CN101276724A - 透射电镜微栅及其制备方法 - Google Patents
透射电镜微栅及其制备方法 Download PDFInfo
- Publication number
- CN101276724A CN101276724A CNA2007100737681A CN200710073768A CN101276724A CN 101276724 A CN101276724 A CN 101276724A CN A2007100737681 A CNA2007100737681 A CN A2007100737681A CN 200710073768 A CN200710073768 A CN 200710073768A CN 101276724 A CN101276724 A CN 101276724A
- Authority
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- Prior art keywords
- carbon nano
- tube
- micro grid
- tem micro
- film
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Links
- 238000000034 method Methods 0.000 title claims abstract description 13
- 230000005540 biological transmission Effects 0.000 title abstract description 16
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 84
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 41
- 239000002184 metal Substances 0.000 claims abstract description 27
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 239000003960 organic solvent Substances 0.000 claims abstract description 26
- 239000010409 thin film Substances 0.000 claims abstract description 14
- 239000002238 carbon nanotube film Substances 0.000 claims description 75
- 239000002041 carbon nanotube Substances 0.000 claims description 44
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 44
- 238000002360 preparation method Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 17
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical group CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 8
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 8
- 239000003054 catalyst Substances 0.000 claims description 8
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical class CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 238000007654 immersion Methods 0.000 claims description 3
- 230000008595 infiltration Effects 0.000 claims description 3
- 238000001764 infiltration Methods 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000002105 nanoparticle Substances 0.000 description 9
- 239000012982 microporous membrane Substances 0.000 description 8
- 239000002245 particle Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 238000005411 Van der Waals force Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000012512 characterization method Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002389 environmental scanning electron microscopy Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002173 high-resolution transmission electron microscopy Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 229910021392 nanocarbon Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (11)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007100737681A CN101276724B (zh) | 2007-03-30 | 2007-03-30 | 透射电镜微栅及其制备方法 |
US12/005,741 US8288723B2 (en) | 2007-03-30 | 2007-12-28 | Transmission electron microscope micro-grid and method for making the same |
US12/750,210 US8294098B2 (en) | 2007-03-30 | 2010-03-30 | Transmission electron microscope micro-grid |
US12/868,938 US20100319833A1 (en) | 2007-03-30 | 2010-08-26 | Method for making transmission electron microscope micro-grid |
US13/609,832 US8436303B2 (en) | 2007-03-30 | 2012-09-11 | Transmission electron microscope micro-grid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007100737681A CN101276724B (zh) | 2007-03-30 | 2007-03-30 | 透射电镜微栅及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101276724A true CN101276724A (zh) | 2008-10-01 |
CN101276724B CN101276724B (zh) | 2011-06-22 |
Family
ID=39792591
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007100737681A Active CN101276724B (zh) | 2007-03-30 | 2007-03-30 | 透射电镜微栅及其制备方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US8288723B2 (zh) |
CN (1) | CN101276724B (zh) |
Cited By (31)
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CN101866804A (zh) * | 2010-04-14 | 2010-10-20 | 北京富纳特创新科技有限公司 | 透射电镜微栅 |
CN101866803A (zh) * | 2010-04-14 | 2010-10-20 | 北京富纳特创新科技有限公司 | 透射电镜微栅 |
CN101887829A (zh) * | 2010-04-14 | 2010-11-17 | 北京富纳特创新科技有限公司 | 透射电镜微栅的制备方法 |
CN101894720A (zh) * | 2010-04-14 | 2010-11-24 | 北京富纳特创新科技有限公司 | 透射电镜微栅的制备方法 |
CN102148124A (zh) * | 2010-02-08 | 2011-08-10 | 北京富纳特创新科技有限公司 | 透射电镜微栅 |
CN102194623A (zh) * | 2010-03-17 | 2011-09-21 | 清华大学 | 透射电镜微栅的制备方法 |
CN102194633A (zh) * | 2010-03-17 | 2011-09-21 | 清华大学 | 透射电镜微栅 |
CN102315058A (zh) * | 2010-07-07 | 2012-01-11 | 清华大学 | 透射电镜微栅及其制备方法 |
CN101988874B (zh) * | 2009-07-31 | 2012-01-25 | 清华大学 | 透射电镜试样制备方法 |
CN101964292B (zh) * | 2009-07-24 | 2012-03-28 | 清华大学 | 石墨烯片-碳纳米管膜复合结构及其制备方法 |
CN101964291B (zh) * | 2009-07-24 | 2012-03-28 | 清华大学 | 透射电镜微栅及其制备方法 |
US8207431B2 (en) | 2010-02-08 | 2012-06-26 | Beijing Funate Innovation Technology Co., Ltd. | Transmission electron microscope micro-grid and method for manufacturing the same |
US8253122B2 (en) | 2009-09-11 | 2012-08-28 | Tsinghua University | Infrared physiotherapeutic apparatus |
CN102661882A (zh) * | 2012-04-17 | 2012-09-12 | 刘遵峰 | 一种基于一维碳纳米材料的亲和性分离透射电镜支持膜 |
US8278604B2 (en) | 2009-08-14 | 2012-10-02 | Tsinghua University | Carbon nanotube heater-equipped electric oven |
US8294098B2 (en) | 2007-03-30 | 2012-10-23 | Tsinghua University | Transmission electron microscope micro-grid |
CN102005357B (zh) * | 2009-08-28 | 2012-12-19 | 清华大学 | 透射电镜微栅 |
US8357881B2 (en) | 2009-08-14 | 2013-01-22 | Tsinghua University | Carbon nanotube fabric and heater adopting the same |
US8551392B2 (en) | 2010-02-08 | 2013-10-08 | Beijing Funate Innovation Technology Co., Ltd. | Method for manufacturing transmission electron microscope micro-grid |
CN103357960A (zh) * | 2012-04-03 | 2013-10-23 | 清华大学 | 微栅切割装置 |
TWI417934B (zh) * | 2010-03-26 | 2013-12-01 | Hon Hai Prec Ind Co Ltd | 透射電鏡微柵的製備方法 |
US8650739B2 (en) | 2010-04-14 | 2014-02-18 | Beijing Funate Innovation Technology Co., Ltd. | Method for manufacturing transmission electron microscope micro-grid |
US8841588B2 (en) | 2009-03-27 | 2014-09-23 | Tsinghua University | Heater |
CN104176722A (zh) * | 2014-08-06 | 2014-12-03 | 北京航空航天大学 | 一种高取向高强度的阵列牵伸碳纳米管薄膜及其制备方法 |
CN105185674A (zh) * | 2014-06-17 | 2015-12-23 | 清华大学 | 透射电镜微栅的制备方法 |
CN105185679A (zh) * | 2014-06-17 | 2015-12-23 | 清华大学 | 透射电镜微栅 |
CN109142615A (zh) * | 2018-08-16 | 2019-01-04 | 中国科学院金属研究所 | 用于液相催化体系中多相催化剂相同位置微结构演变研究的装置和方法 |
CN110729162A (zh) * | 2019-09-17 | 2020-01-24 | 东南大学 | 一种用于透射电镜表征的高目数微栅载网及其制备方法 |
CN114689414A (zh) * | 2022-04-13 | 2022-07-01 | 浙江大学 | 一种具有特殊结构的透射电镜载网及其制备方法 |
CN115458379A (zh) * | 2021-06-08 | 2022-12-09 | 清华大学 | 碳纳米管器件及其使用方法 |
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US7818356B2 (en) | 2001-10-29 | 2010-10-19 | Intel Corporation | Bitstream buffer manipulation with a SIMD merge instruction |
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US8058627B2 (en) * | 2008-08-13 | 2011-11-15 | Wisys Technology Foundation | Addressable transmission electron microscope grid |
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CN101609771B (zh) * | 2008-06-20 | 2010-12-08 | 清华大学 | 透射电镜微栅的制备方法 |
CN101988874B (zh) * | 2009-07-31 | 2012-01-25 | 清华大学 | 透射电镜试样制备方法 |
CN101887829B (zh) * | 2010-04-14 | 2013-03-13 | 北京富纳特创新科技有限公司 | 透射电镜微栅的制备方法 |
CN101894720B (zh) * | 2010-04-14 | 2013-06-19 | 北京富纳特创新科技有限公司 | 透射电镜微栅的制备方法 |
CN101866805B (zh) * | 2010-04-14 | 2012-03-14 | 北京富纳特创新科技有限公司 | 透射电镜微栅的制备方法 |
-
2007
- 2007-03-30 CN CN2007100737681A patent/CN101276724B/zh active Active
- 2007-12-28 US US12/005,741 patent/US8288723B2/en active Active
-
2010
- 2010-08-26 US US12/868,938 patent/US20100319833A1/en not_active Abandoned
Cited By (53)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8294098B2 (en) | 2007-03-30 | 2012-10-23 | Tsinghua University | Transmission electron microscope micro-grid |
US8841588B2 (en) | 2009-03-27 | 2014-09-23 | Tsinghua University | Heater |
CN101964291B (zh) * | 2009-07-24 | 2012-03-28 | 清华大学 | 透射电镜微栅及其制备方法 |
CN101964292B (zh) * | 2009-07-24 | 2012-03-28 | 清华大学 | 石墨烯片-碳纳米管膜复合结构及其制备方法 |
CN101988874B (zh) * | 2009-07-31 | 2012-01-25 | 清华大学 | 透射电镜试样制备方法 |
US8278604B2 (en) | 2009-08-14 | 2012-10-02 | Tsinghua University | Carbon nanotube heater-equipped electric oven |
US8357881B2 (en) | 2009-08-14 | 2013-01-22 | Tsinghua University | Carbon nanotube fabric and heater adopting the same |
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