CN101603886A - 方形靶材的取样方法和检测方法 - Google Patents
方形靶材的取样方法和检测方法 Download PDFInfo
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- CN101603886A CN101603886A CNA2009101495142A CN200910149514A CN101603886A CN 101603886 A CN101603886 A CN 101603886A CN A2009101495142 A CNA2009101495142 A CN A2009101495142A CN 200910149514 A CN200910149514 A CN 200910149514A CN 101603886 A CN101603886 A CN 101603886A
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- 238000005070 sampling Methods 0.000 title claims abstract description 57
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000001514 detection method Methods 0.000 title claims abstract description 19
- 238000005260 corrosion Methods 0.000 claims description 8
- 230000007797 corrosion Effects 0.000 claims description 8
- 238000005498 polishing Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 10
- 239000013078 crystal Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 239000000956 alloy Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 4
- 238000005477 sputtering target Methods 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
- 238000005088 metallography Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 244000137852 Petrea volubilis Species 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- -1 aldary Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000006071 cream Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000005308 flint glass Substances 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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CN 200910149514 CN101603886B (zh) | 2009-06-25 | 2009-06-25 | 方形靶材的取样方法和检测方法 |
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CN 200910149514 CN101603886B (zh) | 2009-06-25 | 2009-06-25 | 方形靶材的取样方法和检测方法 |
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CN101603886A true CN101603886A (zh) | 2009-12-16 |
CN101603886B CN101603886B (zh) | 2011-06-08 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102590086A (zh) * | 2011-12-31 | 2012-07-18 | 宁波江丰电子材料有限公司 | 圆形阳极的取样方法和检测方法 |
CN103398880A (zh) * | 2013-07-04 | 2013-11-20 | 广西玉柴机器股份有限公司 | 双层金属材料的金相显示方法 |
CN103454115A (zh) * | 2012-05-29 | 2013-12-18 | 宁波江丰电子材料有限公司 | 圆形靶材的取样方法和检测方法 |
CN103913416A (zh) * | 2012-12-31 | 2014-07-09 | 宁波江丰电子材料有限公司 | 靶材检测方法 |
CN106918467A (zh) * | 2017-04-14 | 2017-07-04 | 长庆石油勘探局技术监测中心 | 一种逐层采集铁基材料腐蚀产物的方法 |
CN107462437A (zh) * | 2017-08-09 | 2017-12-12 | 海盐猛凌汽车配件有限公司 | 粗车件金相试样取样方法 |
CN112504797A (zh) * | 2020-10-30 | 2021-03-16 | 哈尔滨飞机工业集团有限责任公司 | 一种金属锻件k1c试样辨别取样方向的测试方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2188760Y (zh) * | 1993-10-18 | 1995-02-01 | 鞍山钢铁公司 | 型材在线取样装置 |
-
2009
- 2009-06-25 CN CN 200910149514 patent/CN101603886B/zh active Active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102590086A (zh) * | 2011-12-31 | 2012-07-18 | 宁波江丰电子材料有限公司 | 圆形阳极的取样方法和检测方法 |
CN103454115A (zh) * | 2012-05-29 | 2013-12-18 | 宁波江丰电子材料有限公司 | 圆形靶材的取样方法和检测方法 |
CN103913416A (zh) * | 2012-12-31 | 2014-07-09 | 宁波江丰电子材料有限公司 | 靶材检测方法 |
CN103398880A (zh) * | 2013-07-04 | 2013-11-20 | 广西玉柴机器股份有限公司 | 双层金属材料的金相显示方法 |
CN106918467A (zh) * | 2017-04-14 | 2017-07-04 | 长庆石油勘探局技术监测中心 | 一种逐层采集铁基材料腐蚀产物的方法 |
CN107462437A (zh) * | 2017-08-09 | 2017-12-12 | 海盐猛凌汽车配件有限公司 | 粗车件金相试样取样方法 |
CN112504797A (zh) * | 2020-10-30 | 2021-03-16 | 哈尔滨飞机工业集团有限责任公司 | 一种金属锻件k1c试样辨别取样方向的测试方法 |
CN112504797B (zh) * | 2020-10-30 | 2023-10-20 | 哈尔滨飞机工业集团有限责任公司 | 一种金属锻件k1c试样辨别取样方向的测试方法 |
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CN101603886B (zh) | 2011-06-08 |
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Address after: 315400 Zhejiang Province, Yuyao City Yangming science and Technology Industrial Park No. 1 Jiang Feng Lu Patentee after: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Address before: 315400 Zhejiang Province, Yuyao City Yangming science and Technology Industrial Park No. 1 Jiang Feng Lu Patentee before: Ningbo Jiangfeng Electronic Materials Co., Ltd. |
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