CN101520977A - Check apparatus - Google Patents

Check apparatus Download PDF

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Publication number
CN101520977A
CN101520977A CN200910118706A CN200910118706A CN101520977A CN 101520977 A CN101520977 A CN 101520977A CN 200910118706 A CN200910118706 A CN 200910118706A CN 200910118706 A CN200910118706 A CN 200910118706A CN 101520977 A CN101520977 A CN 101520977A
Authority
CN
China
Prior art keywords
probe
mentioned
easy
bright lamp
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN200910118706A
Other languages
Chinese (zh)
Other versions
CN101520977B (en
Inventor
三浦一佳
齐藤丰和
佐藤和男
大津进
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Publication of CN101520977A publication Critical patent/CN101520977A/en
Application granted granted Critical
Publication of CN101520977B publication Critical patent/CN101520977B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1345—Conductors connecting electrodes to cell terminals

Abstract

The present invention provides a check apparatus. When performing lighting light check and the lighting is poor, the reason for poor lighting is the poor of panel or contact can be easily judged. The check apparatus checks the lighting of the check object panel. The check apparatus comprises multiple probe combinations with probes directly contacting with the electrodes of the check object panel and a probe pedestal supporting the probe combinations, wherein the multiple probe combinations comprise a probe combination for simple contact, which simply contacts with the check object panel for simple lighting check, and a probe combination for all contact, which fully contacts with the check object panel for universal lighting check.

Description

Testing fixture
Technical field
The present invention relates to the testing fixture that the bright lamp inspection of the inspection object plate of a kind of liquid crystal panel etc. is adopted.
Background technology
For example in the manufacturing process of liquid crystal panel (LCD panel), before entering assembling procedure, in LCD panel monomer, carry out bright lamp inspection.In this bright lamp inspection, there are common bright lamp inspection and simple and easy bright lamp inspection.
Common bright lamp inspection is to instigate probe all to contact each electrode of LCD panel and the bright lamp inspection carried out.Simple and easy bright lamp inspection is meant all electrodes of not making probe contact LCD panel and the bright lamp inspection undertaken by the simple and easy contact of part contact.Example as this simple and easy bright lamp inspection has patent documentation 1.
Patent documentation 1: Japanese kokai publication hei 09-138422 communique
, in above-mentioned testing fixture, bright lamp taking place when bad, judge to cause that the bad reason of this bright lamp is under the panel or the situation of loose contact, needs to change probe unit when bright lamp is checked.
But, under the situation of changing probe unit, because operation is numerous and diverse and consuming time, so there is the problem that transaction capabilities is poor, be not easy to judge poor prognostic cause.
Summary of the invention
The present invention makes in order to address the above problem, and its purpose is to provide a kind of and bright lamp takes place when bad carrying out bright lamp inspection, can easily judge to cause that the bad reason of this bright lamp is the bad or testing fixture of loose contact of panel.
In order to address the above problem, testing fixture of the present invention carries out bright lamp inspection to checking the object plate, it is characterized in that, comprise having directly with a plurality of contactor assemblies of the contacted probe of electrode of above-mentioned inspection object plate and support the probe base of each contactor assembly, above-mentioned contactor assembly comprises that the simple and easy contact probe assembly that carries out simple and easy bright lamp inspection with above-mentioned simple and easy contact of inspection object plate carries out whole contact probe assemblys of common bright lamp inspection with all contacting with above-mentioned inspection object plate.
Be preferably in above-mentioned simple and easy contact probe assembly be provided with make probe near or away from the travel mechanism of above-mentioned inspection object plate.Preferably has control part in addition, carry out common bright lamp inspection and when producing defective, in order to judge that the reason that causes this defective is panel or contact, this control part is controlled above-mentioned travel mechanism, makes above-mentioned simple and easy contact probe assembly switch to simple and easy bright lamp inspection near above-mentioned inspection object plate.
Bright lamp taking place when bad, can easily judge to cause that the bad reason of this bright lamp is the bad or loose contact of panel carrying out bright lamp inspection.
Description of drawings
Fig. 1 is the stereographic map of the probe unit of expression embodiments of the present invention.
Fig. 2 is the vertical view of the probe unit of expression embodiments of the present invention.
Fig. 3 is the stereographic map of the simple and easy contact probe assembly of expression embodiments of the present invention.
Fig. 4 is the summary construction diagram of control system of the testing fixture of expression embodiments of the present invention.
Fig. 5 is the front view of keeping out of the way state of the simple and easy contact probe assembly of expression embodiments of the present invention.
Fig. 6 is the front view of simple and easy contact condition of the simple and easy contact probe assembly of expression embodiments of the present invention.
Embodiment
Below, describe with reference to the testing fixture of accompanying drawing embodiments of the present invention.
The testing fixture of present embodiment is such device, that is, go up mounting at the worktable (not shown) that can utilize XYZ θ platform (not shown) adjustment XYZ axially to reach the θ sense of rotation and check the object plate, adopts the probe unit with a plurality of probes to carry out bright lamp inspection.
As shown in Figures 1 and 2, probe unit 1 checks that along the conduct that is positioned on the worktable 2 limits of the liquid crystal panel 2 of object plate are provided with.Specifically, this probe unit 1 comprises along the long limit probe unit 3 on the long limit of liquid crystal panel 2 with along the minor face probe unit 4 of the minor face of liquid crystal panel 2.
Long limit probe unit 3 mainly comprises long limit probe base 5, contactor assembly 6, to mutatis mutandis video camera 7.
Long limit probe base 5 is the members that are used for supporting above-mentioned contactor assembly 6 etc. under the state of the probe station (not shown) of the apparatus main body side that is supported in testing fixture, along the long limit of liquid crystal panel 2.Contactor assembly 6 is installed and to mutatis mutandis video camera 7 on this length limit probe base 5.
Contactor assembly 6 is made of whole contact probe assembly 6A and simple and easy contact probe assembly 6B.On long limit probe unit 3, only be provided with whole contact probe assembly 6A.In addition, simple and easy contact probe assembly 6B sees below and states.
All contact probe assembly 6A are used for all contacting liquid crystal panel 2 and carry out the contactor assembly that common bright lamp is checked.All contact probe assembly 6A directly contacts (all contacts) one by one with each electrode of liquid crystal panel 2, and the circuit on liquid crystal panel 2 sends checks signal.All contact probe assembly 6A mainly constitutes by hanging pedestal 9 and slide block 10, probe block 11.
Hanging pedestal 9 is the members that are used for the probe 13 of direct supporting slide block 10 and false bearing aftermentioned probe block 11.Hanging pedestal 9 is fixed on the long limit probe base 5.Slide block 10 can be bearing in the downside on the top that hangs pedestal 9 along the vertical direction slidably.
Slide block 10 is the members that are used to support probe block 11.Can slide up and down to be supported under the state that hangs pedestal 9 at slide block 10, utilize spring (not shown) that probe block 11 is applied acting force downwards.By the acting force of this spring, under each the electrode state of contact that makes probe 13 and liquid crystal panel 2, apply acting force.
Probe block 11 is the members to check signal etc. and be electrically connected with the electrode of liquid crystal panel 2 in order to send to the circuit (not shown) of liquid crystal panel 2.Probe block 11 is supported with a plurality of probes 13 and constitutes.Probe 13 sets with the electrode of liquid crystal panel 2 with matching, is supported integratedly by probe block 11.Probe 13 is connected with control part by means of signal wire etc.
All contact probe assembly 6A matches with the electrode of liquid crystal panel 2, is equipped with 5 on long limit probe base 5.Each probe 13 of these 5 whole contact probe assembly 6A contacts with all electrodes of liquid crystal panel 2 respectively and becomes whole contact conditions, sends to check signal.
To mutatis mutandis video camera 7 are the video cameras that are used to make liquid crystal panel 2 and each contactor assembly 6 (all contact probe assembly 6A and simple and easy contact probe assembly 6B) contraposition.Mutatis mutandis video camera 7 is demonstrated the mark of being located on the liquid crystal panel 2 (not shown), this mark is aimed at the reference position, make each electrode coupling of the top contact of probe 13 and the liquid crystal panel 2 of each contactor assembly 6.Mutatis mutandis video camera 7 is provided with one here, on long limit probe base 5.
Minor face probe unit 4 is mainly reached mutatis mutandis video camera 7 is constituted by minor face probe base 15, whole contact probe assembly 6A, simple and easy contact probe assembly 6B.
Minor face probe base 15 is the members that are used for along minor face supporting contactor assembly 6 grades of liquid crystal panel 2.Whole contact probe assembly 6A, simple and easy contact probe assembly 6B are installed and to mutatis mutandis video camera 7 on this minor face probe base 15.At this, all contact probe assembly 6A with to mutatis mutandis video camera 7 be and whole contact probe assembly 6A of above-mentioned long limit probe unit 3 and the device identical to mutatis mutandis video camera 7.At this, be provided with 3 whole contact probe assembly 6A, 1 simple and easy contact probe assembly 6B, 2 to mutatis mutandis video camera 7.
Simple and easy contact probe assembly 6B is used for the simple and easy contactor assembly that is contacted with liquid crystal panel 2 and carries out simple and easy bright lamp inspection.As the panel of above-mentioned patent documentation 1, on liquid crystal panel 2, be provided with the distribution and the electrode (sensitive terminal) of simple and easy contact usefulness.Simple and easy contact probe assembly 6B is used for and this simple and easy contact with the contacted contactor assembly of electrode.In this simple and easy contact probe assembly 6B, the less probe 13 of number contacts (simple and easy contact) and carries out simple and easy bright lamp inspection with electrode with simple and easy probe.
As shown in Figure 3, simple and easy contact probe assembly 6B is made of pillar 17, travel mechanism (not shown), slide block 18, probe block rest pad 19 and probe block 20.
Pillar 17 is the members that are used for by the probe 13 of probe block such as aftermentioned such as supporting such as slide block 18 grades 20.Pillar 17 is fixed on the minor face probe base 15.On the leading flank (faces of liquid crystal panel 2 one sides) of pillar 17, be provided with track 21 along the longitudinal.On this track 21, the guide part 22 of aftermentioned slide block 18 can be installed slidably, thereby can be along the vertical direction supporting slide block 18 slidably.
The 21A of travel mechanism is the straight-moving mechanism that is used to make slide block 18 to move along the vertical direction.The 21A of travel mechanism moves along the vertical direction by making slide block 18, make probe 13 near or away from liquid crystal panel 2.Specifically, carrying out simple and easy bright lamp when checking, the probe 13 that makes simple and easy contact probe assembly 6B when common bright lamp is checked, makes probe 13 away from liquid crystal panel 2 near liquid crystal panel 2.The 21A of this travel mechanism is made of straight-moving mechanisms such as linear motors.In addition, as the 21A of travel mechanism, can use various straight-moving mechanisms.For example, can use known all straight-moving mechanisms such as ball screw.This travel mechanism is assembled in the pillar 17, perhaps be arranged at pillar 17 near.
The 21A of travel mechanism have the probe 13 that makes probe block 20 move to than the probe 13 of whole contact probe assembly 6A more function and the probe 13 that makes probe block 20 of the retreating position of upside move to than the probe 13 of whole contact probe assembly 6A more downside contact position and make the probe 13 and the simple and easy function that contacts with the electrode contact of probe block 20.Thus, when simple and easy contact, liquid crystal panel 2 does not move, and only is that the probe 13 of probe block 20 moves towards the below and realizes being electrically connected.
Slide block 18 is to be used for false bearing probe 13 and member that probe 13 is moved between above-mentioned retreating position and contact position.Slide block 18 integral body are the L font, are fixed with the guide part 22 that can be installed on above-mentioned track 21 slidably on its longitudinal member.3 screw rods 23 are installed, supporting probe block rest pad 19 on the cross member of slide block 18.On screw rod 23, be provided with spring (not shown), utilize this spring is applied acting force downwards to probe block rest pad 19.By the acting force of this spring, contact when contacting probe 13 and liquid crystal panel 2 simple and easy probe 13 is applied acting force with electrode.
Probe block rest pad 19 is the members that are used for flexibly supporting by probe block 20 probe 13.Probe block rest pad 19 links with the screw rod 23 of slide block 18, utilize spring and by elastic bearing in slide block 18.On probe block rest pad 19, be provided with mounting screw 24.Probe block 20 utilizes this mounting screw 24 to be fixed on the probe block rest pad 19.
Probe block 20 is the members to check signal etc. and be electrically connected with the electrode of liquid crystal panel 2 in order to send to the circuit (not shown) of liquid crystal panel 2.Probe block 20 supports a plurality of probes 13 and constitutes.Probe 13 is supported by probe block 20 integratedly to set side by side with the identical quantity of electrode with the simple and easy contact of liquid crystal panel 2.Probe 13 is connected with control part by signal wire etc.
Simple and easy contact probe assembly 6B matches with simple and easy the contact with electrode of liquid crystal panel 2, and it all forms carefullyyer, is equipped with 1 on minor face probe unit 4.
As shown in Figure 4, whole contact probe assembly 6A of minor face probe unit 4 and simple and easy contact probe assembly 6B are connected with control part 27 with signal generator 26.Specifically, all contact probe assembly 6A utilizes whole the contact with lamp bright signal line 28 to be connected with signal generator 26.Simple and easy contact probe assembly 6B utilizes simple and easy the contact with lamp bright signal line 29 to be connected with signal generator 26.And signal generator 26 also utilizes signal wire 30 to be connected with control part 27.
Control part 27 control-signals generator 26 and carry out common bright lamp inspection and simple and easy bright lamp inspection.Promptly, control part 27 is selected common bright lamp inspection and simple and easy bright lamp inspection, and lamp bright signal is sent to simple and easy contact probe assembly 6B with lamp bright signal line 29 from simple and easy contact to whole contact probe assembly 6A or with lamp bright signal with lamp bright signal line 28 from whole contacts.
Control part 27 has following function: when defective such as line defect takes place when common bright lamp is checked, control the above-mentioned 21A of travel mechanism and make simple and easy contact probe assembly 6B near liquid crystal panel 2, probe 13 and electrode are contacted with each other and switch to simple and easy bright lamp inspection, judgement is to be caused or caused by contact by panel.That is, can adjust the worktable that XYZ axially reaches the θ sense of rotation and not move, utilize the 21A of travel mechanism that probe 13 is moved and probe 13 is electrically connected with the electrode of liquid crystal panel 2.Being treated in this control part 27 automaticallyed switch, judged to cause that the reason of this defective is the bad or loose contact of panel utilizing Flame Image Process automatically to check under the situation of defective of liquid crystal panel 2.As examiner during with the defect inspection of Visual Confirmation liquid crystal panel 2, the examiner is switched change-over switch, makes liquid crystal panel 2 carry out common bright lamp and simple and easy bright lamp is judged.
The testing fixture that constitutes like that as mentioned above plays a role as follows.
As shown in Figure 5, carrying out utilizing control part 27 control-signals generator 26 under the situation that common bright lamp checks, the probe 13 of simple and easy contact probe assembly 6B is moved to than the probe 13 of the whole contact probe assembly 6A retreating position of upside more.
Then, axially reach the worktable of θ sense of rotation adjustment supporting liquid crystal panel 2 along XYZ, all the electrode of the probe 13 of contact probe assembly 6A and liquid crystal panel 2 mates, make liquid crystal panel 2 move to whole contact positions, all under the contact condition probe 13 of contactor assembly 6A and the electrode of liquid crystal panel 2 are electrically connected mutually from aligned position.Then, utilize signal generator 26 to produce concurrent censorship and look into signal.
Thus, liquid crystal panel 2 bright lamps, the examiner carries out common bright lamp inspection with the lighting lamp state of this liquid crystal panel 2 of Visual Confirmation.In addition, also utilize the lighting lamp state of this liquid crystal panel 2 of camera and confirm whether there is defective sometimes by Flame Image Process.
By this affirmation, when having produced defectives such as line defect, with manually or automatically switching to simple and easy bright lamp inspection.As shown in Figure 6, in this simple and easy bright lamp is checked, be failure to actuate and liquid crystal panel 2 remained under the state of aligned position, only make the 21A of travel mechanism action at worktable.Specifically, stationary table is away from whole lower positions of the probe 13 of contact probe assembly 6A.Then, make simple and easy contact probe assembly 6B action and this probe 13 is moved downwards, make this probe 13 simple and easyly contact electrode (sensitive terminal) electrical connection of usefulness and carry out simple and easy contact with above-mentioned.Thus, liquid crystal panel 2 carries out simple and easy bright lamp.
The examiner perhaps utilizes Flame Image Process automatically to confirm with the liquid crystal panel 2 of this simple and easy bright lamp of Visual Confirmation.
As a result, if normal bright lamp, then decidable causes that the reason of defective such as above-mentioned line defect is the loose contact when all contacting.If abnormal bright lamp, then decidable causes that the reason of above-mentioned defective is that panel is bad.
As known from the above, when the above-mentioned bright lamp of generation is bad, can easily judge to cause that the bad reason of this bright lamp is the bad or loose contact of panel.
As a result, do not need to change probe unit, confirm that operation is easy, can be at short notice and easily determine poor prognostic cause, increase substantially the inspection efficiency of operation.

Claims (3)

1. testing fixture, this testing fixture carries out bright lamp inspection to checking the object plate, it is characterized in that,
Comprise and have directly with a plurality of contactor assemblies of the contacted probe of electrode of above-mentioned inspection object plate and support the probe base of each contactor assembly;
Above-mentioned a plurality of contactor assembly comprises the simple and easy contact probe assembly that carries out simple and easy bright lamp inspection with above-mentioned simple and easy contact of inspection object plate and all contacts with above-mentioned inspection object plate and carry out whole contact probe assemblys that common bright lamp is checked.
2. testing fixture according to claim 1 is characterized in that,
Above-mentioned simple and easy contact probe assembly be provided with make above-mentioned probe near or away from the travel mechanism of above-mentioned inspection object plate;
Carry out simple and easy bright lamp when checking, make above-mentioned simple and easy contact probe assembly, carry out common bright lamp when checking, make above-mentioned simple and easy contact probe assembly away from above-mentioned inspection object plate near above-mentioned inspection object plate.
3. testing fixture according to claim 2 is characterized in that,
Has control part, judge that the reason that causes this defective is panel or contact when producing defective carrying out common bright lamp inspection, this control part is controlled above-mentioned travel mechanism, makes above-mentioned simple and easy contact probe assembly switch to simple and easy bright lamp inspection near above-mentioned inspection object plate.
CN2009101187067A 2008-02-25 2009-02-24 Check apparatus Expired - Fee Related CN101520977B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008043236A JP5432460B2 (en) 2008-02-25 2008-02-25 Inspection device
JP2008-043236 2008-02-25
JP2008043236 2008-02-25

Publications (2)

Publication Number Publication Date
CN101520977A true CN101520977A (en) 2009-09-02
CN101520977B CN101520977B (en) 2011-04-20

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JP (1) JP5432460B2 (en)
KR (1) KR101044630B1 (en)
CN (1) CN101520977B (en)
TW (1) TWI404935B (en)

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Also Published As

Publication number Publication date
JP5432460B2 (en) 2014-03-05
CN101520977B (en) 2011-04-20
KR20090091649A (en) 2009-08-28
KR101044630B1 (en) 2011-06-29
TW200946920A (en) 2009-11-16
JP2009198455A (en) 2009-09-03
TWI404935B (en) 2013-08-11

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