CN101802996A - 搬运装置的停止检测方法 - Google Patents
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Abstract
提供一种搬运装置的停止检测方法,不必增加零件即可迅速可靠地检测动作后的搬运装置的停止,可提高产量和利用率。所述搬运装置具有驱动电机(3)、以及安装在该驱动电机(3)的旋转轴(4)一侧的搬运臂(6),所述驱动电机(3)在旋转轴(4)上作用有旋转方向的作用力时可产生感应电动势。在所述搬运臂(6)的另一侧保持被搬运物(S),通过所述驱动电机(3),使旋转轴仅(4)旋转到规定的旋转角时停止旋转,检测由于搬运臂(6)的振动而产生的所述感应电动势,当所述检出的感应电动势到达小于等于规定值时,判断搬运臂(6)停止。
Description
技术领域
本发明涉及搬运装置的停止检测方法,尤其涉及在大气中或真空中搬运处理基板时使用的搬运装置的停止检测方法。
背景技术
在半导体装置或平板显示器的制造工艺中,为了将Si晶片或玻璃基板等处理基板(被搬运物)搬运到溅射成膜、离子注入或蚀刻等多种处理装置中,需要使用搬运装置。公知的搬运装置,由驱动电机、以及安装在该驱动电机旋转轴前端的搬运臂所构成(专利文献1)。
所述搬运装置安装在与上述处理装置连接的真空进样室、以及配置在多个处理装置的处理室之间的传送室等中。以向真空进样室传送基板为例,当将搬运臂的一端移动到真空进样室外侧后,由具有公知结构的搬运机器人与该搬运臂进行基板的接收或移交。此时,接收或移交基板的位置坐标被作为学习数据存储到搬运机器人的控制器中。
专利文献1:特开2005-12033号公报
发明内容
如上所述搬运基板时,为了提高产量和利用率(或运转率),要求搬运机器人高速并高精度地与搬运臂进行基板的接收与移交。然而,使驱动电机动作将搬运臂移动到规定位置时,由于其停止时的惯性力,搬运臂变得不稳。此时,会产生下述问题,即使具有编码器等旋转位置检测手段的驱动电机或与脉冲功率同步动作的步进电机可以识别搬运臂已到达规定位置,但是不能识别不稳定的动作,即搬运臂的旋转方向上的衰减振动(摆动)。
搬运臂的振动较大时,搬运机器人根据存储的坐标进行基板的接收与移交时,基板的位置偏移等搬运错误时有发生,导致利用率下降。如果等到搬运臂移动后的动作(振动)充分衰减并稳定后,搬运机器人再开始接收或移交基板(即延迟接收或移交的开始时间),虽然可以控制上述问题的发生,但是不利于提高产量。
另外,也可以通过位移传感器等测量搬运臂的振动,检测出其衰减到规定范围后再开始接收与移交基板,但这种做法不仅会使控制变得复杂,还会增加零件个数提高成本,而且在真空中的检测也很困难。
为此,鉴于上述各点,本发明提供一种搬运装置的停止检测方法,不增加零件的数量,就能够迅速简便地检测出动作后的搬运装置的停止,同时可提高产量和利用率。
为了解决上述问题,本发明提供一种搬运装置的停止检测方法,所述搬运装置包括驱动电机、以及安装在该驱动电机旋转轴一侧的搬运臂,所述驱动电机在旋转轴上作用有旋转方向的作用力时可产生感应电动势,其特征在于:在所述搬运臂的另一侧保持被搬运物,通过所述驱动电机,使旋转轴仅旋转到规定的旋转角时停止旋转,检测由于搬运臂的振动而产生的所述感应电动势,当所述检出的感应电动势到达小于等于规定值时,判断搬运臂停止。
若采用本发明,通过所述驱动电机的驱动,使旋转轴仅旋转到规定的旋转角,从而使搬运臂移动到规定位置时,由于其停止时的惯性力,搬运臂变得不稳,即搬运臂上产生衰减振动。此时,伴随在旋转轴上重复作用旋转方向的作用力,结果会在例如电机的线圈间产生感应电动势。测量该感应电动势,当测得的感应电动势小于等于预先设定的规定值时,可检测到搬运臂移动后的振动已衰减并稳定到不会产生基板位置偏移等搬运错误的范围。
本发明不必使用位移传感器等多余的零件,由驱动搬运臂所必需使用的驱动电机自身的电气性变化,即使在真空中也可以迅速可靠地检测到动作后的搬运臂振动的稳定。因而在通过搬运机器人进行被搬运物的接收或移交时,可提高产量和利用率,并且可维持低成本。
在本发明中,由于如上所述通过驱动电机产生的感应电动势监视搬运臂动作后的振动,在衰减振动的振幅和衰减振动的时间超过规定值时,可判断出因驱动电机自身或轴承的老化等原因使搬运装置自身的异常增加。因此,本发明的搬运装置的停止检测方法也可作为检测搬运装置自身异常的手段而发挥功能。
此外,本发明中的驱动电机优选为步进电机。
在使用的驱动电机旋转扭矩、搬运臂的长度以及搬运物的重量等条件相同的情况下,所述衰减振动的频率基本不会变化。因此,在检测所述感应电动势时,仅选择性地抽出规定频率的信号,就不会受来自驱动电机驱动器的输出中所包含的噪声影响,能准确地测量仅仅由于所述衰减振动而产生的感应电动势。
具体实施方式
参照图1加以说明,1为本实施方式的搬运装置,配置在例如可形成真空气氛的真空进样室2内。真空进样室2连接在例如溅射成膜、离子注入以及蚀刻等各种处理装置(未图示)上,在将玻璃基板或Si晶片等需处理的基板(被搬运物)从大气中搬运到真空状态的上述装置中时使用。
搬运装置1具有设置在真空进样室2外侧的步进电机3(驱动电机)。步进电机3具有公知的构造,例如由具有绕组线圈的定子和转子构成的两相单极永磁(PM)型结构。未图示的转子上连接有旋转轴4,该旋转轴4借助真空密封垫贯穿真空进样室2的壁面而纵向设置。通过来自电机驱动器5的脉冲信号使DC端子和各线圈端子之间依次通过电流,使转子、进而使旋转轴4按照规定的步进单位旋转驱动。
旋转轴4的一端位于真空进样室2内,并设有搬运臂6。用于搬运玻璃基板或Si晶片等基板的搬运臂6,其前端形成有手指部61,使其能够在与基板S接触面积较小的状态下保持该基板S。
此外,步进电机3与电机驱动器5之间设置有振动测量电路7,该测量电路可检测由于步进电机2的旋转停止而产生的搬运臂6的振动。振动测量电路7具有用于测量线圈31之间产生的电位的电压测量部71(参照图2)。
有时,由电机驱动器5向步进电机3的线圈的各端子DC输出中,会包含有电路中的各种高频噪声。并且,在使用的步进电机3的旋转扭矩、搬运臂6的长度以及基板S的重量等条件相同的情况下,上述振动的频率基本不会变化(参照图3(a)),该振动将会衰减。所以,在振动测量电路7中设置有转换部72,用于对测量的电位进行傅立叶变换,变换为特定频率(例如6Hz)的信号强度。仅仅选择性地读取由于搬运臂6的振动而产生的感应电动势。而后将转换部72得到的信号强度通过输出部73输出到电机驱动器5(参照图2)。
在此情况下,使搬运臂6以规定频率(例如6Hz)振动时,用示波器等测量步进电机3的线圈间产生的电位,将测定的波形通过傅立叶变换得到上述规定频率的信号强度,从而得到该电位与摆动量(振幅)之间的相关数据,并将该相关数据预先存储到电机驱动器5中(参照图3(b))。以下,说明本发明搬运装置1的停止检测方法。
在真空进样室2的大气状态下,打开设置在该真空进样室2中的门阀(未图示),通过电机驱动器5控制驱动步进电机3旋转,将手指部61移动到真空进样室2外侧的规定位置。当步进电机3停止旋转后搬运臂6随即停止,则搬运臂6由于其停止时的惯性力在旋转方向上产生衰减振动。此时,在旋转轴4的旋转方向上重复施加作用力,则因为贯通线圈的磁束的时间性变化产生感应电动势,由振动测量电路7的电压测量部71测量该电位。
接着,将转换部72中测量的电位傅立叶变换为预先设定的特定频率(例如6Hz)中的信号强度,通过输出部73输出到电机驱动器5。如果该信号强度小于预先设定值,则由电机驱动器5检测出搬运臂6移动后的振动已经被衰减并稳定到不发生基板S的位置偏移等搬运错误的范围,并将该结果输出到搬运机器人的控制器。随后,通过搬运机器人对手指部61进行基板S的接收或移交。
另外,当基板S的重量发生变化时,振动的频率将发生变化,相应地优选可在电机驱动器5中适当设定信号强度,以及决定振动稳定性的信号强度的阈值。
如上所述,本实施方式中,不必使用位移传感器等多余的零件,由构成搬运装置1所必需使用的驱动电机3的电气性变化,不论在真空中还是大气中,都可以迅速可靠地检测动作后的搬运臂6振动的稳定。因而在通过搬运机器人进行基板S的接收或移交时,可提高产量和利用率,并且可维持低成本。
在本实施方式中,由于监视动作后的搬运臂6的振动,在衰减振动的振幅和衰减振动的时间超过规定值时,可判断出因步进电机3自身或轴承老化等引起的步进电机3等的异常(机械故障)。因此,以上说明的搬运装置1的停止检测方法也可作为检测搬运装置1自身异常的手段而发挥功能。
并且,本实施方式中,说明了不受电机驱动器5的输出中所含噪声的影响、仅仅为测量由衰减振动引起的感应电动势而设置的傅立叶变换部,但不限于此,例如也可仅使用高通滤波器或低通滤波器等公知手段高效地测量特定频率的感应电动势。
本实施方式中,对用电压测量部71直接测量线圈间产生的感应电动势的电路作为振动测量电路进行了说明,但是不限于此,例如也可采用在电机驱动器的输出上串联设置电阻来测量电位的电路构成。
附图说明
图1是向真空进样室设置搬运装置的示意图。
图2是实施本发明的振动测量电路的构成示意图。
图3(a)是搬运臂的衰减振动示意图,(b)是在规定的频率上伴随衰减振动的信号强度变化示意图。
图中标号说明
1、搬运装置
3、步进电机(驱动电机)
4、旋转轴
6、搬运臂
7、振动测量电路
S、基板(被搬运物)。
Claims (3)
1.一种搬运装置的停止检测方法,所述搬运装置包括:
一个驱动电机;
以及安装在该驱动电机旋转轴一侧的搬运臂,所述驱动电机在旋转轴上作用有旋转方向的作用力时可产生感应电动势,其特征在于该方法包括:
在所述搬运臂的另一侧保持被搬运物,通过所述驱动电机,使旋转轴仅旋转到规定的旋转角时停止旋转,检测由于搬运臂的振动而产生的所述感应电动势;以及
当所述检出的感应电动势到达小于等于规定值时,判断搬运臂停止。
2.根据权利要求1所述的搬运装置的停止检测方法,其特征在于:所述驱动电机为步进电机。
3.根据权利要求1或2所述的搬运装置的停止检测方法,其特征在于:检测所述感应电动势时,仅仅选择性地抽出特定频率的信号。
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US20100129940A1 (en) * | 2008-11-24 | 2010-05-27 | Texas Instruments Incorporated | Vibration monitoring of electronic substrate handling systems |
US9034865B2 (en) | 2010-02-18 | 2015-05-19 | Medivation Technologies, Inc. | Pyrido [4,3-B] indole and pyrido [3,4-B] indole derivatives and methods of use |
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JPH08189859A (ja) * | 1995-01-09 | 1996-07-23 | Hitachi Ltd | 磁気カップリングの振動測定装置 |
US5781363A (en) * | 1996-10-15 | 1998-07-14 | International Business Machines Corporation | Servo-free velocity estimator for coil driven actuator arm in a data storage drive |
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JP2002292337A (ja) * | 2001-03-30 | 2002-10-08 | Ykk Corp | パーツフィーダの制御方法と装置 |
JP4329416B2 (ja) * | 2003-06-06 | 2009-09-09 | ソニー株式会社 | データ処理装置及びデータ処理方法、編集処理装置及び編集処理方法、プログラム、記録媒体 |
JP2005012033A (ja) | 2003-06-20 | 2005-01-13 | Nikon Corp | 搬送装置 |
JP2006016142A (ja) * | 2004-07-01 | 2006-01-19 | Ishida Co Ltd | 電磁振動式搬送装置の制御装置及びその制御装置を備えた搬送装置を有する計量装置 |
JP4845489B2 (ja) | 2005-11-22 | 2011-12-28 | 株式会社スター精機 | 成形品取出機のチャック制振方法 |
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JP5188503B2 (ja) | 2013-04-24 |
TWI449117B (zh) | 2014-08-11 |
US20110229299A1 (en) | 2011-09-22 |
CN101802996B (zh) | 2012-03-28 |
TW200919618A (en) | 2009-05-01 |
KR20100085058A (ko) | 2010-07-28 |
JPWO2009038164A1 (ja) | 2011-01-06 |
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US8390230B2 (en) | 2013-03-05 |
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