CN109623507A - YAG slab laser crystal reflection face shape processing method - Google Patents

YAG slab laser crystal reflection face shape processing method Download PDF

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Publication number
CN109623507A
CN109623507A CN201910000515.4A CN201910000515A CN109623507A CN 109623507 A CN109623507 A CN 109623507A CN 201910000515 A CN201910000515 A CN 201910000515A CN 109623507 A CN109623507 A CN 109623507A
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CN
China
Prior art keywords
polishing
reflecting
shape
crystal
processing
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Pending
Application number
CN201910000515.4A
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Chinese (zh)
Inventor
程鑫
魏朝阳
邵建达
曹俊
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN201910000515.4A priority Critical patent/CN109623507A/en
Publication of CN109623507A publication Critical patent/CN109623507A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means

Abstract

A kind of YAG slab laser crystal reflection face shape processing method, the present invention is combined by tradition grinding, polishing and magnetorheological numerical control polishing, overcome lath upper lower burrs bring deformation problems, the machining accuracy of lath laser crystal can effectively be controlled, process the slab laser crystal for high-power strip laser, reflecting surface shape PV≤λ/6.

Description

YAG slab laser crystal reflection face shape processing method
Technical field
The present invention relates to laser crystal optics, and field, especially a kind of YAG slab laser crystal pro cessing method is cold worked.
Background technique
As the core work element of high-power strip laser, YAG slab laser crystal element has high transparency, Superior optics, the both mechanically and thermally characteristics such as even refractive index, low laser threshold, impact resistance are still current most important, application Widest solid-state laser operation material, is largely used in military affairs, scientific research, medical treatment and industrial laser, need high power, The occasions such as high-energy, switch and mode-locked ultrashort pulse laser, even more preferred working-laser material.
YAG slab laser crystal pro cessing precision directly influences the output beam quality of laser, with slab laser The continuous promotion of demanded power output, the geometric dimension of required lath is increasing, and difficulty of processing and quality requirement are also increasingly It is high.For typical hard crisp difficult worked crystal, such as Nd:YAG crystal, Mohs' hardness reaches 8.5, the elastic limit of this kind of material with Strength degree is very close, and rupture failure will occur when the load that material is born is slightly exceeding elastic limit.Its crystal Structure category carbuncle type is the third-largest hard brittle material of diamond, cubic boron nitride to be only second in nature, therefore process this Crystal is more difficult than general optical material.In addition, lath Nd:YAG crystal is typical ultrathin optical element, have compared with Big length-width ratio, poor structure rigidity, traditional upper disk mode would generally bring very big machining deformation.Due to opposite shape The requirement of precision is unified, thus polishing process must also strict control amount of roll off.Finally, to improve device performance, Each edge chamfering size of lath is minimum or even not chamfering, and seamed edge is sharp, if clamping is improper in process, easily causes member The chipping of part is collapsed angle or even is scrapped.
For the optical manufacturing of YAG slab laser crystalline material, at present both at home and abroad reported processing method be mostly Using polished dies such as pitch, polyurethane or pure tins on lapping and buffing machine, diamond or alumina powder abrasive material is selected to carry out hand polish Or machine is thrown.China Engineering Physics Research Institute thank it is auspicious it is clear etc. carried out novel synthesis polishing disk polishing process research, instead of biography Pitch, polyurethane of system etc. polish disk material, realize no turned-down edge polishing substantially;Base of the external research institution in traditional processing Small tool polishing process is introduced on plinth, has carried out certainty, the high-precision Research on processing technology of slab crystal.But it is existing each Kind process still can not be fully solved the high surface figure accuracy of slab crystal element and effectively control, and realize the class component high-precision surface Shape processing and manufacturing is still relatively difficult.
Summary of the invention
The present invention provides a kind of YAG slab laser crystal reflection face shape processing method, and this method is by traditional processing and numerical control Magnetorheological processing combines, and processes the slab laser crystal for high-power strip laser, reflecting surface shape PV≤λ/6.
Technical solution of the invention is as follows:
A kind of YAG slab laser crystal reflection face shape processing method, it is characterized in that this method includes the following steps:
1) it uniaxial machine grinding and polishing: using the first face of the uniaxial machine grinding and polishing crystal of tradition, is detected using laser interferometer The first face reflecting surface shape after polishing completes the first face reflecting surface shape when reflection surface figure accuracy reaches 0.5 λ~1 λ when the first face Processing;By the first face vacuum suction on optical cement plate, using the second face of traditional uniaxial machine grinding and polishing crystal, laser interference is utilized The second face reflecting surface shape after instrument detection polishing, when the second face, reflection surface figure accuracy reaches the λ of 0.5 λ~1, when, it is anti-to complete the second face The processing of face shape is penetrated, by crystal from optical cement plate upper lower burrs;
2) ring polishing: by accompanying throwing piece to be corrected glass polishing machine, control environment temperature is utilized in 20 ± 2 DEG C of ranges Glass polishing machine accompanies the reflecting surface shape for throwing piece by laser interferometer detection to accompanying throwing piece to polish, when reflecting surface shape is greater than 0.3 λ When, continue to polish;When reflecting surface shape is less than 0.3 λ, correction is finished, and removes accompany throwing piece immediately, respectively to two single sides of crystal It carries out ring and throws processing, when two single side reflection surface figure accuracies reach 0.3 λ~0.5 λ, complete ring and throw processing;
3) magnetorheological numerical control processing: control environment temperature is in 20 ± 2 DEG C of ranges, using magnetorheological polishing machine to the two of crystal A single side is polished respectively, using two single side reflecting surface shapes after laser interferometer detection polishing, when two single sides reflect When the shape PV≤λ/6 of face, Magnetorheological Polishing is finished;
4) crystal pro cessing terminates.
Technical effect of the invention is as follows:
The present invention combines tradition polishing and numerical control Technique of Magnetorheological Finishing, overcomes YAG lath upper lower burrs bring deformation Problem can effectively control the machining accuracy of lath laser crystal, it is up to standard to produce the index in high-power strip laser Slab laser crystal, reflecting surface shape PV≤λ/6.
Specific embodiment
It elaborates, but should not be limited the scope of the invention with this to the present invention below with reference to embodiment.
Embodiment 1
A kind of YAG slab laser crystal reflection face shape processing method, the processing object of the embodiment be a piece of 128mm × The Nd:YAG slab crystal of 6mm × 6mm, it is desirable that big face reflecting surface shape PV≤λ/6 128mm × 6mm, this method include following step It is rapid:
1) uniaxial machine grinding and polishing: using the first face of the uniaxial machine grinding and polishing crystal of tradition, 600mm bore interferometer is utilized The first face reflecting surface shape after detection polishing completes the reflection of the first face when reflection surface figure accuracy reaches 0.5 λ~1 λ when the first face The processing of face shape;By the first face vacuum suction on optical cement plate, using the second face of traditional uniaxial machine grinding and polishing crystal, utilize The second face reflecting surface shape after the detection polishing of 600mm bore interferometer, when the second face, reflection surface figure accuracy reaches the λ of 0.5 λ~1, complete It is processed at the second face reflecting surface shape, by crystal from optical cement plate upper lower burrs;
2) ring polishing: by accompanying throwing piece to be corrected 1m glass polishing machine, control environment temperature is in 20 ± 2 DEG C of ranges, benefit With 1m glass polishing machine to accompanying throwing piece to polish, the reflecting surface shape for throwing piece is accompanied by the detection of 600mm bore interferometer, when reflecting surface shape When greater than 0.3 λ, continue to polish;When reflecting surface shape is less than 0.3 λ, correction is finished, and removes accompany throwing piece immediately, respectively to crystal Two single sides carry out ring and throw processing, when two single side reflection surface figure accuracies reach 0.3 λ~0.5 λ, complete ring and throw processing;
3) magnetorheological numerical control processing: control environment temperature is magnetorheological using NUBULA~UPF~60 in 20 ± 2 DEG C of ranges Polishing machine polishes two single sides of crystal respectively, anti-using two single sides after the detection polishing of 600mm bore interferometer Face shape is penetrated, as two single side reflecting surface shape PV≤λ/6, Magnetorheological Polishing is finished.
4) crystal pro cessing terminates.
Test of many times proves that the present invention can process the slab laser crystal for high-power strip laser, reflection Face shape PV≤λ/6.

Claims (1)

1. a kind of YAG slab laser crystal reflection face shape processing method, it is characterised in that this method includes the following steps:
1) it uniaxial machine grinding and polishing: using the first face of the uniaxial machine grinding and polishing crystal of tradition, is detected and is polished using laser interferometer The first face reflecting surface shape afterwards completes the processing of the first face reflecting surface shape when reflection surface figure accuracy reaches 0.5 λ~1 λ when the first face; By the first face vacuum suction on optical cement plate, using the second face of traditional uniaxial machine grinding and polishing crystal, examined using laser interferometer The second face reflecting surface shape after surveying polishing, when the second face, reflection surface figure accuracy reaches the λ of 0.5 λ~1, when, complete the second face reflecting surface Shape processing, by crystal from optical cement plate upper lower burrs;
2) ring polishing: by accompanying throwing piece to be corrected glass polishing machine, environment temperature is controlled in 20 ± 2 DEG C of ranges, is thrown using ring Machine accompanies the reflecting surface shape for throwing piece by laser interferometer detection to accompanying throwing piece to polish, when reflecting surface shape is greater than 0.3 λ, after Continuous polishing;When reflecting surface shape is less than 0.3 λ, correction is finished, and removes accompany throwing piece immediately, is carried out respectively to two single sides of crystal Ring throws processing, when two single side reflection surface figure accuracies reach 0.3 λ~0.5 λ, completes ring and throws processing;
3) magnetorheological numerical control processing: control environment temperature is in 20 ± 2 DEG C of ranges, using magnetorheological polishing machine to two lists of crystal Face is polished respectively, using two single side reflecting surface shapes after laser interferometer detection polishing, when two single side reflecting surface shapes When PV≤λ/6, Magnetorheological Polishing is finished;
4) crystal pro cessing terminates.
CN201910000515.4A 2019-01-02 2019-01-02 YAG slab laser crystal reflection face shape processing method Pending CN109623507A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910000515.4A CN109623507A (en) 2019-01-02 2019-01-02 YAG slab laser crystal reflection face shape processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910000515.4A CN109623507A (en) 2019-01-02 2019-01-02 YAG slab laser crystal reflection face shape processing method

Publications (1)

Publication Number Publication Date
CN109623507A true CN109623507A (en) 2019-04-16

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0703847A1 (en) * 1993-06-04 1996-04-03 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
US20110028071A1 (en) * 2009-08-03 2011-02-03 Lawrence Livermore National Security, Llc Method and system for processing optical elements using magnetorheological finishing
CN102909650A (en) * 2012-11-01 2013-02-06 成都精密光学工程研究中心 Surface processing method of strip laser medium
CN103692294A (en) * 2013-11-11 2014-04-02 中国科学院上海光学精密机械研究所 Ultrahigh precision processing method for meter-scale optical element
CN105182459A (en) * 2015-07-13 2015-12-23 中国科学院上海光学精密机械研究所 Meter-level large diameter polarizer full-band surface shape processing method
CN105643394A (en) * 2016-01-14 2016-06-08 长春设备工艺研究所 High-efficiency and high-precision advanced manufacturing technology process for medium or large caliber aspherical optical element
CN107598715A (en) * 2017-09-08 2018-01-19 中国科学院光电技术研究所 A kind of heavy caliber special-shaped level processing method
CN108058066A (en) * 2017-12-05 2018-05-22 江苏师范大学 A kind of big method for processing surface of laser slab medium

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0703847A1 (en) * 1993-06-04 1996-04-03 Byelocorp Scientific, Inc. Magnetorheological polishing devices and methods
US20110028071A1 (en) * 2009-08-03 2011-02-03 Lawrence Livermore National Security, Llc Method and system for processing optical elements using magnetorheological finishing
CN102909650A (en) * 2012-11-01 2013-02-06 成都精密光学工程研究中心 Surface processing method of strip laser medium
CN103692294A (en) * 2013-11-11 2014-04-02 中国科学院上海光学精密机械研究所 Ultrahigh precision processing method for meter-scale optical element
CN105182459A (en) * 2015-07-13 2015-12-23 中国科学院上海光学精密机械研究所 Meter-level large diameter polarizer full-band surface shape processing method
CN105643394A (en) * 2016-01-14 2016-06-08 长春设备工艺研究所 High-efficiency and high-precision advanced manufacturing technology process for medium or large caliber aspherical optical element
CN107598715A (en) * 2017-09-08 2018-01-19 中国科学院光电技术研究所 A kind of heavy caliber special-shaped level processing method
CN108058066A (en) * 2017-12-05 2018-05-22 江苏师范大学 A kind of big method for processing surface of laser slab medium

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