CN101498654B - 使用太赫兹波的检查装置和检查方法 - Google Patents

使用太赫兹波的检查装置和检查方法 Download PDF

Info

Publication number
CN101498654B
CN101498654B CN2009100097063A CN200910009706A CN101498654B CN 101498654 B CN101498654 B CN 101498654B CN 2009100097063 A CN2009100097063 A CN 2009100097063A CN 200910009706 A CN200910009706 A CN 200910009706A CN 101498654 B CN101498654 B CN 101498654B
Authority
CN
China
Prior art keywords
answer signal
thz wave
measuring condition
measured
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2009100097063A
Other languages
English (en)
Chinese (zh)
Other versions
CN101498654A (zh
Inventor
井辻健明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN101498654A publication Critical patent/CN101498654A/zh
Application granted granted Critical
Publication of CN101498654B publication Critical patent/CN101498654B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3577—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing liquids, e.g. polluted water

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Toxicology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN2009100097063A 2008-01-29 2009-01-23 使用太赫兹波的检查装置和检查方法 Expired - Fee Related CN101498654B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008-017844 2008-01-29
JP2008017844 2008-01-29
JP2008017844 2008-01-29

Publications (2)

Publication Number Publication Date
CN101498654A CN101498654A (zh) 2009-08-05
CN101498654B true CN101498654B (zh) 2010-11-17

Family

ID=40577741

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2009100097063A Expired - Fee Related CN101498654B (zh) 2008-01-29 2009-01-23 使用太赫兹波的检查装置和检查方法

Country Status (4)

Country Link
US (1) US7919752B2 (enExample)
EP (1) EP2085765A1 (enExample)
JP (2) JP5328319B2 (enExample)
CN (1) CN101498654B (enExample)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2202481A1 (en) * 2007-10-16 2010-06-30 Aisin Seiki Kabushiki Kaisha Non-contact film thickness measurement method and device
JP4807707B2 (ja) * 2007-11-30 2011-11-02 キヤノン株式会社 波形情報取得装置
JP4975001B2 (ja) * 2007-12-28 2012-07-11 キヤノン株式会社 波形情報取得装置及び波形情報取得方法
JP5341488B2 (ja) 2008-01-18 2013-11-13 キヤノン株式会社 テラヘルツ波を測定するための装置及び方法
JP5632599B2 (ja) 2009-09-07 2014-11-26 キヤノン株式会社 発振器
JP5615941B2 (ja) * 2011-02-10 2014-10-29 株式会社日立ハイテクノロジーズ 異物検出装置及び異物検出方法
JP5735824B2 (ja) 2011-03-04 2015-06-17 キヤノン株式会社 情報取得装置及び情報取得方法
JP5768429B2 (ja) * 2011-03-23 2015-08-26 セイコーエプソン株式会社 テラヘルツ波検出装置、テラヘルツ波長フィルター、イメージング装置および計測装置
JP2013076618A (ja) * 2011-09-30 2013-04-25 Sony Corp 光伝導素子、レンズ、テラヘルツ放射顕微鏡及びデバイスの製造方法
DE102012215496B4 (de) * 2012-08-31 2022-07-14 Siemens Healthcare Gmbh Verfahren zur automatischen Positionierung eines Aufnahmesystems eines Röntgengerätes und Röntgengerät
JP2014122875A (ja) * 2012-11-26 2014-07-03 Canon Inc 層状物体の測定装置および方法
CN103115893A (zh) * 2013-01-30 2013-05-22 大连理工大学 一种检测托卡马克钨第一壁灰尘沉积层成分及厚度的装置
GB201303324D0 (en) * 2013-02-25 2013-04-10 Subterandt Ltd Passive detection of deformation under coatings
JP2014174082A (ja) * 2013-03-12 2014-09-22 Seiko Epson Corp 標本検査装置
EP2781911B1 (en) * 2013-03-18 2019-10-16 ABB Schweiz AG Sensor system and method for determining paper sheet quality parameters
JP2015099031A (ja) * 2013-11-18 2015-05-28 株式会社東芝 半導体マイクロ分析チップ及びその製造方法
CN103698275A (zh) * 2013-12-12 2014-04-02 北京理工大学 一种在透射和反射测量间切换的测光装置
CN104749110B (zh) * 2013-12-30 2019-04-02 深圳先进技术研究院 光谱检测装置
JP6391278B2 (ja) 2014-04-14 2018-09-19 キヤノン株式会社 測定装置及び測定方法
CN104034690A (zh) * 2014-06-12 2014-09-10 清华大学 一种宽带太赫兹时域光谱的分析方法及便携式分析装置
CN106370109A (zh) * 2016-08-19 2017-02-01 南开大学 一种桥梁基桩钢筋笼长度检测装置及检测方法
JP6428728B2 (ja) * 2016-08-23 2018-11-28 ニプロ株式会社 テラヘルツパルス波を用いた粉末中の異物検出装置および異物検出方法
JP6843600B2 (ja) * 2016-11-28 2021-03-17 キヤノン株式会社 画像取得装置、これを用いた画像取得方法及び照射装置
WO2018105332A1 (ja) * 2016-12-06 2018-06-14 パイオニア株式会社 検査装置、検査方法、コンピュータプログラム及び記録媒体
ES2940671T3 (es) * 2017-10-13 2023-05-10 Abb Schweiz Ag Método y aparato para detectar un haz de THz pulsado con corrección de tiempo de vuelo
CN108279671B (zh) * 2018-01-08 2021-12-14 深圳市易成自动驾驶技术有限公司 基于太赫兹的环境感知方法、装置及计算机可读存储介质
US11143590B2 (en) 2018-03-22 2021-10-12 3M Innovative Properties Company Time-domain terahertz measurement system having a single reference surface
JP7455611B2 (ja) * 2019-03-14 2024-03-26 キヤノン株式会社 処理システム
CN110031416B (zh) * 2019-05-16 2021-07-06 北京印刷学院 气体浓度检测装置及方法
JP7362409B2 (ja) 2019-10-17 2023-10-17 キヤノン株式会社 照明装置およびカメラシステム
JP7365042B2 (ja) * 2019-10-18 2023-10-19 フェムトディプロイメンツ株式会社 電磁波信号解析装置および電磁波信号解析用プログラム
CN111351764B (zh) * 2020-02-27 2024-01-23 云南电网有限责任公司电力科学研究院 一种基于太赫兹技术的材料检测装置及检测方法
US12196670B2 (en) 2020-06-22 2025-01-14 Hitachi High-Tech Corporation Far-infrared spectroscopy device
JP2023157737A (ja) 2022-04-15 2023-10-26 キヤノン株式会社 アンテナ装置、通信装置、及び、撮像システム

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6078047A (en) 1997-03-14 2000-06-20 Lucent Technologies Inc. Method and apparatus for terahertz tomographic imaging
JPH1188091A (ja) * 1997-09-10 1999-03-30 Nippon Telegr & Teleph Corp <Ntt> 音響信号制御装置、その装置およびそのプログラム記録媒体
US6448553B1 (en) 1999-04-26 2002-09-10 Canon Kabushiki Kaisha Signal detector to be used with scanning probe and atomic force microscope
JP2002310882A (ja) 2001-04-17 2002-10-23 Canon Inc 走査型プローブによる信号検出装置、該装置によるプローブ顕微鏡、及び走査型プローブによる信号検出方法、該方法を用いてサンプル表面を観察する観察方法
JP2005504959A (ja) 2001-09-12 2005-02-17 テラビュー リミテッド 画像処理装置及び方法
GB2385415B (en) * 2002-02-15 2005-09-14 Teraview Ltd An analysis apparatus and method
JP2004101510A (ja) * 2002-07-15 2004-04-02 Tochigi Nikon Corp パルス光を用いた分光計測方法および装置
US6983213B2 (en) * 2003-10-20 2006-01-03 Cerno Bioscience Llc Methods for operating mass spectrometry (MS) instrument systems
JP4136858B2 (ja) 2003-09-12 2008-08-20 キヤノン株式会社 位置検出装置、及び情報入力装置
GB2425833B (en) * 2004-01-19 2007-02-21 David Alexander Crawley Terahertz Radiation Sensor and Imaging System
JP4217646B2 (ja) 2004-03-26 2009-02-04 キヤノン株式会社 認証方法及び認証装置
US20050231416A1 (en) * 2004-04-14 2005-10-20 Rowe Richard L Relational millimeter-wave interrogating
JP2006121643A (ja) 2004-09-21 2006-05-11 Canon Inc 平面アンテナ
JP4642458B2 (ja) * 2004-12-28 2011-03-02 富士通株式会社 波長分散発生装置
JP4878180B2 (ja) 2005-03-24 2012-02-15 キヤノン株式会社 電磁波を用いる検査装置
JP2006275867A (ja) * 2005-03-30 2006-10-12 Tochigi Nikon Corp テラヘルツ光検査装置
DE102005023160B4 (de) * 2005-05-19 2007-04-05 Beltz, Robert, Dipl.-Math. Vorrichtung zur Erfassung und Bewertung von hygroskopischen Materialien
JP4535975B2 (ja) * 2005-09-21 2010-09-01 日本電信電話株式会社 表面プラズモン共鳴スペクトル測定装置におけるデータ校正方法
JP2007101189A (ja) * 2005-09-30 2007-04-19 Nippon Telegr & Teleph Corp <Ntt> 透過型電磁波イメージング装置
JP4898472B2 (ja) 2006-04-11 2012-03-14 キヤノン株式会社 検査装置
GB2438215B (en) * 2006-05-19 2011-06-08 Teraview Ltd A THz investigation apparatus and method
US20080161674A1 (en) * 2006-12-29 2008-07-03 Donald Martin Monro Active in vivo spectroscopy
JP4977048B2 (ja) 2007-02-01 2012-07-18 キヤノン株式会社 アンテナ素子
US8067739B2 (en) 2007-06-22 2011-11-29 Canon Kabushiki Kaisha Photoconductive element for generation and detection of terahertz wave

Also Published As

Publication number Publication date
US7919752B2 (en) 2011-04-05
CN101498654A (zh) 2009-08-05
JP2009204605A (ja) 2009-09-10
JP5328319B2 (ja) 2013-10-30
EP2085765A1 (en) 2009-08-05
US20090189078A1 (en) 2009-07-30
JP2013167649A (ja) 2013-08-29
JP5546669B2 (ja) 2014-07-09

Similar Documents

Publication Publication Date Title
CN101498654B (zh) 使用太赫兹波的检查装置和检查方法
Lima et al. Self-calibration of cluster dark energy studies: Observable-mass distribution
Stahn et al. Focusing specular neutron reflectometry for small samples
Cao et al. Measuring the speed of light with ultra-compact radio quasars
Withayachumnankul et al. Fundamentals of measurement in terahertz time-domain spectroscopy
CN102679894B (zh) 反射式差动共焦透镜中心厚度测量方法
Alvarez et al. The cosmic reionization history as revealed by the cosmic microwave background doppler-21 cm correlation
US20140146306A1 (en) Layered object and measuring apparatus and method
CN102589851B (zh) 反射式共焦透镜焦距测量方法
CN104964932B (zh) 一种测量太赫兹垂直透射谱和反射谱的一体化系统及应用
US20140365158A1 (en) Laser ultrasound material testing
TW201011278A (en) Object defect measurement method and its device
McCarthy et al. Cluster Sunyaev-Zeldovich effect scaling relations
JP2014001925A (ja) 測定装置及び方法、トモグラフィ装置及び方法
CN101482504B (zh) 材料激光空间散射特性的检测方法
CN104568249B (zh) 一种基于太赫兹时域光谱系统的应力测量方法
CN104792732B (zh) 一种光源分布自参照的折光计
Vieweg et al. Online thickness measurements of acrylate-based coatings on knitted polyester fabric using terahertz time-domain spectroscopy
JPWO2006085403A1 (ja) 実時間テラヘルツ・トモグラフィー装置および分光イメージング装置
Fan et al. Enhanced Measurement of Paper Basis Weight Using Phase Shift in Terahertz Time‐Domain Spectroscopy
Dong et al. Enhancing dark siren cosmology through multi-band gravitational wave synergetic observations
CN202676595U (zh) 一种基于热透镜效应的二维成像装置
CN101975562A (zh) 一种测量光波阵列面或光学反射面表面平坦度的方法
CN113252142A (zh) 一种密闭容器中白酒液位的非接触式测量系统及方法
CN209102603U (zh) 一种反射式太赫兹时域光谱成像系统

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20101117

Termination date: 20170123