CN1919767A

CN1919767A - Applying device

Info

Publication number: CN1919767A
Application number: CN 200610111296
Authority: CN
Inventors: 岛井太; 河田茂; 佐保田勉
Original assignee: Tokyo Ohka Kogyo Co Ltd
Current assignee: Tokyo Ohka Kogyo Co Ltd
Priority date: 2005-08-23
Filing date: 2006-08-21
Publication date: 2007-02-28
Also published as: JP2007054696A; TW200708347A; TWI300363B; JP4657855B2

Abstract

The present invention provided a coater capable of sorting stopping of a slit nozzle and removal of a foreign matter according to a size of the foreign matter. When a surface of a glass substrate W is coated with a coating liquid from a delivery port at a lower end of the slit nozzle 14 while moving a gate type movement mechanism 3 in a right direction in figure by driving a linear motor, when the foreign matter G1 having a diameter dimension capable of being sensed by a sensor 17 is deposited on the substrate W at a front side in a traveling direction, the sensor outputs a stop signal to the linear motor when the sensor senses it and traveling of the gate type movement mechanism is immediately stopped. Whereas, when the foreign matter G2 having a diameter dimension capable of being not sensed by the sensor is deposited on the substrate W at a front side in the traveling direction, since the stop signal is not output to the linear motor, the gate type movement mechanism 3 travels as it is. Further, the foreign matter G2 is not removed by a protector 15. Further, when the dimension of the foreign matter G2 is extremely small, it cannot be removed by the protector, however, in this case, there is no fear that the slit nozzle is damaged.

Description

Applying device

Technical field

The present invention relates to a kind of on the substrate surface of glass substrate etc. the applying device of coating liquid coating.

Background technology

In the past, known had a following applying device: by mounting on the substrate of platform, while keep predetermined gap gap nozzle is moved, and to coating liquid such as substrate surface coating resists.

In this applying device, if be attached with foreign matter on the substrate, then when gap nozzle from this foreign matter by the time contact with foreign matter, make the relief outlet of gap nozzle be subjected to less damage.So, if relief outlet sustains damage, filming and go up to produce convex tendon thereafter then.The device of eliminating this unfavorable phenomenon is disclosed in patent documentation 1 and 2.

In the patent documentation 1, front in the relative working direction of gap nozzle can be equipped with plate member up or down, the vibration detection parts are set on this plate member, when being accompanied by relatively moving of gap nozzle, when the lower end that is attached to the foreign matter of substrate surface and aforementioned panels parts is run into, plate member is vibrated, and detects this vibration by aforementioned vibration detection parts, thereby makes coating force to stop.

In the patent documentation 2, detect the bump or the foreign matter of substrate surface, thereby before bump or foreign matter and gap nozzle are run into, gap nozzle is hidden by the detecting unit that utilizes laser.

[patent documentation 1] TOHKEMY 2000-024571 communique

[patent documentation 2] TOHKEMY 2002-001195 communique

In patent documentation 1 disclosed device, because plate member and vibration detection parts directly are installed on nozzle, so safeguard inconvenient.Have again,, make that then bigger foreign matter sustains damage by making nozzle,, then can take place unwantedly to stop by force if instead set lessly if set the interval between plate member and the substrate bigger.

In patent documentation 2 disclosed devices, owing to adopted the detecting unit that utilizes laser,, might make less foreign matter run into the relief outlet of gap nozzle and sustain damage so can only detect bigger foreign matter.

Summary of the invention

Being used to solve the applying device that the technical scheme 1 of aforementioned problems relates to constitutes: dispose the substrate-placing platform between the track of pair of parallel, and be erected at movably between the aforementioned track with the gate type movement mechanism that the mode of crossing over this substrate-placing platform will have a gap nozzle, wherein, aforementioned gate type movement mechanism has: the moving body that engages respectively with the track of aforementioned pair of parallel; Connect the tie-beam between these moving bodys; Liftably supported nozzle base between aforementioned moving body, in addition, with based on the coating direction of aforementioned slots nozzle as benchmark, part at the aforementioned nozzle base that is positioned at the place ahead is equipped with backplate, the mobile eliminating that this backplate is accompanied by the horizontal direction of gap nozzle is present in the fine foreign matters on the substrate, and more the tie-beam in the place ahead or the part of moving body are equipped with transmitter than this backplate being positioned at, this sensor detecting goes out to be present in the bigger foreign matter on the substrate, and exports the signal that aforementioned moving body is stopped.

Aforementioned tie-beam both can be one, also can be to be the aforementioned nozzle base of clamping and before and after being disposed at respectively when overlooking.Under the occasion of two of front and back configurations, constitute the whole framework of shaped as frame that is by between moving body, connecting, thereby reduce the distortion in moving, have again, when aforementioned gate type movement mechanism moves not with the limit of substrate and substrate-placing contact with platform under, aforementioned tie-beam is installed on lower position, can suppresses thus to rise and fall and detect foreign matter exactly.

According to the present invention, under the occasion that is attached with bigger foreign matter on the substrate, relatively moving of gap nozzle stops immediately, and under the occasion that is attached with less foreign matter on the substrate, can not stop to move of gap nozzle, and with backplate it is got rid of, therefore can prevent that the relief outlet of gap nozzle from sustaining damage, and need not stop to move of nozzle continually.

Description of drawings

Fig. 1 is the whole vertical view of the applying device that the present invention relates to.

Fig. 2 is the enlarged view that the A-A direction from Fig. 1 is observed.

Fig. 3 is the moving body amplification plan view on every side of a side.

Fig. 4 is the moving body enlarged side view on every side of a side.

Fig. 5 is the figure of explanation effect of the present invention.

Nomenclature is as follows:

1 underframe, 2 tracks, 3 gate type movement mechanisms

4 substrate-placing platforms 5 are allocated portion's 6 cleaning parts in advance

7 steeping vats, 8 gantry frames, 9 air cushions

10,11 tie-beams, 12 nozzle hoisting appliances, 13 nozzle bases

14 gap nozzles, 15 backplates, 16 laser sensors

17 foreign matters detect the foreign matter with the appreciable diameter of transmitter G1 transmitter

The foreign matter W substrate of the non diameter of G2 transmitter

Embodiment

Below, based on accompanying drawing embodiments of the present invention are described.Fig. 1 is the whole vertical view of the applying device that the present invention relates to, and Fig. 2 is the enlarged view that the A-A direction from Fig. 1 is observed, and Fig. 3 is the amplification plan view of the moving body part of a side, and Fig. 4 is the enlarged side view of the moving body part of a side.

Applying device is supported on the table top by underframe 1.Along continuous straight runs and be provided with pair of

tracks

2,2 abreast on this underframe 1.Engaging has gate type movement mechanism 3 on these pair of tracks 2.

Have again, on underframe 1, be provided with the substrate-placing platform 4 that is used for mounting glass substrate W etc.And, platform 4 can be fixed on table top etc.Will from substrate-placing platform 4 away from direction be made as benchmark, with the order of allocating portion 5, cleaning part 6 and steeping vat 7 in advance with they configurations.

Aforementioned gate type movement mechanism 3 has gantry frame 8 that is the shape of encircling track 2.The medial surface of this gantry frame 8 have and track 2 between form the air cushion 9 in gap.

About

gantry frame

8,8 connected integratedly by two tie-

beams

10,11, when overlooking, be shaped as frame.Though can reduce distortion in moving by forming such shaped as frame, also can only use one for tie-

beam

10,11.

About gantry frame 8 be connected with the movable part (core) of not shown linear motor respectively, by the linear motor about synchronized drive, gate type movement mechanism 3 along track 2 frictions move.At this, though tie-

beam

10,11 be installed in gantry frame 8 above, tie-

beam

10,11 and substrate (substrate-placing platform 4) did not relax position minimum in the ballistic scope when this position was mobile.By the height of such reduction tie-

beam

10,11, jolting in the time of can suppressing mobile.

About gantry frame 8 above be set with the nozzle hoisting appliance 12 that constitutes by piston-cylinder unit etc., about nozzle hoisting appliance 12 between freely set up nozzle base 13 along level and liftable, and on this nozzle base 13, gap nozzle 14 is installed.So, come lifting moving nozzle base 13 and gap nozzle 14 integratedly by driving hoisting appliance 12.

In addition, on the part of nozzle base 13, with the coating direction be benchmark, be positioned at than gap nozzle 14 more the part in the place ahead the backplate 15 that rolls (squeegee) as rubber is installed.The length of this backplate 15 is set to longer than the width of gap nozzle 14.The laser sensor 16 at the interval of the lower end of measuring gap nozzle 14 and substrate W is installed on nozzle base 13.

The bottom of aforementioned backplate 15 is sharp, interval in the horizontal direction, the bottom of the relief outlet of gap nozzle 14 and baffle plate 15 is set to 70～75mm, in vertical direction, the bottom of baffle plate 15 is set to also low 100～50 μ m of relief outlet than gap nozzle 14 lower ends.

And then, be benchmark with the coating direction, about the front of

gantry frame

8,8, the

transmitter

17,17 that foreign matter detects usefulness is installed.These

transmitters

17,17 for example are a side to be made as luminous element and the opposing party is made as

photo detector.Transmitter

17,17 detects and is positioned at than backplate 15 foreign matter of front region more, and minimum foreign matter diameter that can perception is set to 100 μ m.

That is, as shown in Figure 5, reduce nozzle base 13, and the relief outlet of gap nozzle 14 lower ends and the interval of substrate W are set at for example 100 μ m.By this state, drive linear motor and when gate type movement mechanism 3 is moved along the right direction among the figure, from the relief outlet of gap nozzle 14 lower ends to substrate W surface applied coating liquid.

At this moment, if in the place ahead of travel direction, be attached with the foreign matter G1 of transmitter 17 appreciable diameter on substrate W, then transmitter 17 is exported stop signal in the moment of this situation of perception to linear motor, stops to move of gate type movement mechanism 3 at once.

On the other hand,, be attached with on the substrate W under the occasion of foreign matter G2 of transmitter 17 non diameter, to linear motor output stop signal, so that gate type movement mechanism 3 is kept intact is mobile in the place ahead of travel direction.So foreign matter G2 is got rid of by backplate 15.In addition, under the very little occasion of the size of foreign matter G2, though can not get rid of by backplate 15, under this occasion, the danger that gap nozzle 14 does not also sustain damage.

And, in an embodiment, though the front of

gantry frame

8,8 is equipped with transmitter 17, also can tie-beam 11 forwardly on sensor installation 17.

[industrial utilizability]

The coating apparatus that is coated with of the present invention can be used as on the glass substrate in being installed on various displays, Be used to form the coating apparatus that is coated with of filming.

Claims

1. an applying device disposes the substrate-placing platform between the track of pair of parallel, will have the gate type movement mechanism of gap nozzle, is erected at movably between the aforementioned track in the mode of crossing over this substrate-placing platform, and this applying device is characterised in that,

Aforementioned gate type movement mechanism has: the moving body that engages respectively with the track of aforementioned pair of parallel; Connect the tie-beam between these moving bodys; Liftably supported nozzle base between aforementioned moving body,

With the coating direction based on the aforementioned slots nozzle is benchmark, part at the aforementioned nozzle base that is positioned at the place ahead is equipped with backplate, this backplate is accompanied by the moving of horizontal direction of gap nozzle and gets rid of the fine foreign matters that is present on the substrate, more the tie-beam in the place ahead or the part of moving body are equipped with transmitter than this backplate being positioned at, this sensor detecting goes out to be present in the bigger foreign matter on the substrate, and exports the signal that aforementioned moving body is stopped.

2. applying device according to claim 1 is characterized in that,

Be before and after the aforementioned nozzle base of clamping is configured in when aforementioned tie-beam is overlooked, and, be the framework of shaped as frame and constitute integral body by between aforementioned moving body, connecting the tie-beam of these front and back.

3. applying device according to claim 1 is characterized in that,

When aforementioned gate type movement mechanism moves not with the limit of substrate and substrate-placing contact with platform under, aforementioned tie-beam is installed on lower position.