CN101786797B - 处理装置 - Google Patents

处理装置 Download PDF

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Publication number
CN101786797B
CN101786797B CN200910129866.1A CN200910129866A CN101786797B CN 101786797 B CN101786797 B CN 101786797B CN 200910129866 A CN200910129866 A CN 200910129866A CN 101786797 B CN101786797 B CN 101786797B
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CN
China
Prior art keywords
substrate
heating unit
mentioned
processing space
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN200910129866.1A
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English (en)
Chinese (zh)
Other versions
CN101786797A (zh
Inventor
池田均
菊池正志
小川正浩
冈山智彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of CN101786797A publication Critical patent/CN101786797A/zh
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Publication of CN101786797B publication Critical patent/CN101786797B/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
CN200910129866.1A 2009-01-22 2009-03-30 处理装置 Active CN101786797B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009012402A JP5232671B2 (ja) 2009-01-22 2009-01-22 処理装置
JP2009-012402 2009-06-02

Publications (2)

Publication Number Publication Date
CN101786797A CN101786797A (zh) 2010-07-28
CN101786797B true CN101786797B (zh) 2014-04-02

Family

ID=42530197

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200910129866.1A Active CN101786797B (zh) 2009-01-22 2009-03-30 处理装置

Country Status (4)

Country Link
JP (1) JP5232671B2 (enExample)
KR (1) KR101563002B1 (enExample)
CN (1) CN101786797B (enExample)
TW (1) TWI438290B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102560373B (zh) * 2010-12-16 2014-12-17 北京北方微电子基地设备工艺研究中心有限责任公司 基片加热腔室、使用基片加热腔室的方法及基片处理设备
CN102508381B (zh) * 2011-11-29 2015-02-11 深圳市华星光电技术有限公司 一种用于液晶面板的烘烤设备
CN104233210A (zh) * 2013-06-08 2014-12-24 深圳市联懋塑胶有限公司 一种高效顶喷真空离子镀套喷用的夹具
KR20170004773A (ko) * 2015-07-03 2017-01-11 김재욱 다단으로 탈포가 가능한 오토클레이브 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101176006A (zh) * 2005-06-14 2008-05-07 株式会社岛津制作所 Tft基板检查装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3833439B2 (ja) * 2000-05-02 2006-10-11 株式会社ノリタケカンパニーリミテド 大型基板用多段加熱炉、及び両面加熱式遠赤外線パネルヒーター、並びに該加熱炉内の給排気方法
JP2002221394A (ja) * 2001-01-24 2002-08-09 Showa Mfg Co Ltd 電子部品の加熱装置
JP4280481B2 (ja) * 2002-10-17 2009-06-17 タツモ株式会社 基板支持装置
JP5170964B2 (ja) * 2005-02-18 2013-03-27 株式会社半導体エネルギー研究所 発光装置の作製方法
JP5052152B2 (ja) * 2007-02-13 2012-10-17 株式会社アルバック 真空チャンバ、ロードロックチャンバ、及び処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101176006A (zh) * 2005-06-14 2008-05-07 株式会社岛津制作所 Tft基板检查装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特開2008-197374A 2008.08.28

Also Published As

Publication number Publication date
CN101786797A (zh) 2010-07-28
TWI438290B (zh) 2014-05-21
TW201028489A (en) 2010-08-01
JP2010169896A (ja) 2010-08-05
KR101563002B1 (ko) 2015-10-23
JP5232671B2 (ja) 2013-07-10
KR20100086400A (ko) 2010-07-30

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