JPH04334516A - Air purifier - Google Patents

Abstract

PURPOSE:To easily remove dust by a method wherein air desired to be purified is once mixed with condensible gas and the condensible gas in the gaseous mixture is collected and liquefied in a condensing separator to be subjected to gas liquid separation. CONSTITUTION:In a mixer, raw air 1 desired to be purified by the removal of dust is mixed with condensible gas 2 (e.g. volatile hydrocarbon). Further, the condensible gas in the gaseous mixture formed by mixing the raw air 1 and the condensible gas 2 by the mixer 4 is cooled and liquefied in a condensing separator 5 to be subjected to gas-liquid separation. That is, when the condensible gas is condensed and liquefied, dust can easily be removed by utilizing such a property that the condensible gas is condensed and liquefied using extremely fine dust as a condensing nucleus.

Description

[Detailed description of the invention]

0001

[Industrial Application Field] The present invention is applicable to clean air production equipment used in the semiconductor manufacturing industry, food manufacturing industry, pharmaceutical manufacturing industry, etc., as well as industrial emissions, bio-related emissions, and nuclear-related emissions that cause air pollution. The present invention relates to an air cleaning device used in a removal device, etc.

0002

[Prior Art] Conventional air purifiers include electrostatic electric precipitators that charge and remove dust from raw air, and filter-type dust collectors that filter dust with a filter. Cleaning methods are used.

[0003] These devices are also used for the removal of industrial emissions that cause air pollution.

0004

[Problems to be Solved by the Invention] The conventional air cleaning device described above has the following problems to be solved.

That is, in the conventional apparatus, there is a lower limit to the size of dust that can be removed, and in any case, it is 0.1 μm.
There is a problem in that it is extremely difficult to remove dust of (submicron) size or smaller. Another problem was that separate equipment was required for deodorization and degassing.

In view of the above problems, the present invention utilizes the property of condensable gas to condense and liquefy using extremely fine dust as condensation nuclei.
It is an object of the present invention to provide an air cleaning device that can easily remove dust.

[0007]

[Means for Solving the Problems] As a means for solving the above-mentioned problems, the present invention provides an air cleaning device and a condensation separation device described in the following (1) and (2). (1) A mixer that mixes a condensable gas with the raw material air that needs to be purified by removing dust, and a condensable gas in the mixed gas that is created by mixing the raw material gas and the condensable gas using the mixer. An air cleaning device characterized by comprising a condensing separator that cools and liquefies the air and separates it into gas and liquid. (2) A cooler installed in a flow path of air containing condensable gas so that the air can come into contact with the air, and a collision plate that separates and captures droplets of condensable gas that come into contact with the cooler and condense. A condensation separation device characterized by comprising:

[0008]

[Operation] Since the present invention is constructed as described above, the following (1)
), (2). (1) In the configuration of (1) above, a condensable gas is mixed with raw air using a mixer, and the condensable gas in the mixed gas is cooled and liquefied by a condensing separator to separate gas and liquid. Therefore, when the condensable gas is cooled and becomes fine droplets, the fine dust in the gas mixture develops into droplets as fog nuclei, envelops them, and carries away the dust in the air into the condensed liquid. Therefore, the raw air leaves the device as clean air containing almost no dust of submicron (0.1 μm) or less. that time,
NOX, SOX, ammonia, and other odorous gases become fog nuclei or are absorbed by the condensate and removed from the raw air. (2) In the configuration of (2) above, a cooler is provided in the flow path of the air containing condensable gas so that the air can come into contact with it, so that the condensable gas in the air that comes into contact with the cooler is Microscopic dust particles in the air are used as fog nuclei to develop into droplets, enveloping them, and carrying away the dust particles in the air into the condensate. The condensable gas condensed on the surface of the cooler turns into droplets and flows down the cooler, but the fine mist droplets that are being carried away by the air have a much higher specific gravity than the air, so they collide with the collision plate due to inertia. The mist collides with other mist droplets, collects with other mist droplets, or aggregates with condensate that has already developed into dewdrops, forms droplets, flows downward, and is separated from the air.

As a result, as in the case (1) above, clean air containing almost no submicron or smaller dust and no odor gas or foreign gas is obtained.

0010

DESCRIPTION OF THE PREFERRED EMBODIMENTS Air cleaning apparatuses according to first and second embodiments of the present invention will be explained with reference to FIGS. 1 to 3.

First, a first embodiment will be explained with reference to FIG. FIG. 1 is a schematic block diagram of the first embodiment. In the figure, a mixer 4 includes raw air 1 containing dust, water superheated in a superheater 3,
It is used to mix condensable gases 2 such as volatile hydrocarbons such as alcohol and high melting point gases such as fluorocarbons, and the downstream thereof is connected to a condensing separator 5. A cooler 6 equipped with a collision plate for separating and trapping droplets is housed horizontally or vertically in the condensing separator 5, and a condensing water tank 8 is connected to the lower part of the cooler 6. Note that the raw material air 1, condensable gas 2, etc. flow in the direction of the arrow in the figure.

Next, the operation of the above configuration will be explained. The raw air 1 containing dust is mixed in the mixer 4 with the condensable gas 2 superheated in the superheater 3, and a part of the condensable gas 2 is condensed into droplets with dust as the core. It is sent to separator 5. In the condensation separator 5, condensation is further accelerated in the process of being cooled by the cooler 6, and droplets of about 1 to 10 μm are generated, and odor molecules in the air, water-soluble gases, etc. also act as nuclei to form droplets. It is absorbed by the generated droplets.

These droplets are separated and captured by a collision plate connected to the cooler 6, and the captured droplets grow in contact with each other and travel through the collision plate as condensed water and accumulate in a condensed water tank 8. The accumulated condensed water is periodically transferred to condensed water 7 from condensed water tank 8.
Take it out as The air in which the droplets have been separated and captured is taken out as clean air 9.

Next, a second embodiment in which the above configuration is combined with peripheral equipment as required will be described with reference to FIG. Note that parts similar to those in FIG. 1 are denoted by the same reference numerals, and explanations thereof will be omitted.

In FIG. 2, a blower 10 that sends raw air 1 to the mixer 4 and a gas generator 11 that sends condensable gas are combined, and an electrostatic charger is used to capture droplets after they exit the condensation separator 5. A dust collector 12 is combined. Further, an air temperature regulator 13 for adjusting the air temperature is provided downstream of the electrostatic precipitator 12, so that clean air 9 having a target temperature can be obtained.

FIG. 3 shows a schematic relationship diagram between changes in air volume and changes in dust capture rate according to the first and second embodiments.

[0017] The diagram shows the air volume on the horizontal axis and the dust capture rate on the vertical axis, and the temperature of the raw air is changed.
If the temperature is changed within the range of m3/min, the temperature of the raw air will be 2
In a high temperature range of about 0 to 30°C, a maximum dust capture rate of about 90 to 98% can be obtained, and in a low temperature range of about 10 to 20°C, a dust capture rate of about 60 to 70% can be obtained.

It should be noted that the condensing separator described in the third and fourth embodiments is recommended as a preferable example of the condensing separator 5 used in the first and second embodiments. However, the use is not limited to the third and fourth embodiments, and any condensing separator may be used without departing from the purpose of the invention.

Next, third and fourth embodiments of the condensation separation apparatus according to the second aspect of the invention will be explained with reference to FIGS. 4 to 6.

First, a third embodiment will be explained with reference to FIG. FIG. 4 shows the main parts of the third embodiment, where (a) is a side sectional view, (a) is a side sectional view, and (
b) is a bottom view of (a). In the figure, cooler 14
is a pipe made of a corrosion-resistant material with a rectangular cross section, through which a refrigerant fluid 16 flows through a refrigerant pipe 15. In order to increase the cooling efficiency, the coolers 14 are arranged in a wave shape as shown in the figure, and a collision plate 17 for separating and trapping droplets is attached to the end face of each cooler 14. Raw air 1
The air enters from the right side of the figure as indicated by the white arrow, repeatedly collides between the coolers 14, and exits as clean air 9 to the left side of the figure.

Next, the operation of the above configuration will be explained. When raw air 1 consisting of dust-containing air and condensable gas enters the apparatus, it is cooled by a cooler 14 through which a refrigerant fluid 16 is supplied and discharged through a refrigerant pipe 15. During the cooling process, the condensable gas contained in the raw material air 1 condenses with dust as the core, generating droplets of approximately 1 to 10 μm, and the collision plate 1
Collision with 7. The collided droplets adhere to the collision plate 17, grow in contact with each other, travel through the collision plate 17, and are collected as condensed water and taken out. At this time, large particles of dust that could not become fog nuclei also collide with the wet collision plate 17 due to the inertial force due to the specific gravity, which is much larger than that of air, and are captured by the condensate and removed from the raw air 1. . The air in which the droplets have been separated and captured is taken out as clean air 9.

Next, a fourth embodiment will be explained with reference to FIG. Note that members similar to those in FIG. 4 are designated by the same reference numerals, and explanations thereof will be omitted.

FIG. 5 is a view of the main part of the fourth embodiment, in which (a) is a side sectional view and (b) is a bottom view of (a). In the figure,
The cooler 14a has a circular cross-sectional shape, and the refrigerant fluid 16 flows through it from the refrigerant pipe 15a. By arranging the collision plates 17a so as to connect the respective coolers 14a, the number of man-hours required for manufacturing can be reduced without impairing the droplet separation effect. That is, the cooler 14 of the third embodiment has a long rectangular cross section, and the manufacturing process
Compared to this, since the cooler 14a of this embodiment has a circular cross section, ready-made pipes can be used as they are, and both the manufacturing process and the number of man-hours are small.

FIG. 6 shows a schematic relationship diagram comparing the dust capture rates of the third and fourth embodiments and the conventional condensable gas separation device.

[0025] The horizontal axis shows the air flow rate and the vertical axis shows the dust capture rate. When the air flow rate is changed between 3 and 10 m3/min, the conventional type can only obtain a capture rate of about 40 to 50%. In contrast, in the case of both examples, the maximum
A dust capture rate of about 98% can be obtained.

As described above, according to the first and second embodiments, the condensable gas 2 is mixed with the raw air 1 in the mixer 4, and the mixture is passed through the condensation separator 5 to condense the condensable gas 2 into condensation. So,
Generally, when a gas condenses and atomizes, the gas molecules condense using extremely fine or ultrafine dust particles in the gas as nuclei, atomize, expose, and become droplets.Condensable gas 2 The remaining raw material air
has the advantage of being purified very clearly.

Further, there is an advantage that odor molecules, water-soluble gases, etc. in the raw air 1 are also carried away as fog nuclei of the condensate or absorbed by the generated droplets, thereby achieving deodorization and degassing.

Further, according to the third and fourth embodiments, since the coolers 14, 14a are placed in the flow path of air containing condensable gas, and the collision plates 17, 17a are provided, the coolers 14, 14
Since the condensable gas condensed in step a collides with the collision plates 17 and 17a and is captured, the condensed droplets do not scatter into the air and mix into the clean air 9, and the cleanliness of the clean air is further improved. , has the advantage of increasing

[0029] Also, the cooler 14 etc. are air (raw air 1)
are arranged so that they repeatedly collide, so even dust that has a relatively high particle size and cannot become a fog nucleus, due to its inertia,
exiting the air stream and impinging on cooler 14 or impinging plate 17
It has the advantage that it impinges on the air and is trapped in the condensate and removed from the air.

[0030]

That is, once the condensable gas is mixed with the air to be purified, the condensable gas is condensed and liquefied again in the condensation separator, so that dust, odor molecules, water-soluble gases, etc. contained in the air are condensed as nuclei. Droplets of liquid are formed and the remaining air to be cleaned is significantly cleaned.

Furthermore, air can be obtained from which dust of submicron (0.1 μm) or less, which has been difficult to remove in the past, has been sufficiently removed.

[0033] At the same time as removing dust, deodorization and degassing are performed. Further, unlike the conventional method, there is no need to prepare devices for deodorizing, degassing, etc., so the equipment cost and equipment area are reduced.

[Brief explanation of the drawing]

FIG. 1 is a schematic diagram of a first embodiment of the present invention.

FIG. 2 is a schematic configuration diagram of a second embodiment of the present invention.

FIG. 3 is a schematic relationship diagram showing the effects of the first and second embodiments, that is, changes in air volume and changes in dust capture rate.

4A and 4B are diagrams of main parts of a third embodiment of the present invention, in which (a) is a side sectional view and (b) is a bottom view of (a).

5A and 5B are diagrams of main parts of a fourth embodiment of the present invention, in which (a) is a side sectional view and (b) is a bottom view of (a).

FIG. 6 is a comparison diagram showing the effects of the third and fourth embodiments, that is, the dust capture rate with respect to the air flow rate in comparison with the conventional example.

[Explanation of symbols]

1 Raw material air 2 Condensable gas 3
Superheater 4 Mixer 5 Condensation separator 6
Cooler 7 Condensed water 8 Condensed water tank 9 Clean air 10 Air blower 11 Gas generator 12
Electrostatic precipitator 13 Air temperature regulator 14, 14a Cooler 15, 15a Refrigerant piping 16 Refrigerant fluid 17, 17a Collision plate

Claims (2)

[Claims] Claim 1: A mixer for mixing a condensable gas with raw material air that is required to be purified by removing dust, and condensability in the mixed gas obtained by mixing the raw material gas and the condensable gas using the mixer. An air cleaning device characterized by comprising a condensing separator that cools and liquefies gas and separates it from gas and liquid. 2. A cooler provided in a flow path of air containing a condensable gas so that the air can come into contact with the air, and a collision plate that separates and captures droplets of the condensable gas that come into contact with the cooler and condense. A condensation separation device characterized by comprising: