CN101350575B - 致动器 - Google Patents

致动器 Download PDF

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Publication number
CN101350575B
CN101350575B CN2008101336635A CN200810133663A CN101350575B CN 101350575 B CN101350575 B CN 101350575B CN 2008101336635 A CN2008101336635 A CN 2008101336635A CN 200810133663 A CN200810133663 A CN 200810133663A CN 101350575 B CN101350575 B CN 101350575B
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CN
China
Prior art keywords
vibrating body
piezoelectric element
electrode
vibration
support component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN2008101336635A
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English (en)
Chinese (zh)
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CN101350575A (zh
Inventor
根岸真人
横松孝夫
明正谦
秦诚一
下河边明
孙东明
汪盛
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Publication of CN101350575A publication Critical patent/CN101350575A/zh
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Publication of CN101350575B publication Critical patent/CN101350575B/zh
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN2008101336635A 2007-07-20 2008-07-18 致动器 Expired - Fee Related CN101350575B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007189001 2007-07-20
JP2007189001 2007-07-20
JP2007-189001 2007-07-20
JP2008155357 2008-06-13
JP2008-155357 2008-06-13
JP2008155357A JP5159452B2 (ja) 2007-07-20 2008-06-13 アクチュエータ

Publications (2)

Publication Number Publication Date
CN101350575A CN101350575A (zh) 2009-01-21
CN101350575B true CN101350575B (zh) 2011-05-18

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Family Applications (1)

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CN2008101336635A Expired - Fee Related CN101350575B (zh) 2007-07-20 2008-07-18 致动器

Country Status (2)

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JP (1) JP5159452B2 (enrdf_load_stackoverflow)
CN (1) CN101350575B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110462356A (zh) * 2017-02-15 2019-11-15 迪知胜控股公司 振弦式传感器和用于振弦式传感器的振弦

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9164584B2 (en) * 2009-04-21 2015-10-20 Google Technology Holdings LLC Methods and devices for consistency of the haptic response across a touch sensitive device
CN102525378B (zh) * 2012-02-02 2014-01-01 重庆理工大学 一种纤毛振动驱动的微型机器人
KR101452055B1 (ko) * 2012-12-03 2014-10-21 삼성전기주식회사 진동발생장치
US11139426B2 (en) 2015-12-21 2021-10-05 Koninklijke Philips N.V. Actuator device based on an electroactive polymer
JP2017118040A (ja) * 2015-12-25 2017-06-29 日本特殊陶業株式会社 圧電アクチュエータ
CN107547005A (zh) * 2017-09-14 2018-01-05 苏州迈客荣自动化技术有限公司 一种新型压电陶瓷致动器
CN110690832B (zh) * 2018-07-06 2021-06-01 成都理想境界科技有限公司 一种压电驱动器、光纤扫描模组和投影设备
US10816016B2 (en) * 2018-10-31 2020-10-27 Seiko Instruments Inc. Thrust expansion device
CN111306400B (zh) * 2019-12-28 2022-02-11 邦瓷电子科技(盐城)有限责任公司 一种压电式管道爬行机器人

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1943101A (zh) * 2004-06-09 2007-04-04 佳能株式会社 振动波驱动设备和振动器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07274559A (ja) * 1994-03-30 1995-10-20 Fanuc Ltd 圧電式リニアアクチュエータ
JPH0880068A (ja) * 1994-09-02 1996-03-22 Nikon Corp 超音波アクチュエータ
JPH10210776A (ja) * 1997-01-27 1998-08-07 Toshiba Corp 回転直動一体型超音波モータ及びそれを内蔵した電子機器
JP2005153110A (ja) * 2003-11-27 2005-06-16 Olympus Corp 静電アクチュエータ
JP2007116889A (ja) * 2005-09-22 2007-05-10 Canon Inc インチワーム駆動によるアクチュエータ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1943101A (zh) * 2004-06-09 2007-04-04 佳能株式会社 振动波驱动设备和振动器

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JP特开平10-210776A 1998.08.07
Minoru Kuribayashi et al.Excitation conditions of flexural traveling waves for a reversible ultrasonic linear motor.《Acoustical society of America》.1985,第77卷(第4期),第1431-1435页. *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110462356A (zh) * 2017-02-15 2019-11-15 迪知胜控股公司 振弦式传感器和用于振弦式传感器的振弦
CN110462356B (zh) * 2017-02-15 2022-04-26 迪知胜控股公司 振弦式传感器和用于振弦式传感器的振弦

Also Published As

Publication number Publication date
JP2009050146A (ja) 2009-03-05
CN101350575A (zh) 2009-01-21
JP5159452B2 (ja) 2013-03-06

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Granted publication date: 20110518

Termination date: 20180718