CN101645276B - 基板处理设备以及磁记录介质制造方法 - Google Patents

基板处理设备以及磁记录介质制造方法 Download PDF

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Publication number
CN101645276B
CN101645276B CN2009101617101A CN200910161710A CN101645276B CN 101645276 B CN101645276 B CN 101645276B CN 2009101617101 A CN2009101617101 A CN 2009101617101A CN 200910161710 A CN200910161710 A CN 200910161710A CN 101645276 B CN101645276 B CN 101645276B
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China
Prior art keywords
ion beam
beam generator
substrate
grid
ion
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Chinese (zh)
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CN101645276A (zh
Inventor
山中和人
芝本雅弘
三好步
人见聪
大卫·朱利安托·贾亚普拉维拉
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Canon Anelva Corp
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Canon Anelva Corp
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer

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  • Drying Of Semiconductors (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Heads (AREA)
CN2009101617101A 2008-07-31 2009-07-31 基板处理设备以及磁记录介质制造方法 Active CN101645276B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2008-197736 2008-07-31
JP2008197736 2008-07-31
JP2008197736 2008-07-31
JP2008249585 2008-09-29
JP2008249585 2008-09-29
JP2008-249585 2008-09-29

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CN101645276A CN101645276A (zh) 2010-02-10
CN101645276B true CN101645276B (zh) 2011-06-15

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CN2009101617101A Active CN101645276B (zh) 2008-07-31 2009-07-31 基板处理设备以及磁记录介质制造方法
CN200910161707XA Active CN101645275B (zh) 2008-07-31 2009-07-31 基板处理设备以及磁记录介质制造方法

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JP (1) JP5174170B2 (fr)
CN (2) CN101645276B (fr)
WO (1) WO2010013765A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5518449B2 (ja) * 2009-12-02 2014-06-11 エイチジーエスティーネザーランドビーブイ 磁気記録媒体及びその製造方法
US20130004736A1 (en) * 2011-06-30 2013-01-03 Seagate Technology, Llc Method of protecting patterned magnetic materials of a stack

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62162219A (ja) * 1986-01-10 1987-07-18 Hitachi Maxell Ltd 両面記録型磁気記録媒体およびその製造方法
JP3732250B2 (ja) * 1995-03-30 2006-01-05 キヤノンアネルバ株式会社 インライン式成膜装置
CN1240635C (zh) * 1996-02-26 2006-02-08 日本碍子株式会社 结晶玻璃及其制法、磁盘用基片和磁盘
JP2005056535A (ja) * 2003-08-07 2005-03-03 Tdk Corp 磁気記録媒体の製造方法及び製造装置
JP2006318648A (ja) * 2003-12-25 2006-11-24 Tdk Corp 凹凸パターンの凹部充填方法及び磁気記録媒体の製造方法
JP3916636B2 (ja) * 2005-02-15 2007-05-16 Ｔｄｋ株式会社 磁気記録媒体、磁気記録再生装置
US20070137063A1 (en) * 2005-12-21 2007-06-21 Hitachi Global Storage Technologies Netherlands, B.V. Carbon beam deposition chamber for reduced defects
JP4676897B2 (ja) * 2006-02-16 2011-04-27 昭和電工株式会社 磁気記録媒体およびその製造方法

Also Published As

Publication number Publication date
CN101645275A (zh) 2010-02-10
JPWO2010013765A1 (ja) 2012-01-12
CN101645276A (zh) 2010-02-10
JP5174170B2 (ja) 2013-04-03
CN101645275B (zh) 2011-06-15
WO2010013765A1 (fr) 2010-02-04

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