CN108058066A - A kind of big method for processing surface of laser slab medium - Google Patents
A kind of big method for processing surface of laser slab medium Download PDFInfo
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- CN108058066A CN108058066A CN201711267299.7A CN201711267299A CN108058066A CN 108058066 A CN108058066 A CN 108058066A CN 201711267299 A CN201711267299 A CN 201711267299A CN 108058066 A CN108058066 A CN 108058066A
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- laser slab
- polishing
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- big
- disk
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
The invention discloses a kind of big method for processing surface of laser slab medium, this method comprises the following steps：By laser slab medium blank excision forming to be processed；It is placed on twin grinder, while pre-grinding is carried out to two big face；It is placed on after cleaning up on Twp-sided polishing machine, while pre-polish(ing) is carried out to two big face；It is placed on plane glass polishing machine, carries out whole road polishing to two big face respectively, be placed with polytetrafluoroethylene (PTFE) separator on the polishing disk of plane glass polishing machine, clean up rear laser slab and be placed in polytetrafluoroethylene (PTFE) separator；Completion of processing, checks the big face finish of laser slab medium, flatness, the depth of parallelism, it is qualified after by laser slab lower wall, cleaning, censorship.The method of the present invention such as glues or adsorb without wax at the upper disk mode for generating stress, and flatness and the depth of parallelism are easy to control, and finish quality is good, efficiently solves the problems, such as the Deformation of surface figure after element lower wall, processing efficiency and qualification rate height, processing cost is low, good process repeatability.
Description
Technical field
The present invention relates to optical processing technology field, more particularly to a kind of big method for processing surface of laser slab medium.
Background technology
Slab laser is since pumping is uniform, the advantages that face cools down, can obtain preferable beam quality and higher is averaged
Output power, therefore paid much attention to be subject to people, at home and abroad quickly grow.Laser crystal strip is as slab laser
Important process substance, people process it index and propose higher requirement.For big flat thin laser slab, process
In big facial plane degree lower wall after deformation have become a problem urgently to be resolved hurrily in process, and existing processing side
The method process-cycle is long, how to shorten the process-cycle, and improving processing efficiency also becomes batch machining problem to be solved.
Some existing processing methods, pre-grinding, polishing are using disk on wax glue or pitch, and this method is due to upper disk process
In have thermal stress and a bond stress, flatness can become very poor and extremely irregular (more than 8 λ) after laser slab lower wall, process
During the second face due between each device wax layer or asphalt thickness it is inconsistent, cause the means parallel degree after pre-polish(ing) very poor (more than 5
Point), the very poor flatness precision of pre-polish(ing) and the depth of parallelism are required for finishing polish to correct, this all brings to finishing polish greatly adds
Work difficulty.It is deposited during existing certain methods finishing polish using disk on vacuum suction pad, this upper disk mode due to vacuum suction pad
In small elasticity, the face for adsorbing two on absorption layer laser slabs and absorption layer contact in process is difficult to be in
On same plane, and the adsorption capacity of absorption layer is not very strong in process, since the effect of frictional force in process is thrown
Light liquid can be penetrated between absorption layer and laser slab, virtually add the thickness difference between laser slab, make be difficult during finishing polish
The depth of parallelism of laser slab is processed, these situations also increase the corresponding liquid of difficulty of processing and add the process-cycle.
The content of the invention
The object of the present invention is to provide a kind of big method for processing surface of laser slab medium, this method can effectively solve lower wall
Deformation of surface figure problem afterwards can be greatly improved the processing quality and product qualification rate of the big face processing of laser slab medium, shorten
Process-cycle.
To achieve the above object, the technical solution used in the present invention is：
A kind of big method for processing surface of laser slab medium, this method comprise the following steps：
(1) by laser slab medium blank excision forming to be processed；
(2) the laser slab medium after cutting will be completed to be placed on twin grinder, while beforehand research is carried out to two big face
Mill；
(3) it is placed on after the laser slab medium for having completed pre-grinding is cleaned up on Twp-sided polishing machine, while to two
Big face carries out pre-polish(ing)；
(4) the laser slab medium for having completed pre-polish(ing) is placed on plane glass polishing machine, two big face is carried out eventually respectively
Road polishes, and is placed with polytetrafluoroethylene (PTFE) separator on the polishing disk of the plane glass polishing machine, cleans up rear laser slab and put
It puts in the polytetrafluoroethylene (PTFE) separator；
(5) completion of processing checks the big face finish of laser slab medium, flatness, the depth of parallelism, closes when being cooled to room temperature
By laser slab lower wall, cleaning, censorship after lattice.
Further, the plane glass polishing machine polishing disk is first checked with amesdial before whole road polishing described in step (4)
Surface smoothness, if requirement is not achieved in glass polishing machine polishing disk surface smoothness, using repairing disk device glass polishing machine polishing disk
Surface smoothness trims reprocessing.
Preferably, for the abrasive disk that pre-grinding uses described in step (2) for cast iron plate, rotating speed is 40~55rpm, and abrasive material is adopted
With the precise and tiny powder of W10 boron carbides.
Preferably, for the polishing disk that pre-polish(ing) uses described in step (3) for polyurethane polishing disk, rotating speed is 40~45rpm,
Polishing powder uses W1 alumina powders.
Preferably, for the polishing disk that whole road polishing uses described in step (4) to synthesize tin disk, rotating speed is 40~45rpm, is thrown
Light liquid uses oiliness W0.5 polycrystalline diamonds.
Preferably, the length of the laser slab medium is more than 130mm, and width is more than 40mm, and thickness is less than 4.5mm.
The beneficial effects of the invention are as follows：
(1) pre-grinding is carried out using twin grinder, Twp-sided polishing machine carries out pre-polish(ing), and wax glue or pitch heating is omitted
Upper disk and lower wall step, two big face processes laser slab simultaneously in a device, improves pre-grinding, the processing efficiency of polishing,
The process-cycle is shortened, and twin grinding, the means parallel degree of polishing machining can reach 5 seconds, and flatness can reach
To 0.5 λ, finish can reach I grade, drastically increase processing quality；
(2) since laser slab medium is freely put in the separator during whole road processing, the depth of parallelism will not change, separator
Using polytetrafluoroethylene material, the chipping in process of laser slab medium and turned-down edge, and poly- four are prevented well
Fluoride material can keep polishing disk surface long term not have to finishing, improve the utilization rate of equipment to the damage very little of polishing disk；
Using oiliness W0.5 polycrystalline diamond masonry polishing fluids, finish can further improve；Whole road polishing, which uses to carry, repaiies disk device
Plane glass polishing machine, the polishing disk disk flatness trimmed are less than 0.0002mm, the device table that thus flatness disk processes
Facial plane degree is high；Whole road polishing need to only change the flatness of laser slab to be processed, and flatness is trimmed to 0.1 λ by 0.5 λ,
This process probably removes 0.0003mm, therefore the whole road polishing cycle is extremely short；
(3) processing method of the invention is suitable for the processing of the fragile materials such as various glass, crystal, ceramics.
Description of the drawings
Fig. 1 is a kind of process flow chart of the big method for processing surface of laser slab medium of the present invention；
Fig. 2 is laser slab medium of the invention pre-grinding, polishing schematic diagram on twin grinding, polishing machine；
The laser slab medium that Fig. 3 is the present invention polishes schematic diagram in glass polishing machine Shang Zhong roads；
Fig. 4 is the big facial plane degree test result of 2 ceramic laser lath of the embodiment of the present invention；
Fig. 5 is the big face interference light spectrogram of 2 ceramic laser lath of the embodiment of the present invention.
In figure：1st, twin grinding, the lower millstone of polishing machine, 2, twin grinding, the erratic star wheel fixture of polishing machine, 3, Laser Slabs
Medium, 4, glass polishing machine carry and repair disk device, 5, glass polishing machine polishing disk, 6, polytetrafluoroethylene (PTFE) separator.
Specific embodiment
The present invention is described in further detail in the following with reference to the drawings and specific embodiments.
Embodiment 1
As shown in Figure 1-Figure 3, a kind of big method for processing surface of crystal laser lath, comprises the following steps：
(1) by 3 blank excision forming of crystal laser lath to be processed, the allowance of 0.2mm is stayed；
(2) the crystal laser lath 3 after cutting will be completed to be placed on the fixture 2 of twin grinder, while to two big faces
Pre-grinding is carried out, puts down upper millstone, opens feed pump, using W10 boron carbide abrasives, opens twin grinder, setting speed
For 55rpm, when processing 1 is small after check finish and size, finish is qualified, and size reaches tolerance limit i.e. lower wall；
(3) it is placed on after the crystal laser lath 3 for having completed pre-grinding is cleaned up on the fixture of Twp-sided polishing machine, simultaneously
Pre-polish(ing) is carried out to two big face, puts down polishing disk, opens feed pump, using W1 alumina polishing solutions, opens twin polishing
Machine, setting speed 45rpm, when processing 1.5 is small after check 3 finish of laser slab, flatness, the depth of parallelism, it is qualified after lower wall；
(4) 5 surface smoothness of synthesis tin polishing disk of plane glass polishing machine is checked with amesdial, disk is repaiied automatically with glass polishing machine and sets
Standby 4 are trimmed to amesdial to zero 5 disk of synthesis tin polishing disk, will complete the crystal laser lath 3 of pre-polish(ing) and synthesis tin
Polishing disk 5 cleans up, and the crystal laser lath 3 after cleaning is put into polytetrafluoroethylene (PTFE) separator 6 first face that processes, with certainly
Oiliness W0.5 polycrystalline diamonds polishing fluid is uniformly sprayed in 5 disk of synthesis tin polishing disk by dynamic material spray pump, is opened planar rings and is thrown
Machine, setting speed 45rpm, when processing 0.8 is small after check 3 finish of crystal laser lath, flatness, the depth of parallelism, after qualified
Turn-over polishes the second face, and the second face processing 0.8 checks 3 finish of crystal laser lath, flatness, the depth of parallelism when small；
(5) by 3 lower wall of crystal laser lath, cleaning, censorship after passed examination.
More crystal laser laths 3 can be processed in above-mentioned process, it can be achieved that large-scale production simultaneously.
Embodiment 2
Using dimensions 145 × 40 × 4mm ceramic lasers lath as experiment exemplar, exemplar quantity is 9, and procedure of processing is such as
Under：
(1) first 3 blank excision forming of ceramic laser lath, the allowance of 0.2mm is stayed.
(2) it is described two-sided to grind as shown in Fig. 2, the ceramic laser lath 3 of forming is put into twin grinding machine clamp 2
Grinding machine shares 5 erratic star wheel fixtures 2, wherein four erratic star wheel fixtures 2 respectively put two panels ceramic laser lath 3, another wandering star
Wheel fixture 2 is put into a piece of ceramic laser lath 3, after ceramic laser lath 3 is put well, puts down top lap, opens feed pump, abrasive material
Using W10 boron carbides, open twin grinder, setting speed 50rpm, when processing 1 is small after check finish and size, it is bright and clean
Degree is qualified, and ceramic laser lath 3 is taken out from the device when size reaches tolerance limit, is cleaned up.
(3) the ceramic laser lath 3 after cleaning is put into Twp-sided polishing machine erratic star wheel fixture 2, puts the same twin grinding of method
Shi Xiangtong puts down polishing disk, opens feed pump, and polishing opens Twp-sided polishing machine, setting speed using W1 alumina polishing solutions
For 40rpm, when processing 1.5 is small after check 3 finish of ceramic laser lath, flatness, the depth of parallelism, it is qualified after from Twp-sided polishing machine
Middle taking-up ceramic laser lath 3 cleans up the processing of Dai Zhong roads and uses.
(4) as shown in figure 3, checking 5 surface smoothness of plane glass polishing machine synthesis tin polishing disk with amesdial, with glass polishing machine certainly
5 disk of synthesis tin polishing disk is trimmed to amesdial to zero by dynamic disc apparatus 4 of repairing, and synthesis tin polishing disk 5 is cleaned up, ceramics
Laser slab 3 is put into polytetrafluoroethylene (PTFE) separator 6, puts three pieces in each separator, 3 first face of processing ceramic laser slab,
It is pumped and oiliness W0.5 polycrystalline diamonds polishing fluid is equably sprayed in 5 disk of synthesis tin polishing disk with automatic material spray, opened ring and throw
Machine, setting speed 40rpm, when processing 0.8 is small after check 3 finish of ceramic laser lath, flatness, it is qualified after turn-over, throw
3 second face of light ceramic laser slab, when the second face processing 0.8 is small after check finish, flatness, the depth of parallelism, it is qualified after lower wall,
Cleaning, censorship.
Ceramic laser lath 3 after processing is placed on Hi-Marc-150 laser plane interferometers and carries out optical flatness
Accurate measurement, test mode：PZT phase shifts, face shape, test wavelength：632.8nm, measuring resolution：512*512Pix,
0.290mm/Pix, as a result as shown in Figure 4 and Figure 5, big 0.096 λ of facial plane degree PV values, the depth of parallelism 5 seconds, I grade of finish, test
The results show 9 is qualified.
Claims (6)
1. a kind of big method for processing surface of laser slab medium, which is characterized in that this method comprises the following steps：
(1) by laser slab medium blank excision forming to be processed；
(2) the laser slab medium after cutting will be completed to be placed on twin grinder, while pre-grinding is carried out to two big face；
(3) it is placed on after the laser slab medium for having completed pre-grinding is cleaned up on Twp-sided polishing machine, while to two big faces
Carry out pre-polish(ing)；
(4) the laser slab medium for having completed pre-polish(ing) is placed on plane glass polishing machine, carries out whole road to two big face respectively and throw
Light is placed with polytetrafluoroethylene (PTFE) separator on the polishing disk of the plane glass polishing machine, cleans up rear laser slab and be placed on
In the polytetrafluoroethylene (PTFE) separator；
(5) completion of processing checks the big face finish of laser slab medium, flatness, the depth of parallelism, after qualified when being cooled to room temperature
By laser slab lower wall, cleaning, censorship.
2. the big method for processing surface of laser slab medium according to claim 1, which is characterized in that described in step (4)
The plane glass polishing machine polishing disk surface smoothness is first checked with amesdial before whole road polishing, as glass polishing machine polishing panel surface is put down
Requirement is not achieved in whole degree, and glass polishing machine polishing disk surface smoothness is trimmed reprocessing using disk device is repaiied.
3. the big method for processing surface of laser slab medium according to claim 1 or 2, which is characterized in that institute in step (2)
Abrasive disk that pre-grinding uses is stated as cast iron plate, rotating speed is 40~55rpm, and abrasive material uses the precise and tiny powder of W10 boron carbides.
4. the big method for processing surface of laser slab medium according to claim 1 or 2, which is characterized in that institute in step (3)
Polishing disk that pre-polish(ing) uses is stated as polyurethane polishing disk, rotating speed is 40~45rpm, and polishing powder uses W1 alumina powders.
5. the big method for processing surface of laser slab medium according to claim 1 or 2, which is characterized in that institute in step (4)
The polishing disk that the polishing of Shu Zhong roads uses is synthesizes tin disk, and rotating speed is 40~45rpm, and polishing fluid uses oiliness W0.5 polycrystalline diamonds
Stone.
6. the big method for processing surface of laser slab medium according to claim 1 or 2, which is characterized in that the Laser Slabs
The length of medium is more than 130mm, and width is more than 40mm, and thickness is less than 4.5mm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711267299.7A CN108058066A (en) | 2017-12-05 | 2017-12-05 | A kind of big method for processing surface of laser slab medium |
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| CN201711267299.7A CN108058066A (en) | 2017-12-05 | 2017-12-05 | A kind of big method for processing surface of laser slab medium |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109006942A (en) * | 2018-08-24 | 2018-12-18 | 合肥启迪农业发展有限公司 | One kind being used for animal cuticle defeathering equipment |
| CN109623507A (en) * | 2019-01-02 | 2019-04-16 | 中国科学院上海光学精密机械研究所 | YAG slab laser crystal reflection face shape processing method |
| CN109848760A (en) * | 2019-01-02 | 2019-06-07 | 中国科学院上海光学精密机械研究所 | YAG slab laser crystal parallelism of two planes processing method |
| CN111644906A (en) * | 2020-06-02 | 2020-09-11 | 大连理工大学 | Thickening-optical cement-symmetrical thinning processing method for high-precision ultrathin optical part |
| CN111774943A (en) * | 2020-07-17 | 2020-10-16 | 成都东骏激光股份有限公司 | Vertical crystal processing tool and manufacturing method |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109848760A (en) * | 2019-01-02 | 2019-06-07 | 中国科学院上海光学精密机械研究所 | YAG slab laser crystal parallelism of two planes processing method |
| CN111644906A (en) * | 2020-06-02 | 2020-09-11 | 大连理工大学 | Thickening-optical cement-symmetrical thinning processing method for high-precision ultrathin optical part |
| CN111774943A (en) * | 2020-07-17 | 2020-10-16 | 成都东骏激光股份有限公司 | Vertical crystal processing tool and manufacturing method |
| CN111774943B (en) * | 2020-07-17 | 2022-03-01 | 成都东骏激光股份有限公司 | Vertical crystal processing tool and manufacturing method |
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Application publication date: 20180522 |