CN101351734B - 用于聚焦激光束的设备和方法 - Google Patents

用于聚焦激光束的设备和方法 Download PDF

Info

Publication number
CN101351734B
CN101351734B CN2006800498909A CN200680049890A CN101351734B CN 101351734 B CN101351734 B CN 101351734B CN 2006800498909 A CN2006800498909 A CN 2006800498909A CN 200680049890 A CN200680049890 A CN 200680049890A CN 101351734 B CN101351734 B CN 101351734B
Authority
CN
China
Prior art keywords
symmetry
focusing distance
focusing
light beam
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN2006800498909A
Other languages
English (en)
Chinese (zh)
Other versions
CN101351734A (zh
Inventor
加布里埃莱·科拉因
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Datalogic SpA
Original Assignee
Datalogic SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Datalogic SpA filed Critical Datalogic SpA
Publication of CN101351734A publication Critical patent/CN101351734A/zh
Application granted granted Critical
Publication of CN101351734B publication Critical patent/CN101351734B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
  • Measurement Of Optical Distance (AREA)
CN2006800498909A 2005-12-30 2006-12-18 用于聚焦激光束的设备和方法 Active CN101351734B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP05425953.6A EP1804100B1 (en) 2005-12-30 2005-12-30 Device and method for focusing a laser light beam
EP05425953.6 2005-12-30
PCT/EP2006/012169 WO2007076926A1 (en) 2005-12-30 2006-12-18 A device and a method for focusing a laser light beam

Publications (2)

Publication Number Publication Date
CN101351734A CN101351734A (zh) 2009-01-21
CN101351734B true CN101351734B (zh) 2011-12-14

Family

ID=36602699

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2006800498909A Active CN101351734B (zh) 2005-12-30 2006-12-18 用于聚焦激光束的设备和方法

Country Status (5)

Country Link
US (1) US7593114B2 (https=)
EP (1) EP1804100B1 (https=)
JP (1) JP5558720B2 (https=)
CN (1) CN101351734B (https=)
WO (1) WO2007076926A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009061317A1 (en) * 2007-11-08 2009-05-14 Optoelectronics Co., Ltd. Optical code scanner with automatic focusing
CN102057326A (zh) * 2008-06-06 2011-05-11 Opto电子有限公司 光学仪器的自动聚焦控制
GB0816308D0 (en) 2008-09-05 2008-10-15 Mtt Technologies Ltd Optical module
CN102231189B (zh) * 2011-05-12 2016-04-13 天地融科技股份有限公司 一种图像采集装置
CN102196181B (zh) * 2011-05-13 2013-11-13 天地融科技股份有限公司 一种图像采集装置
KR102038533B1 (ko) * 2012-06-14 2019-10-31 한국전자통신연구원 레이저 레이더 시스템 및 목표물 영상 획득 방법
DE102013215442A1 (de) * 2013-08-06 2015-02-12 Robert Bosch Gmbh Vorrichtung zur Materialbearbeitung mit einem Laserstrahl
GB201316815D0 (en) * 2013-09-23 2013-11-06 Renishaw Plc Additive manufacturing apparatus and method
DE102015215840B4 (de) * 2015-08-19 2017-03-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Multiaperturabbildungsvorrichtung, Abbildungssystem und Verfahren zum Bereitstellen einer Multiaperturabbildungsvorrichtung
EP4137256A1 (en) 2015-10-30 2023-02-22 Seurat Technologies, Inc. Additive manufacturing system and method
US10768404B2 (en) * 2017-03-22 2020-09-08 Mitutoyo Corporation Modulation monitoring system for use with an imaging system that includes a high speed periodically modulated variable focal length lens
KR102767094B1 (ko) * 2018-07-20 2025-02-13 오퍼 옵트로닉스 솔루션스 리미티드 다중-영상 레이저 빔 품질 측정의 초점 보정을 위한 방법 및 장치
CN111722243B (zh) * 2020-06-28 2024-05-28 上海兰宝传感科技股份有限公司 基于激光三角测量系统低温漂输出的温度补偿测距方法
US12162074B2 (en) 2020-11-25 2024-12-10 Lawrence Livermore National Security, Llc System and method for large-area pulsed laser melting of metallic powder in a laser powder bed fusion application

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4604739A (en) * 1984-04-16 1986-08-05 International Business Machines Corporation Optical focus detection employing rotated interference patterns
CN2127178Y (zh) * 1992-06-18 1993-02-17 天津大学 激光干涉调焦装置
US5338924A (en) * 1992-08-11 1994-08-16 Lasa Industries, Inc. Apparatus and method for automatic focusing of light using a fringe plate
US6288986B1 (en) * 1999-01-12 2001-09-11 Siros Technologies, Inc. Focus error signal generation using a birefringent plate with confocal detection

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6017660A (ja) * 1983-07-12 1985-01-29 Matsushita Electric Ind Co Ltd 給湯器
JPS6026621U (ja) 1983-07-28 1985-02-22 アルプス電気株式会社 光学式ヘツド位置制御装置
JPH03168712A (ja) * 1989-11-29 1991-07-22 Victor Co Of Japan Ltd オートフォーカス装置
JPH05342608A (ja) * 1992-06-05 1993-12-24 Omron Corp 焦点調整装置及び当該焦点調整装置を用いた発光装置、光ピックアップ装置、光学的コード読取装置ならびに光学検知装置。
US5446710A (en) 1992-11-06 1995-08-29 International Business Machines Corporation Focus error detection using an equal path length lateral shearing interferometer
US5689485A (en) 1996-04-01 1997-11-18 Discovision Associates Tracking control apparatus and method
JPH09304016A (ja) * 1996-05-15 1997-11-28 Nikon Corp 面位置検出装置及び該装置を備えた露光装置
JP3693767B2 (ja) * 1996-09-13 2005-09-07 オリンパス株式会社 形状測定器
DE19726581C5 (de) 1997-06-23 2010-02-04 Sick Ag Verfahren zur Bestimmung der Fokuslage einer optoelektronischen Vorrichtung
JPH11194018A (ja) * 1998-01-06 1999-07-21 Nikon Corp 被写体情報測定装置
JPH11214299A (ja) * 1998-01-27 1999-08-06 Komatsu Ltd ドットマークの読み取り装置と読み取り方法
JP4027605B2 (ja) * 2001-01-26 2007-12-26 株式会社リコー 光学面の形状測定方法および装置および記録媒体
US6794625B2 (en) * 2001-05-15 2004-09-21 Applied Materials Dynamic automatic focusing method and apparatus using interference patterns
JP2003030867A (ja) 2001-07-13 2003-01-31 Hitachi Ltd フォーカス制御方法及び装置とそれを用いた原盤露光装置
US6621060B1 (en) 2002-03-29 2003-09-16 Photonics Research Ontario Autofocus feedback positioning system for laser processing
JP2005221702A (ja) * 2004-02-05 2005-08-18 Noritsu Koki Co Ltd 投影装置
DE102005016029A1 (de) 2005-04-07 2006-10-12 Sick Ag Vorrichtung und Verfahren zur Bestimmung der Fokuslage

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4604739A (en) * 1984-04-16 1986-08-05 International Business Machines Corporation Optical focus detection employing rotated interference patterns
CN2127178Y (zh) * 1992-06-18 1993-02-17 天津大学 激光干涉调焦装置
US5338924A (en) * 1992-08-11 1994-08-16 Lasa Industries, Inc. Apparatus and method for automatic focusing of light using a fringe plate
US6288986B1 (en) * 1999-01-12 2001-09-11 Siros Technologies, Inc. Focus error signal generation using a birefringent plate with confocal detection

Also Published As

Publication number Publication date
US7593114B2 (en) 2009-09-22
EP1804100B1 (en) 2018-02-21
EP1804100A1 (en) 2007-07-04
WO2007076926A1 (en) 2007-07-12
JP2009525493A (ja) 2009-07-09
JP5558720B2 (ja) 2014-07-23
US20070153644A1 (en) 2007-07-05
CN101351734A (zh) 2009-01-21

Similar Documents

Publication Publication Date Title
CN101351734B (zh) 用于聚焦激光束的设备和方法
JP2913984B2 (ja) 傾斜角測定装置
CA3026005C (en) Device for process monitoring during laser machining
JP2008541101A (ja) 物体の表面測定装置およびその表面測定方法
US5338924A (en) Apparatus and method for automatic focusing of light using a fringe plate
JPH0652171B2 (ja) 光学式非接触位置測定装置
CN116635182B (zh) 用于确定焦点位置的装置和方法
US20110235049A1 (en) Wavefront Sensing Method and Apparatus
EP0234562B1 (en) Displacement sensor
EP0208276A1 (en) Optical measuring device
US5432330A (en) Two-stage detection noncontact positioning apparatus having a first light detector with a central slit
US20070008550A1 (en) Systems and methods for tilt and range measurement
CN117109442A (zh) 一种激光位移传感器和位移测量的方法
US5387975A (en) Interferometer for measuring a surface configuration of a test object by an interference pattern using gratings to generate wave fronts
JP5358898B2 (ja) 光学面の形状測定方法および装置および記録媒体
CN119148373A (zh) 用于自动对焦传感器的中继系统、传感器、系统以及方法
JP2005201703A (ja) 干渉測定方法及び干渉測定システム
US5815272A (en) Filter for laser gaging system
US20060226335A1 (en) Apparatus and a method for the determination of the focal distance
CN116783024B (zh) 一种用于确定焦点位置的装置和方法
US20240009761A1 (en) Device and Method for Determining a Focal Point
JP2000097657A (ja) 干渉計
CN120993579A (zh) 一种基于波前离焦系数的自动对焦方法和装置
JP3077725B2 (ja) 屈折率測定方法及びその装置
JPH04130239A (ja) 動的面出入り測定装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant