CN101369594B - 光电变换装置及其制造方法和摄像系统 - Google Patents

光电变换装置及其制造方法和摄像系统 Download PDF

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Publication number
CN101369594B
CN101369594B CN2008101662973A CN200810166297A CN101369594B CN 101369594 B CN101369594 B CN 101369594B CN 2008101662973 A CN2008101662973 A CN 2008101662973A CN 200810166297 A CN200810166297 A CN 200810166297A CN 101369594 B CN101369594 B CN 101369594B
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impurity
impurity region
conductivity type
photoelectric conversion
region
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CN2008101662973A
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Chinese (zh)
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CN101369594A (zh
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让原浩
三岛隆一
渡边高典
市川武史
田村清一
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Canon Inc
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Canon Inc
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CN2008101662973A 2003-12-12 2004-12-10 光电变换装置及其制造方法和摄像系统 Expired - Fee Related CN101369594B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003415011 2003-12-12
JP415011/2003 2003-12-12
JP252310/2004 2004-08-31
JP2004252310A JP4612818B2 (ja) 2004-08-31 2004-08-31 固体撮像素子、固体撮像装置及び撮像システム

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CNB2004101007057A Division CN100438049C (zh) 2003-12-12 2004-12-10 光电变换装置和摄像系统

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CN101369594A CN101369594A (zh) 2009-02-18
CN101369594B true CN101369594B (zh) 2012-06-27

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5959877B2 (ja) * 2012-02-17 2016-08-02 キヤノン株式会社 撮像装置
JP6355311B2 (ja) 2013-10-07 2018-07-11 キヤノン株式会社 固体撮像装置、その製造方法及び撮像システム
JP6541361B2 (ja) 2015-02-05 2019-07-10 キヤノン株式会社 固体撮像装置
JP2018107358A (ja) * 2016-12-27 2018-07-05 キヤノン株式会社 撮像装置の製造方法および撮像システム
JP7406887B2 (ja) 2019-08-07 2023-12-28 キヤノン株式会社 光電変換装置、放射線撮像システム、光電変換システム、移動体
US20230039770A1 (en) * 2020-01-10 2023-02-09 Sony Semiconductor Solutions Corporation Imaging element, manufacturing method, and electronic apparatus
CN116130499A (zh) * 2022-05-31 2023-05-16 神盾股份有限公司 光感测单元及光感测装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6504194B1 (en) * 1999-12-01 2003-01-07 Innotech Corporation Solid state imaging device, method of manufacturing the same, and solid state imaging system
CN1453628A (zh) * 2002-04-26 2003-11-05 奥林巴斯光学工业株式会社 照相机及其使用的摄像元件单元

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
JPS63174358A (ja) * 1987-01-14 1988-07-18 Hitachi Ltd 固体撮像素子
JPH1126741A (ja) * 1997-07-04 1999-01-29 Toshiba Corp 固体撮像装置
JP3934827B2 (ja) * 1999-06-30 2007-06-20 株式会社東芝 固体撮像装置
JP4449106B2 (ja) * 1999-07-14 2010-04-14 ソニー株式会社 Ｍｏｓ型固体撮像装置及びその製造方法
JP3315962B2 (ja) * 1999-12-01 2002-08-19 イノテック株式会社 固体撮像素子、その製造方法及び固体撮像装置
JP3596749B2 (ja) * 1999-12-01 2004-12-02 日本ビクター株式会社 Ｃｍｏｓイメージセンサ
JP3688980B2 (ja) * 2000-06-28 2005-08-31 株式会社東芝 Ｍｏｓ型固体撮像装置及びその製造方法
JP2002043557A (ja) * 2000-07-21 2002-02-08 Mitsubishi Electric Corp 固体撮像素子を有する半導体装置およびその製造方法
JP4270742B2 (ja) * 2000-11-30 2009-06-03 Ｎｅｃエレクトロニクス株式会社 固体撮像装置
JP4174468B2 (ja) * 2003-12-12 2008-10-29 キヤノン株式会社 光電変換装置及び撮像システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6504194B1 (en) * 1999-12-01 2003-01-07 Innotech Corporation Solid state imaging device, method of manufacturing the same, and solid state imaging system
CN1453628A (zh) * 2002-04-26 2003-11-05 奥林巴斯光学工业株式会社 照相机及其使用的摄像元件单元

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
US 6504194 B1,说明书第5栏20行-第6栏63行，附图1-3，5，10.

Also Published As

Publication number Publication date
JP2010245567A (ja) 2010-10-28
JP4587187B2 (ja) 2010-11-24
JP4709319B2 (ja) 2011-06-22
CN101369594A (zh) 2009-02-18
JP2008263227A (ja) 2008-10-30

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