CN101798680B - 环境友好半导体材料Mg2Si薄膜的磁控溅射制备工艺 - Google Patents
环境友好半导体材料Mg2Si薄膜的磁控溅射制备工艺 Download PDFInfo
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- CN101798680B CN101798680B CN2010101473042A CN201010147304A CN101798680B CN 101798680 B CN101798680 B CN 101798680B CN 2010101473042 A CN2010101473042 A CN 2010101473042A CN 201010147304 A CN201010147304 A CN 201010147304A CN 101798680 B CN101798680 B CN 101798680B
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CN2010101473042A CN101798680B (zh) | 2010-04-15 | 2010-04-15 | 环境友好半导体材料Mg2Si薄膜的磁控溅射制备工艺 |
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CN2010101473042A CN101798680B (zh) | 2010-04-15 | 2010-04-15 | 环境友好半导体材料Mg2Si薄膜的磁控溅射制备工艺 |
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CN101798680A CN101798680A (zh) | 2010-08-11 |
CN101798680B true CN101798680B (zh) | 2012-07-04 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN103451611B (zh) * | 2013-08-29 | 2016-03-23 | 电子科技大学 | 适用于栅介质层的低漏电流HfO2薄膜的制备方法 |
CN104018124B (zh) * | 2014-06-19 | 2017-04-19 | 贵州大学 | 一种半导体材料SiC薄膜的制备工艺 |
CN104600155A (zh) * | 2015-01-09 | 2015-05-06 | 贵州大学 | 一种红外探测器及其制备方法 |
CN105070806B (zh) * | 2015-07-17 | 2018-01-30 | 贵州大学 | 一种发光二极管及其制备方法 |
CN105274484B (zh) * | 2015-10-27 | 2018-01-12 | 福州大学 | 一种Sb掺杂Mg2Si基热电薄膜及其制备方法 |
CN105200382B (zh) * | 2015-10-27 | 2018-04-13 | 福州大学 | 一种Ge掺杂Mg2Si基热电薄膜及其制备方法 |
CN105220118B (zh) * | 2015-10-27 | 2017-10-20 | 福州大学 | 一种Al掺杂Mg2Si基热电薄膜及其制备方法 |
CN105220119A (zh) * | 2015-10-27 | 2016-01-06 | 福州大学 | 一种Ag掺杂Mg2Si基热电薄膜及其制备方法 |
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CN101339906A (zh) * | 2008-08-12 | 2009-01-07 | 贵州大学 | 新型环境半导体光电子材料β-FeSi2薄膜的制备工艺 |
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Inventor after: Xie Quan Inventor after: Xiao Qingquan Inventor after: Zhang Jinmin Inventor after: Chen Qian Inventor after: Yu Zhiqiang Inventor after: Zhao Kejie Inventor before: Xie Quan Inventor before: Xiao Qingquan Inventor before: Zhang Jinmin |
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Free format text: CORRECT: INVENTOR; FROM: XIE QUAN XIAO QINGQUAN ZHANG JINMIN TO: XIE QUAN XIAO QINGQUAN ZHANG JINMIN CHEN XI YU ZHIQIANG ZHAO KEJIE |
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