CN2482099Y

CN2482099Y - Measuring head of integrated circuit test sorter

Info

Publication number: CN2482099Y
Application number: CN 01218618
Authority: CN
Inventors: 谢来福; 谢宜璋; 黄清荣; 廖沐盛
Original assignee: Silicon Integrated Systems Corp
Current assignee: Silicon Integrated Systems Corp
Priority date: 2001-04-09
Filing date: 2001-04-09
Publication date: 2002-03-13
Anticipated expiration: 2011-04-09

Abstract

The utility model relates to a testing head of an integrated circuit testing classification machine, and the testing head comprises a positioning element and an air pipe, wherein the positioning element can be assembled in the integrated circuit testing classification machine and is provided with a penetrative containing space, the air pipe is arranged in the containing space, one end of the air pipe can be connected with a vacuum air pump, and the other end is close to an integrated circuit waiting for testing, therefore, when the vacuum air pump operates, the air pipe absorbs the integrated circuit to directly contact with the pipe wall of the air pipe, and when the vacuum air pump does not operate, the air pipe releases the integrated circuit, thereby the effects that the electrostatic effect generated by the absorbing and releasing movement is effectively avoided and the vacuum air leakage is prevented are achieved.

Description

The measuring head of integrated circuit testing classifier

The utility model relates to a kind of measuring head, particularly relates to the measuring head that a kind of integrated circuit testing classifier uses.

General when the integrated circuit (IC) of test product, be to utilize an integrated circuit testing classifier to move with the integrated circuit to be measured of classifying.And this kind integrated circuit testing classifier has a measuring head 1, is used for the integrated circuit 2 of contact measured, to move this integrated circuit 2.As Fig. 1, be the exploded view of measuring head in the past.This measuring head 1 comprises a connecting pipe 11, a spring 12, a tracheae 13, a base 14 and a protective cover 15.Connecting pipe 11 has one to be run through a passage 11 1 at two ends and is positioned on the end of connecting pipe 11 and a location division 112 of locating to be arranged with around this passage 11 1, and the internal diameter of location division 112 is to be communicated with greater than the internal diameter of passage 111 and with this passage 111.This tracheae 13 is the passages 111 that pass connecting pipe 11, the one end is provided with the suction nozzle 131 that rubber is made, integrated circuit in order to contact measured, and outside near other end position a sheathed O type ring 132, in order to fill up the gap of 111 in tracheae 13 and passage, and on tracheae 13 outside wall surface between O type ring 132 and the suction nozzle 131, being convexly equipped with a flange 133, this flange 133 is received in the location division 112 of connecting pipe 11.Spring 12 is to be socketed on outside this tracheae 13, and on the location division 112 of connecting pipe 11 and ring wall that passage 111 joins, more be arranged with a portion that puts 113 that cooperates spring 12, in order to put spring 12, so an end contact of spring 12 puts the wall of portion 113, and the flange 133 of other end conflict tracheae 13 moves down in order to compress this tracheae 13.This base 14 also has passage 111 positions that should connecting pipe 11 and size and is provided with and runs through the passage 141 at two ends.And as Fig. 2; this base 14 is to be locked on this connecting pipe 11 with screw 16 with protective cover 15; after the assembling; the flange 133 of tracheae 13 is folded between connecting pipe 11 and the base 14; to locate this tracheae 13; and tracheae 13 is arranged in the passage 111,141 of connecting pipe 11 and base 14, and the suction nozzle 131 of an end of tracheae 13 passes this base 14, and the other end passes this connecting pipe 11 and can be communicated with a vacuum air pump.

Utilize above-mentioned member and assembled relation, please in the lump with reference to Fig. 2, draw the air in the tracheae 13 when vacuum air pump action, allow gas be inhaled into according to the direction of arrow 17, and related absorption integrated circuit 2, allow integrated circuit 2 be resisted against on the suction nozzle 131, then removable this integrated circuit 2, this vacuum air pump stops action being tested to discharge these integrated circuit 2 to one precalculated positions, and after test, recycling vacuum air pump is controlled the action that the suction of 131 pairs of integrated circuit 2 of suction nozzle is put.But because the suction nozzle 131 of rubber system is put in the process of integrated circuit 2 in suction, static can be produced and attached on the integrated circuit 2 because of friction, so when if the too high or integrated circuit 2 anti-electrostatic potentials of this electrostatic potential are too low, the situation that promptly causes integrated circuit to punch or destroy.

A purpose of the present utility model is to provide a kind of measuring head that reaches the integrated circuit testing classifier of the effect of avoiding electrostatic effect.

Another purpose of the present utility model is to provide a kind of reaching to assemble easily and the measuring head of the integrated circuit testing classifier of the effect that reduces cost.

A purpose more of the present utility model is to provide a kind of measuring head that reaches the integrated circuit testing classifier of the effect that prevents vacuum gas leakage.

So for reaching above-mentioned purpose, the measuring head of integrated circuit testing classifier of the present utility model comprises a certain hyte part and a tracheae.This positioning component is can be assembled in the integrated circuit testing classifier and have a reception space that runs through.This tracheae is to be arranged in the reception space of this positioning component, and an end of this tracheae can connect a vacuum air pump, and the other end can directly contact an integrated circuit to be measured.Whereby, when the action of this vacuum air pump, this tracheae is drawn this integrated circuit contacting with the tube wall of this tracheae, and when this vacuum air pump was failure to actuate, this tracheae discharged this integrated circuit.

Below by Cui embodiment the measuring head of integrated circuit testing classifier of the present utility model is elaborated, in the accompanying drawing:

Fig. 1 is the view sub-anatomy of measuring head in the past.

Fig. 2 is the synoptic diagram of the combination of measuring head in the past and an integrated circuit among Fig. 1.

Fig. 3 is the view sub-anatomy of the utility model than Cui embodiment.

Fig. 4 is that the utility model is than the combination of Cui embodiment and the synoptic diagram of an integrated circuit.

Please refer to shown in Figure 3ly, is this practical preferred embodiment, and it comprises certain hyte part 3, a tracheae 4, a leakproof compression ring 5 and a protective cover 6.

The positioning component 3 of present embodiment is made of a connecting pipe 31, a flexible member 32 and a base 33.

This connecting pipe 31 is can be assembled in this integrated circuit testing classifier.This connecting pipe 31 has one and cooperates with the caliber of this tracheae 4 and the first passage 311 and that connects two ends is positioned at an end of this connecting pipe 31 and by the fastening part of locating to be arranged with around this first passage 311 312.This fastening part 312 is to be communicated with this first passage 311, and this fastening part 312 comprises a location division 3121 and that is positioned at an end of connecting pipe 31 and puts portion 3122.And put portion 3122 be by location division 3121 and first passage 311 joints set to the concave form and be connected with this first passage 311.In addition, the internal diameter that puts portion 3122 is less than the internal diameter of location division 3121 but greater than the internal diameter of first passage 311, causes the portion of putting 3122 forming terrace with location division 3121 and first passage 311 joints respectively.

In the present embodiment, this flexible member 32 is a spring, and the external diameter of this spring 32 is to cooperate with this internal diameter that puts portion 3122, in the portion that puts 3122 that is assembled in this connecting pipe 31.

This base 33 is to be connected this connecting pipe 31, and have a position second channel 331 corresponding with the first passage 311 of connecting pipe 31 with size, cause assembling back second channel 331 to be connected with first passage 311, to form one for the reception space that puts tracheae 4, and in the present embodiment, base 33 is to be fixed on this connecting pipe 31 with four screw 34 screw locks.

Moreover the external diameter of this tracheae 4 is the internal diameters less than these passages 311,331 of positioning component 3, and being through in these passages 311,331, and the position of the fastening part 312 of the corresponding connecting pipe 31 of the outside wall surface of this tracheae 4 is provided with a flange 41.In the present embodiment, the size of this flange 41 is greater than the portion that puts 3122 of this fastening part 312 and less than this location division 3121, after causing assembling, this flange 41 can be arranged in location division 3121 and be subjected to the contact of this flexible member 32 and conflict base 33, to be positioned in this positioning component 3.

In addition, this leakproof compression ring 5 is the belows that are socketed on tracheae 4 outside wall surface and are positioned at this flange 41, and the internal diameter of the leakproof compression ring 5 in the present embodiment is the external diameters that cooperate tracheae 4, and its external diameter is the internal diameter that cooperates this second channel 331, after causing assembling, this leakproof compression ring 5 is the location divisions 3121 that are arranged in this connecting pipe 31, and closely contacted with base 33 by flange 41 contacts of tracheae 4, to intercept the circulation of air of 331 of this fastening part 312 and this second channels.

In the present embodiment, this protective cover 6 is to be fixed on this connecting pipe 31 with four screws, 34 screw locks, and the perisporium of this protective cover 6 is to surround this base 33.

Please in the lump with reference to Fig. 4; with regard to the above member and assembled relation; during assembling; at first respectively flexible member 32 and leakproof compression ring 5 are socketed in the up and down of the flange 41 of tracheae 4 respectively; then integral body is inserted in the connecting pipe 31; allow an end of tracheae 4 by first passage 311 and protrude this connecting pipe 31, and the other end of relief tracheae 4 is by behind the second channel 331 of base 33, respectively with base 33 and protective cover 6 corresponding screw locks on connecting pipe 31 and finish assembling.Whereby, the flange 41 and the leakproof compression ring 5 of tracheae 4 is arranged in the location division 3121 of connecting pipe 31, and flange 41 is subjected to compressing of flexible member 32 and suppresses leakproof compression ring 5, allow leakproof compression ring 5 and base 33 and flange 41 closely contact and be close to the ring wall of the second channel 331 of base 33, thereby intercept the circulation of air between fastening part 312 and the second channel 331.

Please in the lump with reference to Fig. 4, the measuring head of present embodiment is assembled in the integrated circuit testing classifier, and wherein tracheae 4 end that is exposed to connecting pipe 31 is to be connected in a vacuum air pump (figure does not show), and the below of measuring head (promptly being positioned at the below of the other end of tracheae 4) puts an integrated circuit 7 to be measured, when vacuum air pump turns round, the other end of air by tracheae 4 sucked, therefore air flows to the suction of integrated circuit 7 generations along key head 8 directions, allow integrated circuit 7 approach to contact tracheae 4, draw the action of integrated circuit 7 to reach measuring head, so that allow integrated circuit 7 test.After the test, utilize shutting down of vacuum air pump, make the suction of integrated circuit 7 is removed and release integrated circuit 7.Hence one can see that, suction at the measuring head of this case is let slip in the journey, integrated circuit 7 is tube walls of the tracheae 4 of direct engaged test head, different from the past is to contact with suction nozzle, thereby can avoid in the past because of producing electrostatic effect with the contact friction of rubber system suction nozzle, put the effect that static that action produced is punched or destroyed to reach the suction of avoiding the tested head of integrated circuit 7, and then have the effect that improves the integrated circuit yields.And the utility model was compared to saving an assembly (promptly referring to suction nozzle) in the past, can reduce relatively and assembled also easier advantage so have cost.In addition, because leakproof compression ring 5 can effectively intercept the circulation of air between the second channel 331 of the fastening part 312 of connecting pipe 31 and base 33, thereby vacuum pneumatic is when tracheae 4 is inhaled vacuum, the air that related absorption second channel 331 of meeting and tracheae are 4, and because the obstruct of leakproof compression ring 5, allow 4 of second channel 331 and tracheaes can keep vacuum state, therefore have the advantage of the vacuum of preventing gas leakage.

Claims

1. the measuring head of an integrated circuit testing classifier comprises a certain hyte part and a tracheae, it is characterized in that:

This positioning component is can be assembled in the integrated circuit testing classifier and have a reception space that runs through this positioning component;

This tracheae is to be arranged in the reception space of this positioning component, and an end of this tracheae can connect a vacuum air pump, and the other end can directly contact an integrated circuit to be measured.

2. the measuring head of integrated circuit testing classifier as claimed in claim 1 is characterized in that:

This positioning component is to comprise a connecting pipe and a base, this connecting pipe be can be assembled in this integrated circuit testing classifier and have a first passage and that cooperates with this tracheae be positioned at this connecting pipe an end and with the fastening part of this channel connection, reaching this base is to be connected this connecting pipe and to have the second channel that is connected with this first passage, to form this reception space.

3. the measuring head of integrated circuit testing classifier as claimed in claim 2 is characterized in that:

The outside wall surface of this tracheae is provided with a flange to the position of fastening part that should connecting pipe, and this flange is to be arranged in this fastening part and to be subjected to the contact of this base and to be positioned at this positioning component.

4. the measuring head of integrated circuit testing classifier as claimed in claim 3 is characterized in that:

This positioning component more comprises a flexible member between the flange of the fastening part of this connecting pipe and this tracheae, in order to the flange of this tracheae of contact near this base.

5. as the measuring head of arbitrary described integrated circuit testing classifier among the claim 2-4, it is characterized in that:

This test comprises that one is socketed on the leakproof compression ring of this tracheae outside wall surface first watch, and this leakproof compression ring is the fastening part that is arranged in this connecting pipe, in order to intercept the circulation of air between this fastening part and this second channel.

6. as the measuring head of arbitrary described integrated circuit testing classifier among the claim 2-4, it is characterized in that:

This test comprises a protective cover first watch, is to be connected this connecting pipe and to surround this base.

7. the measuring head of integrated circuit testing classifier as claimed in claim 4 is characterized in that:

This flexible member is a spring.