CN101338411A - Zr-Si-N硬质复合涂层及其制备方法 - Google Patents
Zr-Si-N硬质复合涂层及其制备方法 Download PDFInfo
- Publication number
- CN101338411A CN101338411A CNA2008100225438A CN200810022543A CN101338411A CN 101338411 A CN101338411 A CN 101338411A CN A2008100225438 A CNA2008100225438 A CN A2008100225438A CN 200810022543 A CN200810022543 A CN 200810022543A CN 101338411 A CN101338411 A CN 101338411A
- Authority
- CN
- China
- Prior art keywords
- target
- substrate
- composite coating
- hard composite
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910007991 Si-N Inorganic materials 0.000 title claims abstract description 36
- 229910006294 Si—N Inorganic materials 0.000 title claims abstract description 36
- 238000000576 coating method Methods 0.000 title claims description 55
- 239000011248 coating agent Substances 0.000 title claims description 54
- 239000002131 composite material Substances 0.000 title claims description 21
- 238000000034 method Methods 0.000 title abstract description 11
- 238000004544 sputter deposition Methods 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 150000001875 compounds Chemical class 0.000 claims abstract description 20
- 238000002360 preparation method Methods 0.000 claims abstract description 16
- 229910052786 argon Inorganic materials 0.000 claims abstract description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims abstract description 3
- 239000002184 metal Substances 0.000 claims abstract description 3
- 239000007789 gas Substances 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 9
- 238000005516 engineering process Methods 0.000 claims description 9
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 abstract description 27
- 238000007254 oxidation reaction Methods 0.000 abstract description 27
- 238000005520 cutting process Methods 0.000 abstract description 8
- 239000000463 material Substances 0.000 abstract description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 239000010408 film Substances 0.000 description 12
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- QFUKUPZJJSMEGE-UHFFFAOYSA-N 5-(hydroxymethyl)-1-(3-methylbutyl)pyrrole-2-carbaldehyde Chemical compound CC(C)CCN1C(CO)=CC=C1C=O QFUKUPZJJSMEGE-UHFFFAOYSA-N 0.000 description 4
- 229910010037 TiAlN Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000003078 antioxidant effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005546 reactive sputtering Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000003963 antioxidant agent Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000002114 nanocomposite Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000004062 sedimentation Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- FFRBMBIXVSCUFS-UHFFFAOYSA-N 2,4-dinitro-1-naphthol Chemical group C1=CC=C2C(O)=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 FFRBMBIXVSCUFS-UHFFFAOYSA-N 0.000 description 1
- 229910018509 Al—N Inorganic materials 0.000 description 1
- 229910019590 Cr-N Inorganic materials 0.000 description 1
- 229910019588 Cr—N Inorganic materials 0.000 description 1
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical group [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000013332 literature search Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008100225438A CN101338411B (zh) | 2008-08-15 | 2008-08-15 | Zr-Si-N硬质复合涂层及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008100225438A CN101338411B (zh) | 2008-08-15 | 2008-08-15 | Zr-Si-N硬质复合涂层及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101338411A true CN101338411A (zh) | 2009-01-07 |
CN101338411B CN101338411B (zh) | 2012-01-25 |
Family
ID=40212581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2008100225438A Expired - Fee Related CN101338411B (zh) | 2008-08-15 | 2008-08-15 | Zr-Si-N硬质复合涂层及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101338411B (zh) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101775577A (zh) * | 2010-03-25 | 2010-07-14 | 西安交通大学 | Zr-Si-N纳米双相结构表面传导电子发射薄膜的制备方法 |
CN101921982A (zh) * | 2010-09-06 | 2010-12-22 | 厦门大学 | 在硬质合金基体表面制备纳米结构氮硅锆涂层的方法 |
CN101928916A (zh) * | 2010-09-06 | 2010-12-29 | 厦门大学 | 在硬质合金基体表面制备纳米结构氮钇锆硬质涂层的方法 |
FR2956310A1 (fr) * | 2010-02-12 | 2011-08-19 | Seb Sa | Surface de cuisson facile a nettoyer et article culinaire ou appareil elecromenager comportant une telle surface de cuisson |
EP2636764A1 (en) | 2012-03-07 | 2013-09-11 | Seco Tools Ab | Nanolaminated coated cutting tool |
WO2013131943A1 (en) | 2012-03-07 | 2013-09-12 | Seco Tools Ab | A body with a metal based nitride layer and a method for coating the body |
CN105887012A (zh) * | 2016-01-11 | 2016-08-24 | 天津职业技术师范大学 | 一种Zr-B-N纳米复合涂层制备工艺 |
CN106756817A (zh) * | 2016-11-29 | 2017-05-31 | 沈阳黎明航空发动机(集团)有限责任公司 | 利用PVD在模具表面制备Cr‑ZrSiN‑TiAlSiCN薄膜的方法 |
CN106893991A (zh) * | 2017-02-27 | 2017-06-27 | 天津职业技术师范大学 | 一种Zr‑B‑O‑N纳米复合涂层制备工艺 |
CN110088352A (zh) * | 2016-12-28 | 2019-08-02 | Jx金属株式会社 | 气流溅射装置、气流溅射用靶以及溅射靶原料的制造方法 |
CN111206217A (zh) * | 2020-03-25 | 2020-05-29 | 郑州大学 | 一种核电用Zr-Si-O非晶防护涂层的制备方法 |
CN112599666A (zh) * | 2020-12-09 | 2021-04-02 | 上海工程技术大学 | 一种Si-Sb-Sn相变存储材料及其制备方法 |
-
2008
- 2008-08-15 CN CN2008100225438A patent/CN101338411B/zh not_active Expired - Fee Related
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103328679A (zh) * | 2010-02-12 | 2013-09-25 | Seb公司 | 便于清洗的烹饪表面以及包括这种烹饪表面的烹饪用品或家电设备 |
FR2956310A1 (fr) * | 2010-02-12 | 2011-08-19 | Seb Sa | Surface de cuisson facile a nettoyer et article culinaire ou appareil elecromenager comportant une telle surface de cuisson |
US20130136920A1 (en) * | 2010-02-12 | 2013-05-30 | Seb S.A. | Easy-Clean Cooking Surface and Culinary Article or Domestic Electrical Appliance Comprising such a Cooking Surface |
WO2011098730A3 (fr) * | 2010-02-12 | 2013-08-01 | Seb S.A. | Surface de cuisson facile à nettoyer et article culinaire ou appareil electromenager comportant une telle surface de cuisson |
CN103328679B (zh) * | 2010-02-12 | 2016-01-06 | Seb公司 | 便于清洗的烹饪表面以及包括这种烹饪表面的烹饪用品或家电设备 |
US9109122B2 (en) | 2010-02-12 | 2015-08-18 | Seb S.A. | Easy-clean cooking surface and culinary article or domestic electrical appliance comprising such a cooking surface |
CN101775577A (zh) * | 2010-03-25 | 2010-07-14 | 西安交通大学 | Zr-Si-N纳米双相结构表面传导电子发射薄膜的制备方法 |
CN101921982A (zh) * | 2010-09-06 | 2010-12-22 | 厦门大学 | 在硬质合金基体表面制备纳米结构氮硅锆涂层的方法 |
CN101928916A (zh) * | 2010-09-06 | 2010-12-29 | 厦门大学 | 在硬质合金基体表面制备纳米结构氮钇锆硬质涂层的方法 |
CN104160060A (zh) * | 2012-03-07 | 2014-11-19 | 山高刀具公司 | 具有金属基氮化物层的刀体和涂布该刀体的方法 |
WO2013131961A1 (en) | 2012-03-07 | 2013-09-12 | Seco Tools Ab | Nanolaminated coated cutting tool |
WO2013131943A1 (en) | 2012-03-07 | 2013-09-12 | Seco Tools Ab | A body with a metal based nitride layer and a method for coating the body |
EP2636764A1 (en) | 2012-03-07 | 2013-09-11 | Seco Tools Ab | Nanolaminated coated cutting tool |
CN105887012A (zh) * | 2016-01-11 | 2016-08-24 | 天津职业技术师范大学 | 一种Zr-B-N纳米复合涂层制备工艺 |
CN105887012B (zh) * | 2016-01-11 | 2018-10-30 | 天津职业技术师范大学 | 一种Zr-B-N纳米复合涂层制备工艺 |
CN106756817A (zh) * | 2016-11-29 | 2017-05-31 | 沈阳黎明航空发动机(集团)有限责任公司 | 利用PVD在模具表面制备Cr‑ZrSiN‑TiAlSiCN薄膜的方法 |
CN110088352A (zh) * | 2016-12-28 | 2019-08-02 | Jx金属株式会社 | 气流溅射装置、气流溅射用靶以及溅射靶原料的制造方法 |
CN106893991A (zh) * | 2017-02-27 | 2017-06-27 | 天津职业技术师范大学 | 一种Zr‑B‑O‑N纳米复合涂层制备工艺 |
CN106893991B (zh) * | 2017-02-27 | 2019-03-15 | 天津职业技术师范大学 | 一种Zr-B-O-N纳米复合涂层制备工艺 |
CN111206217A (zh) * | 2020-03-25 | 2020-05-29 | 郑州大学 | 一种核电用Zr-Si-O非晶防护涂层的制备方法 |
CN112599666A (zh) * | 2020-12-09 | 2021-04-02 | 上海工程技术大学 | 一种Si-Sb-Sn相变存储材料及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN101338411B (zh) | 2012-01-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101338411B (zh) | Zr-Si-N硬质复合涂层及其制备方法 | |
CN101597751B (zh) | Zr-Al-Si-N硬质复合涂层及其制备方法 | |
CN101074474B (zh) | 硬质叠层被膜的制造方法及成膜装置 | |
CN100419117C (zh) | 硬质叠层被膜、其制造方法及成膜装置 | |
Chen et al. | Machining performance of Ti–Al–Si–N coated inserts | |
CN102011091B (zh) | 高硬度高弹性模量CrAlN保护涂层及其制备方法 | |
CN102378831B (zh) | 用于产生高温的金属切割领域的镀膜切割工具 | |
EP2446066A1 (en) | Nanolaminated coated cutting tool | |
CN106835037A (zh) | 一种高硬度、高弹性模量的多组元氮化物涂层及其制备方法 | |
WO2009151386A8 (en) | Coated cutting tool for metal cutting applications generating high temperatures | |
JP2012522653A5 (zh) | ||
CN110029320B (zh) | 磁控溅射法制备二硼化钛/二氧化锆梯度纳米结构薄膜及其应用 | |
CN103255373A (zh) | 一种TaVN复合涂层及其制备方法 | |
CN104805408A (zh) | 高硬度TiSiBN纳米复合结构保护性涂层及其制备方法 | |
CN104975259A (zh) | 带涂层的切削工具及其制造方法 | |
CN103305789B (zh) | 一种CrAlN/ZrO2纳米涂层及其制备方法 | |
CN102011093B (zh) | 高硬度高弹性模量CrAlN/AlON纳米多层涂层材料及其制备方法 | |
CN100443625C (zh) | ZrO2/TiN硬质纳米多层涂层 | |
CN1793415A (zh) | ZrN/Al2(O1-xNx) 3硬质纳米多层涂层的制备方法 | |
CN102162084B (zh) | 一种模具用抗高温氧化纳米ZrOxN1-x薄膜及其制备工艺 | |
CN102011092B (zh) | 高硬度高弹性模量CrAlN/SiO2纳米多层涂层材料及其制备方法 | |
Qu et al. | Influence of boron contents on properties of AlMgB films prepared by RF magnetron sputtering | |
CN103898456B (zh) | NbVN硬质纳米薄膜及制备方法 | |
CN100424224C (zh) | 反应磁控溅射TiN/SiO2硬质纳米多层涂层的制备方法 | |
Stüber et al. | Magnetron sputtered nanocrystalline metastable (V, Al)(C, N) hard coatings |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C56 | Change in the name or address of the patentee | ||
CP02 | Change in the address of a patent holder |
Address after: 212028 Zhenjiang, Dantu Metro Industrial Park Rui East Road, No. 9 Patentee after: Jiangsu University of Science and Technology Address before: 212003 Zhenjiang,, Jiangsu, Jiangsu University of Science and Technology, No. Patentee before: Jiangsu University of Science and Technology |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201125 Address after: Group 1, Jiqing village, Duntou Town, Hai'an City, Nantong City, Jiangsu Province Patentee after: HAI ZHONGSHAN SYNTHETIC FIBER Co.,Ltd. Address before: 212028 Zhenjiang, Dantu Metro Industrial Park Rui East Road, No. 9 Patentee before: JIANGSU University OF SCIENCE AND TECHNOLOGY |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201216 Address after: Meng Xi Road 212003 Zhenjiang city of Jiangsu province Jingkou District No. 2 Patentee after: JIANGSU University OF SCIENCE AND TECHNOLOGY Address before: Group 1, Jiqing village, Duntou Town, Hai'an City, Nantong City, Jiangsu Province Patentee before: HAI ZHONGSHAN SYNTHETIC FIBER Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120125 |