CN102922404B - Polishing device and method for end surface angle of slab laser medium - Google Patents

Polishing device and method for end surface angle of slab laser medium Download PDF

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Publication number
CN102922404B
CN102922404B CN201210429812.9A CN201210429812A CN102922404B CN 102922404 B CN102922404 B CN 102922404B CN 201210429812 A CN201210429812 A CN 201210429812A CN 102922404 B CN102922404 B CN 102922404B
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laser medium
slab laser
angle
matrix
face
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CN102922404A (en
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谢瑞清
陈贤华
雷向阳
王健
侯晶
袁志刚
钟波
马平
郑楠
廖德锋
李洁
李瑞洁
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CHENGDU FINE OPTICAL ENGINEERING RESEARCH CENTER
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CHENGDU FINE OPTICAL ENGINEERING RESEARCH CENTER
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Abstract

The invention provides a polishing device and method for an end surface angle of a slab laser medium. The polishing device is high in clamping precision, high in generality and suitable for mass processing. The polishing device for the end surface angle of the slab laser medium comprises a base body, a plurality of pressing blocks with adjustable displacement, and a plurality of locking bolts; a supporting surface for supporting the slab laser medium is arranged on the side surface of the base body; the supporting surface is vertical to the side surface of the base body; an included angle between the supporting surface on the base body and the bottom surface is equal to an angle between the supporting surface and the end surface of the processed slab laser medium; and the pressing blocks are respectively fixed on the sidewall of the base body. By adopting the device and method provided by the invention, various slab laser media can be processed in batches, so that high generality is achieved; and the device and method are suitable for various common machine tools; the surface figure accuracy of the end surface of the processed slab laser medium is stably over 0.1 wavelength, the angle accuracy is over 10 seconds, and the consistency is high.

Description

Burnishing device and the method thereof of slab laser medium end plane angle
Technical field
The present invention relates to optical processing technology field, particularly a kind of burnishing device and method thereof of slab laser medium end plane angle.
Background technology
The features such as the solid state laser of high-average power is high with its peak power, compact conformation, show important application prospect at aspects such as civilian (as laser cutting, welding, heat treatment, mark), military (as laser radar, range finding, photoelectronic warfare) and space communications.Traditional solid state laser is owing to adopting pole shape laser working medium, and fuel factor is very serious, has limited laser output power and beam quality.Adopt lath-shaped laser medium can effectively improve this situation.Since U.S. GE company in 1969 proposes " zigzag " slab laser concept, slab laser becomes one of effective way of generally acknowledged acquisition high-average power gradually, has obtained the broad research of countries in the world.As the core work device of high-power strip laser, the processing precision direct influence of slab laser medium element is to the output beam quality of laser instrument.Along with the continuous lifting of slab laser demanded power output, the physical dimension of required lath is increasing, and difficulty of processing and quality requirement are also more and more higher.
In order to eliminate the impact of thermal lens, conventionally lath medium is not done squarely, but two ends cuttings that pass through for oscillating laser are gone out to the Brewster's angle of inclination, and by two also polishings of large face of medium, oscillating laser is "the" shape in lath medium inside by the total internal reflection of two large faces and propagates.A crucial difficult point of this lath processing is to guarantee the machining accuracy of its end face angle of wedge.In traditional processing technology, the processing of this end face angle of wedge is conventionally first with angle block gauge location, and then the mode of casting gypsum is carried out clamping, this installation way has two large shortcomings, and the one, clamping precision is not high, and the 2nd, working (machining) efficiency is very low, technical process is hard to tackle tediously long, can not adapt to mass production.Application number be 90105801.7 Chinese patent for the processing of YAG lath end face, a kind of stainless steel cubic block work die clamper has been proposed, reduced to a certain extent the difficulty of processing of laser slab.But this fixture is owing to directly oblique notching in stainless steel cubic block surrounding, and common machining accuracy is difficult to guarantee the angle precision requirement of this skewed slot, and then limited the machining accuracy of element, and this skewed slot is fixed width, can only process fixed qty (4 groups 24 s') workpiece at every turn.
Summary of the invention
Technical problem to be solved by this invention is to provide that a kind of clamping precision is high, versatility good, can adapts to burnishing device and the method thereof of the slab laser medium end plane angle of mass processing.
The solution that technical solution problem of the present invention adopts is: the burnishing device of slab laser medium end plane angle, by matrix, the adjustable briquetting of a plurality of displacement and many lock-screws, formed, on the side of described matrix, be respectively arranged with the supporting surface that supports lath laser medium, this lateral vertical of described supporting surface and described matrix, the angle of the supporting surface on described matrix and the angle of bottom surface and processed slab laser medium end face is consistent, and described briquetting is separately fixed on the sidewall of matrix.
Further, on described briquetting, also there is an inclined-plane consistent with the angle of processed slab laser medium end face.
Further, on described supporting surface, be bonded with supporting substrate, in the bottom surface of described matrix, be bonded with and join dish substrate, described in to join the angle of angle between the non-bonding surface of dish substrate and supporting substrate and described slab laser medium end face consistent.
Further, described in, joining dish substrate adopts the laser medium material identical with processed slab laser media hardness to make.
Further, in the upper surface center of described matrix, be provided with centre hole.
Further, also include a plurality of pressing plates with circular arc external surface, described pressing plate is fixed on the sidewall of described briquetting and matrix.
Further, described a plurality of be four, and four circular arc external surface of described four pressing plates are combined into a complete face of cylinder.
Further, on described briquetting, be provided with T-shaped chute.
The finishing method of slab laser medium end plane angle, is characterized in that: the method comprises the following steps:
1) ends cutting of slab laser medium is gone out to initial angle, cutting angle precision is controlled at " dividing " level;
2) dressing plate is lain in a horizontal plane on workbench, then matrix is positioned on dressing plate;
3) polylith lath laser medium is superposed to one group, the end face of slab laser medium is close on dressing plate, the large face of slab laser medium is close to the upper surface of the supporting substrate on matrix, and the side of matrix is close in the side of slab laser medium;
4) complete behind the location of slab laser medium, with briquetting, compress lath laser medium, then lock briquetting, then with pressing plate, the side of slab laser medium is carried out fasteningly, complete after clamping, four circular arc external surface of pressing plate will be combined into a complete face of cylinder;
5) device clamping being completed is positioned on polisher lapper to be processed, and after completing the grinding and polishing of slab laser medium, detects lath laser medium end face face shape, angle, fineness index, qualified rear lower wall.
Further, described in step 5), polisher lapper is single shaft machine, two axle machine or annular polishing machines.
Beneficial effect of the present invention: adopt device and method of the present invention can realize the batch machining of various slab laser media (as crystal, pottery, glass etc.), versatility is good, applicable to multiple conventional lathe, as single shaft machine, two axle machines, annular polishing machine etc., the end face surface figure accuracy of the slab laser medium after processing can be stablized and is better than 0.1 wavelength, angle precision is better than 10 seconds, and high conformity.
Accompanying drawing explanation
Fig. 1 is the stereogram of matrix of the present invention.
Fig. 2 is that Fig. 1 is at supporting substrate and the side view of joining after dish substrate of having bondd.
Fig. 3 is the top view of Fig. 2.
Fig. 4 is the side view of briquetting of the present invention.
Fig. 5 is the stereogram of apparatus of the present invention duty.
In figure, be labeled as: 1 for screw hole, 11 for lightening hole, 12 for T-shaped chute, 13 is supporting substrate for centre hole, 10 for joining dish substrate, 8 for supporting surface, 9 for dressing plate, 7 for lock-screw, 6 for slab laser medium, 5 for pressing plate, 4 for briquetting, 3 for matrix, 2.
The specific embodiment
Design principle of the present invention is: the angle precision of slab laser medium end face processing mainly depends on its clamping precision, therefore design and make a matrix with the high accuracy angle of wedge, by the angle precision of matrix, guarantee the end plane angle precision of processed lath.By adopting mechanical type clamping, can overcome the shortcomings such as traditional gypsum cast installation way complex operation, clamping precision are not high, reduced the skill requirement to operating personnel, more be adapted to batch production, meanwhile, by the particular design of device profile, improved the versatility of device.
Below in conjunction with the drawings and specific embodiments, elaborate content of the present invention, but should not limit the scope of the invention with this.
As Figure 1-Figure 5, slab laser medium end face angle polishing device of the present invention is comprised of the adjustable briquetting of matrix 1, four displacements 2, four pressing plate 3 and many lock-screws 5 with circular arc external surface.On four sides of square matrix 1, be respectively arranged with the supporting surface 8 that supports lath laser medium 4, the lateral vertical of supporting surface 8 and this matrix 1, and become α angle with the bottom surface of matrix 1, supporting substrate 13 bonds on supporting surface 8.For reducing polishing pressure and preventing slab laser medium 4 limit of collapsing, in the bottom surface of matrix 1, bonding is joined dish substrate 7.Wherein, matrix 1 adopts metal material to make, and briquetting 2 and pressing plate 3 adopt metal or plastic material to make, and joins dish substrate 7 and adopts the laser medium material identical with slab laser medium 4 hardness to make, and supporting substrate 13 adopts glass material to make.
Utilize precision optics grinding machine to carry out accurate grinding processing to joining dish substrate 7 with the non-bonding surface of supporting substrate 13, guarantee that the angle α (be supporting substrate 13 and join the angle between the non-bonding surface that coils substrate 7) of matrix 1 upper support face 8 and bottom surface and the design angle of processed slab laser medium 4 end faces are consistent.
Some square or 11 pairs of whole devices of circular lightening hole can be set on matrix 1, briquetting 2 and pressing plate 3 and carry out loss of weight, to alleviate the limit phenomenon of collapsing of shape after 4 polishings of lath laser medium.
On briquetting 2, be provided with T-shaped chute 12, can be by regulating the position of briquetting 2 to guarantee the process requirements of the slab laser medium 4 of varying number when clamping slab laser medium 4.Lock-screw 5, through the T-shaped chute 12 on briquetting 2 and the screw hole 10 on matrix 1, is separately fixed on four sidewalls of matrix 1 four briquettings 2.On briquetting 2, also have the inclined-plane that an angle is α, briquetting 2 closely and equably contacts with slab laser medium 4 when guaranteeing clamping.
Four pressing plates 3 are fixed on the sidewall of four briquettings 2 and matrix 1 by lock-screw 5, and four circular arc external surface of four pressing plates 3 will be combined into a complete face of cylinder, be engaged in the centre hole 9 of the upper surface center setting of matrix 1, apparatus of the present invention can be applied on multiple polisher lapper, for example single shaft machine, two axle machine or annular polishing machines.
While adopting device of the present invention to carry out the polishing of slab laser medium end plane angle, comprise the following steps:
1) first adopt conventional method to cut out initial angle the end face of slab laser medium 4, cutting angle precision is controlled at " dividing " level;
2) a dressing plate 6(flatness is reached to 1 μ m) lie in a horizontal plane on workbench, then matrix 1 is positioned on dressing plate 6;
3) after slab laser medium 4 to be processed is cleaned and is dried, polylith is superposed to one group, this device can be processed at most four groups, the end face of slab laser medium 4 is close on dull and stereotyped 6, the large face of slab laser medium 4 is close to the upper surface of the supporting substrate 13 on matrix 1, and the side of matrix 1 is close in the side of slab laser medium 4;
4) complete behind location, as shown in Figure 5, with briquetting 2, compress lath laser medium 4, assurance firmly evenly, is then locked briquettings 2 with lock-screw 5 by the screw hole 10 on matrix 1, then is carried out fastening with the side of pressing plate 3 and 5 pairs of slab laser media 4 of lock-screw.Complete after clamping, four circular arc external surface of pressing plate 3 will be combined into a complete face of cylinder, make apparatus of the present invention applicable to annular polishing machined, thereby realize higher machining accuracy.
5) device aforementioned clamping being completed and slab laser medium 4 are done as a whole, are positioned on polisher lapper and process.After completing the grinding and polishing of slab laser medium 4, detect the indexs such as lath laser medium 4 end face face shapes, angle, fineness, carry out lower wall after qualified.
Employing the present invention can realize the batch machining of multiple lath laser medium (as crystal, pottery, glass etc.), and versatility is good, applicable to multiple conventional lathe.Through experimental test, adopt the present invention to process slab laser medium, production efficiency and machining accuracy obviously improve, and end face surface figure accuracy can be stablized and is better than 0.1 wavelength, and angle precision is better than 10 seconds, and high conformity.

Claims (10)

1. the burnishing device of slab laser medium end plane angle, it is characterized in that: by matrix (1), the adjustable briquetting of a plurality of displacement (2) and many lock-screws (5), formed, on the side of described matrix (1), be respectively arranged with the supporting surface (8) that supports lath laser medium (4), this lateral vertical of described supporting surface (8) and described matrix (1), the angle of the supporting surface (8) on described matrix (1) and the angle of bottom surface and processed slab laser medium (4) end face is consistent, and described briquetting (2) is separately fixed on the sidewall of matrix (1).
2. the burnishing device of slab laser medium end plane angle as claimed in claim 1, is characterized in that: on described briquetting (2), also have an inclined-plane consistent with the angle of processed slab laser medium (4) end face.
3. the burnishing device of slab laser medium end plane angle as claimed in claim 1, it is characterized in that: on described supporting surface (8), be bonded with supporting substrate (13), in the bottom surface of described matrix (1), be bonded with and join dish substrate (7), described in to join the angle of angle between dish substrate (7) and the non-bonding surface of supporting substrate (13) and described slab laser medium (4) end face consistent.
4. the burnishing device of slab laser medium end plane angle as claimed in claim 3, is characterized in that: described in join dish substrate (7) and adopt the laser medium material identical with processed slab laser medium (4) hardness to make.
5. the burnishing device of slab laser medium end plane angle as claimed in claim 1, is characterized in that: in the upper surface center of described matrix (1), be provided with centre hole (9).
6. the burnishing device of slab laser medium end plane angle as claimed in claim 1, is characterized in that: also include a plurality of pressing plates (3) with circular arc external surface, described pressing plate (3) is fixed on the sidewall of described briquetting (2) and matrix (1).
7. the burnishing device of slab laser medium end plane angle as claimed in claim 6, is characterized in that: described a plurality of be four, and four circular arc external surface of described four pressing plates (3) are combined into a complete face of cylinder.
The burnishing device of slab laser medium end plane angle claimed in claim 1, it is characterized in that: on described briquetting (2), be provided with T-shaped chute (12).
9. the finishing method of slab laser medium end plane angle, is characterized in that: the method comprises the following steps:
1) ends cutting of slab laser medium (4) is gone out to initial angle, cutting angle precision is controlled at " dividing " level;
2) dressing plate (6) is lain in a horizontal plane on workbench, then matrix (1) is positioned on dressing plate (6);
3) polylith lath laser medium (4) is superposed to one group, the end face of slab laser medium (4) is close on dressing plate (6), the large face of slab laser medium (4) is close to the upper surface of the supporting substrate (13) on matrix (1), and the side of matrix (1) is close in the side of slab laser medium (4);
4) complete behind the location of slab laser medium (4), with briquetting (2), compress lath laser medium (4), then lock briquetting (2), use again pressing plate (3) to carry out fastening to the side of slab laser medium (4), complete after clamping, four circular arc external surface of pressing plate (3) will be combined into a complete face of cylinder;
5) device clamping being completed is positioned on polisher lapper to be processed, and after completing the grinding and polishing of slab laser medium (4), detects lath laser medium (4) end face face shape, angle, fineness index, qualified rear lower wall.
10. the finishing method of slab laser medium end plane angle as claimed in claim 9, is characterized in that: described in step 5), polisher lapper is single shaft machine, two axle machine or annular polishing machines.
CN201210429812.9A 2012-11-01 2012-11-01 Polishing device and method for end surface angle of slab laser medium Active CN102922404B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108081033A (en) * 2017-12-04 2018-05-29 江苏师范大学 A kind of method for processing laser slab Brewster angle end face
CN109571186A (en) * 2019-01-02 2019-04-05 中国科学院上海光学精密机械研究所 Batten member end face fixer for machining

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1048184A (en) * 1990-04-12 1991-01-02 四川大学 Multiple strip laser crystal processing technology by disks and its device
JP2005294365A (en) * 2004-03-31 2005-10-20 Matsushita Electric Ind Co Ltd Method and device for polishing end detection and semiconductor device
CN202825541U (en) * 2012-11-01 2013-03-27 成都精密光学工程研究中心 Buffing device for angle of end face of slab laser medium

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1048184A (en) * 1990-04-12 1991-01-02 四川大学 Multiple strip laser crystal processing technology by disks and its device
CN1018346B (en) * 1990-04-12 1992-09-23 四川大学 Multiple strip laser crystal processing technology by disks and its device
JP2005294365A (en) * 2004-03-31 2005-10-20 Matsushita Electric Ind Co Ltd Method and device for polishing end detection and semiconductor device
CN202825541U (en) * 2012-11-01 2013-03-27 成都精密光学工程研究中心 Buffing device for angle of end face of slab laser medium

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