CN101439235A - Gas-liquid separating device - Google Patents
Gas-liquid separating device Download PDFInfo
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- CN101439235A CN101439235A CNA2008101811164A CN200810181116A CN101439235A CN 101439235 A CN101439235 A CN 101439235A CN A2008101811164 A CNA2008101811164 A CN A2008101811164A CN 200810181116 A CN200810181116 A CN 200810181116A CN 101439235 A CN101439235 A CN 101439235A
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- gas
- fluid
- cooling tube
- corrugated plating
- cooler
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
- B01D45/08—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/12—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces
- B01D45/16—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by the winding course of the gas stream, the centrifugal forces being generated solely or partly by mechanical means, e.g. fixed swirl vanes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/05—Separating dispersed particles from gases, air or vapours by liquid as separating agent by condensation of the separating agent
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separating Particles In Gases By Inertia (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
The invention provides a gas-liquid separation device capable of trapping tiny droplets swimming in gas-liquid mixed fluid, thereby trapping gasification material contained in the gas-liquid mixed fluid. The box (11) is provided with a cooler (12) and a plurality of corrugated plates (13). The cooler (12) is arranged on the flowing section of the fluid circulating in the box body (11b) and is connected with the external cooling source; the cooling gas-liquid is mixed with fluid to make an effort of condensing the gasification material contained in the fluid and cooling the plurality of corrugated plates (13) by heat transfer. The plurality of corrugated plates (13) are provided with a throttle portion (13a) for reducing the interval between the corrugated plates and improving the velocity of flow of the gas-liquid mixed fluid, and a wall (13b) arranged at downstream side of the throttle portion (13a) and compacted with the gas-liquid mixed fluid. The plurality of corrugated plates (13) can adhere, flow down and recover the tiny droplets swimming in gas-liquid mixed fluid on the wall (13b).
Description
Technical field
The present invention relates to gas-liquid separation device, in more detail, for example relate to droplet treatments such as vaporific fine particle, and separate the gas-liquid separation device that reclaims the treatment fluid that swims in the gasification substance that from the fluid of the liquid processing device exhaust of the coating processing the semiconductor manufacturing, used, development treatment etc., comprises, the fluid.
Background technology
At present, as the vaporific particle of treatment fluid etc. is separated a kind of of the spraying separator that reclaims from air, a plurality of corrugated platings are arranged in casing side by side, when the gas that contains vaporific particle etc. flows into, vaporific particles etc. are captured, reclaim by corrugated plating, the structure that separates vaporific particle etc. from gas is well-known (for example, with reference to patent documentation 1).
The patent documentation spy open the 2005-252100 communique (claims, Fig. 4)
Summary of the invention
In the technology of patent documentation 1 record, worry in the fluid (air) after handling that residual have the gasification substance of treatment fluid, a vaporific fine particle etc. with the spraying separator, existence will be vented to the problem of (outside the system) outside the factory by the fluid of spraying separator.
The present invention In view of the foregoing finishes, and its purpose is to provide a kind of can capture the fine droplet that swims in the gas-liquid mixture fluid, further, can capture the gas-liquid separation device that is included in the gasification substance in the gas-liquid mixture fluid.
In order to address the above problem, the invention is characterized in, in being connected to the casing that makes the pipeline that gas-liquid mixture fluid passes through, has the cooler that on the cross section of flowing of above-mentioned fluid, is provided with, with in the downstream of cooler along a plurality of corrugated platings that flow and set side by side of above-mentioned fluid, wherein, above-mentioned cooler constitutes, be connected with the cooling source that is arranged on the outside, condense by cooling and to be included in gasification substance in the above-mentioned gas-liquid mixture fluid, above-mentioned a plurality of corrugated plating, have and dwindle corrugated plating interval each other, improve that above-mentioned flow rate of fluid makes its restriction of passing through and above-mentioned gas-liquid mixture fluid collides in the downstream of this restriction wall, have the drop that the fine droplet that swims in the above-mentioned fluid is adhered to flow down and reclaim and capture path on above-mentioned wall.(first aspect)
According to such formation, the gas-liquid mixture fluid that circulates in casing flows through cooler, circulates between corrugated plating, flows out to outside the casing afterwards.Gas-liquid mixture fluid improves flow velocity by the restriction between corrugated plating, and when the wall with this downstream collided, the fine droplet that swims in this fluid was attached on this wall and be captured.In this case because the cooler of upstream side cooling gas-liquid mixture fluid, so the gasification substance that is included in this fluid condensed, with the fine droplet in this fluid of swimming by droplet treatment.Therefore, as attached on the above-mentioned wall and the drop that is captured is not only spraying, and gasification substance is also separated effectively and is reclaimed.
In the present invention, preferred above-mentioned corrugated plating is made of the material with heat conductivity, is connected (second aspect) with above-mentioned cooler.
According to such formation, can cool off corrugated plating effectively with cooler, thus, because produce temperature difference between the temperature of the temperature of corrugated plating and above-mentioned fluid, so can make the gasification substance that is included in this fluid ties mist, condenses on the surface of corrugated plating, the drop growth flows down after becoming greatly, so can reclaim drop from bottom half.Therefore, can further increase seizure amount from the fine droplet in the above-mentioned fluid.
In the present invention, preferred above-mentioned cooler is made of cancellate cooling tube, and cooling tube and corrugated plating link into an integrated entity, and makes to carry out heat conduction (third aspect) between this cooling tube and the above-mentioned corrugated plating.And then, preferably to be arranged to above-mentioned cooling tube and to contact with the upper and lower of above-mentioned corrugated plating, above-mentioned heat-exchange tube contacts with the end of above-mentioned corrugated plating.
According to such formation,, can reclaim the gasification substance that is included in the above-mentioned fluid by the cooling corrugated plating with above-mentioned same.
The medial surface of the above-mentioned throttling path that preferably forms between above-mentioned corrugated plating in the present invention, is formed with hydrophobic layer (fourth aspect).And, in the present invention, preferably on the fluid collision wall of the above-mentioned drop capture path that forms between above-mentioned corrugated plating, be formed with hydrophilic layer (aspect the 5th).Further, in the present invention, the medial surface of the above-mentioned throttling path that preferably forms between above-mentioned corrugated plating is formed with hydrophobic layer, and is formed with hydrophilic layer (aspect the 6th) on the fluid collision wall of the above-mentioned drop capture path that forms between above-mentioned corrugated plating.
According to such formation, the medial surface at the throttling path that is formed with hydrophobic layer is difficult to adhere to fine droplet, and the gasification substance that contains in fluid is difficult to condense, so the reduction of the pressure loss fluid can be flow through the throttling path time suppresses lessly.And, on the surface that is formed with hydrophilic layer, adhere to fine droplet easily, so can further increase the seizure amount of fine droplet.
In the present invention, preferred above-mentioned cooler, by upper and lower horizontally disposed top cooling tube and the bottom cooling tube on the cross section of flowing of above-mentioned gas-liquid mixture fluid, and be parallel to each other and set, the a plurality of vertical cooling tube that top and bottom and top cooling tube are connected with the bottom cooling tube, form clathrate, and the outer end of the outer end of above-mentioned top cooling tube and bottom cooling tube, be connected (the 7th aspect) with the cold-producing medium supply source that is arranged on the outside above-mentioned cooling source of conduct.Perhaps, in the present invention, preferred above-mentioned cooler, by horizontally disposed top cooling tube and the bottom cooling tube that constitutes by transfer pipes in upper and lower on the cross section of flowing of above-mentioned gas-liquid mixture fluid, and be arranged in parallel, the vertical cooling tube that a plurality of heat pipes that top and bottom are connected with the bottom cooling tube with the top cooling tube constitute, form clathrate, and the outer end of above-mentioned top cooling tube and the outer end of bottom cooling tube are connected (eight aspect) with the heat absorbing side of the Peltier element that is arranged on the outside above-mentioned cooling source of conduct.
According to such formation, above-mentioned cooler flows through the cold-producing medium of cold-producing medium supply source, and cooling top cooling tube, bottom cooling tube and a plurality of vertical cooling tube cool off above-mentioned fluid, in addition, cool off above-mentioned corrugated plating by the heat transmission.
In the present invention, above-mentioned a plurality of corrugated platings be preferably formed into, with the end that is connected with above-mentioned cooler of each corrugated plating as stiff end, can dilatation, by telescopic drive mechanism stretch (the 9th aspect) along the direction that flows of above-mentioned fluid.In this case, preferably corresponding above-mentioned each corrugated plating is connected with guide rod on above-mentioned cooler, by this guide rod supports can dilatation above-mentioned each corrugated plating (the tenth aspect).
According to such formation, in the above-mentioned casing of gas-liquid mixture fluid, adjust according to the ventilation in the casing of gas-liquid mixture fluid, the feasible gap that becomes between suitable corrugated plating, can adjust flow velocity like this by the throttling path between corrugated plating, can adjust the flow velocity that collides wall, make the wall of fine droplet that swims in the gas-liquid mixture fluid to be adhered to capture effectively in the downstream of this throttling path.
According to the present invention, owing to adopt above formation, so can obtain following excellent effect.
(1) invention of putting down in writing according to first aspect, the gas-liquid mixture fluid that circulates in casing improves flow velocity by the restriction between corrugated plating, collide wall, so just can adhere to and capture the fine droplet that swims in the above-mentioned fluid, particularly, gas-liquid mixture fluid between corrugated plating the circulation before, cool off by cooler, can condense in the gasification substance that contains in this fluid, so can carry out cooling off the capture of condensing of the gasification substance that can't carry out under the situation of gas-liquid mixture fluid at cooler of no use, therefore, can provide a kind of being fit to make the gas-liquid separation device that separates the drops such as spray form particle of recycle process fluids in the gas of discharging the liquid processing device of employed coating processing or development treatment from semiconductor.
(2) according to the record of second aspect, can cool off corrugated plating, therefore, except above-mentioned (1), can also further promote the gasification substance that contains in the above-mentioned fluid on the corrugated plating surface, to condense, further increase the yield of gasification substance.
(3) according to the record of the third aspect, the same with above-mentioned (2), except cooling off corrugated plating, reclaiming the gasification substance, in can also be in casing so little space, suppress the pressure loss of above-mentioned fluid less, realize reinforcement, the simplification of corrugated plating support structure, help the device cost degradation.
(4) according to the record of fourth aspect, owing to be difficult to adhere to fine droplet, so the pressure loss can reduce above-mentioned fluid by the throttling path time on the surface that is formed with hydrophobic layer.
(5) according to the record of the 5th aspect,, therefore can further increase the seizure amount of fine droplet owing to adhere to fine droplet easily on the surface that is formed with hydrophilic layer.
(6) according to the record of the 6th aspect, owing to be difficult to adhere to fine droplet on the surface that is formed with hydrophobic layer, therefore the pressure loss in the time of can reducing above-mentioned fluid by the throttling path, in addition, owing to adhere to fine droplet easily on the surface that is formed with hydrophilic layer, and the gasification substance that contains in the above-mentioned fluid condenses easily, therefore can further increase the seizure amount of fine droplet.
(7) according to the record of the 7th aspect, except above-mentioned (1)～(6), can also use the above-mentioned fluid of refrigerant cools system cools, in addition, utilize hot transmission can cool off above-mentioned corrugated plating.
(8) according to the record of eight aspect, except above-mentioned (1)～(6), can also cool off above-mentioned fluid, in addition, utilize hot transmission can cool off above-mentioned corrugated plating with the cooling system that heat pipe and Peltier element constitute.
(9) according to the record of the 9th aspect,, can adjust the flow rate of fluid of colliding the downstream side wall, so except above-mentioned (1)～(8), can also capture the fine droplet that swims in the above-mentioned fluid effectively because can adjust the throttling path.
(10) according to the record of the tenth aspect, except above-mentioned (9), can also support above-mentioned each corrugated plating, help the device cost degradation with the scalable shifting ground of the structure of simplifying.
Description of drawings
Fig. 1 is the approximate three-dimensional map (a) of the gas-liquid separation device that relates to of first embodiment of the invention and the amplification sectional view (b) of the corrugated plating part among the present invention.
Fig. 2 is the approximate three-dimensional map of the gas-liquid separation device that relates to of second embodiment of the invention.
Fig. 3 is the approximate three-dimensional map (a) and the general view (b) thereof of the corrugated plating elongation state in the gas-liquid separation device that relates to of expression third embodiment of the invention.
Fig. 4 is the approximate three-dimensional map (a) and the general view (b) thereof of the corrugated plating contraction state in the gas-liquid separation device that relates to of expression third embodiment of the invention.
Fig. 5 is the major part stereogram of the corrugated plating variation in the gas-liquid separation device that relates to of expression third embodiment of the invention.
Fig. 6 is the summary sectional view of an example of the user mode of the gas-liquid separation device that the present invention relates to of expression.
Symbol description
10,20,30 gas-liquid separation devices
11,21,31 casings
12,22,32 coolers
12a, 22a, 32a top cooling tube
12b, 22b, 32b bottom cooling tube
12c, 22c, the vertical cooling tube of 32c
13,33 corrugated platings
The 13a restriction
The 13b wall
The 13c medial surface
The 13d drop captures path
14 hydrophobic layers
15 hydrophilic layers
24 Peltier elements
40 guide rods
41 straight moving reciprocating type actuators (telescopic drive mechanism)
The specific embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
(first embodiment)
At first, the structure of the gas-liquid separation device that first embodiment of the invention is related to describes.Fig. 1 is the stereogram (a) of the gas-liquid separation device that relates to of first embodiment, and a part of amplification view (b) of the corrugated plating of seeing on in-plane among the present invention.
Above-mentioned gas-liquid separation device 10, for example be connected with the pipeline that passes through gas-liquid mixture fluid that the liquid waste processing of coating processing of using from semiconductor device or developing apparatus is partly propped up, perhaps be connected, constitute by casing 11, the cooler 12 that in this casing 11, has and a plurality of corrugated plating 13 with existing mist eliminator (mist trap) (gas exhaust piping of device).
Casing main body 11b that casing 11 has fluid intake 11a, accommodate cooler 12 and a plurality of corrugated platings 13 and fluid issuing 11c as the outlet of the fluid that has separated separated liquid have the outlet (not shown) of the capture structure of discharging parting liquid in bottom surface sections.And, be formed with hydrophilic protective films in the inside of casing 11b.
Cooler 12, is arranged on the mobile cross section of the above-mentioned fluid that circulates in casing main body 11b by forming clathrate by top cooling tube 12a, bottom cooling tube 12b and a plurality of vertical cooling tube 12c.Top cooling tube 12a is the cold-producing medium effuser, and bottom cooling tube 12b is the cold-producing medium inflow pipe, a plurality of vertical cooling tube 12c, and top and bottom are connected with top cooling tube 12a and bottom cooling tube 12b, and being arranged in parallel sets.Top cooling tube 12a and bottom cooling tube 12b, be arranged in parallel up and down, extend to the cooling tube outer end of casing main body 11b outside and be connected, the cold-producing medium of cold-producing medium supply source is supplied in the cooling tube 12b of bottom with cold-producing medium supply source (not shown) as cooling source.And top cooling tube 12a, bottom cooling tube 12b and vertical cooling tube 12c are for example formed by aluminum pipe.
The cooler 12 of Gou Chenging like this, the gas-liquid mixture fluid that cooling is circulated in casing reaches the effect that the gasification substance that will contain in this fluid condenses, and reaches by the effect of heat transmission with a plurality of corrugated platings 13 coolings.
A plurality of corrugated platings 13 by the parts with heat conductivity, for example form with the extrudate of aluminium, possess by changing corrugated plating thickness to dwindle corrugated plating interval each other, and the flow velocity that makes gas-liquid mixture fluid improves and restriction 13a that it is passed through; With on the roughly front in restriction 13a downstream, dispose, make and improve the wall 13b (with reference to Fig. 1 (b)) that the gas-liquid mixture fluid of flow velocity by restriction 13a collides.On the face of the medial surface 13c of throttling path 13a, for fine droplet is difficult to adhere to, and the gasification substance that contains in the gas-liquid mixture fluid is difficult to condense, the hydrophobic layer 14 that formation suppresses the reduction of this fluid pressure loss less.In addition, on wall 13b, be formed with fine droplet and adhere to easily, can further increase the hydrophilic layer 15 of fine droplet seizure amount.Thus, a plurality of corrugated platings 13 have the drop that makes the fine droplet that swims in gas-liquid mixture fluid adhere to, flow down and reclaim and capture path 13d on wall 13b.
A plurality of corrugated platings 13, the end face of its upper and lower is connected support by the top cooling tube 12a of cooler 12 with bottom cooling tube 12b one, and in addition, the end face between the upper and lower is connected by a plurality of vertical cooling tube 12c one and to support.Therefore, a plurality of corrugated platings 13 are cooled off by the heat transmission by cooler 12, so get mode and remain on low temperature level to produce temperature difference between the temperature of the surface temperature of corrugated plating and above-mentioned fluid.
Secondly, the operating state to above-mentioned gas-liquid separation device 10 describes.The gas-liquid mixture fluid of circulation flows through cooler 12 and flows through between the corrugated plating 13 in casing 11, flows out to the outside of casing 11.Gas-liquid mixture fluid device 12 cooling that is cooled improves flow velocity and flows through the throttling path 13a that is formed by the medial surface 13c that forms hydrophobic layer 14 between the corrugated plating, collides the wall 13b of its downstream hydrophilic layer 15 of formation, slows down flow velocity afterwards, outflow casing 11 outsides.Device 12 cooling if gas-liquid mixture fluid is cooled, then the gasification substance that contains in this fluid is condensed, and is included in the fine droplet that swims in this fluid and grows up, and becomes drop.Flow through throttling path 13a if gas-liquid mixture fluid improves flow velocity, collide wall 13b, then the fine droplet that swims in this fluid is captured attached to wall 13b goes up, and the stream of liquid droplets that flows down is crossed drop and captured path 13d, is recovered at bottom half.The gasification substance that contains in this fluid also is cooled and condenses, so be captured attached to wall 13b goes up.
In addition, corrugated plating 13 device 12 cooling that is cooled produces temperature difference between the temperature on corrugated plating surface and the above-mentioned fluid temperature (F.T.), therefore can make the gasification substance that contains in the above-mentioned fluid at the surface of corrugated plating 13 knot mist, condense, can separate recovery.
(second embodiment)
Fig. 2 is the stereogram of the gas-liquid separation device that relates to of second embodiment of the invention.This gas-liquid separation device 20 constitutes by the cooler 22 that has in casing 21, the casing 21 with the same a plurality of corrugated platings 13 of first embodiment.
This Peltier element 24, when flowing through electric current at the PN junction surface, the heat absorption phenomenon takes place in N → P bonding part, and exothermic phenomenon takes place in P → N bonding part, and heat transmits to high temperature side (heating side) from low temperature side (heat absorbing side).Therefore, the outer end of top cooling tube 22a and bottom cooling tube 22b forms has big area, and the mode one of transmitting with carrying out heat that can be good in the N → P bonding part of Peltier element 24 connects.This Peltier element 24 absorbs heat the heat that heat pipe draws up, in the face heat release of its opposition side at the joint face of heat pipe.
Heat pipe is by catheter main body, be housed in the porous body that is known as tube core (wick) of catheter main body and be selected from He, N, H
2O, NH
3, Na, K etc. the action fluid constitute, when end cooling gas-liquid mixture fluid (in the other end heating of tube body) at tube body, the stream of action evacuator body, move to by the end of Peltier element 24 cooling and condense, action fluid after this condenses utilizes capillarity to move in the inside of porous body, turn back to an above-mentioned end of catheter main body, the gas-liquid mixture fluid of circulation in casing 11 is cooled off in evaporation once more thus.The heat that a plurality of vertical cooling tube 22c are configured to draw up from gas-liquid mixture fluid is delivered to any one party of top cooling tube 22a and bottom cooling tube 22b.
According to above-mentioned such gas-liquid separation device 20 that constitutes second embodiment, the gas-liquid mixture fluid of circulation device 22 cooling that is cooled in casing 21, the gasification substance that contains in this fluid is condensed, and is included in the fine droplet that swims in this fluid and grows up, and becomes drop.And the same with first embodiment, in by the process between the corrugated plating 13, the fine droplet that swims in this fluid is captured, and the stream of liquid droplets that flows down is crossed drop and captured path 13d, is recovered at bottom half.
(the 3rd embodiment)
Fig. 3 (a) is the stereogram of the gas-liquid separation device that relates to of third embodiment of the invention, and Fig. 3 (b) is a plane.Fig. 4 (a) is the stereogram of other states, and Fig. 4 (b) is a plane.This gas-liquid separation device 30 is made of the cooler 32 and a plurality of corrugated plating 33 that have in casing 31, this casing 31.Casing 31 has fluid intake 31a, casing main body 31b, fluid issuing 31c, and is identical with first embodiment formation, in this description will be omitted.Cooler 32, by what constitute by heat pipe, top cooling tube 32a, bottom cooling tube 32b and a plurality of vertical cooling tube 32c form clathrate, and be identical with the cooler 22 of second embodiment, in this description will be omitted.
A plurality of corrugated platings 33 are different with the corrugated plating 13 of first embodiment.The end that each corrugated plating 33 will be connected with cooler 32 can dilatation along the flow direction of the gas-liquid mixture fluid of circulation in casing 31 as stiff end.
In this case, if corrugated plating 33 for example is plastic plate member, then shown in Fig. 5 (a), the prominent cross section of establishing is circular bulge axial region 33b on the side of a side's adjacent with the bend of corrugated plating 33 plate member 33a, on the end of the opposing party's plate member 33c, be provided with can rotate freely the cross section circular-arc chimeric recess 33d chimeric with bulge axial region 33b, and the side in the end is provided with the inclined plane 33e of the interference when being used to prevent contraction distortion.In addition, can replace plastic plate member, with the extrudate formation corrugated plating 33 of aluminum, this situation is provided with bulge axial region 33b and chimeric recess 33d with above-mentioned the same, can dilatation.
In addition, under the situation that corrugated plating 33 usefulness metallic plates form, shown in Fig. 5 (b), the hinged support parts 33h that fixedly has the pin inserting hole 33g of portion in the side of a side's adjacent plate member 33f with the bend of corrugated plating 33, end at the opposing party's plate member 33i is provided with hinge fastener 33k, and this hinge fastener 33k has the pin inserting hole 33g of portion with above-mentioned hinged support parts 33h at the consistent pin inserting hole 33j of portion of direction of principal axis.Under the pin inserting hole 33g of portion of the hinged support parts 33h of two plate member 33f, the 33i state consistent with the pin inserting hole 33j of portion of hinge fastener 33k, pass through and insert joint pin 33p, two plate member 33f, 33i can rotate freely.
In addition, be connected with guide rod 40 on this cooler 32, this guide rod 40 supports flexible above-mentioned each corrugated plating 33.Side in the casing 31 has the straight moving reciprocating type actuator 41 as telescopic drive mechanism.The top of piston rod 41a that should straight moving reciprocating type actuator 41, the stripper plate 42 that is connected jointly with the part of the downstream of a plurality of corrugated platings 33 is connected, can be by the piston rod 41a that the stretches corrugated plating 33 that stretches.When the flow of gas-liquid mixture fluid for a long time, as shown in Figure 3, elongation piston rod 41a, relax the degree of crook of the curved pathway of 33 of corrugated platings, when the flow of gas-liquid mixture fluid after a little while, as shown in Figure 4, shrink piston rod 41a, tighten up the degree of crook of the curved pathway of 33 of corrugated platings, adjust flow velocity by the throttling path of 33 of corrugated platings.
If constitute like this, then by adjusting the dilatability of piston rod 41a, adjust according to the ventilation in the casing 31 of gas-liquid mixture fluid, making becomes the gap of 33 of suitable corrugated platings, can adjust the flow velocity by the throttling path of 33 of corrugated platings like this.Therefore, can adjust the flow velocity that collides wall, make the wall of fine droplet that swims in the gas-liquid mixture fluid to be adhered to capture effectively in the downstream of this throttling path.
(application examples)
Secondly, with reference to Fig. 6 semiconductor is made the situation that has gas-liquid separation device in the employed developing apparatus and describe.
This development processing apparatus 50, the central portion and the level of adsorbing the back side (following) of wafer W with rotary chuck 51 keep this wafer W, by driving mechanism 53 liftings, the rotation that is connected with this axial region 52 this rotary chuck 51 is set freely, it possesses side and below that encirclement remains on the wafer W on the rotary chuck 51, has interior cup (cap) 54 that liquid reclaims road 54a; Outer cup 55 with having gas supply port 55d also possesses developer solution supply nozzle 56, cleaning solution supplying nozzle 62, the mist eliminator 61 that reclaims spraying and the gas- liquid separation device 10,20,30 that the present invention relates to.
In this case, the liquid that is formed with ring-type in the inboard of interior cup 54 reclaims road 54a, the upper opening portion of cup 55 and interior cup 54 outside, and road 55a is reclaimed in the ring-type spraying recoverer 55c and the spraying that are formed with the inner face side opening.Reclaim on the approaching position in the top of road 55a and side in this spraying and on concentric circles, to form a plurality of for example 8 gas supply port 55d and to attract a mouthful 55b with the interval that equates.And, on gas supply port 55d, be connected with for example air supply source 67 of gas supply source.If by open and close valve 66, utilize opening of open and close valve 66 that air is supplied to gas supply port 55d from air supply source 67, then air flows along spraying recovery road 55a, the negative pressure of utilizing this air-flow to produce, promptly according to the jeting effect of air-negative-pressure effect, by a spraying recoverer 55c and an attraction mouthful 55b, spraying is recovered to spraying reclaims in the 55a of road.The time that this air is supplied with is, after wafer W is supplied with cleaning fluid, when being rotated the rotation of chuck 51.
In addition, the liquid of cup 54 reclaims the discharge line 59 that is connected with dump valve 60 on the 54a of road in being arranged at.This discharge line 59 with the bottom that is arranged on outer cup 55, the discharge line 68 that is connected with outlet 55e, all is connected with mist eliminator 61, utilizes mist eliminator 61 gas-liquid separations to become gas and waste liquid.
On the other hand, the upper side keeping the wafer W on the rotary chuck 51 is designed to and can freely advances and retreat and free lifting by the relative developer solution supply nozzle 56 in gap with the central portion on wafer W surface.This developer solution supply nozzle 56, the open and close valve 57 by flow rate adjustable is connected with developer solution supply source 58.In addition, be designed to and freely advance and retreat and free lifting by the relative cleaning solution supplying nozzle 62 in gap with the surface of wafer W.This cleaning solution supplying nozzle 62, by open and close valve 64 and cleaning fluid for example the supply source 63 of pure water be connected.
In the development processing apparatus 50 of above-mentioned formation, supply with developer solution with developer solution supply nozzle 56 to the surface of wafer W, carry out development treatment.Thus, by the position that has solubility with respect to developer solution in the resist film on dissolving wafer W surface, form the resist pattern of regulation.Further, supply with for example cleaning (rinse) liquid of pure water etc. to wafer W, carry out cleaning treatment from cleaning solution supplying nozzle 62.Remove the Rotary drying of cleaning fluid then.At this moment, if open open and close valve 66, from air supply source 67 to gas supply port 55d air supply, air will flow along spraying loop 55a so, utilize the negative pressure of this air-flow, the radiation effect that just utilizes the negative pressure that caused by air-flow to work by spraying recoverer 55c and attract a mouthful 55b, is recovered to spraying in the spraying loop 55a.Be recovered to the spraying in the spraying loop 55a, be discharged to mist eliminator 61, utilize mist eliminator 61 to realize gas-liquid separation from outlet 55e.In addition, the developer solution, the cleaning fluid that are recovered in the liquid recovery road 54a are discharged to mist eliminator 61 from discharge line 59, utilize mist eliminator 61 to realize gas-liquid separations.
With mist eliminator 61 gas-liquid separations, the waste liquid that contains developer solution is recovered to waste liquid returnable (tank) (not showing among the figure), the gasification substance of spraying, developer solution and the cleaning fluid of the air of air supply source 67, the spraying of developer solution, cleaning fluid flows into the gas- liquid separation device 10,20,30 that the present invention relates to.
Gas- liquid separation device 10,20,30, go into gas-liquid mixture fluid (fluid-mixing of the gasification substance of the spraying of air, developer solution, the spraying of cleaning fluid, developer solution and cleaning fluid) in the casing with cooler 12,22,32 cool stream, between corrugated plating, circulate, flow out in the casing.At this moment, gas-liquid mixture fluid improves flow velocity by the throttling path between corrugated plating, collides the wall in downstream, and then the fine droplet that swims in this fluid (spraying of developer solution and the spraying of cleaning fluid) is attached on this wall and be captured.In addition, because the above-mentioned fluid of cooler 12,22,32 coolings, the developer solution that contains in this fluid and the gasification substance of cleaning fluid are condensed, be included in the fine droplet that swims in this fluid and grow up, become drop, as attached on the above-mentioned wall and the fine droplet that is captured, separated recovery.
In addition, in the above description, illustrated at development processing apparatus 50 to be suitable for the situation of the gas- liquid separation device 10,20,30 that the present invention relates to, but also be applicable to for example resist application processing apparatus of development processing apparatus 50 liquid processing device in addition.
Claims (10)
1. gas-liquid separation device is characterized in that:
In being connected to the casing that makes the pipeline that gas-liquid mixture fluid passes through, have the cooler that on the cross section of flowing of described fluid, is provided with and in the downstream of cooler along a plurality of corrugated platings that flow and set side by side of described fluid, wherein,
Described cooler constitutes, and is arranged on outside cooling source and is connected, and condensing by cooling is included in gasification substance in the described gas-liquid mixture fluid,
Described a plurality of corrugated plating, have and dwindle corrugated plating interval each other, improve the restriction that described flow rate of fluid is passed through it, with the wall that the described gas-liquid mixture fluid in the downstream of this restriction collides, have the drop that the fine droplet that swims in the described fluid is adhered to flow down and reclaim and capture path on described wall.
2. gas-liquid separation device as claimed in claim 1 is characterized in that:
Described corrugated plating is made of the material with heat conductivity, is connected with described cooler.
3. gas-liquid separation device as claimed in claim 1 is characterized in that:
Described cooler is made of cancellate cooling tube, and cooling tube and corrugated plating link into an integrated entity, and makes to carry out the heat conduction between this cooling tube and the described corrugated plating.
4. as each described gas-liquid separation device in the claim 1～3, it is characterized in that:
The medial surface of the described throttling path that forms between described corrugated plating is formed with hydrophobic layer.
5. as each described gas-liquid separation device in the claim 1～3, it is characterized in that:
On the fluid collision wall of the described drop capture path that forms between described corrugated plating, be formed with hydrophilic layer.
6. as each described gas-liquid separation device in the claim 1～3, it is characterized in that:
The medial surface of the described throttling path that forms between described corrugated plating is formed with hydrophobic layer, is formed with hydrophilic layer on the fluid collision wall of the described drop capture path that forms between described corrugated plating.
7. as each described gas-liquid separation device in the claim 1～3, it is characterized in that:
Described cooler, by upper and lower horizontally disposed top cooling tube and the bottom cooling tube on the cross section of flowing of described gas-liquid mixture fluid, and be parallel to each other and set, the a plurality of vertical cooling tube that top and bottom and top cooling tube are connected with the bottom cooling tube, form clathrate, and the outer end of described top cooling tube and the outer end of bottom cooling tube are connected with the cold-producing medium supply source that is arranged on the outside described cooling source of conduct.
8. as each described gas-liquid separation device in the claim 1～3, it is characterized in that:
Described cooler, by horizontally disposed top cooling tube and the bottom cooling tube that constitutes by transfer pipes in upper and lower on the cross section of flowing of described gas-liquid mixture fluid, and be arranged in parallel, the vertical cooling tube that a plurality of heat pipes that top and bottom are connected with the bottom cooling tube with the top cooling tube constitute, form clathrate, and the outer end of described top cooling tube and the outer end of bottom cooling tube are connected with the heat absorbing side of the Peltier element that is arranged on the outside described cooling source of conduct.
9. as each described gas-liquid separation device in the claim 1～3, it is characterized in that:
Described a plurality of corrugated plating, as stiff end, can dilatation along the direction that flows of described fluid, mechanism stretches by telescopic drive with the end that is connected with described cooler of each corrugated plating.
10. gas-liquid separation device as claimed in claim 9 is characterized in that:
Corresponding described each corrugated plating is connected with guide rod on described cooler, by this guide rod supports can dilatation described each corrugated plating.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-303563 | 2007-11-22 | ||
| JP2007303563 | 2007-11-22 | ||
| JP2007303563A JP4688223B2 (en) | 2007-11-22 | 2007-11-22 | Gas-liquid separator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101439235A true CN101439235A (en) | 2009-05-27 |
| CN101439235B CN101439235B (en) | 2011-08-17 |
Family
ID=40723927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101811164A Active CN101439235B (en) | 2007-11-22 | 2008-11-21 | Gas-liquid separating device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4688223B2 (en) |
| KR (1) | KR101376345B1 (en) |
| CN (1) | CN101439235B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2009125672A (en) | 2009-06-11 |
| CN101439235B (en) | 2011-08-17 |
| KR101376345B1 (en) | 2014-03-20 |
| JP4688223B2 (en) | 2011-05-25 |
| KR20090053683A (en) | 2009-05-27 |
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