lens milling and grinding method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014146620A1 (en) * 2013-03-19 2014-09-25 西安交通大学 Optical element polishing device and method
CN107414632A (en) * 2017-08-21 2017-12-01 中国科学院长春光学精密机械与物理研究所 The burnishing device and method of surface figure accuracy amendment and Ultra-smooth machining are carried out to tubular optical element
CN111843629A (en) * 2020-07-31 2020-10-30 长春博信光电子有限公司 Aspherical mirror polishing process and polishing disk thereof
CN111843629B (en) * 2020-07-31 2022-02-11 长春博信光电子有限公司 Aspherical mirror polishing process and polishing disk thereof
CN113305653A (en) * 2021-07-07 2021-08-27 胡靖烯 Optical lens milling and grinding method

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Application publication date: 20130710