CN101282824A

CN101282824A - Suction head apparatus

Info

Publication number: CN101282824A
Application number: CNA2005800517869A
Authority: CN
Inventors: 渡边敏彦; 田野实贵彦
Original assignee: Hirata Corp
Current assignee: Hirata Corp
Priority date: 2005-10-18
Filing date: 2005-10-18
Publication date: 2008-10-08
Anticipated expiration: 2025-10-18
Also published as: CN101282824B; TW200724329A; JP4891251B2; JPWO2007046152A1; TWI363678B; WO2007046152A1

Abstract

A suction head device has a suction pad (20) for sucking a workpiece (W), a suction force generation device (70) for making the suction pad (20) generate suction force, a shaft (30) for holding at its lower end the suction head (20) and vertically moving suction head, a lifting mechanism (40) for lifting and lowering the shaft (30), holding mechanisms (50, 60) for holding the workpiece (W), sucked by the suction pad (20), from horizontal directions, and a control means (80) for driving and controlling the suction force generation mechanism (70) such that, after the workpiece (W) is held by the holding mechanisms (50, 60), the suction by the suction pad (20) is once released and then the suction pad (20) is again caused to suck the workpiece (W).; Even if holding by the holding mechanisms and suction by the suction pad are sequentially released, the workpiece is reliably transferred while being highly accurately positioned.

Description

Suction head apparatus

Technical field

The present invention relates to workpiece such as relevant electronic device of semiconductor or mechanical part are adsorbed and the suction head apparatus of movement, relate in particular to when reception position adsorbs workpiece and takes out it is positioned also movement to the suction head apparatus of assigned position.

Background technology

On the manufacturing streamline of semiconductor or other small electronic devices etc., be carried to various processing workshop section as the workpiece (electronic device) of object by conveyer belt, and, take out and movement is implemented predetermined process to the assigned position of handling part from conveyer belt by board migration device.

Yet,,, therefore need carry out the change of type continually because the life cycle of the goods of these workpiece of employing is of short duration for this workpiece (electronic device).Thereby, corresponding to this type change, in order to make multiple parts at an easy rate, on the manufacturing streamline, be necessary guaranteeing to carry out high speed processing in the quality, and for for the board migration device of workpiece from the conveyer belt movement to handling part, especially wishing to possess has the workpiece that can easily keep (absorption) diversified size and can be with the suction head apparatus of it movement to handling part when carrying out hi-Fix.

As suction head apparatus in the past, for example following example is well known, and this device possesses: central authorities have the basic deckle board of through hole; The suction tube that can move up and down by the through hole of basic deckle board; Be arranged at the suction pad of the front end of suction tube; Be adapted to can along basic deckle board radially mutually near and open from, two pairs of jaws that can carry out clamping to mechanical arm; And drive the linkage of two pairs of jaws and cam mechanism etc. respectively, when suction tube descends, the two pairs of jaws open respectively from, when suction tube is being inhaled when rising under the state that pad adsorbing workpiece, the two pairs of jaws carry out clamping (for example Japan Patent real open flat 6-24882 communique) to workpiece.

Yet, in this suction head apparatus, because two pairs of jaws fill up holding workpiece under the state that is adsorbing workpiece in suction, therefore when workpiece therein the heart depart from when being adsorbed under the state of inhaling the center of filling up, two pairs of jaw desires are positioned workpiece for inhale the pad center and make the suction pad that strain take place, thereby occur in the situation of carrying out clamping under the state of this suction pad generation strain.

For this reason, even if workpiece is located by jaw, with workpiece when the movement of predetermined process portion, when the positioning solution of being carried out by the clamping of jaw is removed, inhale that pad elasticity is recovered and on the position that workpiece got back to depart from, thus be difficult to workpiece exactly movement to assigned position.

In addition, as other suction head apparatus, following example is well known, and this device possesses: front end have the suction nozzle axle of suction nozzle, in the horizontal direction have rotating shaft and be subjected to cam part that motor revolution drives, have with the rod-like members of the slave unit of cam part interlock, be connected in rod-like members and suction nozzle axle linkage component, be equipped on the jaw around the suction nozzle and when being used to prevent to have a power failure the suction nozzle axle fall the rising mechanism etc. that makes the rising of suction nozzle axle with generations such as workpiece being used to of colliding because of deadweight.In this device, rely on the revolution of cam part and the effect by rod-like members and linkage component, in the lifting of suction nozzle axle, the workpiece that is subjected to suction nozzle absorption is carried out clamping with jaw, and, rising mechanism action when having a power failure and make the suction nozzle axle rise to assigned position (for example Japanese patent laid-open 5-21997 communique)

Yet, in this suction head apparatus, make the mechanism of suction nozzle axle lifting comprise cam part, rod-like members and linkage component etc. with the rotating shaft on the horizontal direction, but also be provided with the rising mechanism that prevents that the suction nozzle axle from descending because of deadweight in addition, thereby the complex structure that it is whole is with respect to for the workpiece of object, device volume is unnecessarily too huge, is difficult to satisfy requirements such as save space, intensification and miniaturization.

Summary of the invention

In view of the above problems, the object of the present invention is to provide a kind of suction head apparatus, the miniaturization that the simplifying that can realize constructing, the intensification of each mechanism, device the are whole and save space of area is set, shorten the workpiece required time of movement, simultaneously, can to workpiece such as electronic device such as semiconductor chip, substrate or mechanical part adsorb and accurately movement to predetermined process portion, thereby improve prouctiveness.

For achieving the above object, of the present invention suction head apparatus comprises: the suction pad that workpiece is adsorbed; Make and inhale the attraction generating mechanism that pad produces attraction; The axle that pad remains in the lower end and moves up and down will be inhaled; Make the elevating mechanism of a lifting; From the clamping device of general horizontal direction to being carried out clamping by the workpiece of suction pad absorption; And to attracting generating mechanism to drive control to make it the temporary transient control device of removing the absorption of inhaling pad and making it once more subsequently to adsorb after clamping device carries out clamping to workpiece.

According to this formation, when dropping to the position that workpiece is adsorbed under the start of axle at elevating mechanism, under the attraction action that attracts generating mechanism, inhale pad workpiece is adsorbed.And, when rising to predetermined bits under the start of axle at elevating mechanism, clamping device start and workpiece is carried out clamping from horizontal direction.Afterwards, attract the attraction action of generating mechanism temporarily to be stopped, after workpiece is inhaled pad release, be adsorbed once more.

Thereby, even workpiece is subjected to inhaling the absorption of pad under the state that departs from the center that should be adsorbed at this place and positioned by clamping device under this state that departs from and make and inhale pad and be in elastic deformation, owing to workpiece is being in temporary transient and suction pad disengaging under the state that is held mechanisms grip, thereby can make and inhale pad elasticity and recover and eliminate departing from of position, and workpiece is adsorbed once more being located under the state of assigned position.Thus, though the clamp position that clamping device is caused and inhale the adsorbed state that pad produces and remove successively, workpiece still can be with the state that obtains hi-Fix reliably by movement to assigned position (for example predetermined process portion).

In the above-described configuration, control device can followingly constitute, and promptly, make for the absorption of remove inhaling pad after the attraction action that attracts generating mechanism stops, driving elevating mechanism and makes that axle is temporary transient to rise.

This formation of foundation, with respect to the workpiece that is subjected to the clamping device clamping, the suction pad temporarily rises and disengaging with it after releasing is adsorbed it, therefore, fills up the occasion that strain once took place in suction, and elasticity returns to shape originally to make suction fill up reliably.

In the above-described configuration, control device can followingly constitute, and promptly, for remove inhaling the absorption of pad, drives control to attracting generating mechanism, so that workpiece is blown.

According to this formation, in order to remove absorption, inhale pad to the workpiece that is subjected to the clamping device clamping blow (gas beyond injection air or the air), therefore, can be promptly, under the situation of time under reach, make to inhale and fill up the shape that elasticity reliably returns to script in the vertical motion that does not need to inhale pad (axle).

In the above-described configuration, elevating mechanism can adopt comprise round the rotating cam that on above-below direction, produces the cam effect along the vertical direction along the rotation of the axis stretched, and with the slave unit that spool is connected and engages with rotating cam in interior formation.

According to this formation, because elevating mechanism can make the rotating cam that is rotated along the axis of stretching around (vertical direction) along the vertical direction comprise straight line portion (being used to prevent to cause because of the deadweight of axle the structure of rotating cam action), therefore, beyond in lifting action under the situation, the deadweight of axle is born by straight line portion, thereby, even if situations such as generation power failures, can rotating cam be rotated yet, can prevent that axle from descending voluntarily and making and inhale pad and collide with workpiece because of the deadweight of axle etc.And, owing to the workpiece in keeping is not applied unnecessary pressure, thereby can safeguard the quality of workpiece.In addition, owing to adopted this rotating cam and the slave unit that engage with its cam surface, so can realize the simplifying of constructing and intensify, and can make equipment miniaturization.

In the above-described configuration, clamping device can adopt comprise move back and forth in the horizontal direction and mutually near and open from least one pair of clamping limb, and at least one pair of clamping limb is carried out the formation of the driving mechanism of horizontal drive.

According to this formation, under the drive actions of driving mechanism, the clamping limb of at least one pair of with respect to workpiece from horizontal direction near and workpiece is carried out clamping and location, and along continuous straight runs breaks away from it away from workpiece.That is, the clamped position (clip position) of clamping limb and workpiece can be on above-below direction, set accurately, the stable holding action of otherness can be obtained not having.

In the above-described configuration, driving mechanism can adopt and be included in rotation in the horizontal plane, have at least one pair of clamping limb produce make its mutually near and open from the plectane cam of cam path of cam effect in interior formation.

According to this formation, owing to comprised plectane cam in the driving mechanism with cam path, therefore can make clamping limb reliably interlock take place and be close and open from, can carry out clamping and release to workpiece accurately, and, can be on above-below direction the miniaturization of implement device.

In the above-described configuration, clamping device can adopt comprise around along general horizontal direction along the axis stretched swing and mutually near and open from least one pair of swing arm and make at least one pair of swing arm swing and when making it when axle descends, to open from, rising approaching driving mechanism in interior formation.

According to this formation, take place on mobile phase connection ground under the drive actions of driving mechanism of action with axle, at least one pair of swing arm while rotate with workpiece near and workpiece carried out the clamping location, and reverse rotation is disengaging with it away from workpiece.That is, rely on the structure of the action interlock that makes driving mechanism and axle, can reduce the number of component parts, the simplifying of realization structure and the miniaturization of device.

Description of drawings

Fig. 1 is the block diagram of an example of the control system of expression suction head apparatus of the present invention.

Fig. 2 is the front view of an example of expression suction head apparatus of the present invention.

Fig. 3 is the local amplification view of suction head apparatus shown in Figure 2.

Fig. 4 A is the vertical view of expression as the plectane cam of the component part of suction head apparatus, and Fig. 4 B is the cutaway view along the E1-E1 line among Fig. 4 A.

Vertical view and the side view of Fig. 5 for the action as the clamping device of the component part of suction head apparatus is described.

Vertical view and the side view of Fig. 6 for the action as the clamping device of the component part of suction head apparatus is described.

Fig. 7 A, Fig. 7 B, the action diagram of Fig. 7 C for the part in a series of actions of suction head apparatus is described.

Fig. 8 A, Fig. 8 B, the action diagram of Fig. 8 C for the part in a series of actions of suction head apparatus is described.

Fig. 9 A, Fig. 9 B, the action diagram of Fig. 9 C for the part in a series of actions of suction head apparatus is described.

Figure 10 is the local amplification view of another example of expression suction head apparatus of the present invention.

Figure 11 is the local amplification view of the state of clamping device when holding workpiece of the component part of expression suction head apparatus shown in Figure 10.

The specific embodiment

Below, with reference to accompanying drawing preferable example of the present invention is described.

As shown in Figure 1 to Figure 3, this suction head apparatus comprises: the basic framework 10 that becomes structure; The suction pad 20 of absorption workpiece W; The axle 30 that pad 20 remains in its lower end, moves up and down will be inhaled; Make the elevating mechanism 40 of axle 30 liftings; The workpiece W that are subjected to inhaling pad 20 absorption are carried out the two pairs of clamping limbs 50 and the driving mechanism 60 as clamping device of clamping from general horizontal direction; Make and inhale the pressure adjustment machine 70 that pad 20 produces the conduct attraction generating mechanism of attraction; And to install that whole driving control controls as the control module 80 of control device etc.

And, this suction head apparatus, for example on the manufacturing streamline of various parts relevant etc. with semiconductor, be as the workpiece W that is come by carryings such as conveyer belts being adsorbed and movement is assembled in wherein to the part of the workpiece board migration device of predetermined process portion, rely on driving mechanism up and down included in the workpiece board migration device and horizontal drive mechanism and to carry out three-dimensional mobile.

Framework 10 usefulness metal materials etc. are made, as shown in Figures 2 and 3, comprising: flat basic deckle board 11, the flat supporting deckle board 15 being located at the drawing strickle guide cylindraceous 12 of basic deckle board 11 central authorities, basic deckle board 11 being installed in assembling frame 13 on the part of board migration device with the hanging shape, being arranged to the bearing bracket stand 14 outstanding and separating the interval of regulation and be connected etc. with basic deckle board 11 from basic deckle board 11 belows.

Inhale the resin material of pad 20 employing elastically deformables etc., as shown in Figure 1 to Figure 3, be configured to the cavity that the lower end is horn-like ground opening and has the snake abdomen shape structure that is easy to deform on the way therein, its upside combines with the lower end of axle 30.

And, under the state of its lower surface and workpiece W butt, when attracting by following

pressure adjustment machine

70 and 30 pairs of air of axle, inhaling 20 couples of workpiece W of pad adsorbs, and, then discharge workpiece W when attracting to stop and pressure adjustment or when workpiece W blown (gas beyond ejection air or the air).

As shown in Figures 2 and 3, axle 30 is configured to along the vertical direction (vertical direction) Z along the tubular part cylindraceous of stretching and form in inside the cavity, comprising: but be positioned at wide diameter portion 31 that having of its lower end be the flange 31a that tabular launches in the horizontal direction, be positioned at being connected of its upper end adjust the connecting portion 32 on the flexible pipe that machine 70 is communicated with pressure and be positioned at connecting portion 32 belows with the frame support bracket 33 that roughly is L word shape of following slave unit 43 free rotary ground supportings etc.At this, on the flange 31a of wide diameter portion 31, be provided with banking stop 34, this banking stop 34 is configured to vertically and hangs down, and the workpiece W that are subjected to inhaling pad 20 absorption are moved upward limit.

And axle 30 can Z free lifting ground be supported along the vertical direction with respect to the drawing strickle guide 12 of the substantial middle that is arranged on basic deckle board 11.

As shown in Figures 2 and 3, elevating mechanism 40 comprises: have along the vertical direction (vertical direction) Z along the rotating shaft 41a that stretches, be fixed on the stepper motor 41 on the basic deckle board 11; Directly be connected with rotating shaft 41a and have a rotating cam 42 that Z along the vertical direction produces the cam surface 42a of cam effect; Can be subjected to frame support bracket 33 supportings of axle 30 and the slave unit 43 that engages with rotating cam 42 (cam surface 42a) with rotating freely; And between the wide diameter portion 31 of axle 30 and supporting deckle board 15, be configured with compressive state, all the time to axle 30 helical spring 44 etc. of the application of force down.

That is, when stepper motor 41 rotation, rotating cam 42 rotations and along the vertical direction Z slave unit 43 is produced the cam effects, thereby axle 30 overcomes the application of force of helical spring 44 and lifting takes place.

At this, as elevating mechanism, owing to produce the rotating cam 42 of cam effect at above-below direction Z being rotated round Z along the vertical direction along the axis of stretching, be connected with axle 30 and with slave unit 43 that rotating cam 42 engages on adopted straight line portion (being used to prevent to cause the structure of rotating cam 42 actions) because of the deadweight of axle 30, even if situations such as power failure take place, can rotating cam 42 be rotated because of deadweight of axle 30 etc. yet, can prevent that axle 30 from descending voluntarily and making inhales pad 20 and collides with workpiece W, and, the simplifying of constructing and intensification can be realized, and equipment miniaturization can be made.In addition, owing to the workpiece in keeping is not applied unnecessary pressure, thereby can safeguard the quality of workpiece.

As shown in Figures 2 and 3, the two pairs of clamping limbs 50 by on the directions X in horizontal plane mutually near and open from clamping limb and the Y direction in horizontal plane on mutually near and open from clamping limb (not shown) constitute, comprise respectively: the holding piece 51 that engage with workpiece W, can freely reciprocatingly be carried on the directed section 52 of supporting on the deckle board 15, be projected into the pins 53 that engage with cam path 65a following plectane cam 65 52 tops, directed section etc.

And, the two pairs of clamping limbs 50 respectively in the horizontal direction near and workpiece W is carried out clamping, and open in the horizontal direction respectively from and break away from (discharging workpiece W) with workpiece W.In addition, the center of the center of the moving range of two pairs of clamping limbs 50 and suction pad 20 is configured to consistent with the center HC of suction nozzle (device), and this suction head apparatus is to position with the relative assigned position of this center HC (for example processing position of handling part).

Thereby, when 50 couples of workpiece W of two pairs of clamping limbs carry out clamping, on this suction head apparatus, promptly workpiece W is located.If 50 couples of workpiece W that adsorbed under the state that departs from suction pad 20 center HC of two pairs of clamping limbs carry out clamping, workpiece W is moved in the horizontal direction and depart from suitable amount, thereby be under the state that has carried out center-aligned (that is, align with the center HC of suction nozzle to make inhale pad 20 strains take place), to carry out clamping for the center WC that makes workpiece W.

As mentioned above, the two couples of clamping limb 50 relative workpiece W are approaching from horizontal direction (directions X and Y direction), when workpiece W is carried out clamping it is positioned, and, break away from workpiece W away from workpiece W with horizontal direction (directions X and Y direction), thereby, the position (clip position) of the above-below direction Z that clamping limb 50 engages with workpiece W can be set accurately, thereby the stable holding action of indifference can be obtained.

As shown in Figures 2 and 3, driving mechanism 60 comprises: have along the vertical direction be fixed on the stepper motor 61 basic deckle board 11 on of (vertical direction) Z along the rotating shaft 61a that stretches; With the direct-connected driving pulley 62 of rotating shaft 61a; Can be subjected to the driven pulley 63 of bearing bracket stand 14 supportings with rotating freely; The power that is wound on driving pulley 62 and the driven pulley 63 transmits with annular belt 64; And with driven pulley 63 be combined into can do with it one rotation, have the pin 53 of housing clip gripping arm 50 simultaneously and produce the plectane cam 65 etc. of the cam path 65a of cam effect.

Shown in Fig. 4 A to Fig. 4 B, plectane cam 65 has: with two pairs promptly 4 cam path 65a engage of 4 clamping limbs 50 pin 53 separately reach the flange 65b of the ring-type that combines with driven pulley 63 at its radially inner side.4 cam path 65a form bending so that one end 65a ' is positioned near the position of radial outside other end 65a " be positioned near on the position of radially inner side.Thereby rely on plectane cam 65 to be rotated at the angular range of regulation, the pin 53 of 4 clamping limbs 50 is at an end 65a ' and the other end 65a of cam path 65a " between move back and forth.

Promptly, starting by stepper motor 61, when plectane cam 65 being rotated by a certain direction by driving pulley 62, annular belt 64 and driven pulley 63, as shown in Figure 5,4 pins 53 are under the guiding of each cam path 65a, to the radial outside of horizontal direction, promptly on directions X and Y direction to mutually away from direction move, break away from from workpiece W.

On the other hand, reverse starting by stepper motor 61, when plectane cam 65 being rotated by other direction by driving pulley 62, annular belt 64 and driven pulley 63, as shown in Figure 6,4 pins 53 are under the guiding of each cam path 65a, to the radially inner side of horizontal direction, promptly on directions X and Y direction, move, in holding workpiece W, it is positioned to mutual approaching direction.

As mentioned above, because driving mechanism 60 has comprised the plectane cam 65 with cam path 65a, thereby can make two pairs of clamping limbs 50 reliably interlock and mutually near and open from, can carry out clamping and release to workpiece W accurately, and can be on Z direction up and down slimming, the miniaturization of implement device.Moreover, drive source as driving mechanism 60, can carry out numerically controlled motor by using stepper motor 61 grades, can at random be rotated driving and clamping limb 50 is stopped on the optional position, can carry out to carry out with the suitableeest separately position the different various workpiece of size the control of clamping and maintenance plectane cam 65.

As shown in Figures 1 and 2, adjusting machine 70 as the pressure that attracts generating mechanism is configured in than the connecting portion 32 of axle 30 more on the position of upstream, by through the inner passage of axle 30 and with inhale pad 20 air ducts that are communicated with, suck air and ejection air and even air gas in addition.

As shown in Figure 1, control module 80 is mainly controlled the control of integral body, comprising: the control loop 81 of the state of device being judged and sent various control signals according to the signal that obtains from various sensors (not shown); The command signal of sending according to the control loop 81 and stepper motor 41 of driving mechanism 40 is driven the driving loop 82 of control; The command signal of sending according to the control loop 81 and stepper motor 61 of driving mechanism 60 is driven the driving loop 83 of control; And the command signal of sending according to control loop 81 and pressure is adjusted the driving loop 84 etc. that machine 70 drives control.

And this control module 80 is configured to adjust machine 70 to pressure and drives control, adsorbs once more subsequently so that workpiece W will inhale temporary transient the releasing also of the absorption of pad 20 after being held arm 50 clampings.

Therefore, even workpiece W is inhaled pad 20 absorption and be held arm 50 clampings under this state at the center position that has departed from script, because workpiece W is temporarily inhaled pad 20 and is discharged, therefore inhale the strain of pad 20 and recovered and make to be offset to eliminate, workpiece W is again adsorbed with the state that is positioned on the assigned position.Thus, workpiece W under the state of hi-Fix by movement reliably to predetermined process portion.

In addition, as making the temporary transient driving control of removing of the suction-operated of inhaling pad 20, for example can adopt following method, promptly stop back (absorption disarm state) in the attraction action that makes pressure adjust machine 70, driving elevating mechanism 40 makes the i.e. suction pad 20 temporary transient risings of axle 30 and is pulled away from from workpiece W, and adsorbs once more after suction pad 20 is close to workpiece W making it once more to descend.

According to this kind method, for the workpiece W by clamping limb 50 clampings, the absorption back is temporary transient rises and breaks away from from workpiece W reliably removing to inhale pad 20, thereby, the occasion of strain once took place inhaling pad 20, can make inhale pad 20 reliably elasticity return to shape originally.In addition, as the suction pad that is used for this occasion, also can adopt the formation that snake abdomen shape structure is not set.

In addition, as making temporary transient other driving control removed of the suction-operated of inhaling pad 20, for example can adopt following method, be that controlled pressure is adjusted machine 70 and workpiece W is blown, the state of being close to of inhaling pad 20 and workpiece W is removed, implement to attract action subsequently once more, pressure is adjusted machine 70 control the absorption that makes workpiece W be subjected to inhaling pad 20.

According to this kind method, for workpiece W by clamping limb 50 clampings, rely on to blow (gas beyond injection air and even the air) and make workpiece W and inhale that the formation gap just can make adsorbed state temporarily remove between the pad 20, thereby, can be in the vertical motion that does not need to inhale pad 20 (axle 30), be make under the situation of time under reach inhale pad 20 reliably elasticity return to shape originally, thereby can position workpiece W accurately.

Then, according to Fig. 7 A to Fig. 9 C the action of this suction head apparatus is described.This action drives control aptly by control module 80.

At first, shown in Fig. 7 A, when this suction head apparatus moved to the extracting position of workpiece W, the center (the center HC of suction nozzle) of inhaling pad 20 was positioned on the position that the center WC with respect to workpiece W takes place necessarily to depart from.

Then, shown in Fig. 7 B, suction head apparatus is whole to descend, and inhales pad 20 and workpiece W butt.And pressure is adjusted machine 70 and is attracted action, inhales 20 couples of workpiece W of pad and adsorbs.Attitude when at this moment, banking stop 34 adsorbs workpiece W when restriction is inhaled pad 20 and too is close to limits.

Under this state, workpiece W is adsorbed with the state that its center WC departs from center (center of the suction nozzle) HC that inhales pad 20.

Then, shown in Fig. 7 C,, thereby rise to the height of regulation owing to suction head apparatus integral body moves to predetermined process portion.

Then, shown in Fig. 8 A, paired clamping limb 50 mutually near and workpiece W is carried out clamping, position so that the center WC of workpiece W is consistent with the center HC of suction nozzle.Under the effect of the chucking power that causes by this aligned in position, inhale pad 20 strain takes place in the horizontal direction.

Then, after the attraction action that makes pressure adjust machine 70 stops and having removed absorption, shown in Fig. 8 B, under the driving of elevating mechanism 40, make to inhale and fill up the height that 20 (and axles 30) rise to regulation, will inhale pad 20 and be pulled away from from workpiece W fully.Thus, be held arm 50 clampings and be located under the state of assigned position, inhale pad 20 elasticity and return to shape originally at workpiece W.In addition, at this moment, but also driving pressure is adjusted machine 70 so that workpiece W is blown.

Then, shown in Fig. 8 C, under the driving of elevating mechanism 40, make inhale that pad 20 (and axle 30) descends and with workpiece W butt, make pressure adjust machine 70 and attract action, thereby fill up 20 and once more workpiece W is adsorbed with inhaling.At this moment, the center of suction pad 20 is consistent with the center WC of workpiece W.

Then, shown in Fig. 9 A, paired clamping limb 50 mutually away from and break away from from workpiece W, remove clamp position.

Then, shown in Fig. 9 B, when workpiece W was directly over it should be by movement predetermined process portion extremely, suction head apparatus is whole to begin to descend facing to this handling part, and shown in Fig. 9 C, to handling part, finish by a series of shifting movement by movement for workpiece W.

Afterwards, get back to the original state shown in Fig. 7 A,, make a plurality of workpiece W movement to predetermined process portion by carrying out a series of action continuously.

At this,, thereby can save unnecessary action, time under reach when handling part because the action shown in Fig. 7 B～Fig. 9 A is to be carried out by the driving mechanism movement of board migration device in suction head apparatus integral body.

As mentioned above, after temporarily discharging, pad 20 adsorbed workpiece W adsorb once more inhaling owing to be controlled to, thereby, even workpiece W is subjected to inhaling pad 20 under the state that departs from the center HC that should be adsorbed at this place absorption, and depart under the state at this and to position by clamping limb 50 and make and inhale pad 20 and be in elastic deformation, the strain of inhaling pad 20 is eliminated, workpiece W is positioned on the assigned position.Thus, workpiece W be subjected to hi-Fix and reliably by movement to predetermined process portion.

Figure 10 and Figure 11 represent is another example of suction head apparatus of the present invention, except that the supporting deckle board of a part that constitutes framework 10 and clamping device change, substantially the same with above-mentioned example, thereby, to the identical symbol of identical formation mark and omit its explanation.

Promptly, in this suction head apparatus, as Figure 10 and shown in Figure 11, as clamping device, adopted around along general horizontal direction along the axis swing of stretching mutually near and open from two pairs of swing arms 50 ' and swing this two pairs of swing arms 50 ' and make it when axle 30 descends, to open from, approaching driving mechanism 60 ' when rising.

Supporting deckle board 15 ' is configured to basic deckle board 11 belows and combines, to axle 30 about the Z direction on the simple structure that leads and the part of swing mechanism is kept.

As Figure 10 and shown in Figure 11, the two pairs of swing arms 50 ' by can around be supported along the swing fulcrum 15a ' that stretches along the Y direction in the horizontal plane with freely swinging, mutually near and open from swing arm 50 ' and by can around be supported along the swing fulcrum (not shown) of stretching along the directions X in the horizontal plane with freely swinging, mutually near and open from swing arm (omitting diagram), comprise respectively: the holding piece 51 ' that engage with workpiece W, be accommodated in the interior spring base 52 ' of supporting deckle board 15 ', limiting component 53 ' that the hunting range of swing arm 50 ' is limited etc.

As Figure 10 and shown in Figure 11, driving mechanism 60 ' comprising: the flange 61 ' that combines with axle 30; Be located at 4 plungers 62 ' on the flange 61 ', that can engage respectively with the spring base 52 ' of each swing arm 50 ' (following); And be configured in spring base 52 ' and 4 helical springs 63 ' of supporting between the deckle board 15 ' etc. with compressive state.

And, as shown in figure 10, the two pairs of swing arms 50 ' be subjected to helical spring 63 ' to its generation, make it respectively with separately fulcrum 15a ' for the center rotates up mutually away from the rotation application of force, when axle 30 descends and when making plunger 62 ' leave spring base 52 ', mutually away from and break away from (discharging workpiece W) with workpiece W.

On the other hand, as shown in figure 11, when plunger 62 ' upwards being promoted to spring base 52 ', rely on this action that upwards pushes away when axle 30 risings, the two pairs of swing arms 50 ' are that the center is rotated down with separately fulcrum 15a ' respectively, thus mutually near and workpiece W is carried out clamping.

In addition, the two pairs of swing arms 50 ' are configured to the symmetry axis of its wobbling action and inhale the center of pad 20 consistent with the center HC of suction nozzle (device), and this suction head apparatus is to position with respect to assigned position (for example processing position of handling part) with this center HC.

Thereby, when two pairs of swing arms 50 ' carry out clamping to workpiece W, just on this suction head apparatus, workpiece W is located.If two pairs of swing arms 50 ' carry out clamping to the workpiece W that is adsorbed under the state that departs from suction pad 20 center WC, workpiece W is moved in the horizontal direction and depart from suitable amount, thereby under the state that workpiece W has been carried out center-aligned (that is, align with the center HC of suction nozzle to make inhale pad 20 strains take place), it is carried out clamping for the center WC that makes workpiece W.

The action of this suction head apparatus, identical in fact except that above-mentioned clamping limb 50 is altered to the swing arm 50 ' with the action shown in Fig. 7 A to Fig. 9 C, can to workpiece W carry out hi-Fix and with it reliably movement to predetermined process portion.

In addition, in this suction head apparatus, drive owing to utilize with the driving mechanism 60 ' of the mobile interlock of axle 30 two pairs of swing arms 50 ' to holding workpiece W, therefore can reduce component parts number, realize the simplifying of structure and the miniaturization of installing.

In above-mentioned example, as clamping device, the situation that has adopted two pairs of clamping limbs 50, two pairs of swing arms 50 ' has been carried out illustration, yet, as long as can keep and locate to workpiece W, also can adopt a pair of clamping limb 50 or a pair of swing arm 50 ', perhaps also can adopt uniformly-spaced 3 clamping limbs or the swing arm of configuration.

In above-mentioned example, as the driving mechanism that clamping limb 50 is driven, the situation that has adopted the plectane cam 65 that is driven by stepper motor 61 revolutions has been carried out illustration, but be not limited thereto, as long as can carry out horizontal drive to clamping limb 50, also can adopt other mechanisms.

In above-mentioned example, as the driving mechanism that makes swing arm 50 ' swing, the situation that has adopted the plunger 62 ' that moves with axle 30 one, helical spring 63 ' etc. has been carried out illustration, but be not limited thereto, as long as can and make swing arm 50 ' swing with the lifting action interlock of axle 30, also can adopt other mechanisms.

In above-mentioned example, as the drive source of driving

mechanism

40,60, adopted

stepper motor

41,61, but be not limited thereto, also can adopt other motors or actuator.

In above-mentioned example, illustrated situation is, utilize clamping device and attract generating mechanism workpiece W that carries out and the aligned in position of inhaling between filling up when board migration device carries out movement to this suction head apparatus, to carry out, but be not limited thereto, also can carry out above-mentioned aligned in position in that suction head apparatus is stopped under the state of assigned position.

As mentioned above, according to suction head apparatus of the present invention, the miniaturization that the simplifying that can realize constructing, the intensification of each mechanism, device the are whole and save space of area is set, shorten the workpiece required time of movement, simultaneously, can with workpiece W accurately movement to predetermined process portion, and, also can improve the prouctiveness of miscellaneous electronic device etc. corresponding to diversified workpiece W.

Industrial utilizability

As mentioned above, suction head apparatus of the present invention, for every needs will be littler parts etc. Industry from the assigned position movement to other position, the semiconductor manufacturing is self-evident, In the manufacturing streamline of other the parts such as electronic equipment or other machinery or electronic device Connection to make in the streamline also be useful.

Claims

1. a suction head apparatus is characterized in that, comprising:

The suction pad that workpiece is adsorbed;

Make described suction pad produce the attraction generating mechanism of attraction;

With described suction pad remain in the lower end and move up and down the axle;

Make the elevating mechanism of described axle lifting;

From the clamping device of general horizontal direction to being carried out clamping by the workpiece of described suction pad absorption; And

Control device, this control device drives control to described attraction generating mechanism, removes the absorption of described suction pad and makes described suction pad absorption subsequently once more so that described attraction generating mechanism is temporary transient after described clamping device carries out clamping to workpiece.

2. suction head apparatus as claimed in claim 1 is characterized in that, described control device drives described elevating mechanism and makes that described axle is temporary transient to rise after the attraction action that makes described attraction generating mechanism for the absorption of removing described suction pad stops.

3. suction head apparatus as claimed in claim 1 is characterized in that, described control device drives control for the absorption of removing described suction pad to described attraction generating mechanism, so that workpiece is blown.

4. suction head apparatus as claimed in claim 1, it is characterized in that described elevating mechanism comprises: round on above-below direction, producing the rotating cam of cam effect and the slave unit that is connected and engages with described axle along the axis rotation of stretching along the vertical direction with described rotating cam.

5. suction head apparatus as claimed in claim 1 is characterized in that, described clamping device comprises: move back and forth in the horizontal direction and mutually near and open from least one pair of clamping limb and the driving mechanism that described at least one pair of clamping limb is carried out horizontal drive.

6. suction head apparatus as claimed in claim 5 is characterized in that described driving mechanism comprises the plectane cam, and this plectane cam rotates in horizontal plane, and have to described at least one pair of clamping limb produce make its mutually near and open from the cam path of cam effect.

7. suction head apparatus as claimed in claim 1 is characterized in that, described clamping device comprises: around along general horizontal direction along the axis stretched swing and mutually near and open from least one pair of swing arm; And make described at least one pair of swing arm swing and it is opened when described axle descends from, approaching driving mechanism when rising.