CN1018346B - Multiple strip laser crystal processing technology by disks and its device - Google Patents
Multiple strip laser crystal processing technology by disks and its deviceInfo
- Publication number
- CN1018346B CN1018346B CN 90105801 CN90105801A CN1018346B CN 1018346 B CN1018346 B CN 1018346B CN 90105801 CN90105801 CN 90105801 CN 90105801 A CN90105801 A CN 90105801A CN 1018346 B CN1018346 B CN 1018346B
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- lath
- crystal
- processing
- cubic block
- dish
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention relates to a processing technique for a plurality of YAG lath-shaped laser medium disks. YAG crystal is a workpiece and a mould, and a SiC abrasive material is added. The processing of the disk on a complete reflective surface of a ground YAG lath and the processing of the disk which has the same material and the end surface of the ground YAG are exchanged on a grinder. After the surface of the lath precisely ground is clean, diamond micro powder emulsion is added and then mutually ground and polished to required geometric dimension and precision. A lath laser medium processed through the present invention has the advantages of high optical precision, high efficiency and low cost, and compared with single-piece processing, work efficiency increases more than 20 times. Grinding and throwing mechanization is realized, labor intensity is greatly lightened, and the present invention is free from the limitation of the dimension of a laser material and a lath and provides a work substance with high quality and low processing cost for a practical lath-shaped solid laser.
Description
The present invention relates to the process technology of optical component, particularly the processing method of lath solid laser medium and equipment thereof.
New type of plate stripe geometry laser instrument is eliminated the one-level hot focus because of having, stress focuses on and the remarkable advantage of fevering sodium effect, some exceptional hardships that traditional club-shaped solid laser device faces be can overcome and high average output power and beam quality obtained, it is an important development direction of solid state laser, be subjected to the attention of the U.S., West Europe, Japan and China, development in recent years is very rapid, especially current high-power neodymium-doped yttrium-aluminum garnet slab laser forward multikilowatt development, the physical dimension of required lath is increasing, and quality requirement is more and more higher.
As everyone knows, the quality of working-laser material crudy directly influences the output beam quality of laser instrument.Since the slab laser medium than traditional garden cylindricality laser bar physical dimension complexity, machined surface is many, burnishing surface is big, and is non-garden post symmetry, precision and surface smoothness require height, add that crystalline material is hard, its optics difficulty of processing is very big.Though the proficiency skills by the senior skilled worker adopts traditional hand grinding method can carry out single-piece work, labour intensity is big, and efficient is low, processing charges costliness, and the very difficult integrality that guarantees crudy, and yield rate is also low.In addition, traditional fine gtinding finishing method of yag crystal manual single-piece all adopts refine metal grinding tool, also exists polishing speed slow, and crystal and metal die hardness differs greatly, and often destroys the shortcoming of the flatness of metal die.In order to keep the best fit plane state, need expend a large amount of human and material resources and revise mould.Therefore, above processing method limits the development and the application of plate solid laser to a considerable extent.In recent years, adopt up and down opposed mill to the crystal grinding and polishing, as " monocrystalline germanium twin polishing technology ", the 7th page of " optical technology " 1985 the 2nd phase.This technology only is applicable to the two-sided polishing of the soft monocrystalline germanium of garden shape by the twin polishing technology dislocation in the optical glass processing, and can not be directly used in the manufacturing of the high exceptional hardness crystal lath laser medium of physical dimension complexity, required precision.
Purpose of the present invention is processed existing defective in order to overcome above-mentioned crystal lath of the prior art just, and proposes that a kind of work step is few, efficient is high, cost is low, crudy is high, and can guarantee to reach the processing method that many one-tenth dishes are processed the multinomial technical requirements such as the depth of parallelism, flatness, end plane angle and surface smoothness of the fully reflecting surface of multiple crystal lath.
Another object of the present invention provides a kind of special equipment-cubic block worker die clamper of processing end plane angle.
The objective of the invention is to reach by following measure: adopting up and down, opposed mill grinds and polishes the crystal to be machined lath, one-tenth dish processing to crystal lath fully reflecting surface is that many laths that will be cut moulding are that benchmark is bonded to dish with smooth mould, after adding the leveling of green silicon carbide abrasive material with the black iron mould in advance, many parallel crystal laths of the identical one-tenth dish of two diameters are overlapped, with crystal lath self workpiece and grinding tool each other, replacing green silicon carbide abrasive material progressively from coarse to fine, on grinder, replace mutually up and down mill, up to required physical dimension, thoroughly add diadust emulsion behind the clean surface and mutually mill is polished to desired thickness again, the depth of parallelism, flatness and surface smoothness.Behind the lower wall, with crystal lath one-tenth dish clamping on cubic block worker die clamper, elder generation's parallel θ angle end face that grinds to form on the swage tool of plane, according to the polishing step of lath fully reflecting surface, end face is carried out grinding and polishing to technical indicators such as desired end plane angle, the depth of parallelism, flatness and surface smoothnesses again.
Below in conjunction with accompanying drawing and operation principle the present invention is described in further detail:
Fig. 1 is yttrium-aluminium-garnet lath geometry figure, and wherein 1,2 is the fully reflecting surface of lath, and 3,4 is end face, and 5,6 is non-optical adiabatic face.
Fig. 2 is a yttrium-aluminium-garnet slat saw profile of tooth light path schematic diagram, and α is a Brewster's angle, and 7 is end face angle θ.
Fig. 3 is the smooth dish schematic diagram that is bonded to of yttrium-aluminium-garnet lath, and 8 is the crystal lath, and 9 is smooth mould.
Fig. 4 is that the workpiece mould is to grinding and polishing light schematic diagram each other with yttrium-aluminium-garnet lath self, and 10 is the grinding and polishing agent.
Fig. 5 is the cubic block die clamper vertical view of processing end face, and 11 is stainless steel worker die clamper, and 12 is pressing plate, and 13 is follower bolt, and 14 is centre hole.
Fig. 6 is the cubic block worker die clamper side view of processing end face, and 15 is garden shape yttrium-aluminium-garnet pad, and 16 is skewed slot.
The present invention proposes with yag crystal self processing method of workpiece and mould each other, its principle is that crystal all is a same material up and down, hardness is identical, press between workpiece face and the die face each other, the polishing abrasive material that contains free abrasive particle, and on grinder, make relative rotary motion and swing with slew rate f3 with rotating speed f1 and f2, extremely complicated, even and fine and closely woven movement locus has been synthesized in three kinds of relative motions, make crystal face each point constant speed grinding up and down, mutually even modification face shape, thereby be easy to reach the desired depth of parallelism, flatness and surface smoothness.Many two dish processing up and down simultaneously, efficient improves more than 20 times than single-piece work, realizes polishing mechanization, has reduced labour intensity.
With processing yag crystal lath is example, one-tenth dish processing to fully reflecting surface 1,2 is that the many laths of yttrium-aluminium-garnet 8 that will just cut into shape are that benchmark is bonded to dish with smooth mould 9, after adding the leveling of green silicon carbide abrasive material with the black iron mould in advance, the parallel strip of two mutually the same dishes of diameter is overlapped, make workpiece and mould mutually, replacing abrasive material from coarse to fine one by one, alternatively up and down thoroughly adds diadust emulsion mutually to being milled to the required depth of parallelism, flatness, surface smoothness behind the clean surface again to being ground to required physical dimension on grinder.Behind the lower wall, again to the processing of yag crystal lath end face 3,4, with lath one-tenth dish clamping on cubic block worker die clamper 11, elder generation's parallel θ angle end face that grinds to form on the black iron mould, according to the polishing step of lath fully reflecting surface 1,2, end face 3,4 is carried out polishing to desired end plane angle, the depth of parallelism, flatness and surface smoothness again.Adopting the lath of fine-grinding and polishing crystal of the present invention, can be the neodymium-doped yttrium-aluminum garnet lath, also can be neodymium-doped cerium yttrium-aluminium-garnet lath, can also be to mix multiple solid laser mediums such as titanium sapphire and chrysoberyl, all can reach technical requirement.
After tested, adopt the technical indicator of the lath-shaped laser medium that the present invention processes as follows: (the neodymium-doped yttrium-aluminum garnet lath with size 12 * 4.5 * 118mm is an example)
The depth of parallelism of fully reflecting surface reach＜1.5 ', flatness can reach 0.4 λ, surface smoothness reaches about II level (" optical element surface defect national standard " GB1185-74).
The depth of parallelism 1 of end face ', flatness can reach 0.1 λ, end plane angle θ
± 30 ", surface smoothness reaches about I level (" optical element surface defect national standard " GB1185-74).Machining accuracy has met domestic and international processing request to the lath-shaped laser medium.
The present invention compared with prior art has following advantage:
1. the present invention is with the processing simultaneously in pairs of many lath one-tenth dishes, and worker's amount less, cost is low, efficient is high, improves work efficiency more than 20 times than single-piece work.
2. Jia Gong slab laser Medium Optics quality height, the depth of parallelism, flatness, end plane angle and surface smoothness all can reach required machining accuracy.
3. the not restriction of Stimulated Light medium can all can reach the precision of necessary requirement to multiple crystal lath processing.
4. be not subjected to the restriction of slat dimension, convenient and flexible operation is grasped easily, can directly apply in manufacturer.
One-tenth dish to above-mentioned lath end face is processed the stainless steel cubic block worker die clamper 11 that adopts, oblique notch 16 on four sides at cubic block, skewed slot is identical with the end plane angle 7 that bottom surface angle theta and crystal to be machined lath 8 require, a pressing plate 12 is respectively put at the cubic block four sides, be anchored on processed crystal lath with follower bolt 13, there is a centre hole 14 in the centre above the cubic block 11, be used for matching with the polisher lapper thimble, gap, cubic block unslotted bottom surface is several garden shape yag crystal thin slices 15 that thickness is identical of bonding evenly.During the processing end face, with parallel and with overlapping four groups (6 every group) 24 the crystal laths in cubic block skewed slot side under the optics contact conditions, with the skewed slot side is that benchmark is anchored in worker's die clamper groove with pressing plate 12, the lath of one-tenth dish on cubic block, the parallel θ angle end face that grinds to form on the black iron mould is pressed size, angle and the precision of the step grinding and polishing of lath total reflection 1,2 to necessary requirement then earlier.
The said cubic block worker of the present invention die clamper is characterized in:
1. adopting cubic block worker die clamper one-tenth dish processing lath end face, is that the angle Optical finishing that difficulty is big is transformed into the low cubic block fine finishining of difficulty, can reduce the skill requirement to operating personnel.
2. the efficient height once can be processed 24 crystal laths.
3. can at any time make things convenient for and use auto-collimation collimator, from the cubic block top and four sides are detected, the controlled working precision, therefore, both improve operating efficiency, guarantee again machining accuracy.
Claims (3)
1, the processing method of many crystal lath laser mediums adopts up and down, and opposed mill grinds and polishes the crystal of processing, it is characterized in that crystal lath fully reflecting surface 1,2 one-tenth dish processing is that many crystal laths 8 that will just cut into type are that benchmark is bonded to dish with smooth mould 9, in advance with after the leveling of black iron mould plus silicon carbide abrasive material, many parallel crystal laths of two identical one-tenth dishes of diameter are overlapped, with slab crystal self workpiece and mould each other, replacing abrasive material from coarse to fine one by one, on grinder, replace mutually up and down being ground to required physical dimension, thoroughly add diadust emulsion behind the clean surface and mutually mill is polished to desired thickness, the depth of parallelism, flatness, surface smoothness, after the lower wall cleaning, with crystal lath one-tenth dish clamping on stainless steel cubic block worker die clamper 11, elder generation parallel θ angle that grinds to form on the swage tool of plane is again according to lath fully reflecting surface 1,2 polishing step is to end face 3,4 carry out grinding and polishing to the end plane angle that requires, the depth of parallelism, flatness, technical indicators such as surface smoothness.
2, according to claim 1 described processing method, it is characterized in that fine-grinding and polishing the crystal lath, can be neodymium-doped yttrium-aluminum garnet, also can be neodymium-doped, cerium yag crystal lath, can also be solid laser mediums such as titanium-doped sapphire and chrysoberyl.
3, the stainless steel cubic block worker die clamper that the one-tenth dish processing of many crystal lath end faces is adopted, it is characterized in that on the stainless steel cubic block 11 oblique notch in the four sides, skewed slot is identical with the end plane angle 7 that bottom surface angle theta and crystal lath 8 require, a pressing plate 12 is respectively put at the cubic block four sides, be fastened at processed crystal lath with follower bolt 13, the centre has a centre hole 14 to match with the polisher lapper thimble above the cubic block 11, unslotted gap, cubic block bottom surface is several garden shape yag crystal thin slices 15 that thickness is identical of bonding evenly, with parallel and with four groups of 24 crystal laths of cubic block skewed slot lateral vertical under the optics contact conditions, be benchmark with the skewed slot side, be anchored in worker's die clamper groove 16 with pressing plate 12, the lath of one-tenth dish on cubic block, the parallel θ angle end face that grinds to form on the swage tool of plane is pressed claim 1 described fully reflecting surface 1 earlier, 2 processing method is polished to required size, angle and precision.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90105801 CN1018346B (en) | 1990-04-12 | 1990-04-12 | Multiple strip laser crystal processing technology by disks and its device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90105801 CN1018346B (en) | 1990-04-12 | 1990-04-12 | Multiple strip laser crystal processing technology by disks and its device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1048184A CN1048184A (en) | 1991-01-02 |
| CN1018346B true CN1018346B (en) | 1992-09-23 |
Family
ID=4879603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 90105801 Expired CN1018346B (en) | 1990-04-12 | 1990-04-12 | Multiple strip laser crystal processing technology by disks and its device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1018346B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102922404A (en) * | 2012-11-01 | 2013-02-13 | 成都精密光学工程研究中心 | Polishing device and method for end surface angle of slab laser medium |
| CN102922419A (en) * | 2012-10-29 | 2013-02-13 | 深圳深蓝精机有限公司 | Special clamp for grinding inclined planes of platy tool grains |
| CN105615861A (en) * | 2015-12-21 | 2016-06-01 | 联想(北京)有限公司 | Method for measuring pulse and electronic device |
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| CN100500367C (en) * | 2005-09-23 | 2009-06-17 | 鸿富锦精密工业（深圳）有限公司 | Rolling fixture |
| CN103182681A (en) * | 2011-12-28 | 2013-07-03 | 青岛嘉星晶电科技股份有限公司 | Rectifying device for millstone of double-sided grinder, and rectifying method thereof |
| CN102909650B (en) * | 2012-11-01 | 2015-04-08 | 成都精密光学工程研究中心 | Surface processing method of strip laser medium |
| CN104858773B (en) * | 2015-04-29 | 2017-04-12 | 盐城工学院 | Correction disc capable of adjusting grinding flatness of wafers and grinding method of sapphire wafers |
| CN106099629B (en) * | 2016-08-04 | 2018-10-26 | 同济大学 | A kind of method that ultra-wide angular range inhibits the spontaneous amplification radiation of slab laser |
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| CN108081033A (en) * | 2017-12-04 | 2018-05-29 | 江苏师范大学 | A kind of method for processing laser slab Brewster angle end face |
| CN109571186A (en) * | 2019-01-02 | 2019-04-05 | 中国科学院上海光学精密机械研究所 | Batten member end face fixer for machining |
| CN113021081B (en) * | 2019-12-23 | 2022-12-27 | 福耀玻璃工业集团股份有限公司 | Method for roughening surface of glass substrate |
| CN111774943B (en) * | 2020-07-17 | 2022-03-01 | 成都东骏激光股份有限公司 | Vertical crystal processing tool and manufacturing method |
| CN117117618B (en) * | 2023-10-23 | 2024-03-12 | 中国工程物理研究院应用电子学研究所 | Compact serial planar waveguide laser gain module and laser amplifier |
-
1990
- 1990-04-12 CN CN 90105801 patent/CN1018346B/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102922419A (en) * | 2012-10-29 | 2013-02-13 | 深圳深蓝精机有限公司 | Special clamp for grinding inclined planes of platy tool grains |
| CN102922419B (en) * | 2012-10-29 | 2015-12-16 | 深圳深蓝精机有限公司 | Tabular cutter grain inclined plane grinds special fixture |
| CN102922404A (en) * | 2012-11-01 | 2013-02-13 | 成都精密光学工程研究中心 | Polishing device and method for end surface angle of slab laser medium |
| CN102922404B (en) * | 2012-11-01 | 2014-12-10 | 成都精密光学工程研究中心 | Polishing device and method for end surface angle of slab laser medium |
| CN105615861A (en) * | 2015-12-21 | 2016-06-01 | 联想(北京)有限公司 | Method for measuring pulse and electronic device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1048184A (en) | 1991-01-02 |
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