JP5252264B2 - 流体用積層構造体 - Google Patents
流体用積層構造体 Download PDFInfo
- Publication number
- JP5252264B2 JP5252264B2 JP2007266452A JP2007266452A JP5252264B2 JP 5252264 B2 JP5252264 B2 JP 5252264B2 JP 2007266452 A JP2007266452 A JP 2007266452A JP 2007266452 A JP2007266452 A JP 2007266452A JP 5252264 B2 JP5252264 B2 JP 5252264B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- laminated structure
- block
- block member
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 239000012530 fluid Substances 0.000 title claims description 81
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 12
- 238000009792 diffusion process Methods 0.000 claims description 11
- 229910001092 metal group alloy Inorganic materials 0.000 claims description 8
- -1 aluminum-magnesium-silicon Chemical compound 0.000 claims description 5
- 229910000676 Si alloy Inorganic materials 0.000 claims description 3
- 229910000861 Mg alloy Inorganic materials 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 description 37
- 229910000838 Al alloy Inorganic materials 0.000 description 8
- 238000004088 simulation Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052749 magnesium Inorganic materials 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0832—Modular valves
- F15B13/0839—Stacked plate type valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
- F15B13/081—Laminated constructions
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/206—Flow affected by fluid contact, energy field or coanda effect [e.g., pure fluid device or system]
- Y10T137/2224—Structure of body of device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12361—All metal or with adjacent metals having aperture or cut
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12674—Ge- or Si-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
- Y10T428/12764—Next to Al-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12986—Adjacent functionally defined components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Fluid-Pressure Circuits (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Regulating Braking Force (AREA)
- Valve Housings (AREA)
Description
14…中間部材 16…第2ブロック部材
18〜24、64、74…溝部
18a〜18c、20a、20c、22a、22b、24a〜24c、64a〜64c…端部
20b…屈曲部 26、62…排気孔
30〜56、68…貫通孔 57、63…底面部
58…入力孔 60…出力孔
65…上面部
66a〜66h、72a〜72c、86…取付穴
70a〜70d…ねじ穴 76a〜76c…コネクタ
78…電磁バルブ 80a〜80d…ねじ
82…抑え板 84…センサ
Claims (5)
- 2以上のブロック部材が積層された流体用積層構造体であって、
隣接するブロック部材の弾性定数が異なり、
前記2以上のブロック部材は、それぞれ金属製で形成された第1ブロック部材、中間部材、第2ブロック部材からなり、前記第1ブロック部材、前記中間部材、前記第2ブロック部材は、この順で積層されて相互に接合され、
前記中間部材の弾性定数は、前記第1及び第2ブロック部材の弾性定数よりも大きく、
前記第1ブロック部材と前記第2ブロック部材とが流体用流路を構成する溝部を有すると共に、前記中間部材が前記溝部に連通する貫通孔を有し、前記各部材が拡散接合されていることを特徴とする流体用積層構造体。 - 請求項1記載の流体用積層構造体において、
前記第1及び第2ブロック部材は、軽金属又は軽金属合金からなることを特徴とする流体用積層構造体。 - 請求項2記載の流体用積層構造体において、
前記第1及び第2ブロック部材を構成する軽金属合金は、アルミニウム−マグネシウム−ケイ素系合金であることを特徴とする流体用積層構造体。 - 請求項1〜3のいずれか1項に記載の流体用積層構造体において、
前記中間部材は、軽金属又は軽金属合金からなることを特徴とする流体用積層構造体。 - 請求項4記載の流体用積層構造体において、
前記中間部材を構成する軽金属合金は、アルミニウム−銅−マグネシウム系合金であることを特徴とする流体用積層構造体。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007266452A JP5252264B2 (ja) | 2007-10-12 | 2007-10-12 | 流体用積層構造体 |
US12/211,462 US7923124B2 (en) | 2007-10-12 | 2008-09-16 | Laminated structure for a fluid |
DE102008050933.7A DE102008050933B4 (de) | 2007-10-12 | 2008-10-10 | Laminierte Struktur für ein Fluid |
CN2008101699427A CN101408269B (zh) | 2007-10-12 | 2008-10-10 | 用于流体的层叠结构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007266452A JP5252264B2 (ja) | 2007-10-12 | 2007-10-12 | 流体用積層構造体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009097520A JP2009097520A (ja) | 2009-05-07 |
JP5252264B2 true JP5252264B2 (ja) | 2013-07-31 |
Family
ID=40459179
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007266452A Active JP5252264B2 (ja) | 2007-10-12 | 2007-10-12 | 流体用積層構造体 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7923124B2 (ja) |
JP (1) | JP5252264B2 (ja) |
CN (1) | CN101408269B (ja) |
DE (1) | DE102008050933B4 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2429697B1 (en) * | 2009-05-07 | 2018-10-17 | International Business Machines Corporation | Multilayer microfluidic probe head |
JP2012057652A (ja) * | 2010-09-06 | 2012-03-22 | Polyplastics Co | 流路形成構造体及び当該流路形成構造体の製造方法 |
EP2461046B1 (en) | 2010-12-03 | 2017-11-01 | Schukra Gerätebau GmbH | Valve assembly and pneumatic seat adjusting device |
JP5214790B2 (ja) * | 2011-10-12 | 2013-06-19 | 株式会社 旭 | 接合体の製造方法、接合体及び金属製品 |
DE102012109782A1 (de) * | 2012-10-15 | 2014-04-17 | Karlsruher Institut für Technologie | Schichtverbund |
US9441753B2 (en) * | 2013-04-30 | 2016-09-13 | Boston Dynamics | Printed circuit board electrorheological fluid valve |
US10729839B2 (en) * | 2017-10-03 | 2020-08-04 | Baxter International Inc. | Modular medical fluid management assemblies, machines and methods |
US10722635B2 (en) * | 2017-10-03 | 2020-07-28 | Baxter International Inc. | Modular medical fluid management assemblies and associated machines and methods |
EP4063209B1 (en) * | 2021-03-22 | 2024-04-24 | Nabtesco Corporation | Brake control device and method of manufacturing brake control device |
US11624450B2 (en) * | 2021-04-29 | 2023-04-11 | Applied Materials, Inc. | Fluid delivery mounting panel and system |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3407833A (en) | 1965-08-16 | 1968-10-29 | Aro Corp | Fluid logic circuit mechanism |
US3495604A (en) * | 1967-09-22 | 1970-02-17 | Us Army | Integral flueric element and manifold plate and method of stacking a series of such plates and fluid coupling the same |
US3534755A (en) * | 1968-07-18 | 1970-10-20 | Gen Electric | High signal-to-noise fluid amplifier and fluidic components |
JPS5234118Y2 (ja) * | 1972-11-16 | 1977-08-04 | ||
US3952576A (en) * | 1975-04-10 | 1976-04-27 | The United States Of America As Represented By The Secretary Of The Army | Laminar jet fluid property sensor |
JPS5548806Y2 (ja) * | 1975-12-13 | 1980-11-14 | ||
GB8314054D0 (en) * | 1983-05-20 | 1983-06-29 | Atomic Energy Authority Uk | Fluidic devices |
JPS6218559A (ja) | 1985-07-17 | 1987-01-27 | Fujitsu Ltd | 露光用マスク |
JP2746066B2 (ja) | 1992-12-04 | 1998-04-28 | 住友金属工業株式会社 | 管棒材の拡散接合方法 |
JP3218873B2 (ja) | 1994-07-22 | 2001-10-15 | スズキ株式会社 | 固相拡散接合法 |
JPH0969748A (ja) * | 1995-09-01 | 1997-03-11 | Matsushita Electric Ind Co Ltd | Sawデバイスおよびその製造方法 |
DE19942914B4 (de) | 1999-09-08 | 2009-12-31 | Linde Material Handling Gmbh | Gehäuse für zumindest ein hydraulisches Ventil |
US6234191B1 (en) * | 1999-10-19 | 2001-05-22 | Bryan J. Clarke | Railroad car brake manifold |
JP4560170B2 (ja) | 2000-03-22 | 2010-10-13 | アルバックマテリアル株式会社 | 固相拡散接合スパッタリングターゲット組立て体及びその製造方法 |
JP4522677B2 (ja) | 2003-08-07 | 2010-08-11 | 住友精密工業株式会社 | Al−Cu接合構造物およびその製造方法 |
JP4299152B2 (ja) * | 2004-01-08 | 2009-07-22 | 日本碍子株式会社 | 電磁波シールドケースおよびその製造方法 |
US7305850B2 (en) * | 2004-07-23 | 2007-12-11 | Velocys, Inc. | Distillation process using microchannel technology |
JP4631363B2 (ja) * | 2004-09-06 | 2011-02-16 | 横浜ゴム株式会社 | 樹脂集積配管 |
JP2006264163A (ja) * | 2005-03-24 | 2006-10-05 | Sekiso Kanagata Kenkyusho:Kk | 真空成形金型及びその製造方法 |
JP4656149B2 (ja) * | 2005-10-25 | 2011-03-23 | 株式会社島津製作所 | フローセル及びその製造方法 |
US8905073B2 (en) * | 2006-03-09 | 2014-12-09 | Sekisui Chemical Co. Ltd. | Micro fluid device and trace liquid diluting method |
-
2007
- 2007-10-12 JP JP2007266452A patent/JP5252264B2/ja active Active
-
2008
- 2008-09-16 US US12/211,462 patent/US7923124B2/en active Active
- 2008-10-10 DE DE102008050933.7A patent/DE102008050933B4/de active Active
- 2008-10-10 CN CN2008101699427A patent/CN101408269B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
DE102008050933B4 (de) | 2021-11-25 |
CN101408269A (zh) | 2009-04-15 |
JP2009097520A (ja) | 2009-05-07 |
US7923124B2 (en) | 2011-04-12 |
CN101408269B (zh) | 2012-11-14 |
DE102008050933A1 (de) | 2009-04-23 |
US20090098407A1 (en) | 2009-04-16 |
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