CN101715422B - 悬浮装置及悬浮输送装置 - Google Patents

悬浮装置及悬浮输送装置 Download PDF

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Publication number
CN101715422B
CN101715422B CN200880021740.6A CN200880021740A CN101715422B CN 101715422 B CN101715422 B CN 101715422B CN 200880021740 A CN200880021740 A CN 200880021740A CN 101715422 B CN101715422 B CN 101715422B
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CN
China
Prior art keywords
fluid
levitation
base
suspension
opening
Prior art date
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Active
Application number
CN200880021740.6A
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English (en)
Chinese (zh)
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CN101715422A (zh
Inventor
平田贤辅
田中刈入
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
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IHI Corp
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Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Publication of CN101715422A publication Critical patent/CN101715422A/zh
Application granted granted Critical
Publication of CN101715422B publication Critical patent/CN101715422B/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Advancing Webs (AREA)
CN200880021740.6A 2007-06-29 2008-05-09 悬浮装置及悬浮输送装置 Active CN101715422B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007173433A JP5396695B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置
JP173433/2007 2007-06-29
PCT/JP2008/058625 WO2009004859A1 (ja) 2007-06-29 2008-05-09 浮上装置及び浮上搬送装置

Publications (2)

Publication Number Publication Date
CN101715422A CN101715422A (zh) 2010-05-26
CN101715422B true CN101715422B (zh) 2013-03-27

Family

ID=40225916

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200880021740.6A Active CN101715422B (zh) 2007-06-29 2008-05-09 悬浮装置及悬浮输送装置

Country Status (5)

Country Link
JP (1) JP5396695B2 (enExample)
KR (1) KR20100018613A (enExample)
CN (1) CN101715422B (enExample)
TW (1) TW200918427A (enExample)
WO (1) WO2009004859A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101142959B1 (ko) * 2009-06-29 2012-05-08 김영태 평판 정밀 플로팅 시스템
JP5879680B2 (ja) * 2010-11-05 2016-03-08 株式会社Ihi 非接触式静電チャック
JP5790121B2 (ja) * 2011-04-26 2015-10-07 株式会社Ihi 浮上搬送装置
CN102785940A (zh) * 2012-08-15 2012-11-21 吉林大学 超声波/气浮混合式非接触自动运输装置
CN206705256U (zh) * 2016-11-01 2017-12-05 昆山高艺泽机械设备有限公司 一种气浮式输送系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1590254A (zh) * 2003-08-28 2005-03-09 村田机械株式会社 浮起搬送装置
CN1817767A (zh) * 2005-02-09 2006-08-16 神钢电机株式会社 空气浮起单元、运送方法以及空气浮起运送装置
CN1966371A (zh) * 2005-11-14 2007-05-23 石川岛播磨重工业株式会社 浮起装置及输送装置
CN1982179A (zh) * 2005-12-16 2007-06-20 爱德牌工程有限公司 用于传送玻璃基板的设备和方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1590254A (zh) * 2003-08-28 2005-03-09 村田机械株式会社 浮起搬送装置
CN1817767A (zh) * 2005-02-09 2006-08-16 神钢电机株式会社 空气浮起单元、运送方法以及空气浮起运送装置
CN1966371A (zh) * 2005-11-14 2007-05-23 石川岛播磨重工业株式会社 浮起装置及输送装置
CN1982179A (zh) * 2005-12-16 2007-06-20 爱德牌工程有限公司 用于传送玻璃基板的设备和方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平11-268830A 1999.10.05

Also Published As

Publication number Publication date
WO2009004859A1 (ja) 2009-01-08
KR20100018613A (ko) 2010-02-17
JP2009012875A (ja) 2009-01-22
TW200918427A (en) 2009-05-01
CN101715422A (zh) 2010-05-26
JP5396695B2 (ja) 2014-01-22
TWI359778B (enExample) 2012-03-11

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