CN101382416A - Non-contact six-degree of freedom micro-displacement measuring device - Google Patents
Non-contact six-degree of freedom micro-displacement measuring device Download PDFInfo
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- CN101382416A CN101382416A CNA200810149831XA CN200810149831A CN101382416A CN 101382416 A CN101382416 A CN 101382416A CN A200810149831X A CNA200810149831X A CN A200810149831XA CN 200810149831 A CN200810149831 A CN 200810149831A CN 101382416 A CN101382416 A CN 101382416A
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Abstract
The invention provides a non-contact six-freedom-degree (DOF) micrometric displacement measurement device, which comprises: a movable part, an object to be measured which is fixed with the movable part, a stationary part, and three area-array CCDs, wherein, the first area-array CCD and the second area-array CCD are fixed with the movable part together, and the third area-array CCD is fixed with the stationary part together; a three-way laser output structure is fixed with the stationary part together and emits three beams which are respectively received by the three area-array CCDs, wherein, when the object to be measured carries out movement of arbitrary DOF, the position of a light point on the corresponding area-array CCD is caused to be changed, and the six-DOF displacement of the object to be measured is calculated according to the change of the light point position before and after the movement of the object to be measured. The non-contact six-DOF micrometric displacement measurement device can be used for the six-DOF micrometric displacement monitoring of high-precision objects.
Description
Technical field
The present invention relates to a kind of six-degree of freedom micro-displacement measuring method, belong to the photoelectric measurement field, be specially adapted to the high-acruracy survey of the relative micrometric displacement of six degree of freedom between object.
Background technology
The motion of any one object in the space all has 6 degree of freedom, promptly along the translation (t of 3 directions
x, t
y, t
z) and around the rotation (θ of 3 axis of orientations
x, θ
y, θ
z).Development of modern science and technology is had higher requirement to machining precision, installation accuracy and accuracy of detection in the various fields such as space flight, aviation, machinery and instrument.The location of workpiece to be machined, the installation of precision component and target object all need measurement, adjustment and the control of 6 degree of freedom of as many as at the position in space and motion monitoring etc.Because its application prospects, the multivariant measurement simultaneously is the focus of various countries' research, and an important topic that always is used as detection range is studied.Since the sixties in 20th century, more measuring method and technology have appearred.The six degree of freedom photoelectric measurement method is summarized and is divided into following several big class: 1, traditional geometrical optics six degree of freedom measuring method; 2, based on the six degree of freedom measuring method of diffraction grating; 3, utilize the six degree of freedom measuring method of vision technique; 4, based on the six degree of freedom measuring method of Laser Tracking; 5, the six degree of freedom measuring method of laser interference and laser alignment combination.Above-mentioned six degree of freedom measuring technique respectively has superiority and limitation, and different application conditions and background are also arranged.When carrying out six-degree of freedom displacement monitoring of certain workpiece space, problems such as above-mentioned degree of freedom measuring method ubiquity complex structure, installing space deficiency are difficult to be suitable for.
Summary of the invention
The technical problem to be solved in the present invention is: a kind of non-contact six-degree of freedom micro-displacement measuring device is provided, can realizes the relative microdisplacement measurement of object six degree of freedom, have simple, the advantage of high precision of light path.
The invention provides a kind of non-contact six-degree of freedom micro-displacement measuring device, this device comprises: moving part, and testee and described moving part are fixed together; Maintain static part; Three area array CCDs, wherein, first area array CCD and second area array CCD and moving part are fixed together, the 3rd area array CCD with maintain static partial fixing together; Three road laser export structures, with maintain static partial fixing together, and emission three light beams, received by described three area array CCDs respectively, wherein, when the motion of any degree of freedom takes place in testee, cause that the position of luminous point on the corresponding area array CCD changes, calculate the six-degree of freedom displacement of testee according to the variation of described light spot position before and after the testee motion.
Described three road laser export structures adopt 1 semiconductor laser light resource emission light beam, and described light beam is after the fiber coupler beam split, by the Optical Fiber Transmission and the output that collimates.
Light beams in the three light beams incides on the plane mirror that is fixed on the moving part, the light beam that is reflected by plane mirror is received by the 3rd area array CCD after by a semi-transparent semi-reflecting lens beam split, measures two anglec of rotation components in the six degree of freedom according to the change in location of luminous point on the 3rd area array CCD.
First area array CCD and second area array CCD and plane mirror coplane, and the reverse extending line of the other two light beams in the three light beams meets at a bit, described other two light beams symmetry at a certain angle incides on first area array CCD and second area array CCD, measures another one anglec of rotation component and three translational components in the six degree of freedom according to the change in location of the luminous point on first area array CCD and second area array CCD.
The change in location of luminous point calculates after described three anglec of rotation components on according to described three area array CCDs, obtain rotation matrix, utilize described rotation matrix then, and be combined in the coordinate of the luminous point on first area array CCD and second area array CCD, calculate three translational components.
Characteristics simple in structure, that installation is easy to adjust and measuring accuracy is high that the present invention compared with prior art has can be used for the small six-degree of freedom displacement of monitoring object.
Description of drawings
In conjunction with the drawings, from the description of the following examples, the present invention these and/or others and advantage will become clear, and are easier to understand, wherein:
Fig. 1 is the synoptic diagram according to the multi-path laser export structure of the embodiment of the invention;
Fig. 2 is the enforcement figure according to the non-contact six-degree of freedom measurement mechanism of the embodiment of the invention;
Fig. 3 is 4 degree of freedom measuring principle sketches according to the embodiment of the invention.
Embodiment
To describe embodiments of the invention in detail now, its example is shown in the drawings, and wherein, identical label is represented identical parts all the time.These embodiment are described below with reference to the accompanying drawings to explain the present invention.
Fig. 1 is the multi-path laser export structure synoptic diagram according to the embodiment of the invention.With reference to Fig. 1, the multi-path laser export structure comprises semiconductor laser light resource 1, optical fiber 2, fiber coupler 3, optical fiber 4 and collimating apparatus 5.Semiconductor light sources 1 is sent laser, conducts to fiber coupler 3 by optical fiber 2, and fiber coupler 3 is divided into three beams with laser, respectively independently from optical fiber 4 conduction and through collimating apparatus 5 collimation backs as required light beam 6 outputs.
Fig. 2 is the enforcement figure according to the non-contact six-degree of freedom measurement mechanism of the embodiment of the invention.With reference to Fig. 2, this non-contact six-degree of freedom measurement mechanism comprises support 7, two area array CCDs (charge-coupled image sensor) 8, plane mirror 9, moving part 10, semi-transparent semi-reflecting lens 11, area array CCD 12, optical fiber sources 13 and maintains static part 14.Two area array CCDs 8 are fixed together with moving part 10, area array CCD 12 with maintain static part 14 and be fixed together.Optical fiber source 13 is luminous components, can adopt 3 road laser export structures shown in Figure 1, and with maintain static part 14 and be fixed together.To should be noted that in order representing easyly, in Fig. 2, only to show the part-structure (for example, collimating apparatus 5) of laser export structure, and omitted other ingredient.
Moving part 10 and testee are rigidly fixed together, and the athletic meeting of testee drive system moving part moves like this.Adjust moving part 10 and make the light-sensitive surface and plane mirror 9 coplanes of two area array CCDs 8, and calibrate this two positions of area array CCD 8 in described plane coordinate system.
Adjustment maintains static part 14, make the two-beam line at a certain angle respectively symmetry invest corresponding area array CCD 8, and make its reverse extending line meet at 1 l, structure and calibrates the angle of two-beam line as shown in Figure 3.
When initial, each Array CCD of computer acquisition, and calculate the coordinate of current each optical spot centre in image.During work, when the motion of any degree of freedom takes place testee, cause moving part 10 to move, thereby cause the variation of corresponding light spot position on each area array CCD.It is described below:
1. take place to rotate as moving part 10, the deflection of certain angle then also takes place through the light of plane mirror 9 reflections, and reflex on the area array CCD 12, be presented as that optical spot centre produces moving of z direction by semi-transparent semi-reflecting lens 11 around X-axis;
2. take place to rotate as moving part 10, the deflection of certain angle then also takes place through the light of plane mirror 9 reflections, and reflex on the area array CCD 12, be presented as that optical spot centre produces moving of directions X by semi-transparent semi-reflecting lens 11 around Y-axis;
3. the translation of directions X takes place as moving part 10, and then two optical spot centre on the area array CCD 8 produce identical translation on the X-axis;
4. the translation of Y direction takes place as moving part 10, and then two optical spot centre on the area array CCD 8 produce identical translation on the Y-axis;
5. the translation of Z direction takes place as moving part 10, and then two optical spot centre on the area array CCD 8 produce opposite translation on the Y-axis;
6. take place to rotate around the Z axle as moving part 10, then the rotation around initial point takes place in two optical spot centre on the area array CCD 8;
7. take place to rotate around X-axis as moving part 10, then two optical spot centre on the area array CCD 8 produce displacement in the same way on the Y-axis;
By gathering Array CCD, handle obtaining described light spot position, go out the object six-degree of freedom displacement according to the change calculations of described light spot position.Theoretically the computing method of object six-degree of freedom displacement are analyzed below:
The calculating of six degree of freedom is carried out in two steps: at first, three anglec of rotation components are found the solution in the coordinate figure variation on corresponding area array CCD according to three optical spot centre, and obtain rotation matrix thus; Then, utilize the rotation matrix of having tried to achieve, be combined in the optical spot centre coordinate on the area array CCD 8, be listed as the group of solving an equation, find the solution three translational components.
1. find the solution the anglec of rotation
For the optical spot centre position on the area array CCD 12:
When the translation of x and y direction took place moving part 10 relative fixed static parts 14, light spot position did not change;
When the small translation of z direction took place moving part 10, with respect to translational movement, the variation of light spot position was very small, can ignore;
Moving part 10 is around z axle rotation θ
z, light spot position does not change;
Moving part 10 is around x axle rotation θ
x, luminous point produces the displacement of z direction, can obtain anglec of rotation θ
xAs follows:
Moving part 10 is around y axle rotation θ
y, luminous point produces the displacement of x direction, can obtain anglec of rotation θ
yAs follows:
In superincumbent two equatioies, Δ x, Δ y are signed translational movement, and S is the distance of light process between plane mirror 9 and area array CCD 12.Light spot position measure of the change by plane mirror 9 reflection amplifies the anglec of rotation and reflection on area array CCD 12 around the anglec of rotation of y, z, has improved measuring accuracy.
Two luminous points for direct imaging on area array CCD 8:
Imaging surface is along the translation of x direction, and two luminous points are created in the identical displacement of x direction: Δ x
1, Δ x
1
Imaging surface is along the translation of y direction, and two luminous points are created in displacement identical on the y direction: Δ y
1, Δ y
1
Imaging surface is along the translation of z direction, and two luminous points are created in displacement opposite on the y direction: Δ y
2,-Δ y
2
Imaging surface rotates θ around x
x, on the y direction, produce in the same way but the displacement of differing in size: Δ y
3, Δ y
4
Imaging surface rotates θ around y
y, on the x direction, produce identical displacement: Δ x
2, Δ x
2
Imaging surface rotates θ around z
z, on x, y direction, produce opposite displacement: Δ x
3,-Δ x
3, Δ y
5,-Δ y
5
According to top analysis, two luminous points are 2 Δ x in the difference of x direction top offset amount
3, promptly two luminous points have reflected and have been only to have reflected the anglec of rotation of imaging surface around the z axle in the difference of x direction top offset amount.Also consider the positive dirction of right-hand rule regulation, obtain:
θ
z＝arcsin((Δx
u-Δx
d)/D)
Wherein, Δ x
u, Δ x
dBe the difference of horizontal ordinate before two luminous points motion back and the motion, D is the distance between preceding two luminous points of motion.This method also is that subtle change is amplified by the difference reflects anglec of rotation of point-to-point transmission coordinate to some degree, helps improving measuring accuracy.
Order according to x, y, z is carried out the rotation of respective angles to object, and rotation matrix can be write:
2. find the solution translation vector
The space intersection point of the imaging surface of initial position and two light beams of non-reflection keeps relative static, resonable being thought of as in the three-dimensional system of coordinate that image planes set up, and establishing the light beam intersecting point coordinate is l, two initial light point coordinate are p
1, p
2, as shown in Figure 3.
The rotational transform R that imaging surface has been tried to achieve, and the unknown translation transformation of hypothesis is T, and under new coordinate system, the new coordinate of each point is so:
L＝R(l-T)，P
1＝R(p
1-T)，P
2＝R(p
2-T)
So two light beams can be expressed as respectively:
[L；L-P
1]＝[R(l-T)；R(l-p
1)]，[L；L-P
2]＝[R(l-T)；R(l-p
2)]
Can be by expression formula with described two light beam expression formulas and post exercise imaging plane z=0 simultaneous solution motion back luminous point coordinate.Obtain 4 equations again with by optical spot centre coordinate figure simultaneous after the motion of Flame Image Process acquisition, unknown number is three elements among the translation vector T, and the parameter fitness method with least square obtains the translation vector parameter then.
What obtain 3. is the motion of imaging plane with respect to initial image space, uses relative static position relation between ideal image plane and the light source place object again, and further conversion can obtain the relative motion of testee.The anglec of rotation can obtain by decomposing R.
Said process is realized with computer software, just can be found the solution three anglec of rotation [ω
xω
yω
z] ' and three translational component [t
xt
yt
z] ', thus realize the displacement measurement of six degree of freedom.
Therefore, that non-contact six-degree of freedom measurement mechanism according to the present invention has is simple in structure, advantage easy to adjust, as can to obtain high measurement accuracy is installed, and can be used for the small six-degree of freedom displacement of monitoring object.
Though specifically described and shown the present invention with reference to exemplary embodiment of the present invention, but will be understood by those skilled in the art that, under the situation that does not break away from the spirit and scope of the present invention that are defined by the claims, can carry out the various changes of form and details to it.
Claims (5)
1, a kind of non-contact six-degree of freedom micro-displacement measuring device comprises:
Moving part, testee and described moving part are fixed together;
Maintain static part;
Three area array CCDs, wherein, first area array CCD and second area array CCD and moving part are fixed together, the 3rd area array CCD with maintain static partial fixing together;
Three road laser export structures and maintain static partial fixing together, and the emission three light beams, received by described three area array CCDs respectively,
Wherein, when the motion of any degree of freedom takes place testee, cause that the position of luminous point on the corresponding area array CCD changes, calculate the six-degree of freedom displacement of testee according to the variation of described light spot position before and after the testee motion.
2, non-contact six-degree of freedom micro-displacement measuring device according to claim 1, it is characterized in that, described three road laser export structures adopt a semiconductor laser light resource emission light beam, and described light beam is after the fiber coupler beam split, by the Optical Fiber Transmission and the output that collimates.
3, non-contact six-degree of freedom micro-displacement measuring device according to claim 2, it is characterized in that, light beams in the three light beams incides on the plane mirror that is fixed on the moving part, the light beam that is reflected by plane mirror is received by the 3rd area array CCD after by a semi-transparent semi-reflecting lens beam split, measures two anglec of rotation components in the six degree of freedom according to the change in location of luminous point on the 3rd area array CCD.
4, non-contact six-degree of freedom micro-displacement measuring device according to claim 3, it is characterized in that, first area array CCD and second area array CCD and plane mirror coplane, and the reverse extending line of the other two light beams in the three light beams meets at a bit, described other two light beams symmetry at a certain angle incides on first area array CCD and second area array CCD, measures another one anglec of rotation component and three translational components in the six degree of freedom according to the change in location of the luminous point on first area array CCD and second area array CCD.
5, non-contact six-degree of freedom micro-displacement measuring device according to claim 4, it is characterized in that, after the change in location of luminous point calculates three anglec of rotation components on according to described three area array CCDs, obtain rotation matrix, utilize described rotation matrix then, and be combined in the coordinate of the luminous point on first area array CCD and second area array CCD, calculate described three translational components.
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| CN102162718A (en) * | 2009-12-31 | 2011-08-24 | 中国工程物理研究院流体物理研究所 | Device and method for measuring spatial free attitude of rigid object, and method for analyzing data |
| CN101713639B (en) * | 2009-10-30 | 2011-11-16 | 中国科学院国家天文台南京天文光学技术研究所 | radio telescope co-phase detection method based on four-point support of quadrilateral subpanel |
| CN102252634A (en) * | 2011-06-16 | 2011-11-23 | 中国科学技术大学 | Laser multiple degrees of freedom precision measurement system based on telescope system |
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| WO2013013628A1 (en) * | 2011-07-26 | 2013-01-31 | 清华大学 | Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space |
| CN103983247A (en) * | 2014-05-16 | 2014-08-13 | 哈尔滨工业大学 | Method for measuring inclination angle based on secondary platform linear array CCD (Charge Coupled Device) |
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| CN101713639B (en) * | 2009-10-30 | 2011-11-16 | 中国科学院国家天文台南京天文光学技术研究所 | radio telescope co-phase detection method based on four-point support of quadrilateral subpanel |
| CN102162718A (en) * | 2009-12-31 | 2011-08-24 | 中国工程物理研究院流体物理研究所 | Device and method for measuring spatial free attitude of rigid object, and method for analyzing data |
| CN102162718B (en) * | 2009-12-31 | 2012-09-05 | 中国工程物理研究院流体物理研究所 | Device and method for measuring spatial free attitude of rigid object, and method for analyzing data |
| CN102252634B (en) * | 2011-06-16 | 2012-11-14 | 中国科学技术大学 | Laser multiple degrees of freedom precision measurement system based on telescope system |
| CN102252634A (en) * | 2011-06-16 | 2011-11-23 | 中国科学技术大学 | Laser multiple degrees of freedom precision measurement system based on telescope system |
| US8958078B2 (en) | 2011-07-26 | 2015-02-17 | Tsinghua University | Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space |
| WO2013013628A1 (en) * | 2011-07-26 | 2013-01-31 | 清华大学 | Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space |
| CN102589448A (en) * | 2012-03-13 | 2012-07-18 | 北京信息科技大学 | High-precision six-freedom degree pose monitoring device |
| CN102589448B (en) * | 2012-03-13 | 2015-02-25 | 北京信息科技大学 | High-precision six-freedom degree pose monitoring device |
| CN103983247A (en) * | 2014-05-16 | 2014-08-13 | 哈尔滨工业大学 | Method for measuring inclination angle based on secondary platform linear array CCD (Charge Coupled Device) |
| CN105004271A (en) * | 2015-04-29 | 2015-10-28 | 广州市地平线岩土工程有限公司 | System of utilizing light rays having angles therebetween to carry out displacement monitoring and measurement method thereof |
| CN105004271B (en) * | 2015-04-29 | 2019-12-06 | 广州市地平线岩土工程有限公司 | System and method for monitoring displacement by utilizing light rays forming angles with each other |
| CN110030922A (en) * | 2018-01-11 | 2019-07-19 | 大族激光科技产业集团股份有限公司 | A kind of Multipoint synchronous measurement method and measuring system and storage medium |
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| CN110044272A (en) * | 2019-04-30 | 2019-07-23 | 马鞍山钢铁股份有限公司 | A kind of laser width finding centering device and application method |
| CN110044272B (en) * | 2019-04-30 | 2020-10-27 | 马鞍山钢铁股份有限公司 | Laser width measurement centering device and using method |
| CN110500966A (en) * | 2019-10-09 | 2019-11-26 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of six degree of freedom precision measurement system for the measurement of force structure miniature deformation |
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