CN101276776B - 卡盘工作台机构 - Google Patents

卡盘工作台机构 Download PDF

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Publication number
CN101276776B
CN101276776B CN 200810086968 CN200810086968A CN101276776B CN 101276776 B CN101276776 B CN 101276776B CN 200810086968 CN200810086968 CN 200810086968 CN 200810086968 A CN200810086968 A CN 200810086968A CN 101276776 B CN101276776 B CN 101276776B
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CN101276776A (zh
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关家一马
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Disco Corp
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Disco Corp
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  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN 200810086968 2007-03-30 2008-03-28 卡盘工作台机构 Active CN101276776B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007091263A JP2008246628A (ja) 2007-03-30 2007-03-30 チャックテーブル機構
JP2007-091263 2007-03-30

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CN101276776A CN101276776A (zh) 2008-10-01
CN101276776B true CN101276776B (zh) 2011-06-01

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CN 200810086968 Active CN101276776B (zh) 2007-03-30 2008-03-28 卡盘工作台机构

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CN (1) CN101276776B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5335448B2 (ja) * 2009-01-19 2013-11-06 株式会社ディスコ 加工装置
CN102269310A (zh) * 2010-06-03 2011-12-07 北京中电科电子装备有限公司 旋转接头
JP6018459B2 (ja) * 2012-08-13 2016-11-02 株式会社ディスコ 研削装置
JP6885732B2 (ja) * 2017-01-17 2021-06-16 株式会社ディスコ 研削装置
JP7235587B2 (ja) * 2019-05-14 2023-03-08 株式会社ディスコ 荷重センサの電圧調整方法
CN118024094B (zh) * 2024-04-11 2024-06-18 成都工业职业技术学院 一种摩擦片用打磨装置及其预警方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1498415A (zh) * 2000-10-13 2004-05-19 ��ķ�о����޹�˾ 红外线终点检测系统
CN1526163A (zh) * 2001-11-30 2004-09-01 ���������ƴ���ʽ���� 探测器装置和探测器测试方法
US6927587B2 (en) * 2002-08-23 2005-08-09 Tokyo Electron Limited Probe apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07259855A (ja) * 1994-03-17 1995-10-09 Hitachi Ltd スラストバランス室付ガス軸受タービン
AT404192B (de) * 1996-05-02 1998-09-25 Anton Paar Gmbh Rotationsviskosimeter
JPH1044017A (ja) * 1996-08-01 1998-02-17 Shibayama Kikai Kk 平面研削装置
US6083082A (en) * 1999-08-30 2000-07-04 Lam Research Corporation Spindle assembly for force controlled polishing
JP2001138219A (ja) * 1999-11-19 2001-05-22 Disco Abrasive Syst Ltd 研磨装置
JP4372603B2 (ja) * 2004-04-09 2009-11-25 三菱原子燃料株式会社 棒状体の曲がり測定方法及び測定装置
JP4639644B2 (ja) * 2004-05-26 2011-02-23 三菱電機株式会社 退避機能を備えた加工装置および退避方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1498415A (zh) * 2000-10-13 2004-05-19 ��ķ�о����޹�˾ 红外线终点检测系统
CN1526163A (zh) * 2001-11-30 2004-09-01 ���������ƴ���ʽ���� 探测器装置和探测器测试方法
US6927587B2 (en) * 2002-08-23 2005-08-09 Tokyo Electron Limited Probe apparatus

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JP2008246628A (ja) 2008-10-16
CN101276776A (zh) 2008-10-01

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