CN101740451A - 芯片分拣设备的顶针机构 - Google Patents
芯片分拣设备的顶针机构 Download PDFInfo
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Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102074458A (zh) * | 2010-11-19 | 2011-05-25 | 华中科技大学 | 一种芯片剥离装置 |
CN102254792A (zh) * | 2011-07-08 | 2011-11-23 | 华中科技大学 | 一种具有安全顶针的芯片剥离装置 |
CN102376613A (zh) * | 2010-08-20 | 2012-03-14 | 吴华 | 集成电路装片机顶针模块 |
CN103077918A (zh) * | 2013-01-09 | 2013-05-01 | 广东志成华科光电设备有限公司 | 一种芯片分选设备顶针装置 |
CN103247711A (zh) * | 2012-02-14 | 2013-08-14 | 理想能源设备(上海)有限公司 | 一种用于抬升衬底的顶杆组件 |
WO2014201706A1 (zh) * | 2013-06-18 | 2014-12-24 | 深圳市华星光电技术有限公司 | 一种取放大尺寸液晶基板的自动化设备 |
CN104626727A (zh) * | 2013-11-13 | 2015-05-20 | 鸿富锦精密工业(深圳)有限公司 | 下料机构 |
CN106611736A (zh) * | 2015-10-22 | 2017-05-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 顶针机构及半导体加工设备 |
CN108545449A (zh) * | 2018-05-02 | 2018-09-18 | 东莞市锐祥智能卡科技有限公司 | 一种取芯片机的芯片顶出装置 |
CN109065482A (zh) * | 2018-08-09 | 2018-12-21 | 深圳市华腾半导体设备有限公司 | 一种芯片分选机构及其芯片分选方法 |
CN110112093A (zh) * | 2019-06-14 | 2019-08-09 | 深圳市哈德胜精密科技股份有限公司 | 一种倒封装芯片柔性顶针操作装置和系统 |
CN110371679A (zh) * | 2019-07-24 | 2019-10-25 | 浙江管工智能机械设备有限公司 | 一种气力输送管道补气器 |
CN113261080A (zh) * | 2019-02-20 | 2021-08-13 | 株式会社国际电气 | 基板处理装置、炉口封闭单元及半导体器件的制造方法 |
CN113838789A (zh) * | 2021-11-26 | 2021-12-24 | 河北圣昊光电科技有限公司 | 一种芯片自动供给装置及供给方法 |
CN113865835A (zh) * | 2021-12-06 | 2021-12-31 | 河北圣昊光电科技有限公司 | 一种基于双积分球的芯片测试设备及测试方法 |
CN114933167A (zh) * | 2022-04-27 | 2022-08-23 | 泉州兰姆达仪器设备有限公司 | 一种激光芯片测试分选机的顶针机构及其工作方法 |
WO2023065482A1 (zh) * | 2021-10-19 | 2023-04-27 | 歌尔股份有限公司 | 注塑方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3498877B2 (ja) * | 1995-12-05 | 2004-02-23 | 株式会社東芝 | 半導体製造装置および半導体装置の製造方法 |
JP4574251B2 (ja) * | 2003-09-17 | 2010-11-04 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP5054933B2 (ja) * | 2006-05-23 | 2012-10-24 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
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Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102376613A (zh) * | 2010-08-20 | 2012-03-14 | 吴华 | 集成电路装片机顶针模块 |
CN102376613B (zh) * | 2010-08-20 | 2013-04-03 | 吴华 | 集成电路装片机顶针模块 |
CN102074458A (zh) * | 2010-11-19 | 2011-05-25 | 华中科技大学 | 一种芯片剥离装置 |
CN102254792A (zh) * | 2011-07-08 | 2011-11-23 | 华中科技大学 | 一种具有安全顶针的芯片剥离装置 |
CN102254792B (zh) * | 2011-07-08 | 2013-01-02 | 华中科技大学 | 一种具有安全顶针的芯片剥离装置 |
CN103247711A (zh) * | 2012-02-14 | 2013-08-14 | 理想能源设备(上海)有限公司 | 一种用于抬升衬底的顶杆组件 |
CN103247711B (zh) * | 2012-02-14 | 2016-03-30 | 理想能源设备(上海)有限公司 | 一种用于抬升衬底的顶杆组件 |
CN103077918A (zh) * | 2013-01-09 | 2013-05-01 | 广东志成华科光电设备有限公司 | 一种芯片分选设备顶针装置 |
CN103077918B (zh) * | 2013-01-09 | 2016-03-09 | 广东志成华科光电设备有限公司 | 一种芯片分选设备顶针装置 |
WO2014201706A1 (zh) * | 2013-06-18 | 2014-12-24 | 深圳市华星光电技术有限公司 | 一种取放大尺寸液晶基板的自动化设备 |
CN104626727A (zh) * | 2013-11-13 | 2015-05-20 | 鸿富锦精密工业(深圳)有限公司 | 下料机构 |
CN104626727B (zh) * | 2013-11-13 | 2016-10-05 | 鸿富锦精密工业(深圳)有限公司 | 下料机构 |
CN106611736A (zh) * | 2015-10-22 | 2017-05-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 顶针机构及半导体加工设备 |
CN106611736B (zh) * | 2015-10-22 | 2020-04-28 | 北京北方华创微电子装备有限公司 | 顶针机构及半导体加工设备 |
CN108545449A (zh) * | 2018-05-02 | 2018-09-18 | 东莞市锐祥智能卡科技有限公司 | 一种取芯片机的芯片顶出装置 |
CN108545449B (zh) * | 2018-05-02 | 2023-10-27 | 东莞市锐祥智能卡科技有限公司 | 一种取芯片机的芯片顶出装置 |
CN109065482A (zh) * | 2018-08-09 | 2018-12-21 | 深圳市华腾半导体设备有限公司 | 一种芯片分选机构及其芯片分选方法 |
CN113261080A (zh) * | 2019-02-20 | 2021-08-13 | 株式会社国际电气 | 基板处理装置、炉口封闭单元及半导体器件的制造方法 |
CN110112093A (zh) * | 2019-06-14 | 2019-08-09 | 深圳市哈德胜精密科技股份有限公司 | 一种倒封装芯片柔性顶针操作装置和系统 |
CN110112093B (zh) * | 2019-06-14 | 2024-02-09 | 深圳市哈德胜精密科技股份有限公司 | 一种倒封装芯片柔性顶针操作装置和系统 |
CN110371679A (zh) * | 2019-07-24 | 2019-10-25 | 浙江管工智能机械设备有限公司 | 一种气力输送管道补气器 |
WO2023065482A1 (zh) * | 2021-10-19 | 2023-04-27 | 歌尔股份有限公司 | 注塑方法 |
CN113838789A (zh) * | 2021-11-26 | 2021-12-24 | 河北圣昊光电科技有限公司 | 一种芯片自动供给装置及供给方法 |
WO2023103493A1 (zh) * | 2021-12-06 | 2023-06-15 | 河北圣昊光电科技有限公司 | 一种基于双积分球的芯片测试设备及测试方法 |
CN113865835B (zh) * | 2021-12-06 | 2022-02-18 | 河北圣昊光电科技有限公司 | 一种基于双积分球的芯片测试设备及测试方法 |
CN113865835A (zh) * | 2021-12-06 | 2021-12-31 | 河北圣昊光电科技有限公司 | 一种基于双积分球的芯片测试设备及测试方法 |
CN114933167A (zh) * | 2022-04-27 | 2022-08-23 | 泉州兰姆达仪器设备有限公司 | 一种激光芯片测试分选机的顶针机构及其工作方法 |
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Owner name: GUANGDONG ZHICHENG HUAKE PHOTOELECTRIC EQUIPMENT C Free format text: FORMER OWNER: DONGGUAN HUAKE PRECISION SIDEA EQUIPMENT CO., LTD. Effective date: 20110321 Owner name: DG-HUST MANUFACTURING ENGINEERING INSTITUTE CO., L Free format text: FORMER OWNER: DONGGUAN INSTITUTE OF MANUFACTURING ENGINEERING;HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY Effective date: 20110321 Free format text: FORMER OWNER: DG-HUST MANUFACTURING ENGINEERING INSTITUTE CO., LTD. Owner name: DONGGUAN HUAKE PRECISION SIDEA EQUIPMENT CO., LTD. Free format text: FORMER OWNER: DG-HUST MANUFACTURING ENGINEERING INSTITUTE CO., LTD. Effective date: 20110321 |
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Free format text: CORRECT: ADDRESS; FROM: 523808 NO. 1, KEJI ROAD 9, SONGSHANHU TECHNOLOGY INDUSTRIAL PARK, DONGGUAN CITY, GUANGDONG PROVINCE TO: 523808 ROOM 318, R + D BUILDING, NO. 1, KEJI ROAD 9, SONGSHANHU TECHNOLOGY INDUSTRIAL PARK, DONGGUAN CITY, GUANGDONG PROVINCE Free format text: CORRECT: ADDRESS; FROM: 523808 ROOM 318, R + D BUILDING, NO. 1, KEJI ROAD 9, SONGSHANHU TECHNOLOGY INDUSTRIAL PARK, DONGGUAN CITY, GUANGDONG PROVINCE TO: 523808 ROOM 310, R + D BUILDING, NO. 1, KEJI ROAD 9, SONGSHANHU TECHNOLOGY INDUSTRIAL PARK, DONGGUAN CITY Free format text: CORRECT: ADDRESS; FROM: 523808 DG-HUST MANUFACTURING ENGINEERING RESEARCH INSTITUTE, NO. 1, KEJI ROAD 9, SONGSHANHU TECHNOLOGY INDUSTRIAL PARK, DONGGUAN CITY, GUANGDONG PROVINCE TO: 523808 NO. 1, KEJI ROAD 9, SONGSHANHU TECHNOLOGY INDUSTRIAL PARK, DONGGUAN CITY, GUANGDONG PROVINCE |
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Effective date of registration: 20110321 Address after: 523808 room 1, R & D building, nine science and Technology Industrial Road, Songshan Lake Science and Technology Industrial Park, Dongguan, 310 Applicant after: GUANGDONG ZHICHENG HUAKE PHOTOELECTRIC EQUIPMENT Co.,Ltd. Address before: 523808, room 1, R & D building, Songshan Road, nine, science and Technology Industrial Park, Songshan, Dongguan, Guangdong 318, China Applicant before: Dongguan Huake precision silicon electrical equipment Co.,Ltd. Effective date of registration: 20110321 Address after: 523808, room 1, R & D building, Songshan Road, nine, science and Technology Industrial Park, Songshan, Dongguan, Guangdong 318, China Applicant after: Dongguan Huake precision silicon electrical equipment Co.,Ltd. Address before: Science and technology Songshan Lake Science and Technology Industrial Park in Guangdong province Dongguan City nine road 523808 No. 1 Applicant before: Dongguan Huake Manufacturing Engineering Research Institute Co.,Ltd. Effective date of registration: 20110321 Address after: Science and technology Songshan Lake Science and Technology Industrial Park in Guangdong province Dongguan City nine road 523808 No. 1 Applicant after: Dongguan Huake Manufacturing Engineering Research Institute Co.,Ltd. Address before: 523808 science and Technology Industrial Park, Songshan nine, science and technology road, Guangdong, Dongguan, 1, Dongguan Institute of manufacturing engineering, Huazhong University of Science and Technology Applicant before: DG-HUST Manufacturing Engineering Institute Co-applicant before: Dongguan Huake Manufacturing Engineering Research Institute Co.,Ltd. |
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Owner name: DONGGUAN INSTITUTE OF MANUFACTURING ENGINEERING;HU Free format text: FORMER OWNER: DG-HUST MANUFACTURING ENGINEERING INSTITUTE CO., LTD. Effective date: 20141229 Owner name: DONGGUAN HUAKE PRECISION SIDEA EQUIPMENT CO., LTD. Free format text: FORMER OWNER: GUANGDONG ZHICHENG HUAKE PHOTOELECTRIC EQUIPMENT CO., LTD. Effective date: 20141229 Owner name: DG-HUST MANUFACTURING ENGINEERING INSTITUTE CO., L Free format text: FORMER OWNER: DONGGUAN HUAKE PRECISION SIDEA EQUIPMENT CO., LTD. Effective date: 20141229 |
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Effective date of registration: 20141229 Address after: Science and technology Songshan Lake Science and Technology Industrial Park in Guangdong province Dongguan City nine road 523808 No. 1 Patentee after: DG-HUST MANUFACTURING ENGINEERING INSTITUTE Patentee after: Dongguan Huake Manufacturing Engineering Research Institute Co.,Ltd. Address before: 523808, B Industrial Zone, Songshan Industrial Park, Songshan District, Guangdong City, Dongguan Province, room 2-1, Building Engineering Research Institute, Huazhong University of Science and Technology, Dongguan Patentee before: Dongguan Huake Manufacturing Engineering Research Institute Co.,Ltd. Effective date of registration: 20141229 Address after: 523808, B Industrial Zone, Songshan Industrial Park, Songshan District, Guangdong City, Dongguan Province, room 2-1, Building Engineering Research Institute, Huazhong University of Science and Technology, Dongguan Patentee after: Dongguan Huake Manufacturing Engineering Research Institute Co.,Ltd. Address before: 523808, room 1, R & D building, Songshan Road, nine, science and Technology Industrial Park, Songshan, Dongguan, Guangdong 318, China Patentee before: Dongguan Huake precision silicon electrical equipment Co.,Ltd. Effective date of registration: 20141229 Address after: 523808, room 1, R & D building, Songshan Road, nine, science and Technology Industrial Park, Songshan, Dongguan, Guangdong 318, China Patentee after: Dongguan Huake precision silicon electrical equipment Co.,Ltd. Address before: 523808, room 1, R & D building, Songshan Road, nine, science and Technology Industrial Park, Songshan, Dongguan, Guangdong 310, China Patentee before: GUANGDONG ZHICHENG HUAKE PHOTOELECTRIC EQUIPMENT Co.,Ltd. |
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