CN101666626B - 一种椭偏测量的方法及其装置 - Google Patents
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- CN101666626B CN101666626B CN2008100424357A CN200810042435A CN101666626B CN 101666626 B CN101666626 B CN 101666626B CN 2008100424357 A CN2008100424357 A CN 2008100424357A CN 200810042435 A CN200810042435 A CN 200810042435A CN 101666626 B CN101666626 B CN 101666626B
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- 238000000572 ellipsometry Methods 0.000 title abstract description 33
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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CN2008100424357A CN101666626B (zh) | 2008-09-03 | 2008-09-03 | 一种椭偏测量的方法及其装置 |
PCT/CN2009/073713 WO2010025672A1 (zh) | 2008-09-03 | 2009-09-03 | 一种椭偏测量的方法及其装置 |
US13/061,878 US9200998B2 (en) | 2008-09-03 | 2009-09-03 | Method and apparatus for ellipsometry measurement |
Applications Claiming Priority (1)
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CN2008100424357A CN101666626B (zh) | 2008-09-03 | 2008-09-03 | 一种椭偏测量的方法及其装置 |
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CN101666626A CN101666626A (zh) | 2010-03-10 |
CN101666626B true CN101666626B (zh) | 2012-02-29 |
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CN2008100424357A Active CN101666626B (zh) | 2008-09-03 | 2008-09-03 | 一种椭偏测量的方法及其装置 |
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Country | Link |
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US (1) | US9200998B2 (zh) |
CN (1) | CN101666626B (zh) |
WO (1) | WO2010025672A1 (zh) |
Families Citing this family (31)
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CN101936774B (zh) * | 2010-08-27 | 2011-11-09 | 中国科学院上海光学精密机械研究所 | 偏振检测装置中器件误差的测量方法 |
WO2012118079A1 (ja) * | 2011-02-28 | 2012-09-07 | 国立大学法人香川大学 | 光学特性測定装置及び光学特性測定方法 |
KR20180028556A (ko) * | 2011-07-07 | 2018-03-16 | 케이엘에이-텐코 코포레이션 | 다중-분광기 각도 스펙트로스코픽 엘립소메트리 |
JP2014524028A (ja) * | 2011-07-07 | 2014-09-18 | ケーエルエー−テンカー コーポレイション | 複数のアナライザ角分光偏光解析法 |
US10088413B2 (en) | 2011-11-21 | 2018-10-02 | Kla-Tencor Corporation | Spectral matching based calibration |
CN102878940B (zh) * | 2012-09-29 | 2015-08-19 | 中国科学院微电子研究所 | 一种包含相位补偿器的椭圆偏振仪的校准方法 |
CN102879337B (zh) * | 2012-09-29 | 2015-08-19 | 中国科学院微电子研究所 | 一种椭圆偏振仪的校准方法 |
CN103063412B (zh) * | 2012-12-18 | 2015-05-06 | 华中科技大学 | 一种用于光学测量仪器样品台校准的系统及其方法 |
CN103217385B (zh) * | 2013-03-22 | 2015-02-18 | 华中科技大学 | 椭偏仪测量系统的随机误差评估方法 |
CN104864815B (zh) * | 2014-02-20 | 2018-02-09 | 睿励科学仪器(上海)有限公司 | 校准椭偏测量中应力元件带来的误差影响的方法 |
CN104535500B (zh) * | 2014-12-19 | 2017-04-05 | 中国科学院上海光学精密机械研究所 | 成像椭偏仪的系统参数校准方法 |
JP2017090395A (ja) * | 2015-11-17 | 2017-05-25 | 株式会社ミツトヨ | 干渉対物レンズ及び参照面ユニットセット |
CN116047707A (zh) * | 2016-10-09 | 2023-05-02 | 睿励科学仪器(上海)有限公司 | 非垂直自动聚焦系统以及相应的光学仪器 |
CN107525769B (zh) * | 2016-11-30 | 2021-04-06 | 山东大学 | 一种通过优化偏振器方位角提高磁畴成像质量的方法 |
CN107727668B (zh) * | 2017-11-03 | 2023-11-14 | 浙江科技学院 | 基于偏振消光的透明介质单面选择成像方法及其装置 |
CN109297910B (zh) * | 2018-09-25 | 2021-05-18 | 中国人民解放军海军航空大学 | 一种分时成像偏振图像的偏振角度误差校正方法 |
CN109459138A (zh) * | 2018-10-26 | 2019-03-12 | 天津大学 | 基于四次光强测量的Mueller型椭偏仪椭偏参数测量方法及装置 |
CN109470154B (zh) * | 2018-12-26 | 2020-11-06 | 武汉颐光科技有限公司 | 一种适用于光谱椭偏仪的薄膜厚度初值测量方法 |
CN110220622B (zh) * | 2019-06-26 | 2021-01-05 | 江苏省特种设备安全监督检验研究院 | 一种远距离激光应力检测方法及检测仪 |
CN110596011B (zh) * | 2019-08-26 | 2020-12-29 | 华中科技大学 | 一种材料介电张量测量方法 |
CN111220621B (zh) * | 2020-03-13 | 2023-04-04 | 上海御微半导体技术有限公司 | 芯片倾斜表面检测方法 |
CN111912785B (zh) * | 2020-07-22 | 2023-06-23 | 深圳信息职业技术学院 | 一种光学常数测量方法与光学常数测量设备 |
CN112066896B (zh) * | 2020-07-22 | 2021-12-10 | 北京量拓科技有限公司 | 曲面样品顶点定位方法、装置和椭偏仪 |
CN112557304B (zh) * | 2020-11-22 | 2021-09-17 | 复旦大学 | 基于椭偏参数轨迹拓扑特征识别薄膜材料纳米结构的方法 |
CN112880574B (zh) * | 2021-01-08 | 2023-02-03 | 上海精测半导体技术有限公司 | 一种薄膜厚度测量方法 |
CN112903598B (zh) * | 2021-01-21 | 2021-11-19 | 复旦大学 | 一种椭偏测量系统中偏振元件方位角的差分光谱定标方法 |
CN113823157A (zh) * | 2021-05-11 | 2021-12-21 | 中国矿业大学(北京) | 任意椭圆偏振射电波起偏检偏和偏振度测量的装置技术 |
CN113483677A (zh) * | 2021-06-18 | 2021-10-08 | 中国科学院上海技术物理研究所 | 一种基于椭偏仪的原位薄膜性质参数实时表征方法 |
CN113686444B (zh) * | 2021-06-21 | 2023-01-03 | 复旦大学 | 光束偏振变化测量装置及其测量方法 |
CN114910007B (zh) * | 2022-05-30 | 2023-11-21 | 机械科学研究院浙江分院有限公司 | 一种用于集成电路制造中的集成式膜厚测量系统和方法 |
GB2620750A (en) * | 2022-07-19 | 2024-01-24 | Apoha Ltd | Method and apparatus |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4837603A (en) * | 1986-04-11 | 1989-06-06 | Nihon Shinku Gijutsu Kabushiki Kaisha | Method of correcting azimuth angle of photometric ellipsometers |
US4957368A (en) * | 1989-03-16 | 1990-09-18 | Photoacoustic Technology, Inc. | Apparatus and process for performing ellipsometric measurements of surfaces |
US5335066A (en) * | 1991-08-29 | 1994-08-02 | Nkk Corporation | Measuring method for ellipsometric parameter and ellipsometer |
CN2819212Y (zh) * | 2005-03-17 | 2006-09-20 | 复旦大学 | 一种新型快速椭圆偏振光测量仪 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4053232A (en) * | 1973-06-25 | 1977-10-11 | International Business Machines Corporation | Rotating-compensator ellipsometer |
US4906844A (en) * | 1988-08-12 | 1990-03-06 | Rockwell International Corporation | Phase sensitive optical monitor for thin film deposition |
US5076696A (en) * | 1989-03-16 | 1991-12-31 | The Johns Hopkins University | Dynamic imaging microellipsometry |
US5042951A (en) * | 1989-09-19 | 1991-08-27 | Therma-Wave, Inc. | High resolution ellipsometric apparatus |
US5629115A (en) * | 1993-04-30 | 1997-05-13 | Kabushiki Kaisha Toshiba | Exposure mask and method and apparatus for manufacturing the same |
US7492455B1 (en) * | 1995-09-20 | 2009-02-17 | J.A. Woollam Co., Inc. | Discrete polarization state spectroscopic ellipsometer system and method of use |
US5835220A (en) * | 1995-10-27 | 1998-11-10 | Nkk Corporation | Method and apparatus for detecting surface flaws |
US5831733A (en) * | 1996-02-28 | 1998-11-03 | Zygo Corporation | Apparatus and methods for measuring gaps while compensating for birefringence effects in the measurement path |
US5798837A (en) * | 1997-07-11 | 1998-08-25 | Therma-Wave, Inc. | Thin film optical measurement system and method with calibrating ellipsometer |
WO2002025708A2 (en) * | 2000-09-20 | 2002-03-28 | Kla-Tencor-Inc. | Methods and systems for semiconductor fabrication processes |
US7586607B2 (en) * | 2006-04-21 | 2009-09-08 | Rudolph Technologies, Inc. | Polarization imaging |
WO2007127760A2 (en) * | 2006-04-24 | 2007-11-08 | Raintree Scientific Instruments (Shanghai) Corporation | Spectroscopic ellipsometers |
-
2008
- 2008-09-03 CN CN2008100424357A patent/CN101666626B/zh active Active
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2009
- 2009-09-03 US US13/061,878 patent/US9200998B2/en active Active
- 2009-09-03 WO PCT/CN2009/073713 patent/WO2010025672A1/zh active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4837603A (en) * | 1986-04-11 | 1989-06-06 | Nihon Shinku Gijutsu Kabushiki Kaisha | Method of correcting azimuth angle of photometric ellipsometers |
US4957368A (en) * | 1989-03-16 | 1990-09-18 | Photoacoustic Technology, Inc. | Apparatus and process for performing ellipsometric measurements of surfaces |
US5335066A (en) * | 1991-08-29 | 1994-08-02 | Nkk Corporation | Measuring method for ellipsometric parameter and ellipsometer |
CN2819212Y (zh) * | 2005-03-17 | 2006-09-20 | 复旦大学 | 一种新型快速椭圆偏振光测量仪 |
Also Published As
Publication number | Publication date |
---|---|
US20120038920A2 (en) | 2012-02-16 |
CN101666626A (zh) | 2010-03-10 |
US9200998B2 (en) | 2015-12-01 |
WO2010025672A1 (zh) | 2010-03-11 |
US20110176133A1 (en) | 2011-07-21 |
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