CN108051882A - A kind of aspherical mirror embryo for the edge effect that disappears - Google Patents
A kind of aspherical mirror embryo for the edge effect that disappears Download PDFInfo
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- CN108051882A CN108051882A CN201711298053.6A CN201711298053A CN108051882A CN 108051882 A CN108051882 A CN 108051882A CN 201711298053 A CN201711298053 A CN 201711298053A CN 108051882 A CN108051882 A CN 108051882A
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- aspherical
- circular groove
- face
- edge effect
- embryo
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/10—Mirrors with curved faces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a kind of aspherical mirror embryos for the edge effect that disappears, aspherical mirror embryo is made of the cylindrical mirror embryo for being more than aspherical bore, include first end face on cylindrical mirror embryo, second end face, cylinder side wall, non-spherical structure is located in the first end face of cylindrical mirror embryo, the first circular groove is additionally provided on non-spherical structure, wherein the first circular groove axis of rotation is overlapped with aspherical axis of rotation, and first circular groove internal diameter be more than aspherical bore, when processing aspherical using the mirror body, annular region of the control on aspherical outside first circular groove in the range of edge effect is generated, then the annular region outside aspherical bore is cut off, remaining part is the speculum of no edge effect, the technical solution effectively solves the problems, such as edge effect and stress deformation problem, and it is not easy to generate chipping and chipping at aspherical edge.
Description
Technical field
The invention belongs to optical manufacturing fields, and in particular to a kind of to be used to process aspherical mirror embryo.
Background technology
With computer numerical control single-point diamond Stone technique, superfine grinding technology, computer control optical surface formation skill
The further development of the aspheric surface processing technologies such as art, at present the manufacturing technology of aspherical optical element oneself from traditional craft modification
Spherical surface develops to computer and controls deterministic process.However either traditional classic polishing technology still calculates
Machine control small abrasive nose polishing technology all there is no quickly and effectively method solve the problems, such as non-spherical reflector edge effect.Edge effect
Generation be since removal function is maximum in polishing center removal rate, it is and minimum in edge removal rate, therefore alice can be caused
Edge effect.And at edge, bistrique is understood some area and is disengaged with speculum, cause pressure at edge and bistrique and
Pressure when speculum entirely contacts simultaneously differs, and will also result in theoretical calculation and actual processing result and different edge is imitated
It should.
It is serious to hinder face shape error convergence rate just because of the presence of edge effect, it affects to a certain extent non-
The efficiency and increase difficulty of processing that spherical surface is processed.The technical solution that edge effect is handled in traditional technique has three
Kind, 1. directly grind, as the size of abrasive disk is progressively reduced in the outer shifting of most low strap on minute surface, by outside multiple reprocessabilty
The error of edge progressively reduces, this processing method can processing edge on take a substantial amount of time, and due to the use of mill by
Step, which becomes smaller, easily grinds the broken band that more height rise and fall, and seriously affects the convergence rate of polishing stage edge face shape error；2.
Splicing, the patent of invention of Patent No. 2016109502587 provide a kind of connection scheme, process an internal diameter and aspheric to be processed
Retaining ring and workpiece to be processed are bonded as an entirety by bore identical annular retaining ring in face by bonding process, during grinding and polishing
Retaining ring bears the influence of edge effect, takes down retaining ring after process finishing, and this processing method can increase the difficulty of processing technology
Degree, and easily generates non-uniform stress distribution on workpiece after bonding, process to be processed terminates to unload after retaining ring due to bonding
The stress release of generation, the specular surface processed generate very big local error, the minute surface processed are repaiied again
Positive local error certainly will extend the process-cycle.3. ball changes non-, patent 201610083727X provides a kind of elimination edge effect
Method, originate spherical radius by designing, it is minimum that traditional W-shaped error curve is designed as intermediate high rim, however this
Mode adds material removal amount, and the spherical surface error curved edge designed in time is minimum, in actual polishing process, error
Curved edge lowermost portion still needs to be thrown bright, so if dealing with improperly or can be influenced by edge effect, still having can
It can handle and make troubles to marginal portion.4. trimming removes, the extra material removal in edge fallen using skive, it is necessary to
Substantial amounts of experimental data is grasped, if without rich experience, it will be difficult to margins of excision be controlled, be easy to cause speculum
Outside surface damage, in addition when using diamond wheel grinding, skive is sent out by the mode glass surface of grinding
Raw brittle fracture, the distribution of aspherical mirror edge stress are concentrated, and the face shape alice at aspherical mirror edge can be caused after grinding.
The content of the invention
It is an object of the invention to overcome deficiency of the prior art, edge effect and stress deformation are solved the problems, such as.
A kind of aspherical mirror embryo for the edge effect that disappears：The aspherical mirror embryo is made of cylindrical mirror embryo, cylindrical mirror embryo
Upper to include first end face, second end face, cylinder side wall, non-spherical structure is located in first end face, it is characterised in that aspherical knot
The first circular groove is additionally provided on structure, wherein the first circular groove axis of rotation is overlapped with aspherical axis of rotation, and the first circular groove internal diameter
More than aspherical bore.Using mirror body processing it is aspherical when, control is the on aspherical in the range of edge effect is generated
Then annular region outside one circular groove cuts off the annular region outside aspherical bore, it is no edge to be left part
The speculum of effect.
It is as follows using the processing of above-mentioned cylindrical mirror embryo is aspherical：
Step 1 prepares cylindrical mirror embryo step：It can be with envelope aspherical mirror according to aspherical structural parameters processing
Cylindrical mirror embryo；The wherein described cylindrical mirror embryo is made of first end face, second end face, cylinder side wall, and first end face is used for
Process non-spherical structure, cylindrical mirror embryo diameter be more than aspherical mirror bore, first end face it is parallel with second end face and with
The cylinder side wall of cylindrical mirror embryo is vertical；
Step 2 processes the first circular groove step：The first end face processed is fixed on the turntable of vertical machine upwards；
Wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine turret axis and the axis of cylindrical mirror embryo
It overlaps, the first end face of cylindrical mirror embryo is parallel with turntable surface；Boart boart wheel sleeve is mounted on vertical machine main shaft,
Skive sleeve diameter is not less than the bore of aspherical mirror, and the first circular groove is processed using boart boart wheel sleeve, processes
It is downward along cylindrical mirror embryo axis direction to continuing behind non-spherical structure position since first end face during the first circular groove
Certain depth is processed, starting the first circular groove total depth from first end face is less than cylindrical mirror flake thickness degree；
Step 3, milling non-spherical structure step：Diamond milling emery wheel is mounted on vertical machine main shaft, in cylinder
Milling goes out non-spherical structure in the first end face of shape mirror embryo；
Step 4, grinding and polishing step：Non-spherical structure grinding and polishing will be obtained in step 3 into aspherical mirror；
Step 5, trimming take mirror step：Specially：Acquisition aspherical mirror in step 4 is fixed on to the turntable of vertical machine
On, wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine turret axis and cylindrical mirror embryo
Axis overlaps, and the boart boart wheel sleeve is mounted on vertical machine main shaft, is extracted out with the boart boart wheel sleeve
Aspherical mirror.
Due to the utilization of above-mentioned technical proposal, technical scheme has following advantages compared with prior art：
1. the first circular groove is set in non-spherical surface so that boart boart wheel sleeve set will not be directly to non-during later stage trimming
Spherical optics face is ground, the alice phenomenon for avoiding stress concentration and generating.
2. due to setting the first circular groove in non-spherical surface, when boart boart wheel sleeve is used to extract aspherical, no matter
It is that grinding all will not be on aspherics face or be ground from second end face to first end face from the first circular groove to second end face
There is chipping or chipping.
3. solving the problems, such as edge effect, also avoid the stress deformation that tradition splicing retaining ring method generates due to gluing and ask
Topic.
Description of the drawings
Fig. 1：Disappear the aspherical mirror machining sketch chart of edge effect；
Fig. 2：Second end face and cylindrical bottom plate gluing schematic diagram；
Fig. 3：Process the cylindrical mirror embryo top view of the first circular groove；
Fig. 4：Process the cylindrical mirror proembryo view of the first circular groove, second end face circular groove, non-spherical structure；
Fig. 5：Process the cylindrical mirror embryo sectional view of the first circular groove, second end face circular groove, non-spherical structure；
Fig. 6：A kind of concave aspheric mirror embryo schematic diagram of the edge effect that disappears；
Fig. 7：A kind of convex aspheric surface mirror embryo schematic diagram of the edge effect that disappears；
Wherein 1- cylindrical mirrors embryo；The first circular grooves of 2-；3- second end face circular grooves；4 cylindrical bottom plates；5- cylindrical mirror embryos
Axis；6- non-spherical structures；7- boart boart wheel sleeves；8- first end faces；9- second end faces；10- cylinder side walls；H0- aspheric
Face mirror center is thick；H1- cylindrical mirror flake thickness degree h1；H2- the first circular groove total depths；H3- second end face circular groove depth；H6- aspheric
Edge thickness at the bore of face；The aspherical bores of D-；D2- skive sleeve diameters.
Specific embodiment
In order to illustrate more clearly of the technical solution of invention, it is further described with reference to the accompanying drawings and embodiments
Embodiment one：Such as attached drawing 6 or a kind of aspherical mirror embryo of edge effect that disappears shown in Fig. 7：The aspherical mirror embryo
It is made of cylindrical mirror embryo 1, first end face 8, second end face 9, cylinder side wall 10, non-spherical structure 6 is included on cylindrical mirror embryo
It is arranged at 8 in first end face, it is characterised in that the first circular groove is additionally provided on non-spherical structure, wherein the first circular groove axis of rotation
It is overlapped with aspherical axis of rotation, and the first circular groove internal diameter is more than aspherical bore.
Below in conjunction with the accompanying drawings 1, to process bore as D, exemplified by the revolution concave aspherical surface speculum that center thickness is h0 in detail
It introduces and aspherical specific steps is processed using above-mentioned cylindrical mirror embryo,
Step 1：It can be with the cylindrical mirror embryo 1 of envelope aspherical mirror according to aspherical structural parameters processing；It is wherein described
Cylindrical mirror embryo 1 be made of first end face, second end face, cylinder side wall, first end face is for processing non-spherical structure 6, circle
Cylindricality mirror embryo diameter is more than the bore D of aspherical mirror, and first end face is parallel with second end face and cylinder with cylindrical mirror embryo
Side wall is vertical；
Step 2：The first end face processed is fixed on the turntable of vertical machine upwards；Wherein vertical machine main shaft
Axis is overlapped with vertical machine turret axis, and vertical machine turret axis is overlapped with the axis 5 of cylindrical mirror embryo, cylindrical mirror embryo
First end face it is parallel with turntable surface；Boart boart wheel sleeve 7 is mounted on vertical machine main shaft, boart boart wheel sleeve
Internal diameter D2 is not less than the bore D of aspherical mirror, the first circular groove 2 is processed using boart boart wheel sleeve, when processing the first circular groove
Since first end face one is processed along 5 direction of cylindrical mirror plumular axis line to continuation is downward after 6 position h6 of non-spherical structure
Depthkeeping degree starts the first circular groove total depth h2 from first end face and is less than cylindrical mirror flake thickness degree h1.
Step 3：Diamond milling emery wheel is mounted on vertical machine main shaft, in the first end face of cylindrical mirror embryo
Milling goes out non-spherical structure 6；
Step 4：By 6 grinding and polishing of non-spherical structure into aspherical mirror；
Step 5：Aspherical mirror is extracted with the boart boart wheel sleeve；It concretely comprises the following steps：Aspheric will be obtained in step 4
Face mirror is fixed on the turntable of vertical machine, and wherein vertical machine main-shaft axis is overlapped with vertical machine turret axis, vertical machine
Bed turret axis is overlapped with the axis of cylindrical mirror embryo, and the boart boart wheel sleeve is mounted on vertical machine main shaft, is used
The boart boart wheel sleeve extracts out aspherical mirror.
Embodiment two：On the basis of embodiment one, the first circular groove depth is more than or equal to 2mm, so in later stage trimming
It is possible to prevente effectively from aspherical edge chipping.
Embodiment three：As shown in attached drawing 1- attached drawings 5, on the basis of embodiment one, second end face is additionally provided in second end face
Circular groove 3, wherein second end face circular groove axis of rotation are overlapped with aspherical axis of rotation, and second end face circular groove and the first circular groove
Groove width and internal diameter are all equal, and 3 depth of second end face circular groove is h3, meets h2+h3<h1.In the second end face of cylindrical mirror embryo
It beats after second end face circular groove, when more convenient follow-up trimming, which only needs to be ground on a small quantity, can be taken off aspherical mirror, while further
Reduce grinding stress deformation.
Example IV：On the basis of embodiment three, further include greater diameter than aspherical mirror cylinder bottom plate 4, wherein second
End face is glued on the cylindrical bottom plate 4.The cylinder bottom plate can play the second end face of cylindrical mirror embryo protection and make
With preventing from damaging cylindrical mirror embryo when surprisingly colliding with during post-production.When negated spherical mirror can by heating or
The techniques such as person's organic solvent immersion remove cylindrical bottom plate 4.
Embodiment five：On the basis of example IV, the cylinder bottom plate 4 is equipped with several through holes and justifies with second end face
Slot 3 connects.Second end face circular groove after the glued cylindrical bottom plate of second end face is connected by the through hole of setting with outside air,
Solve the problems, such as that gas varies with temperature the stress deformation generated to aspherical mirror embryo in second end face circular groove.
0.5~2mm of groove width of preferred first circular groove.Groove width is too wide, and polishing bistrique can collide with the first circle during grinding and polishing
The annular boundary of slot be easy to cause aspherical edge chipping.
In preferred step 4, filled in the first circular groove by paraffin.Paraffin fill the first circular groove gap after, grinding agent or
Polishing powder would not be absorbed in the first circular groove；It is possible to prevente effectively from the grinding agent being absorbed in polishing process in the first circular groove seam or throwing
Light powder takes to aspherical upper and scratches non-spherical surface by polishing bistrique, simultaneously because paraffin does not fix molten point, glued power
Very little will not generate stress to mirror body around substantially, nor affect on later stage trimming and take mirror.More preferably scheme is in the first circular groove
Trench bottom is provided with the aperture being in communication with the outside, and since the aperture is in communication with the outside, the later stage can make to fill out by way of heating
Fill paraffin melting is simultaneously flowed out from the aperture.
The present invention method uses edge effect elimination principle for：Edge effect is often concentrated in side during optical manufacturing
In edge a certain range, in advance prepare one be more than aspherical bore cylindrical mirror embryo, shaping it is aspherical on remain with a depthkeeping
Degree the first circular groove, in the range of when aspherical lapping polish, edge effect is generated control on aspherical first circular groove it
Then outer annular region cuts off the annular region outside aspherical bore, it is the anti-of no edge effect to be left part
Mirror is penetrated, which effectively solves the problems, such as edge effect and stress deformation problem, and brings and be not easy at aspherical edge
Generate the effect of chipping and chipping.
The technical program unspecified part belongs to technology well known to those skilled in the art.The technical program can also be used
In aspherical mirror edge effect of the removal with endoporus, the region that diameter of bore is less than or equal at the aspherical center with endoporus adds
The circular groove of work certain depth, principle is identical with the technical program, the circular groove can effectively solve edge effect around endoporus and
Stress deformation problem.The technical program can be used for the aspherical of processing rotational symmetry structure, while can be with by being suitably modified
For processing off-axis aspheric surface.
Claims (8)
1. a kind of aspherical mirror embryo for the edge effect that disappears, the aspherical mirror embryo is made of cylindrical mirror embryo, on cylindrical mirror embryo
Including first end face, second end face, cylinder side wall, non-spherical structure is arranged in first end face, it is characterised in that aspherical knot
The first circular groove is additionally provided on structure, wherein the first circular groove axis of rotation is overlapped with aspherical axis of rotation, and the first circular groove internal diameter
More than aspherical bore.
2. the aspherical mirror embryo of the edge effect according to claim 1 that disappears, it is characterised in that：The first circular groove depth is big
In equal to 2mm.
3. the aspherical mirror embryo of the edge effect according to claim 1 that disappears, it is characterised in that：It is additionally provided in second end face
Second end face circular groove, wherein second end face circular groove axis of rotation are overlapped with aspherical axis of rotation, and second end face circular groove and
The groove width and internal diameter of one circular groove are all equal.
4. the aspherical mirror embryo of the edge effect according to claim 3 that disappears, it is characterised in that：It further includes greater diameter than non-
Spherical mirror cylinder bottom plate, wherein second end face are glued on the cylindrical bottom plate.
5. the aspherical mirror embryo of the edge effect according to claim 4 that disappears, it is characterised in that：It is set on the cylinder bottom plate
There are several through holes and connected with second end face circular groove.
6. the aspherical mirror embryo of the edge effect that disappears according to one of Claims 1 to 5, it is characterised in that：First circular groove
0.5~2mm of groove width.
7. the aspherical mirror embryo of the edge effect that disappears according to one of Claims 1 to 5, it is characterised in that：In first circular groove
It is filled by paraffin.
8. the aspherical mirror embryo of the edge effect according to claim 7 that disappears, it is characterised in that：The trench bottom of first circular groove is set
It is equipped with the aperture being in communication with the outside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711298053.6A CN108051882B (en) | 2017-12-08 | 2017-12-08 | Aspherical mirror blank for eliminating edge effect |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711298053.6A CN108051882B (en) | 2017-12-08 | 2017-12-08 | Aspherical mirror blank for eliminating edge effect |
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| CN108051882A true CN108051882A (en) | 2018-05-18 |
| CN108051882B CN108051882B (en) | 2020-04-14 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111376142A (en) * | 2019-12-25 | 2020-07-07 | 苏州大学 | Numerical control milling, grinding, forming and polishing method and device for large-aperture aspherical mirror |
| CN114603430A (en) * | 2022-05-10 | 2022-06-10 | 中国科学院光电技术研究所 | Method and tool for inhibiting surface band-breaking errors of deep axicon optical element |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111376142A (en) * | 2019-12-25 | 2020-07-07 | 苏州大学 | Numerical control milling, grinding, forming and polishing method and device for large-aperture aspherical mirror |
| CN114603430A (en) * | 2022-05-10 | 2022-06-10 | 中国科学院光电技术研究所 | Method and tool for inhibiting surface band-breaking errors of deep axicon optical element |
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| CN108051882B (en) | 2020-04-14 |
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