CN110030922A - A kind of Multipoint synchronous measurement method and measuring system and storage medium - Google Patents

A kind of Multipoint synchronous measurement method and measuring system and storage medium Download PDF

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Publication number
CN110030922A
CN110030922A CN201810029091.XA CN201810029091A CN110030922A CN 110030922 A CN110030922 A CN 110030922A CN 201810029091 A CN201810029091 A CN 201810029091A CN 110030922 A CN110030922 A CN 110030922A
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CN
China
Prior art keywords
laser
equipment
tested
head assembly
shift value
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Pending
Application number
CN201810029091.XA
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Chinese (zh)
Inventor
陈百强
李宁
翟学涛
高云峰
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Shenzhen Hans CNC Technology Co Ltd
Original Assignee
Han s Laser Technology Industry Group Co Ltd
Shenzhen Hans CNC Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Han s Laser Technology Industry Group Co Ltd, Shenzhen Hans CNC Technology Co Ltd filed Critical Han s Laser Technology Industry Group Co Ltd
Priority to CN201810029091.XA priority Critical patent/CN110030922A/en
Publication of CN110030922A publication Critical patent/CN110030922A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical means

Abstract

The embodiment of the invention discloses a kind of Multipoint synchronous measurement method and measuring system and storage mediums, are related to circuit board processing equipment field.The Multipoint synchronous measurement method includes: that control equipment to be tested is moved according to one or more test point, it controls one or more laser beam modulation head assemblies and issues a branch of or multiple laser beam, so that every beam laser beam is divided into two beam secondary laser beams, wherein a branch of secondary laser beam is radiated in equipment to be tested, in another beam secondary laser beam return laser light head assembly;Acquisition is radiated at a branch of or multiple laser beam returned in test equipment, and the laser beam returned according to equipment to be tested obtains the shift value of each reflection point in equipment to be tested with another beam secondary laser beam split.Multipoint synchronous measurement method and measuring system described in the embodiment of the present invention and storage medium realize the accuracy test at the multiple positions of workbench of process equipment, obtain accurate and visual test result.

Description

A kind of Multipoint synchronous measurement method and measuring system and storage medium
Technical field
The present embodiments relate to circuit board processing equipment field more particularly to a kind of Multipoint synchronous measurement method and measurements System and storage medium.
Background technique
In industrial processes, pcb board (Printed Circuit Board, printed circuit board) generallys use machinery Drilling machine carries out perforation processing operation.
Inventor has found that in process of production, the PCB mechanical drilling machine of six axis does point during studying the application Movement, at this point, the positioning accuracy of workbench directly affects borehole accuracy.Since in practical situations, the rigidity of workbench can not Energy infinity, workbench two sides non complete symmetry, guide rail are equipped with deviation, motor pushing power in reasons such as absolute centers, is not led Cause the inconsistent of the positioning accuracy at each position of workbench.When being reacted in complete machine precision, the machining accuracy of as multiple axis Can be different, cause workbench two sides positioning accuracy that there is biggish deviation, so necessary in equipment research and development and Qualify Phase Accurately hold the positioning accuracy situation of workbench different location point.Therefore, the multiple positions of the workbench of process equipment how to be realized Accuracy test, obtain accurate and visual test result, become urgent problem to be solved.
Summary of the invention
The embodiment of the present invention is the technical problem to be solved is that, realize the precision at the multiple positions of workbench of process equipment Test, obtains accurate and visual test result.
In order to solve the above-mentioned technical problem, the embodiment of the present invention uses technical solution below:
On the one hand, a kind of Multipoint synchronous measurement method, comprising:
Equipment to be tested is controlled to be moved according to one or more test point of presumptive test spacing, control one or Multiple laser beam modulation head assemblies issue a branch of or multiple laser beam, so that every beam laser beam is divided into two beam secondary laser beams, wherein A branch of secondary laser beam is radiated in equipment to be tested, in another beam secondary laser beam return laser light head assembly;
Acquisition is radiated at a branch of or multiple laser beam returned in test equipment, the laser returned according to equipment to be tested Beam and another beam secondary laser beam split obtain the shift value of each reflection point in equipment to be tested;
According to equipment to be tested in mobile one or more the obtained shift value of one or more test point, and obtain Data and curves.
In one or more embodiment of the invention, after each laser beam modulation head assembly issues laser beam, by laser beam point It is segmented into two beam secondary laser beams of same intensity.
In one or more embodiment of the invention, pass through swashing for the more every beam of principle of interference equipment reflection to be tested Light beam and another beam secondary laser beam split, conversion obtain equipment to be tested each reflection point institute in current test point Mobile shift value.
In one or more embodiment of the invention, the one or more laser beam modulation head assemblies of the control issue it is a branch of or Person's multiple laser beam, specifically: laser beam modulation head assembly there are three being respectively arranged in front with respectively in equipment to be tested, and the laser head Component is separately fixed at the both ends of equipment to be tested and the front at middle part, and each laser beam modulation head assembly is touched in synchronization Hair, uniformly carries out the acquisition of the laser beam reflected.
In one or more embodiment of the invention, pass through the laser of the reflection at the both ends and middle part of equipment to be tested Beam obtains corresponding first shift value in equipment left end to be tested, the corresponding second displacement value of equipment right end to be tested and to be measured Try corresponding third shift value in the middle part of equipment;
On the other hand, a kind of measuring system, for realizing the Multipoint synchronous measurement method, comprising: one or more Laser beam modulation head assembly, one or more spectrum groupwares, one or more reflecting assemblies, trigger and processor;
The processor controls equipment to be tested and is moved according to one or more test point of presumptive test spacing, And control one or more laser beam modulation head assemblies and issue a branch of or multiple laser beam, one or more spectrum groupwares make every Shu Ji Light beam is divided into two beam secondary laser beams, wherein a branch of secondary laser beam is radiated in equipment to be tested, another beam secondary laser In beam return laser light head assembly;
One or more laser beam modulation head assembly acquisitions are radiated at a branch of or multi beam equipment to be tested returned in test equipment The laser beam of reflection, and the laser beam returned according to equipment to be tested and another beam secondary laser beam for splitting obtain it is to be measured Try the shift value of each reflection point in equipment;
The processor is according to equipment to be tested in mobile one or more the obtained position of one or more test point Shifting value, and obtain data and curves.
In one or more embodiment of the invention, after each laser beam modulation head assembly issues laser beam, spectrum groupware will Laser beam is divided into two beam secondary laser beams of same intensity.
In one or more embodiment of the invention, the laser beam modulation head assembly is to be measured by the more every beam of principle of interference The laser beam of examination equipment reflection and another beam secondary laser beam split, conversion obtain equipment to be tested in current test point The shift value that upper each reflection point is moved.
In one or more embodiment of the invention, it is respectively arranged in front with respectively in equipment to be tested there are three laser Head assembly, and the laser beam modulation head assembly is separately fixed at the both ends of equipment to be tested and the front at middle part, and makes each laser Head assembly is triggered in synchronization, uniformly carries out the acquisition of laser beam reflected;
By the laser beam of the reflection at the both ends and middle part of equipment to be tested, equipment left end corresponding first to be tested is obtained Corresponding third shift value in the middle part of shift value, the corresponding second displacement value of equipment right end to be tested and equipment to be tested.
On the other hand, a kind of storage medium is stored with instruction in the storage medium, when described instruction is executed by processor So that the processor executes the Multipoint synchronous measurement method.
Compared with prior art, the embodiment of the present invention has the advantages that
Multipoint synchronous measurement method described in the embodiment of the present invention includes: control equipment to be tested according to presumptive test spacing One or more test point moved, control one or more laser beam modulation head assemblies and issue a branch of or multiple laser beam, So that every beam laser beam is divided into two beam secondary laser beams, wherein a branch of secondary laser beam is radiated in equipment to be tested, it is another In beam secondary laser beam return laser light head assembly;Acquisition is radiated at a branch of or multiple laser beam returned in test equipment, root The laser beam returned according to equipment to be tested and another beam secondary laser beam split obtain each reflection in equipment to be tested The shift value of point;According to equipment to be tested in mobile one or more the obtained shift value of one or more test point, and Obtain data and curves.The movement in test point is carried out by debugging equipment to be tested, and passes through one or more laser head groups The mode that part is tested realizes that equipment to be tested is moved and tested in the test point of predetermined quantity, thus obtain to The shift value at multiple positions in test equipment, to intuitively obtain the state of equipment to be tested.In conclusion the present invention is implemented Multipoint synchronous measurement method described in example realizes the accuracy test at the multiple positions of workbench of process equipment, obtains accurate and visual Test result improves the testing efficiency of equipment.
Detailed description of the invention
It, below will be to required use in each embodiment in order to illustrate more clearly of the technical solution of the embodiment of the present invention Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this For the those of ordinary skill of field, without any creative labor, it can also be obtained according to these attached drawings other Attached drawing.
Fig. 1 is the schematic diagram of Multipoint synchronous measurement method in the embodiment of the present invention;
Fig. 2 is the scheme of installation of measuring system in the embodiment of the present invention;
Fig. 3 is the schematic diagram of measuring system in the embodiment of the present invention;
Fig. 4 is the schematic diagram of trigger in the embodiment of the present invention.
Description of symbols: 100- laser beam modulation head assembly, 200- spectrum groupware, 300- reflecting assembly, 400- trigger, 500- Processor.
Specific embodiment
To facilitate the understanding of the present invention, a more comprehensive description of the invention is given in the following sections with reference to the relevant attached drawings.In attached drawing Give presently preferred embodiments of the present invention.But the invention can be realized in many different forms, however it is not limited to this paper institute The embodiment of description.Opposite, purpose of providing these embodiments is keeps the understanding to the disclosure more thorough Comprehensively.
Unless otherwise defined, all technical and scientific terms used herein and belong to technical field of the invention The normally understood meaning of technical staff is identical.Term used herein is only for the purpose of describing specific embodiments not It is intended in the limitation present invention.Term " first " in following claims, specification and Figure of description, " Two " etc. are not use to describe a particular order for distinguishing different objects.
Embodiment one:
It is the schematic diagram of Multipoint synchronous measurement method in the embodiment of the present invention with reference to Fig. 1.Multiple spot is same in the embodiment of the present invention Walk measurement method, comprising:
Step 101: controlling equipment to be tested and moved according to one or more test point of presumptive test spacing, controlled It makes one or more laser beam modulation head assemblies and issues a branch of or multiple laser beam, so that every beam laser beam is divided into two beam secondary laser Beam, wherein a branch of secondary laser beam is radiated in equipment to be tested, in another beam secondary laser beam return laser light head assembly.
Step 102: acquisition is radiated at the laser beam of a branch of or multi beam returned in test equipment equipment reflection to be tested, The laser beam returned according to equipment to be tested and another beam secondary laser beam split obtain each anti-in equipment to be tested The shift value of exit point.
Step 103: according to equipment to be tested in mobile one or more the obtained displacement of one or more test point Value, and obtain data and curves.Wherein, further, according to one or more of shift values, corresponding conversion obtains to be tested set The standby shift differences at the both ends of current test point.
In embodiments of the present invention, after each laser beam modulation head assembly issues laser beam, laser beam is divided into same intensity Two beam secondary laser beams.Two beam secondary laser beams of same intensity are divided into, two beam secondary laser beam after being divided is conducive to Comparison.
In embodiments of the present invention, it by the laser beam of the more every beam of principle of interference equipment to be tested reflection and splits Another beam secondary laser beam, conversion obtain the equipment to be tested shift value that each reflection point is moved in current test point. Be: equipment to be tested carry out preset test point it is mobile when, after a mobile test point, carry out equipment to be tested Test.Equipment to be tested stops moving in the test point, passes through wherein a branch of secondary laser after laser beam modulation head assembly transmitting segmentation For beam in equipment to be tested, equipment to be tested reflects the secondary laser beam.At this point, the reflection of current reflective laser beam The mobile shift value of point is laser beam and time of the matched another beam return laser light head assembly split of reflection Grade laser beam compares the shift value that conversion obtains.
In embodiments of the present invention, the one or more laser beam modulation head assemblies of the control issue a branch of or multiple laser beam, Specifically: laser beam modulation head assembly there are three being respectively arranged in front with respectively in equipment to be tested, and the laser beam modulation head assembly is fixed respectively In the both ends of equipment to be tested and the front at middle part, and each laser beam modulation head assembly is triggered in synchronization, it is unified to carry out The acquisition of the laser beam reflected.
In embodiments of the present invention, it by the laser beam of the reflection at the both ends and middle part of equipment to be tested, obtains to be tested It is right in the middle part of corresponding first shift value in equipment left end, the corresponding second displacement value of equipment right end to be tested and equipment to be tested The third shift value answered.Wherein, it is optionally obtained in embodiments of the present invention using the shift value at both ends and the shift value at middle part The shift differences at both ends.Since the equipment to be tested that uses is located at the process equipment in the middle part of equipment for driving motor, to drive Dynamic motor is located on the basis of middle part correspondence takes third shift value and is worth, and subtracts third shift value by the first shift value and obtains left end The vector value of shift differences, second displacement value subtract third shift value and obtain the vector value of right end shift differences.Pass through left end position The mode that shifting difference added or subtracted right end shift differences obtains the shift differences at both ends.It is, in obtaining data and curves, There are the shift values at one or more position that equipment to be tested is acquired when moving in one or more test point, and lead to The shift value at one or more position crossed further converts identifies the shift differences at equipment both ends in data and curves Variation, facilitate tester to the control of equipment performance.
Multipoint synchronous measurement method described in the embodiment of the present invention, mainly there is following technical effect:
Multipoint synchronous measurement method described in the embodiment of the present invention includes: control equipment to be tested according between presumptive test Away from one or more test point moved, control one or more laser beam modulation head assemblies and issue a branch of or multiple laser Beam, so that every beam laser beam is divided into two beam secondary laser beams, wherein a branch of secondary laser beam is radiated in equipment to be tested, separately In a branch of secondary laser beam return laser light head assembly;Acquisition is radiated at a branch of or multiple laser beam returned in test equipment, The laser beam returned according to equipment to be tested and another beam secondary laser beam split obtain each anti-in equipment to be tested The shift value of exit point;One or more obtained shift value is moved in one or more test point according to equipment to be tested, And obtain data and curves.The movement in test point is carried out by debugging equipment to be tested, and passes through one or more laser heads The mode that component is tested realizes that equipment to be tested is moved and tested in the test point of predetermined quantity, to obtain The shift value at multiple positions in equipment to be tested, to intuitively obtain the state of equipment to be tested.In conclusion the present invention is real The accuracy test that Multipoint synchronous measurement method described in example realizes the multiple positions of workbench of process equipment is applied, is obtained accurate and visual Test result, improve the testing efficiency of equipment.
Embodiment two:
With reference to Fig. 2, Fig. 3 and Fig. 4.The measuring system in embodiments of the present invention, it is same for realizing the multiple spot Walk measurement method, comprising: for issuing one or more laser beam modulation head assemblies 100 of laser beam, for being split to laser beam One or more spectrum groupwares 200, for reflection laser beam one or more reflecting assemblies 300, for trigger one or The trigger 400 of the multiple laser beam modulation head assemblies 100 of person and processor 500 for reading the data in laser beam modulation head assembly 100.Pass through Trigger 400 completes the triggering of one or more laser beam modulation head assemblies 100, and acquires one or more laser using processor 500 The data of head assembly 100, and carry out the statistics of data.
The processor 500 controls equipment to be tested and is moved according to one or more test point of presumptive test spacing It is dynamic, and control one or more laser beam modulation head assemblies 100 and issue a branch of or multiple laser beam, one or more spectrum groupwares 200 So that every beam laser beam is divided into two beam secondary laser beams, wherein a branch of secondary laser beam is radiated in equipment to be tested, it is another In beam secondary laser beam return laser light head assembly.One or more acquisitions of laser beam modulation head assembly 100, which are radiated in test equipment, to be returned A branch of or multi beam equipment to be tested reflection laser beam, and the laser beam returned according to equipment to be tested and split Another beam secondary laser beam obtains the shift value of each reflection point in equipment to be tested.The processor 500 is set according to be tested Standby one or more shift value obtained in the movement of one or more test point, and obtain data and curves.
In some embodiments of the invention, after each laser beam modulation head assembly 100 issues laser beam, spectrum groupware 200 will swash Light beam is divided into two beam secondary laser beams of same intensity, so that wherein a branch of secondary laser beam vertical irradiation is in equipment to be tested On, in another beam secondary laser beam return laser light head assembly 100.Two beam secondary laser beams of same intensity are divided into, are conducive to The comparison of two beam secondary laser beams after being divided.
In some embodiments of the invention, the laser beam modulation head assembly 100 is by comparing the equipment reflection to be tested of every beam The intensity of laser beam and another beam secondary laser beam split, conversion show that equipment to be tested is each in current test point The shift value that reflection point is moved.Be: equipment to be tested carry out preset test point it is mobile when, in a mobile test After point, the test of test point is carried out.Equipment to be tested stops moving in the test point, is emitted by laser beam modulation head assembly 100 and is divided Wherein a branch of secondary laser beam in equipment to be tested, equipment to be tested reflects the secondary laser beam.At this point, working as The mobile shift value of the reflection point of front-reflection laser, the laser beam as reflected and another beam return laser light head assembly 100 swash Light beam compares the shift value that conversion obtains.
In some embodiments of the invention, laser head there are three being preferably respectively arranged in front with respectively in equipment to be tested Component 100, and the laser beam modulation head assembly 100 is separately fixed at the both ends of equipment to be tested and the front at middle part, and makes each Laser beam modulation head assembly 100 is triggered in synchronization, uniformly carries out the acquisition of laser beam reflected.Pass through the two of equipment to be tested It is corresponding to obtain corresponding first shift value in equipment left end to be tested, equipment right end to be tested for the laser beam of the reflection at end and middle part Second displacement value and equipment to be tested in the middle part of corresponding third shift value.Wherein, it optionally adopts in embodiments of the present invention The shift differences at both ends are obtained with the shift value of the shift value at both ends and middle part.Since the equipment to be tested used is driving motor Therefore process equipment in the middle part of equipment is located on the basis of middle part correspondence takes third shift value by driving motor and is worth, passed through First shift value subtracts that third shift value obtains the vector value of left end shift differences, second displacement value subtracts third shift value and obtains The vector value of right end shift differences.Left end, shift differences obtain both ends by way of adding or subtracting right end shift differences Shift differences.It is that in obtaining data and curves, there are equipment to be tested acquisitions when moving in one or more test point One or more position shift value, and the shift value at one or more position by obtaining further converts The variation that the shift differences at equipment both ends are identified in data and curves, facilitates tester to the control of equipment performance.
In alternative embodiment of the invention, laser beam modulation head assembly 100 and mating with its is set in the middle part of equipment to be tested The spectrum groupware 200 and reflecting assembly 300 used, and match in 100 two sides of the laser beam modulation head assembly setting multiple groups of middle part setting The laser beam modulation head assembly 100 of set, and 100 quantity of laser beam modulation head assembly of two sides setting is equal.
In some embodiments of the invention, the trigger 400 include: diode D1, diode D2, diode D3, Diode D4, diode D5, diode D6, resistance R2, resistance R1 and switch S1.Wherein, one end ground connection of the switch S1, and Connect the cathode of the diode D2.The anode of the diode D2 connects the resistance R1 after connecting with the resistance R2, and Power supply is accessed at one end connecting pin of the resistance R2 and the resistance R1.Described two are connected on the other end of the resistance R1 The anode of pole pipe D3.The diode D3, the diode D4, the diode D5 and diode D6 series connection.Described two The cathode of pole pipe D6 is connected with the anode of the diode D1, the other end phase of the cathode of the diode D1 and the switch S1 Even.Wherein, equipment to be tested in testing, it is desirable that under the premise of data during the test are accurate, the present invention is preferably adopted The mode of trigger 400 is taken to carry out the triggering work of multiple laser beam modulation head assemblies 100, so as to be rapidly performed by multiple laser heads The control of component 100 is conducive to multiple laser beam modulation head assemblies 100 while triggering, increases the accuracy of test.
The working principle of measuring system described in the embodiment of the present invention is as follows:
Multiple laser beam modulation head assemblies described in the embodiment of the present invention are installed in the front of try engine to be measured, and the dress that is corresponding to it If the multiple spectrum groupware is on workbench or between workbench and the multiple laser beam modulation head assembly.And make described Multiple reflecting assemblies are installed on the movable part of equipment to be tested.During the test, laser beam modulation head assembly is kept to be in transmitting Laser beam just goes spectrum groupware that laser beam is divided into two beam secondary laser beams, wherein a branch of secondary laser beam vertical irradiation exists In equipment to be tested, another beam is back in laser beam modulation head assembly according to original optical path.Wherein, by the trigger and the processor It is separately connected the multiple laser beam modulation head assembly.When triggering of the multiple laser beam modulation head assembly by the trigger, carry out pair The laser beam of reflection is acquired.When laser beam modulation head assembly receives the laser beam for being radiated at and returning in equipment to be tested, by dry The comparison that principle carries out two beam laser beams is related to, the mobile shift value of equipment to be tested is scaled.Processor is described more by acquiring Numerical value in a laser beam modulation head assembly, by records of values.Optionally, with the laser head group where the driving motor in equipment to be tested It is worth on the basis of the value of part, by way of the addition of the shift value in the laser beam modulation head assembly of both ends or subtracting each other, obtains displacement difference Value.
Measuring system described in the embodiment of the present invention mainly has following technical effect:
Measuring system described in the embodiment of the present invention includes: one or more laser beam modulation head assemblies for issuing laser beam 100, one or more spectrum groupwares 200 for being split to laser beam, for reflection laser beam one or more it is anti- Optical assembly 300, the trigger 400 for triggering one or more laser beam modulation head assembly 100 and for reading laser beam modulation head assembly 100 The processor 500 of interior data.The triggering of one or more laser beam modulation head assemblies 100 is completed by trigger 400, and uses processing Device 500 acquires the data of one or more laser beam modulation head assemblies 100, and carries out the statistics of data.The processor 500 controls to be measured Examination equipment is moved according to one or more test point of presumptive test spacing, and controls one or more laser beam modulation head assemblies 100 issue a branch of or multiple laser beam, and it is sharp that one or more spectrum groupwares 200 make every beam laser beam be divided into two beam secondary Light beam, wherein a branch of secondary laser beam is radiated in equipment to be tested, in another beam secondary laser beam return laser light head assembly.One A or multiple laser beam modulation head assemblies 100 acquire swashing for a branch of or multi beam for being radiated at and returning in test equipment equipment reflection to be tested Light beam, and the laser beam returned according to equipment to be tested and another beam secondary laser beam split obtain in equipment to be tested The shift value of each reflection point.The processor 500 is obtained according to equipment to be tested in the movement of one or more test point One or more shift value, and obtain data and curves.The movement in test point is carried out by debugging equipment to be tested, and is led to The mode that one or more laser beam modulation head assemblies are tested is crossed, realizes that equipment to be tested is moved in the test point of predetermined quantity It moves and tests, so that the shift value at multiple positions in equipment to be tested is obtained, to intuitively obtain the state of equipment to be tested. In conclusion Multipoint synchronous measurement method and measuring system described in the embodiment of the present invention and storage medium realize that processing is set The accuracy test at the multiple positions of standby workbench, obtains accurate and visual test result, improves the testing efficiency of equipment.
Embodiment three:
A kind of storage medium is stored with instruction in the storage medium, makes when described instruction is executed by processor described Processor executes Multipoint synchronous measurement method described in the embodiment of the method in the embodiment of the present invention.
Finally, it should be noted that the above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are simultaneously Be not restricted to the described embodiments, it is other it is any without departing from the spirit and principles of the present invention made by change, modification, Substitution, simplifies combination, should be equivalent substitute mode, is included within the scope of the present invention.

Claims (10)

1. a kind of Multipoint synchronous measurement method characterized by comprising
It controls equipment to be tested to be moved according to one or more test point of presumptive test spacing, control is one or more Laser beam modulation head assembly issues a branch of or multiple laser beam, so that every beam laser beam is divided into two beam secondary laser beams, wherein a branch of Secondary laser beam is radiated in equipment to be tested, in another beam secondary laser beam return laser light head assembly;
Acquisition be radiated at a branch of or multiple laser beam returned in test equipment, according to equipment to be tested return laser beam and Another beam secondary laser beam split obtains the shift value of each reflection point in equipment to be tested;
According to equipment to be tested in mobile one or more the obtained shift value of one or more test point, and obtain data Curve.
2. Multipoint synchronous measurement method according to claim 1, which is characterized in that each laser beam modulation head assembly issues laser beam Afterwards, laser beam is divided into two beam secondary laser beams of same intensity.
3. Multipoint synchronous measurement method according to claim 2, which is characterized in that be measured by the more every beam of principle of interference The laser beam of examination equipment reflection and another beam secondary laser beam split, conversion obtain equipment to be tested in current test point The shift value that upper each reflection point is moved.
4. Multipoint synchronous measurement method according to claim 2, which is characterized in that the one or more laser heads of the control Component issues a branch of or multiple laser beam, specifically: laser head group there are three being respectively arranged in front with respectively in equipment to be tested Part, and the laser beam modulation head assembly is separately fixed at the both ends of equipment to be tested and the front at middle part, and makes each laser head group Part is triggered in synchronization, uniformly carries out the acquisition of laser beam reflected.
5. Multipoint synchronous measurement method according to claim 4, which is characterized in that through the both ends of equipment to be tested in The laser beam of the reflection in portion obtains corresponding first shift value in equipment left end to be tested, equipment right end to be tested corresponding second Corresponding third shift value in the middle part of shift value and equipment to be tested.
6. a kind of measuring system, for realizing Multipoint synchronous measurement method described in claim 1-5, which is characterized in that packet It includes: one or more laser beam modulation head assemblies, one or more spectrum groupwares, one or more reflecting assemblies, trigger and processor;
The processor controls equipment to be tested and is moved according to one or more test point of presumptive test spacing, and controls It makes one or more laser beam modulation head assemblies and issues a branch of or multiple laser beam, one or more spectrum groupwares make every beam laser beam Two beam secondary laser beams are divided into, wherein a branch of secondary laser beam is radiated in equipment to be tested, another beam secondary laser beam is returned It returns in laser beam modulation head assembly;
One or more laser beam modulation head assembly acquisitions are radiated at a branch of or multi beam returned in test equipment equipment reflection to be tested Laser beam, and the laser beam returned according to equipment to be tested and another beam secondary laser beam for splitting obtain to be tested set The shift value of standby each reflection point;
One or more shift value that the processor is obtained according to equipment to be tested in the movement of one or more test point, And obtain data and curves.
7. measuring system according to claim 6, which is characterized in that after each laser beam modulation head assembly issues laser beam, light splitting Laser beam is divided into two beam secondary laser beams of same intensity by component.
8. measuring system according to claim 7, which is characterized in that the laser beam modulation head assembly is more every by principle of interference The laser beam of beam equipment reflection to be tested and another beam secondary laser beam split, conversion obtain equipment to be tested current The shift value that each reflection point is moved in test point.
9. measuring system according to claim 8, which is characterized in that be respectively arranged in front with three in equipment to be tested respectively A laser beam modulation head assembly, and the laser beam modulation head assembly is separately fixed at the both ends of equipment to be tested and the front at middle part, and makes every A laser beam modulation head assembly is triggered in synchronization, uniformly carries out the acquisition of laser beam reflected;
By the laser beam of the reflection at the both ends and middle part of equipment to be tested, corresponding first displacement in equipment left end to be tested is obtained Corresponding third shift value in the middle part of value, the corresponding second displacement value of equipment right end to be tested and equipment to be tested.
10. a kind of storage medium, which is characterized in that be stored with instruction in the storage medium, described instruction is executed by processor When the processor is executed according to claim 1 to Multipoint synchronous measurement method described in any one of 5 claims.
CN201810029091.XA 2018-01-11 2018-01-11 A kind of Multipoint synchronous measurement method and measuring system and storage medium Pending CN110030922A (en)

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