CN101274313B - Coating device and coating method - Google Patents
Coating device and coating method Download PDFInfo
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- CN101274313B CN101274313B CN200810087497XA CN200810087497A CN101274313B CN 101274313 B CN101274313 B CN 101274313B CN 200810087497X A CN200810087497X A CN 200810087497XA CN 200810087497 A CN200810087497 A CN 200810087497A CN 101274313 B CN101274313 B CN 101274313B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Abstract
The invention provides a coating device which can avoid a large amount of production of inferior substrates and improve qualified rate of the coating substrates even if a guide rail guiding a support shelf to move is divided, and a coating method. The coating device includes: a basal table provided with a carrying table which holds the substrates, a coating unit which is configured to extend in a special direction on the basal table and divided into a plurality of tracks, and which relatively moves relative to the substrates along the tracks and coats the coating liquid to the substrates; the coating device includes the following structure of: equipping a detection mechanism for detecting variation of movements of the coating unit; in accordance with the result from the variation detecting mechanism, judging whether the coating state on the substrates is favorable; under the judging situation that the coating state is improper, ceasing the coating unit.
Description
Technical field
The present invention relates to a kind of apparatus for coating and coating process thereof that on substrate, is coated with coating fluid.
Background technology
In flat-panel monitors such as LCD and plasma display, use the substrate (being called coated substrates) that on glass substrate, is coated with liquid against corrosion.This coated substrates is to form through the apparatus for coating that is coated with liquid against corrosion equably.
Promptly; Apparatus for coating has and carries the objective table put glass substrate, the tube head of ejection liquid against corrosion and the door type bearing support that this tube head is bearing on the objective table and it is moved along objective table; Through making liquid against corrosion in the finedraw jet pipe ejection of tube head; Bearing support is moved along the direction of glass substrate, thereby can form the coated substrates of the liquid film against corrosion of specific thickness.And, behind such apparatus for coating formation coated substrates, coated film is checked detection has or not crawling even.Specifically, produced the coated substrates of regulation number through apparatus for coating after, in different with painting process other coated film inspection operations, carry out the inspection of coated substrates.
Constituting of the bearing support of such apparatus for coating carried the base station of putting objective table and is provided with the stone material system track that extends to a direction, and can move along this track.In recent years, be accompanied by the maximization of flat-panel monitor, must produce large-scale coated substrates, have to carry out the maximization of objective table and the long sized of track.But; When track is grown sized, follow the long sized of stone material system track, unavoidably can produce the problem of transporting of manufacturing limit and apparatus for coating; Therefore in following patent documentation 1, disclose through connecting the apparatus for coating that a plurality of track components constitute track.
Patent documentation 1 TOHKEMY 2006-95665 communique
Shown in above-mentioned patent documentation 1; Under through the situation that connects track component formation track; Bearing support is at the seam crossing through track; The bearing support change is influenced by it when being the discontinuity surface (partitioning portion) of track, has that crawling takes place is even and produce the problem of bad substrate easily.But, in case bad substrate is produced, in this case, detecting up to coated film detection operation during this section of bad substrate by subsequent handling, coating is carried out under similarity condition.That is, taking place under the even condition of crawling, owing to continue the coated substrates of production regulation number like this with maintaining the original state, so the problem that exists bad substrate to be produced in large quantities.
Summary of the invention
The present invention puts in view of the above problems and makes, even its objective is and provide a kind of under the divided situation of track of guiding bearing support walking, also can prevent to produce in large quantities bad substrate, and can improve the apparatus for coating of the qualification rate of coated substrates.
In order to solve above-mentioned problem; Apparatus for coating of the present invention has: be equipped with the base station of the objective table that keeps substrate, on above-mentioned base station with the state setting of extending and be separated into a plurality of tracks and relatively walk with respect to aforesaid substrate and to the coater unit of above-mentioned base plate coating coating fluid along above-mentioned track to specific direction; It is characterized in that; The change testing agency of the action change that detects above-mentioned coater unit is set, judges the coating state of the coating fluid on the substrate according to the testing result of this change testing agency.
According to above-mentioned apparatus for coating, because be provided with detection is coated with the coater unit of coating fluid on substrate the change testing agency of action change, so can judge whether to have produced bad coated substrates through the testing result of keeping watch on this change testing agency.That is, passed through at coater unit under the situation of coupling part of track, because the action of coater unit produces entanglement, so it is even to judge whether to have taken place crawling according to the entanglement that detects this action.Therefore; Even under the divided situation of track; Because can detect the even generation of crawling in the coating action; Compare so detect the even situation of crawling, can avoid producing in large quantities the problem of bad substrate, and improve qualification rate with such coated film inspection operation behind the coated substrates of having produced the regulation number, through other operation in the past.
As the concrete mode in the judgement of above-mentioned coating state; Above-mentioned apparatus for coating also further has control device; This control device can constitute: the testing result according to above-mentioned change testing agency judges whether the coating state on the substrate is good; Be judged as under the unsuitable situation of coating state, above-mentioned coater unit is stopped.
According to this structure, coater unit can make the action of coater unit stop automatically under the situation of the even action of the crawling of making the bad substrate of meeting generation.Therefore, can prevent to produce in large quantities bad substrate.
In addition; Concrete mode as above-mentioned change testing agency; Also can be configurations: above-mentioned change testing agency is the speed testing agency of the speed of travel that detects above-mentioned coater unit, according to judging by the variation of the speed of travel of this detected coater unit of speed testing agency whether the coating state is good.
According to this structure, through above-mentioned speed testing agency, the speed of travel when detecting the partitioning portion of coater unit through track variation, can detect the even generation of crawling.Therefore, need not be provided for detecting the even complicated apparatus of crawling, can use the existing device on the existing apparatus for coating to detect the even generation of crawling.
In addition; Other concrete mode as above-mentioned change testing agency; Also can use configurations: in above-mentioned coater unit, have through make coater unit to the raceway surface air supply from bearing portion that track floats; In this air fed pipeline of bearing portion, the pressure detecting mechanism of the air pressure variations in the signal piping is set, above-mentioned change testing agency comprises this pressure detecting mechanism; Through this pressure detecting mechanism, change according to the pressure of detected coater unit and to judge whether the coating state is good.
According to this structure, the variation of the air pressure in the above-mentioned pipeline when having passed through the partitioning portion of track through detected coater unit by above-mentioned pressure detecting mechanism can detect the even generation of crawling.Therefore, need not be provided for detecting the even complicated apparatus of crawling, just can detect the even generation of crawling.
In addition; Other a kind of other concrete mode as above-mentioned change testing agency; Also can use configurations: in above-mentioned coater unit, have through make coater unit to the raceway surface air supply from bearing portion that track floats; In this air fed pipeline of bearing portion, the flow quantity detection mechanism that air mass flow changes in the signal piping is set, above-mentioned change testing agency comprises this flow quantity detection mechanism; Through this flow quantity detection mechanism, judge according to the changes in flow rate of detected coater unit whether the coating state is good.
According to this structure, through above-mentioned flow quantity detection mechanism, the variation of the air mass flow in the above-mentioned pipeline when detecting the partitioning portion of coater unit through track can detect the even generation of crawling.Therefore, need not be provided for detecting the even complicated apparatus of crawling, just can detect the even generation of crawling.
In addition; Above-mentioned change testing agency can be following structure: above-mentioned change testing agency comprises above-mentioned speed testing agency, above-mentioned pressure detecting mechanism, above-mentioned flow quantity detection mechanism; The testing result of at least one testing agency in these speed testing agencies, pressure detecting mechanism, flow quantity detection mechanism is under the situation beyond the setting range, and the coating state on the substrate is judged as inappropriate.
According to this structure, can improve the unsuitable reliability of coating state that is judged as on the substrate.
In the coating process of the present invention that solves above-mentioned problem; Substrate is maintained on the objective table on the base station; Through make coater unit along extend to specific direction and be divided into a plurality of tracks and relatively walk with respect to aforesaid substrate in the ejection coating fluid; Thereby on substrate, be coated with coating fluid, it is characterized in that, the change testing agency of the action change through detecting above-mentioned coater unit; Detection is judged the coating state of the coating fluid on the substrate to the action change of the above-mentioned coater unit of substrate ejection coating fluid according to this testing result.
According to above-mentioned coating process; Even under the divided situation of the track that coater unit is walked; Because can detect the even generation of crawling in the coating action; So with existing such behind production regulation number coated substrates the coated film inspection operation through other operation detect the even situation of crawling and compare, can avoid producing in large quantities the problem of bad substrate, can improve qualification rate.
In addition; Above-mentioned change testing agency also can be following structure: above-mentioned change testing agency comprises above-mentioned speed testing agency, above-mentioned pressure detecting mechanism, above-mentioned flow quantity detection mechanism; The testing result of at least one testing agency in these speed testing agencies, pressure detecting mechanism, flow quantity detection mechanism is under the situation beyond the setting range, and the coating state that is judged as on the substrate is inappropriate.
According to this structure, can improve the unsuitable reliability of coating state that is judged as on the substrate.
According to apparatus for coating of the present invention and coating process, can avoid producing in large quantities the problem of bad coated substrates, can improve qualification rate.
Description of drawings
Fig. 1 is the stereogram of the apparatus for coating in expression an embodiment of the invention.
Fig. 2 is the figure of the air system of the air bearing of roughly representing above-mentioned apparatus for coating.
Fig. 3 is near the figure the unit support sector of the above-mentioned apparatus for coating of expression.
Fig. 4 is the block diagram of the control system of the above-mentioned apparatus for coating of expression.
Fig. 5 is the flow chart of the action of the above-mentioned apparatus for coating of expression.
The figure that concerns between speed of travel V, detected pressures P, the testing result that detects flow F and the position of rule S of Fig. 6 for the above-mentioned apparatus for coating of expression; The figure of Fig. 6 (a) for concerning between expression speed of travel V and the position of rule S; The figure of Fig. 6 (b) for concerning between expression detected pressures P and the position of rule S, Fig. 6 (c) detect the figure that concerns between flow F and the position of rule S for expression.
Reference numeral
1 apparatus for coating
2 substrates
3 base stations
5 coater units
13 tracks
15a scale reading part
The 15b scale
81 pipelines
82 pressure gauges
83 flowmeters
90 control device
The specific embodiment
Use accompanying drawing that embodiment of the present invention is described.
Fig. 1 is the stereogram of apparatus for coating 1 of expression an embodiment of the invention, and Fig. 2 is the figure of the air system of the air bearing 14 of roughly representing apparatus for coating 1, and Fig. 3 is near the figure the unit support sector 7 of expression coater unit 5.
Like Fig. 1～shown in Figure 3, apparatus for coating 1 is the device to fraction such as the laminal substrate that is supplied to 2 coating reagent solutions or resist (below be called " coating fluid ").This apparatus for coating 1 has: base station 3, be used for carrying and put the objective table 4 of substrate 2, and be constituted as the coater unit 5 that can move to specific direction with respect to this objective table 4.
In addition, in following explanation, the direction that coater unit 5 is moved is as X-direction, and will be on horizontal plane vertical with this direction direction will describe as Z-direction with X axle and all vertical direction of Y axle both sides as Y direction.
On the above-mentioned base station 3, carry and be equipped with each component parts, for example objective table 4, track 13 and coater unit 5.
Above-mentioned objective table 4 is for to put and to remain in its lip-deep mechanism in 2 years with the substrate that is transported into.Specifically, on objective table 4, form the attraction hole (not shown) of a plurality of openings in its surface, these attract the hole to be communicated with vavuum pump 9 (with reference to Fig. 4) and link together.And, upload on the surface of objective table 4 under the state that is equipped with substrate 2 through making vavuum pump 9 work, attract to produce attraction in the hole, thereby the face side that makes substrate 2 attracted to objective table 4 is adsorbed maintenance.
In addition, objective table 4 is provided with the substrate elevating mechanism (not shown) that substrate 2 is moved up and down.That is, on the surface of objective table 4, form a plurality of pin-and-holes, be embedded with the lifting pin that can on Z-direction, move up and down in this pin-and-hole.Thus; Upload under the state that is equipped with substrate 2 through making the lifting pin rise or descend on the surface of objective table 4; Fore-end promoting pin is connected under the state of substrate 2, can make substrate 2 carry out elevating movement, and can make substrate 2 remain on the height and position of regulation.
Above-mentioned track 13 is configured to extend along X-direction for the mechanism of the walking of guiding coater unit 5.In this embodiment, be provided with pair of tracks 13 along objective table 4 in the Y direction both sides of objective table 4.This track 13 constitutes through connecting a plurality of track component 13a, and in the example shown in Figure 1, two track component 13a are connected through connecting portion 13b.That is, connecting portion 13b is in the middle position of the X-direction of track 13 haply.
Above-mentioned coater unit 5 has the tube head 6 from coating fluid to a direction and the unit bearing portion 7 that is arranged on the two end portions of this tube head 6 that extend and spray for being used for to the mechanism of carrying the substrate 2 coating coating fluids that place on the objective table 4.
The mechanism that said units support 7 can move up and down it and is used to make this tube head 6 on X-direction, to move for support column head 6.That is, this unit bearing portion 7 has and makes lowering or hoisting gear 20 that tube head 6 moves up and down and the running gear 10 that makes tube head 6 walkings.
The mechanism of lowering or hoisting gear 20 for tube head 6 is moved up and down has guide rail 21 that on Z-direction, extends and the slide block 22 that is connected with tube head 6.On this guide rail 21, slide block 22 can be installed with being free to slide along guide rail 21.In addition, the ball screw mechanism that drives through servomotor 23 is installed on the slide block 22,, slide block 22 is moved on Z-direction, and can stop at an arbitrary position through this servomotor 23 of drive controlling.Thus, tube head 6 by drive controlling, can carry out the motion that can contact or separate to the elevating movement of Z-direction with respect to objective table 4.
Running gear 10 is as shown in Figure 3, is to be used to device that tube head 6 is walked on X-direction, has sliding supporting part 11 and linear motor 12.
This sliding supporting part 11 is supported on the track 13 through being arranged on air bearing 14 between itself and the track 13 (of the present invention bearing portion).And, be installed in the linear motor 12 on the sliding supporting part 11 through drive controlling, sliding supporting part 11 is moved on X-direction.Specifically, like Fig. 2, shown in Figure 3, on the air bearing 14 that is provided with on the sliding supporting part 11, being situated between is connected with compressor 80 by pipeline 81, through making this compressor 80 work, from air bearing 14 to guide surface 13c side air supply.And,, make sliding supporting part 11 keep the state that floats from guide surface 13c through air supply between air bearing 14 and guide surface 13c.And, be under the float state at sliding supporting part 11, through driving linear motor 12, sliding supporting part 11 is moved on X-direction.That is, through driving linear motor 12, under the state that air bearing 14 is floated from track 13, coater unit 5 can be walked along X-direction.
In addition, in pipeline 81, the pressure gauge 82 of measuring the pressure of the air that is fed into air bearing 14 is set on each air bearing 14.In addition, the flowmeter 83 of measuring the flow of the air be supplied to is set on each air bearing 14.These pressure gauges 82 and flowmeter 83 with after the control device stated be connected, make measurement result be taken into control device.
In addition, the position in X-direction that is provided so that coater unit 5 on the sliding supporting part 11 is detected.That is, on track 13, be provided with scale 15b along guide surface 13c.And; On the sliding supporting part 11, with the opposed position of this scale 15b on scale reading part 15a is installed, read scale 15b through using this scale reading part 15a; Even coater unit 5 is in the walking, also can accurately detect the position of current coater unit 5.In addition, scale reading part 15a with after state control device and be connected, calculate the speed of travel of coater unit 5 based on this positional information.Thus, can always detect the speed of travel of coater unit.
Aforementioned tube oral area 6 is the device of coating coating fluid on substrate 2.This spout part 6 is for having the columnar part of the shape of extending to Y direction, is formed with to spraying the nozzle 61 (with reference to Fig. 3) of coating fluid with a surperficial opposed side of objective table 4.This nozzle 61 is outstanding to the face side of objective table 4, on this ledge, is formed with the slit of the shape of extending to Y direction.That is the coating fluid that, is fed into spout part 6 through this slit is ejected on the surface of substrate 2.
Below, utilize block diagram shown in Figure 4 that the formation of the control system of above-mentioned apparatus for coating 1 is described.
Fig. 4 is arranged on the block diagram of the control system of the control device 90 on this apparatus for coating for expression.As shown in Figure 4, this apparatus for coating 1 is provided with the control device 90 of the driving of the above-mentioned various unit of control.This control device 90 has control main part 91, drive control part 92, position detection part 93, pressure detecting portion 94, flow testing division 95, input/output unit control part 96 and external device (ED) control part 97.
Control main part 91 has the known CPU of actuating logic computing, stores the HDD etc. of RAM, the various programs of storage and various data such as OS, particularly production routine of ROM, the various data in the temporary storing device action of the various programs etc. of this CPU of control in advance.And control main part 91 has master control part 91a, judging part 91b and storage part 91c.
Judging part 91b is in coater unit 5 walking and when carrying out the coating campaign to substrate 2 coating coating fluids, judge coater unit 5 the speed of travel, supply to the flow proper device whether of pressure and air of the air of air bearing 14.That is, to the speed of travel of coater unit 5, according to judging by the detected positional information of scale reading part 15a whether the speed of travel that is calculated by master control part 91a satisfies defined terms.And,, judge through pressure gauge 82 and flowmeter 83 detected detected pressures P and detect flow F and whether satisfy defined terms to the pressure and the flow of air.Specifically, after state and store the condition (crawling spare occurrence condition) that the even situation of crawling takes place among the storage part 91c, judge detected speed of travel V, detected pressures P, detect flow F and whether be in this crawling and spare in the scope of occurrence condition.That is, to speed of travel V, detected pressures P and detection flow F difference setting threshold, the next generation crawling that is judged as of situation that exceeds this threshold value is even.In this embodiment; In speed of travel V, detected pressures P and detection flow F any one surpasses under the situation of preset threshold; It is even to be judged as the generation crawling; Master control part 91a stops the driving of each servomotor 23, linear motor 12 etc. through drive control part 92, and gives a warning.
In addition, store the even occurrence condition of crawling among this storage part 91c.The threshold values such as maximum, minimum of a value and change value that the even occurrence condition of this crawling is spared under the situation in allowed band by the crawling that takes place constitute; For example, will above the situation of threshold value, or the situation that will exceed the scope of setting by these a plurality of threshold values be set at the even occurrence condition of crawling.The even occurrence condition of this crawling is set according to the experiment condition of being tried to achieve by the coating campaign of carrying out apparatus for coating 1 in advance.In addition, the even occurrence condition of the crawling of storing among this storage part 91c can be changed by keyboard 98 or touch pad 99.
Drive control part 92 carries out the device of drive controlling to linear motor 12 and servomotor 23 grades from the control signal of master control part 91a for basis.Specifically, through control linear motor 12 and servomotor 23, come running gear on the coater unit 5 10 and lowering or hoisting gear 20 are carried out drive controlling.
The device of position detection part 93 for reading scale 15b and the position of coater unit 5 is detected through scale reading part 15a.This testing result is stored by storage part 91c at any time.And,, come the speed of travel V of computing coater unit 5 through master control part 91a according to this testing result.
The device of pressure detecting portion 94 for the pressure of being measured by pressure gauge 82 is measured.This detected pressures P that is detected is stored by storage part 91c at any time.
The device of flow testing division 95 for the flow of being measured by flowmeter 83 is detected.The detection flow F that this is detected is stored by storage part 91c at any time.
Input/output unit control part 96 is for moving the device of controlling to each input/output units such as keyboard 98, touch pads 99.Specifically, be coated with the setting of condition from keyboard 98 and touch pad 99 by the operator.In addition, judging under the situation of producing bad coated substrates 2, on touch pad, can carry out supervising the warning of warning to show the operator according to satisfying the even occurrence condition of crawling.In addition, under the situation that the warning demonstration occurs, the operator can set from touch pad 99, so that the threshold value of this moment is as the even occurrence condition of crawling.
External device (ED) control part 97 carries out the device of the drive controlling of external device (ED) from the control signal of master control part 91a for basis.In this embodiment, be connected with compressor 80, through driving this compressor 80, to air bearing 14 air supplies.
Next, the coating action to this apparatus for coating 1 describes with reference to flow chart shown in Figure 5.In addition; In this embodiment; Following situation is described: as the even occurrence condition of crawling; Maximum Pa and the minimum of a value Pb of the maximum Va of the speed of travel V of coater unit 5 and minimum of a value Vb, detected pressures P and the maximum Fa and the minimum of a value Fb that detect flow F are set as threshold value respectively; These speeds of travel V, detected pressures P and detect flow F and be under the scope set by threshold value (scope of being set by maximum and the minimum of a value) situation in addition are judged as and crawling has taken place spare.
At first, in step S1, carry out the maintenance of substrate 2.Specifically, a plurality of lifting pins are with the state standby on the surface that protrudes in objective table 4, and substrate was put at these and promoted on the fore-end of pin in 2 years.Then, make to promote that pin descends and substrate was placed the surface of objective table 4 in 2 years, attract to produce attraction in the hole through under this state, making vavuum pump 9 work and making, substrate 2 is adsorbed and remains on the surface of objective table 4.
Next begin the walking (step S2) of coater unit 5.Specifically, through to air bearing 14 air supplies coater unit 5 being under the state that floats, make spout part 6 assigned position on the substrate 2 of walking through drive controlling linear motor 12 from compressor 80.
Next, begin speed of travel V, detected pressures P and detect the supervision (step S3) of flow F.Specifically, calculate the speed of travel V of coater unit 5 from the positional information from the coater unit 5 of scale reading part 15a, this speed of travel V that calculates is stored among the storage part 91c.In addition, detect the pressure that is supplied to the air of air bearing 14 by compressor 80 through pressure gauge 82, and detect the flow of air through flowmeter 83, this detected pressure value P and detected flow value F are stored among the storage part 91c.
And next, coating fluid is applied to (step S4) on the substrate.Specifically, under the state that speed of travel V etc. is kept watch on, make coater unit 5 run to assigned position.And, when coater unit 5 arrives assigned positions, through drive controlling lowering or hoisting gear 20 spout part 6 is set in apart from substrate 2 and is the position of specified altitude, through drive controlling linear motor 12 under this state, spout part 6 is walked on X-direction.That is,, on substrate 2, be coated with coating fluid with homogeneous thickness through in the slit ejection coating fluid of spout part 6, making spout part 6 walkings.At this moment, speed of travel V, detected pressures P and detection flow F are respectively stored among the storage part 91c.
Next, judge whether to have taken place crawling even (step S5).Specifically, according to speed of travel V, detected pressures P with detect flow F and whether be in the scope (scope) set by threshold value with external judgement from maximum (Va, Pa, Fa) to minimum of a value (Vb, Pb, Fb).Here; Fig. 6 is the figure of the relation of expression speed of travel V, detected pressures P, the testing result that detects flow F and position of rule S; Fig. 6 (a) is the figure of the relation of expression speed of travel V and position of rule S; Fig. 6 (b) is the figure of the relation of expression detected pressures P and position of rule S, and Fig. 6 (c) detects the figure of the relation of flow F and position of rule S for expression.
Shown in this Fig. 6 (a)～Fig. 6 (c); Under the state of walking on the guide surface 13c of coater unit 5 at track 13; Speed of travel V, detected pressures P and detection flow F roughly are shown as steady state value; But locate at the connecting portion 13b of track 13 (the middle body So of orbital position S), entanglement takes place in speed of travel V, detected pressures P and detection flow F.That is, because the entanglement of the action of the coater unit 5 during connecting portion 13b (discontinuity surface) through track 13 of coater unit 5, and the entanglement of the air of supplying with to track 13 from air bearing 14, make speed of travel V, detected pressures P and detect flow F and change.And, exceed under the situation of the scope of setting by threshold value at the speed of travel V after the variation, detected pressures P and detection flow F, be judged as the generation crawling and spare.That is, in the example of representing among Fig. 6, because near the speed of travel V the connecting portion 13b surpasses preset threshold (Va, Vb), judging part 91b judges that crawling takes place to be spared.And, judging under the even situation of generation crawling, get into step S6, on touch pad 99, warn demonstration, the operator is warned supervise thus, and apparatus for coating 1 is stopped.
In addition; In step S5, do not satisfy the even occurrence condition of crawling, walk speed V, detected pressures P and detect flow F and all be in the scope of setting by threshold value at once, be judged as thus and do not take place under the even situation of crawling; Get into step S7, coated substrates 2 is discharged from.Then, judge whether to produce the coated substrates 2 of regulation number, under the situation that does not reach the regulation number, repeat the processing (step S8) that begins from step S1.
Like this, according to the apparatus for coating 1 of this embodiment,, can judge whether to produce bad coated substrates through the speed of travel V that keeps watch on the coater unit 5 in the coating action, pressure value P and the flow value F that supplies to the air of air bearing 14.Therefore; Even having to cut apart under the situation of track in order to produce large-scale coated substrates; Because can detect the even generation of crawling in the coating action; Detect the even situation of crawling with the coated film inspection operation through other operation behind the coated substrates of existing production regulation number and compare, can avoid producing in large quantities the problem of bad substrate, thereby improve qualification rate.
In addition, in the above-mentioned embodiment,, to speed of travel V, detected pressures P with detect the example that flow F maximum and minimum of a value separately set as threshold value and be illustrated, but be not limited to this about the even occurrence condition of crawling.For example, can be only with maximum as threshold value, the situation that surpasses this threshold value judges even into crawling takes place.
In addition, also can at the detected pressures P of speed of travel V, air and detect when flow F be shown as the variable quantity of regulation and take place under the even situation of crawling this variable quantity to be set as threshold value.Specifically, for detected speed of travel V, its differential component of computing surpasses under the situation of predefined differential component (threshold value) at this differential component, also can be judged as the generation crawling and spare.Thus,, compare as the situation of threshold value, even under the situation of coater unit 5 generation small variations, also can detect the even generation of crawling effectively with setting maximum and minimum of a value because can keep watch on the change of coater unit 5 continuously.Therefore, at the high precision int of the assembling that is accompanied by apparatus for coating, the interval between the track 13 on the connecting portion 13b becomes very little, under the situation that the change of coater unit 5 becomes small special effectively.
In addition; In the above-mentioned embodiment; Though to speed of travel V, detected pressures P with detect and be judged as the even example of crawling when among the flow F any one exceeds beyond the scope of being set by threshold value and be illustrated, also can detected pressures P for example with detect the situation that flow F both sides all exceed beyond the scope of being set by threshold value and judge even into crawling takes place.That is, also can and detect and select plural key element the flow F, judge even into crawling takes place in situation about exceeding beyond the scope of setting by threshold value from speed of travel V, detected pressures P.
In addition, in the above-mentioned embodiment,, also can suitably change through the operator though the situation of setting the even occurrence condition of crawling in the starting stage is illustrated.For example; Even producing under the even bad coated substrates of generation crawling, the also non-stop situation of coating action; Also can produce the even occurrence condition of crawling of this bad coated substrates by the operator from touch pad 9 inputs; Upgrade each threshold value thus, and be reflected in the production of the coated substrates after it.Thus, can avoid only utilizing the even occurrence condition of crawling of initial setting and produce the problem of bad coated substrates in large quantities.
Claims (8)
1. apparatus for coating; Have: be equipped with the base station of the objective table that keeps substrate, on said base station with the state setting of extending and be split into a plurality of tracks and relatively walk with respect to said substrate and to the coater unit of said base plate coating coating fluid along said track to specific direction; It is characterized in that
The change testing agency of detection in the action change of the said coater unit of said coater unit during through each other coupling part of said track is set, judges the coating state of the coating fluid on the substrate according to the testing result of this change testing agency.
2. apparatus for coating as claimed in claim 1; It is characterized in that; Said apparatus for coating also has control device; This control device judges according to the said testing result that changes testing agency whether the coating state on the substrate is good, is being judged as under the unsuitable situation of coating state, and said coater unit is stopped.
3. according to claim 1 or claim 2 apparatus for coating; It is characterized in that; Said change testing agency is the speed testing agency of the speed of travel that detects said coater unit, according to judging by the variation of the speed of travel of this detected coater unit of speed testing agency whether the coating state is good.
4. according to claim 1 or claim 2 apparatus for coating; It is characterized in that; In said coater unit, have through make coater unit to the raceway surface air supply,, the pressure detecting mechanism of the air pressure variations in the signal piping is set in this air fed pipeline of bearing portion from the bearing portion that track floats; Said change testing agency comprises this pressure detecting mechanism, changes according to the pressure of detected coater unit through this pressure detecting mechanism and judges whether the coating state is good.
5. according to claim 1 or claim 2 apparatus for coating; It is characterized in that; In said coater unit, have through make coater unit to the raceway surface air supply,, the flow quantity detection mechanism that air mass flow changes in the signal piping is set in this air fed pipeline of bearing portion from the bearing portion that track floats; Said change testing agency comprises this flow quantity detection mechanism, judges according to the changes in flow rate of detected coater unit whether the coating state is good through this flow quantity detection mechanism.
6. according to claim 1 or claim 2 apparatus for coating; It is characterized in that; In said coater unit, have through make coater unit to the raceway surface air supply from bearing portion that track floats; In this air fed pipeline of bearing portion, the pressure detecting mechanism of the air pressure variations in the signal piping and the flow quantity detection mechanism that the interior air mass flow of signal piping changes are set
Said change testing agency comprises the speed testing agency of the speed of travel that detects said coater unit, said pressure detecting mechanism, said flow quantity detection mechanism; The testing result of at least one testing agency in these speed testing agencies, pressure detecting mechanism, flow quantity detection mechanism is under the situation beyond the setting range, and the coating state on the substrate is judged as inappropriate.
7. coating process; Wherein, Substrate is maintained on the objective table on the base station, through make coater unit along extend to specific direction and be divided into a plurality of tracks and relatively walk with respect to said substrate in the ejection coating fluid, thereby on substrate, be coated with coating fluid; It is characterized in that
Detect action change through detecting, judge the coating state of the coating fluid on the substrate according to this testing result to the said coater unit of substrate ejection coating fluid in the change testing agency of the action change of the said coater unit of said coater unit during through each other coupling part of said track.
8. coating process as claimed in claim 7; It is characterized in that; In said coater unit, have through make coater unit to the raceway surface air supply from bearing portion that track floats; In this air fed pipeline of bearing portion, the pressure detecting mechanism of the air pressure variations in the signal piping and the flow quantity detection mechanism that the interior air mass flow of signal piping changes are set
Said change testing agency comprises the speed testing agency of the speed of travel that detects said coater unit, said pressure detecting mechanism, said flow quantity detection mechanism; The testing result of at least one testing agency in these speed testing agencies, pressure detecting mechanism, flow quantity detection mechanism is under the situation beyond the setting range, and the coating state that is judged as on the substrate is inappropriate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007086832A JP2008238144A (en) | 2007-03-29 | 2007-03-29 | Apparatus and method for applying coating liquid |
| JP086832/2007 | 2007-03-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101274313A CN101274313A (en) | 2008-10-01 |
| CN101274313B true CN101274313B (en) | 2012-12-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200810087497XA Active CN101274313B (en) | 2007-03-29 | 2008-03-28 | Coating device and coating method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008238144A (en) |
| KR (1) | KR20080088388A (en) |
| CN (1) | CN101274313B (en) |
| TW (1) | TW200916201A (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5303231B2 (en) * | 2008-09-30 | 2013-10-02 | 東京応化工業株式会社 | Coating device |
| JP5550255B2 (en) * | 2009-04-28 | 2014-07-16 | 株式会社日立製作所 | Paste coating apparatus and coating method |
| JP5460418B2 (en) * | 2010-03-29 | 2014-04-02 | オリジン電気株式会社 | Bonding member manufacturing method and bonding member manufacturing apparatus |
| CN103480537B (en) * | 2013-10-18 | 2015-10-28 | 宁波泰立电子科技有限公司 | A kind of automatic dispensing machine |
| CN104722444B (en) * | 2013-12-23 | 2017-03-29 | 昆山国显光电有限公司 | A kind of apparatus for coating |
| CN103706531B (en) * | 2013-12-23 | 2016-03-30 | 京东方科技集团股份有限公司 | A kind of coating apparatus |
| JP6685894B2 (en) * | 2014-02-18 | 2020-04-22 | オイレス工業株式会社 | Air bearing device and measuring device |
| TWI511795B (en) * | 2014-03-26 | 2015-12-11 | Premtek Int Inc | Method of spraying and device thereof |
| CN104384077B (en) * | 2014-11-12 | 2017-02-15 | 浙江龙旺纺织涂层有限公司 | Coating adding device for coated fabric |
| JP6817861B2 (en) * | 2017-03-23 | 2021-01-20 | 株式会社Ｓｃｒｅｅｎホールディングス | Coating device and coating method |
| CN110000046A (en) * | 2019-04-29 | 2019-07-12 | 华工制造装备数字化国家工程中心有限公司 | A kind of liquid application apparatus and method for hard carrier |
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| CN1919767A (en) * | 2005-08-23 | 2007-02-28 | 东京应化工业株式会社 | Applying device |
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| JPS61182737A (en) * | 1985-02-06 | 1986-08-15 | Omron Tateisi Electronics Co | Static pressure pneumatic bearing |
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| JP2006095665A (en) * | 2004-09-30 | 2006-04-13 | Sumitomo Heavy Ind Ltd | Stage apparatus |
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- 2008-03-03 KR KR1020080019542A patent/KR20080088388A/en not_active Application Discontinuation
- 2008-03-28 CN CN200810087497XA patent/CN101274313B/en active Active
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| CN1651153A (en) * | 2004-02-06 | 2005-08-10 | 日立产业有限公司 | Paste coating machine and coating method |
| CN1757439A (en) * | 2004-10-07 | 2006-04-12 | 大日本网目版制造株式会社 | Substrate processing device and method |
| CN1919767A (en) * | 2005-08-23 | 2007-02-28 | 东京应化工业株式会社 | Applying device |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR20080088388A (en) | 2008-10-02 |
| TW200916201A (en) | 2009-04-16 |
| CN101274313A (en) | 2008-10-01 |
| JP2008238144A (en) | 2008-10-09 |
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