CN101356441B - 流通池及其制造方法 - Google Patents

流通池及其制造方法 Download PDF

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Publication number
CN101356441B
CN101356441B CN200580051921XA CN200580051921A CN101356441B CN 101356441 B CN101356441 B CN 101356441B CN 200580051921X A CN200580051921X A CN 200580051921XA CN 200580051921 A CN200580051921 A CN 200580051921A CN 101356441 B CN101356441 B CN 101356441B
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China
Prior art keywords
fluororesin
stickability
temperature
fluororesin film
flow cell
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Expired - Fee Related
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CN200580051921XA
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CN101356441A (zh
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叶井正树
藤山阳一
明地将一
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Shimadzu Corp
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Shimadzu Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
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    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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Abstract

提供一种不会泄露并且耐药品性优异的流通池。该流通池由平板状的玻璃基板(3)、切削加工有成为流路(7)的槽的粘着性氟树脂片(5)、在对应该槽的两端位置形成有成为流体导入口或排出口的贯通孔(9、11)的作为盖构件的玻璃基板(1)构成。玻璃基板(1)和(3)之间夹着氟树脂片(5)，加热到氟树脂片(5)的融点以上同时进行加压，由此，通过氟树脂片(5)自身粘着接合。用玻璃基板(3)和在其上接合的氟树脂片(5)形成流路构件(17)。

Description

流通池及其制造方法
技术领域
本发明涉及能够作为分析仪器用的流量计、电导率计等，作为液体层析的荧光检测器，作为电泳分离用的微芯片等利用的流通池(flow cell)及其制造方法 
背景技术
近年，提出了很多应用进行微细槽加工等的蚀刻法等的半导体制造技术，能够处理微量流体的流通池。图7表示用于处理微量流体的现有的流通池的结构的一个例子。(A)是立体图，(B)是在(A)的X-X线位置的剖面图。 
该流通池是将在表面形成有成为流路7的槽的板状构件34和在对应该槽的两端的位置形成有贯通孔9、11的板状构件32贴合而成的。 
历来，作为板状构件32和34，可以使用例如玻璃基板、硅基板以及树脂基板。例如板状构件34是玻璃基板或硅基板的情况，槽可以通过药液或反应性气体进行蚀刻而形成。另外，例如板状构件34是树脂基板的情况，可以用成型加工形成槽。 
贴合板状构件32和34的方法，根据它们的材质而异。作为代表性的，例如板状构件都是硅基板的情况可以用扩散接合法，另外，都是玻璃基板或树脂基板的情况可以用热融合，另外，一个是硅基板、另一个是玻璃基板的情况，可以用阳极接合法。 
即使是现有的流通池也能够处理微量的流体。但是，为了制造该流通池，例如作为板状构件使用硅基板或玻璃基板时，因为通过应用半导体制造技术的、利用药液或反应性气体进行的蚀刻形成槽，所以需要用于将槽形状复制在板状构件上的曝光装置，和用于使用药液或反应性气体的设备，这需要很大的制造成本。 
另外，在用树脂基板作为板状构件时，因为可以用成型加工形成槽， 所以有可以降低用于形成槽的成本的优点，但由于树脂对有机溶剂的耐受力低，所以能够作为流通池使用的用途受到限定。 
提出了一种不需要通过蚀刻对玻璃基板进行槽加工(用于形成槽的加工)，实现低成本化，并且，对有机溶剂耐受力好的流通池，作为这种流通池使用形成有槽的玻璃基板作为板状构件，在2张玻璃基板的接合部作为隔片夹着氟树脂，把持该玻璃基板的两端进行加压，由此，使玻璃基板和氟树脂接合(参照专利文献1)。 
专利文献1：特开平8-35927号公报 
但是，在玻璃基板间夹着隔片，不粘着而只加压的话，玻璃基板和隔片之间会产生间隙。特别是因为中央附近没有被加压，所以容易从中央部产生渗漏。尤其是有机溶剂的情况下容易渗漏。 
发明内容
因此，本发明的目的在于，提供一种不需要通过蚀刻对板状构件自身进行槽加工，实现低成本化，并且不会发生渗漏，药品耐受性优异的流通池。 
本发明的流通池由至少表面层由氟树脂构成在该表面层形成有成为流路的槽的流路构件，和在所述流路构件的所述表面层通过所述氟树脂自身粘结接合的盖构件构成，在与至少所述流路构件和所述盖构件的任一个构件中的槽的两端相对应的位置设有成为液体出入口的贯通孔，并且，所述流路构件和所述盖构件的接合面的至少一部分由金属层覆盖。 
流路构件的一种方式是通过形成在平坦的板状构件的表面重叠有氟树脂膜的构造，从而使其表面层是氟树脂。这种情况下，槽由贯穿氟树脂膜的贯通孔和板状构件表面形成，该氟树脂膜夹在板状构件和盖构件之间，通过该氟树脂膜自身粘着接合。 
流路构件的另外的方式，通过形成全体为由氟树脂构成的氟树脂体，从而使其表面层是氟树脂。这种情况，槽是在该氟树脂体的表面作为凹部形成。 
氟树脂膜或氟树脂体由在特定温度以上对其他材质的基板显现粘着性的粘着性氟树脂组成。 
粘着性氟树脂在特定的温度，例如在玻璃转移温度附近，即使对玻璃基板、金属板、硅基板等其他材质的基板也显现粘着性，在比其低的温度，树脂表面显示仅具有自身吸附性。粘着在从玻璃转移温度以上、低于热分 解温度之间的温度进行。为了得到更牢固的粘着，优选在从融点附近以上、低于热分解温度之间的温度进行。作为粘着性氟树脂，可以使用ネオフロンEFEP(注册商标，ダイキン工业株式会社产品)等。 
优选流路构件和盖构件的接合面的至少一部分由金属层覆盖。 
另外，优选该金属层设置在与成为流路的槽相接的位置。 
本发明的流通池的制造方法的一个方式具有以下工序(A)到(D)。 
(A)在氟树脂膜上将成为流路的槽作为贯通孔而形成的工序， 
(B)在与平坦的板状构件或盖构件的任一个所述槽的两端相对应的位置形成成为液体出入口的贯通孔的工序， 
(C)在粘着于所述氟树脂膜的任一构件的接合面的至少一部分上形成金属层的工序，以及 
(D)在对所述槽和贯通孔进行定位的状态下，将所述氟树脂膜夹在所述板状构件和所述盖构件之间，加热到氟树脂膜显现粘着性为止，并且进行加压，通过该氟树脂膜粘着接合板状构件和盖构件的工序。 
本发明的流通池的制造方法的另外的方式具有以下工序(A)到(D)。 
(A)在具有成为流路的槽形成凸形状而形成的成形面的模具的该成形面上，重叠氟树脂体，在加热到该氟树脂体的融点附近的温度的状态下进行挤压成形的工序， 
(B)在与所述氟树脂体或盖构件的所述槽的两端相对应的位置形成成为液体出入口的贯通孔的工序， 
(C)在粘着于所述氟树脂膜的任一构件的接合面的至少一部分上形成金属层的工序，以及 
(D)重叠所述氟树脂体的成形面和盖构件，在盖构件上形成所述贯通孔时，在对所述槽的两端和成为液体出入口的贯通孔进行定位的状态下重叠，加热到该氟树脂体显现粘着性为止，并且加压，粘着接合所述氟树脂体和所述盖构件的工序。 
用于使所述氟树脂膜或氟树脂体显现粘着性的加热温度，可以是在这些氟树脂的融点以上但低于分解点的温度。 
作为氟树脂可以使用粘着性氟树脂。这种情况，用于使所述氟树脂膜或氟树脂体显现粘着性的加热温度，可以是这些粘着性氟树脂显现粘着性的温度以上、但低于分解点的温度。 
还可以具有在流路构件和盖构件的接合前，在粘着于氟树脂膜或氟树脂体的任一构件的接合面的至少一部分上形成金属层的工序。 
仅加压把持流通池的两端，可能在构件间产生间隙泄露溶剂等，但通过在接合部使用氟树脂、加压加热，从而通过粘着接合构件之间，因此由于粘着强度提高不会产生间隙，溶剂不会泄漏。 
因为氟树脂自身和与其接合的构件之间粘着，与在基板间夹着间片压接的相比没有渗漏，因此不需要用于压接的工具，而且小型化。此外，专利文献1中所述流通池，通过螺钉对流通池的两端加压，因此，不仅难以层叠而构成形成多重流路的多重流通池，而且在交换一部分流通池的情况下必须全部分解，但是，在本发明中即使是这种多重流通池的情况下，因为各流通池独立，所以容易交换部分流通池。 
另外，流通池的流路采用氟树脂时，原来使用的丙烯和聚碳酸脂制的流通池不能处理的有机溶剂等也可以使用。 
作为氟树脂使用粘着性氟树脂的情况，因为粘着性氟树脂通过成形加工、切削加工等能够容易地加工槽，所以与对玻璃和硅进行槽加工的情况相比，能够廉价地形成成为流路的槽。 
通过在和氟树脂的接合面形成金属薄膜，能够形成提高构件彼此的粘着强度、可靠性高的流通池。此外，通过将这种金属薄膜作为电极使用，能够实现流通池的高功能化。 
附图说明
图1是表示一实施例的流通池的图，(A)是立体图，(B)是(A)X-X线的剖面图。 
图2是表示同一实施例的流通池的制造工序的图，(A1)是每个构件地图解流通池的分解俯视图，(A2)是对应(A1)各构件的剖面图，(B)是接合各构件时的剖面图。 
图3是表示其他的实施例的流通池的图，(A)是立体图，(B)是(A)的X-X线的剖面图。 
图4是表示同一实施例的流通池的制造工序的图。(A)、(B)是表示流通池的制造工序的剖面图，(C)是接合各构件时的流通池的剖面图。 
图5是由同一实施例制造的流通池的显微镜观察图像。 
图6是表示在玻璃基板上形成的金属膜图案的俯视图。 
图7是表示现有的流通池的图，(A)是立体图，(B)是(A)的X-X线的剖面图。 
具体实施方式
以下参照覆土说明本发明优选的实施方式。在实施例中，虽然使用粘着性氟树脂作为氟树脂，但也可以使用粘着性氟树脂以外的氟树脂。 
图1是表示一个实施例的流通池的构成的图，(A)是立体图，(B)是(A)的X-X线的剖面图。 
该实施例的流通池由平板状玻璃基板3、切削加工有成为流路7的槽的粘着性氟树脂片5、和在对应槽的两端的位置形成有成为流体的导入口或排出口的贯通孔9、11的成为盖构件的玻璃基板1构成，在玻璃基板1和3之间夹着氟树脂片5，通过氟树脂片5自身粘着接合。由玻璃基板3和在其上接合的氟树脂片5构成流路构件17。 
使用ネオフロンEFEP(注册商标)RP-4020作为氟树脂片5。该氟树脂片5融点为155-170℃，分解温度355℃。 
图2是表示同一实施例的流通池的制造工序的图，(A1)是每个构件地图解流通池的分解俯视图，(A2)是对应(A1)各构件的剖面图，(B)是接合各构件时的剖面图。以下参照图1和图2，说明流通池的制造方法。 
玻璃基板1、3是表面平坦的基板。玻璃基板1上通过例如超声波加工或喷沙法形成有成为流体导入口或排出口的贯通孔9、11。 
在氟树脂片5上，为了形成连接对应玻璃基板1的贯通孔9、11的位置间的成为流路7的贯通槽，例如通过切削绘图机(cutting plotter)等进行切削加工。在此，虽然贯通槽的形状在两端稍大，但通过使用切削绘图机，可以容易地实现微细复杂的流路形状。 
在表面平坦的玻璃基板3上，重叠实施了切削加工的氟树脂片5，在其上重叠玻璃基板1，对齐氟树脂片5的流路7和贯通孔9、11。将该重叠物加热到在比氟树脂片5的融点高，比分解温度低的250℃，以10kPa左右的压力进行加压，由此形成氟树脂片5进行的粘着，冷却后完成流通 池。 
也可以使用ネオフロンEFEP(注册商标)RP-5000作为氟树脂片5。该氟树脂片的融点为190-200℃，分解点为380℃，需要比上述实施例高温的粘着处理。 
其次，参照图3说明另外的实施例的流通池。(A)是立体图，(B)是(A)的X-X线的剖面图。 
该实施例的流通池，通过粘着性氟树脂的粘着性粘着接合在表面形成成为流路7的槽全体由粘着性氟树脂构成的氟树脂体27、和以覆盖氟树脂体27的槽的方式设置的作为盖构件的玻璃基板1而成。在玻璃基板1上，在对应流路7的槽两端的位置，设有用于向流路7导入流体的流体导入口9或用于从流路7排出流体的成为流体排出口的贯通孔9、11。 
作为氟树脂体27使用例如和上面实施例同样的ネオフロンEFEP(注册商标)RP-4020。 
图4是表示同一实施例的流通池的制造工序的图。(A)、(B)是表示流通池的制造工序的剖面图，(C)是接合各构件时的流通池的剖面图。以下参照图4，说明同一实施例的流通池的制造方法。 
(A)在硅基板21上，通过例如照片制版和丙稀药液进行的蚀刻形成成为对氟树脂体27的槽的复制模的构造(凸部23)。 
其次，在该硅基板21的形成有凸部23的表面上，重叠粘着性氟树脂体27，加热到例如150℃，以0.4MPa加压，由此，在氟树脂体27的表面形成成为流路7的槽。优选这时的加热温度为接近融点温度。 
(B)在成为盖构件的平板状的玻璃基板1上，和上述实施例一样，通过例如超声波或喷砂法形成成为流体导入口或流体排出口的贯通孔9、11。 
(C)在形成有槽的氟树脂体27上重叠玻璃基板1，对齐流路7和贯通孔9、、11，将其加热到250℃，进行10kPa左右的加压，由此，玻璃基板1和氟树脂体27粘着接合，完成流通池。 
图5是由同一实施例制造的流通池的显微镜观察图像。可以通过玻璃基板1观察流路7。在此，形成于氟树脂体27的槽7宽度为20μm，深度为4μm。 
其次，进一步说明流通池的其他的实施例。 
在上述流通池的制造工序中，在玻璃基板3上重叠粘着性氟树脂片5，或者在氟树脂体27上重叠玻璃基板1，使流路7和贯通孔9、11对齐，由此而行成。为了进一步提高玻璃基板3和氟树脂片5或氟树脂体27的粘着性，在玻璃基板1或3上通过溅射技术等成膜例如白金等的金属膜，使该金属膜表面和氟树脂片5或氟树脂体27贴合。如此，提高玻璃基板和片5或氟树脂体27的粘着性，所以能够更有效地抑制在构件间产生间隙，能够防止泄露。 
此外，如图6所示，可以例如将该金属膜的平面构造进行图案形成。28是玻璃基板1或3上形成的金属膜，29是对应成为流路的槽的部分形成的开口部。该金属膜28形成直到与成为流路的槽相接的位置。30是通过该金属膜28形成有电极图案成形的部分。例如，图6所示的该电极图案30可以作为电阻测温体使用，在电极两端施加电压，测定电极的电阻值，由此能够测定流通池基础体的温度。 
本发明并非限定于上述实施例中所述的加热温度和压力、流路宽度，可以在专利保护的范围内实施。 
本发明可以应用于构成分析仪器所用的流量计、导电率计等的流通池。 

Claims (9)

1.一种流通池，其特征在于，由在平坦的板状构件上接合形成有成为流路的贯通槽的粘着性氟树脂膜而构成的流路构件，和通过所述粘着性氟树脂膜的粘着性接合在所述粘着性氟树脂膜上的盖构件构成，在至少所述板状构件和所述盖构件的任一个构件上，在与所述贯通槽的两端相对应的位置设有成为液体出入口的贯通孔，并且，所述流路构件和所述盖构件的接合面的至少一部分由金属层覆盖。
2.根据权利要求1所述的流通池，其特征在于，所述粘着性氟树脂膜在特定温度以上相对于其他材质的基板显现粘着性。
3.根据权利要求1所述的流通池，其特征在于，所述金属层设在与成为流路的所述贯通槽相接的位置。
4.一种流通池的制造方法，其特征在于，具备以下工序(A)～(D)，
(A)在氟树脂膜上切削加工成为流路的槽的工序，
(B)在平坦的板状构件或盖构件的任一个上，与所述氟树脂膜的所述槽的两端相对应的位置形成成为液体出入口的贯通孔的工序，
(C)在粘着于所述氟树脂膜的任一构件的接合面的至少一部分上形成金属层的工序，
(D)其后，在对所述槽和贯通孔进行定位的状态下，将所述氟树脂膜夹在所述板状构件和所述盖构件之间，加热到所述氟树脂膜显现粘着性为止，并且进行加压，通过该氟树脂膜粘着接合所述板状构件和盖构件的工序。
5.一种流通池的制造方法，其特征在于，具备以下工序(A)～(D)，
(A)准备具有成形面的模具，并在该模具的成形面上重叠氟树脂体，在加热到该氟树脂体的融点附近的温度的状态下进行挤压成形的工序，其中，在所述成形面上形成有作为在成形后成为流路的槽的凸形状，
(B)在盖构件上，在与所述氟树脂体的所述槽的两端相对应的位置形成成为液体出入口的贯通孔的工序，
(C)在粘着于所述氟树脂膜的任一构件的接合面的至少一部分上形成金属层的工序，
(D)其后，重叠所述氟树脂体的成形面和盖构件，在对所述槽的两端和成为液体出入口的所述贯通孔进行定位的状态下重叠，加热到该氟树脂体显现粘着性为止，并且进行加压，粘着接合所述氟树脂体和所述盖构件的工序。
6.根据权利要求4所述的制造方法，其特征在于，用于使所述氟树脂膜显现粘着性的加热温度，是在所述氟树脂膜的融点以上但低于分解点的温度。
7.根据权利要求5所述的制造方法，其特征在于，用于使所述氟树脂体显现粘着性的加热温度，是在所述氟树脂体的融点以上但低于分解点的温度。
8.根据权利要求4所述的制造方法，其特征在于，所述氟树脂膜是在特定温度以上相对于其他材质的基板显现粘着性的粘着性氟树脂膜，用于使所述氟树脂膜显现粘着性的加热温度，是在所述氟树脂膜显现粘着性的温度以上但低于分解点的温度。
9.根据权利要求5所述的制造方法，其特征在于，所述氟树脂体是在特定温度以上相对于其他材质的基板显现粘着性的粘着性氟树脂体，用于使所述氟树脂体显现粘着性的加热温度，是在所述氟树脂体显现粘着性的温度以上但低于分解点的温度。
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