CN103934165A - Coating device - Google Patents
Coating device Download PDFInfo
- Publication number
- CN103934165A CN103934165A CN201310064345.9A CN201310064345A CN103934165A CN 103934165 A CN103934165 A CN 103934165A CN 201310064345 A CN201310064345 A CN 201310064345A CN 103934165 A CN103934165 A CN 103934165A
- Authority
- CN
- China
- Prior art keywords
- detection means
- die head
- swing
- acceleration
- force application
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
- B05B15/68—Arrangements for adjusting the position of spray heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
- B05B13/04—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the spray heads being moved during spraying operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05G—CONTROL DEVICES OR SYSTEMS INSOFAR AS CHARACTERISED BY MECHANICAL FEATURES ONLY
- G05G5/00—Means for preventing, limiting or returning the movements of parts of a control mechanism, e.g. locking controlling member
- G05G5/04—Stops for limiting movement of members, e.g. adjustable stop
Abstract
A coating device is high in detection sensitivity of foreign matters on a board and is free of error detection when a die head is accelerated. The coating device has a detection member (6), a spacing member (7), a swing sensor (8), an in-acceleration force-applying member (9), and a press contact device (10), wherein the detection member (6) is configured such that a lower end of the detection member (6) is approaching the board (2) in front of the movement direction of the die head (1) and the lower end of the detection member (6) can swing during the movement toward one side of the die head (1); the spacing member (7) is abutted against the detection member (6) to prevent the lower end of the detection member (6) from swinging toward an opposite side of the die head (1) in the movement; the swing sensor (8) detects swinging of the detection member (6); the in-acceleration force-applying member (9) can press the detection member (6) on the spacing member (7); and when the die head (1) is accelerated, the press contact device (10) enables the in-acceleration force-applying member (9) and the detection member (6) to be contacted in a pressing manner.
Description
Technical field
The present invention relates to a kind of coating unit.
Background technology
Coating die head is moved with respect to substrate, and by liquid spreading in the coating unit on substrate, if there is foreign matter on substrate, foreign matter can be stuck between die head and substrate, and makes die head breakage, or occurs defect on overlay film.For this reason, knownly just like what record in patent documentation 1 to 5 detection means is set like that, this detection means is arranged on the front of die head, because first contacting with foreign matter and produce swing than die head, detects by this foreign matter.In this coating unit, in the time that the oscillating quantity of detection means exceedes a certain limit, be just identified as and have foreign matter emergent stopping, thereby prevent from causing die head damage because foreign matter blocks.
This detection means is except because of foreign matter, and the inertia force acting on also can be because of die head acceleration and deceleration time swings.Therefore, for fear of the swing of accelerating to cause because of die head is detected to the swing for causing because of foreign matter mistakenly, need to be very large value by the Threshold of the oscillating quantity of detection means, just there is the such problem of detection sensitivity that cannot fully improve foreign matter.
Error detection while preventing the acceleration and deceleration of die head in order to realize simultaneously and the detection sensitivity when improving constant speed and applying, having considered only must be larger by the Threshold of the swing for judging the detection means causing because of foreign matter in the time of die head acceleration and deceleration.But, in common sequential control, if change threshold value in course of action, just may in a circulation of controlling, there is detecting the time of foreign matter.The omission that this foreign matter detects may bring serious damage to coating unit, thereby not satisfactory.
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2006-224089 communique
Patent documentation 2: Japanese Patent Laid-Open 2009-61395 communique
Patent documentation 3: Japanese Patent Laid-Open 2008-151603 communique
Patent documentation 4: Japanese Patent Laid-Open 2010-227787 communique
Patent documentation 5: Japanese Patent Laid-Open 2010-232326 communique
Summary of the invention
In view of the above problems, to be to provide the detection sensitivity of the foreign matter on a kind of sheet material high and in the time that die head accelerates, also there will not be the coating unit of error detection for technical problem of the present invention.
For solving the problems of the technologies described above, coating unit of the present invention moves die head sheet material is applied, have: detection means, this detection means be configured to lower end in the direct of travel front of above-mentioned die head near above-mentioned sheet material, and the mode that can state die head one side shifting upward with lower end swings; Locating part, this locating part and above-mentioned detection means butt, prevent that the lower end of above-mentioned detection means is towards the such swing of a side shifting contrary to above-mentioned die head; Oscillation gauge, this oscillation gauge detects the swing of above-mentioned detection means; Force application component when acceleration, when this acceleration, force application component can be pressed into above-mentioned locating part by above-mentioned detection means; And face contact device, in the time that above-mentioned die head accelerates, force application component and above-mentioned detection means face contact when above-mentioned face contact device makes above-mentioned acceleration.
According to said structure, in the time that die head accelerates, utilize mechanicals efforts to suppress the swing of detection means, the detection sensitivity of reduction foreign matter, prevents error detection, and in the time that die head constant speed moves, allows detection means to freely swing, and improves detection sensitivity.In addition, due in the time that die head accelerates and when constant speed moves, detection threshold does not change, and therefore, the omission of controlling can not occur.
In addition,, in coating unit of the present invention, above-mentioned face contact device is after the acceleration of above-mentioned die head finishes, and after having passed through predefined time delay, while making above-mentioned acceleration, force application component separates with above-mentioned detection means.
According to said structure, can suppress speed slow of the die head producing because of inertia or the elasticity of die head etc. or the rotation of the detection means that produces because of overshoot, can not detect mistakenly foreign matter.
In addition,, in coating unit of the present invention, above-mentioned oscillation gauge also can detect the swing of above-mentioned detection means as continuous quantity.
According to this structure, can easily regulate foreign matter detection sensitivity.
In addition, coating unit of the present invention also can have all the time above-mentioned detection means force application component when the above-mentioned locating part application of force usual.
According to said structure, can with the counterforce counteraction of oscillation gauge, improve foreign matter detection sensitivity.
In addition,, in coating unit of the present invention, above-mentioned detection means is swingingly pivotal support of quilt on its position of centre of gravity.
According to said structure, owing to reducing the moment of inertia, therefore, can improve foreign matter detection sensitivity.
Brief description of the drawings
Fig. 1 is the schematic diagram of the coating unit of an embodiment of the present invention.
Fig. 2 be presentation graphs 1 coating unit die head accelerate time schematic diagram.
(symbol description)
1 die head
2 sheet materials
3 frameworks
4 guide rails
5 linear motors
6 detection means
7 locating parts
8 oscillation gauge
Force application component when 9 acceleration
10 cylinders (face contact device)
11 force application components usually time
12 fixed components
13 back shafts
14 servo controllers
15 master controllers
P coating
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.Fig. 1 and Fig. 2 represent the roughly situation of the combustion coating unit of an embodiment of the present invention.This coating unit is to utilize the die head 1 moving horizontally along arrow A direction, coating P is applied to the member that loads the sheet material 2 on the platform of not shown (omitting in order more easily to see other inscape).Die head 1 extends along the width of sheet material 2, and the mode of extending with broad ways in lower end offers the nozzle for spraying coating P.
In addition, this coating unit has, movably framework 3 that keep to die head 1.
The shank 3b that framework 3 is erect by the 3a of beam portion extending above sheet material 2 with in two outsides of the width of sheet material 2 forms.Shank 3b is supported by the linear motor 5 that can move along the guide rail 4 extending on the length direction at sheet material 2 respectively.
In addition, framework 3 keeps detection means 6, locating part 7, oscillation gauge 8, cylinder (face contact device) 10 and fixed component 12, wherein, above-mentioned detection means 6 can swingingly be configured in the front of die head 1, above-mentioned locating part 7 limits the swing of detection means 6, above-mentioned oscillation gauge 8 detects the oscillating quantity of detection means 6, said cylinder 10 is to detection means 6 force application component 9 when the acceleration of locating part 7 application of forces is supported, and above-mentioned fixed component 12 is to supporting detection means 6 force application component 11 when locating part 7 application of forces usual.
Detection means 6 is the tabular components with the length (length of the width of sheet material 2) at least equating with the nozzle of die head 1.In addition, detection means 6 so that the little mode in the Gap-Ratios die head 1 of its lower end and sheet material 2 and the gap of sheet material 2 by back shaft 13 pivotal support of level.Back shaft 13 runs through the position of centre of gravity of detection means 6.
Locating part 7 is configured in detection means 6 under the state in vertical, above back shaft 13 with detection means 6 by the face butt of locating part 7 one sides.By this, the lower end that locating part 7 can prevent detection means 6 is towards the such swing of a side shifting contrary to die head 1.
Oscillation gauge 8 is to have contact 8a outstanding under the effect of spring force and that contact with detection means 6, and the sensor that (continually varying value) detects using the displacement of the contact 8a being brought by the swing of detection means 6 as continuous quantity.Usually time, force application component 11 has and with the contact 8a of the state lower swing sensor 8 of locating part 7 butts, the face contact power of detection means 6 is offset to such spring force in detection means 6.
As shown in Figure 2, when cylinder 10 will speed up because of elongation, force application component 9 is pressed into detection means 6, and as shown in Figure 1, when cylinder 10 makes to accelerate because of shortening, force application component 9 separates with detection means 6.
In addition, this coating unit has the servo controller 14 that the movement of linear motor 5 is controlled and gives the servo controller master controller 15 that 14 actions are indicated.In addition, master controller 15 is controlled the flexible of cylinder 10 after the detection signal input of oscillation gauge 8.
In the case of the detected value of oscillation gauge 8 be more than predefined threshold value, master controller 15 is judged as detection means 6 and foreign matter on sheet material 2 or contacts because being positioned at the sheet material 2 that the foreign matter of below protrudes, and makes by this detection means 6 rotate.In this case, for fear of because contacting die head 1 is damaged with foreign matter or sheet material 2, will apply emergent stopping.Threshold value in oscillation gauge 8 is adjusted to optimal value in each operation.
Accelerate once start die head 1 in coating, in detection means 6, the inertia force effect because of self has revolving force.Certainly, by detection means 6 being carried out to pivotal support at center of gravity place, should be able to make the revolving force that produces because of inertia as far as possible little, but be difficult to not act on completely revolving force.Therefore, in this coating unit, in the time that framework 3 accelerates, utilize force application component 9 while acceleration to suppress the swing of detection means 6, thus the sensitivity that foreign matter is detected.
In more detail, using this coating unit sheet material 2 is applied in the situation that, first, framework 3 is being configured in to the upstream end of moving direction A, thereby makes die head 1 and detection means 6 be positioned at the outside of sheet material 2.Then, cylinder 10 is extended, will speed up time, force application component 9 is pressed into detection means 6.Then, start linear motor 5, before die head 1 arrival will be applied to coating P the front end of scope of sheet material 2, accelerate to the coating speed pre-set for each operation with constant acceleration.After servo controller 14 has confirmed that the speed of linear motor 5 arrives the coating speed of regulation, wait for excessively completely pre-set time delay for each operation, cylinder 10 is shunk, thereby while making to accelerate, force application component 9 separate with detection means 6.
Utilize lower end that locating part 7 prevents detection means 6 towards the direction rotation separating with die head 1.In addition, in the time accelerating, force application component 9 is pressed into detection means 6 by will speed up time, can also suppress the lower end of detection means 6 towards the direction rotation near die head 1.The unbalanced rotation causing of the moment of inertia of the detection means 6 by this, can avoid producing because of acceleration time exceedes the so very large displacement of threshold value in oscillation gauge 8.Certainly, the spring force of force application component 9 must be the degree that allows can to utilize oscillation gauge 8 to detect and exceed the swing of the such detection means 6 of the displacement of threshold value in the time of physical presence foreign matter when acceleration.
In addition, even if finish to accelerate at linear motor 5, and start to move with constant speed, in a lot of situations, because of inertia or the elastic force etc. of framework 3 or each member, can make the speed of back shaft 13 postpone or follow overshoot and undershoot with respect to the speed of linear motor 5.Therefore, master controller 15 is confirming that linear motor 5 arrives after coating speed, and is waiting for that the speed that can predict actual back shaft 13 is after having crossed substantially invariable time delay, and while making to accelerate, force application component 9 separates with detection means 6.In addition, comparatively it is desirable to, set the acceleration of linear motor 5 etc., thereby after having crossed time delay, die head 1 starts to carry out the coating of coating P.
In the time that framework 3 slows down, in detection means 6, also effect has the revolving force producing because of inertia.But, conventionally, can not make die head 1 stop on sheet material 2, therefore, stop, just do not need to utilize the swing of detection means 6 to detect foreign matter as long as framework 3 is slowed down after detection means 6 arrives the outside of sheet material 2.But, if die head 1 is stopped on sheet material 2, comparatively it is desirable to, in the time slowing down, also make cylinder 10 extend force application component 9 and detection means 6 face contacts will speed up time, thereby suppress the swing of detection means 6.
In the above-described embodiment, also can will speed up time force application component 9 and usually time force application component 11 integrated.For example, usually time, make state and detection means 6 butts of a spring to compress a little, come to offset with the spring force of oscillation gauge 8, in the time accelerating, make state and detection means 6 butts of identical spring significantly to compress, suppress the rotation of the detection means 6 producing because of inertia.
In addition, if oscillation gauge 8 is the sensors that do not act on the contactless grade of revolving force in detection means 6, usually time force application component 11 as long as can bring into play the minimal recuperability that makes detection means 16 get back to erectility.Also can, by making the gravity center eccentric of back shaft 13 and detection means 6, apply with the spring force of oscillation gauge 8 and offset and make detection means 6 to return to the such revolving force of erectility, thereby omit force application component 11 when usual.
In addition, the present invention also can be applicable to the coating unit that the platform that sheet material is supported is moved with respect to fixing die head.
Claims (5)
1. a coating unit, moves die head sheet material is applied, and it is characterized in that having:
Detection means, this detection means be configured to lower end in the direct of travel front of described die head near described sheet material, and can swing towards the mode of described die head one side shifting with lower end;
Locating part, this locating part and described detection means butt, prevent that the lower end of described detection means is towards the such swing of a side shifting contrary to described die head;
Oscillation gauge, this oscillation gauge detects the swing of described detection means;
Force application component when acceleration, when this acceleration, force application component can be pressed into described locating part by described detection means; And
Face contact device, in the time that described die head accelerates, force application component and described detection means face contact when described face contact device makes described acceleration.
2. coating unit as claimed in claim 1, is characterized in that, described face contact device is after the acceleration of described die head finishes, and after having passed through predefined time delay, while making described acceleration, force application component separates with described detection means.
3. coating unit as claimed in claim 1 or 2, is characterized in that, described oscillation gauge detects the swing of described detection means as continuous quantity.
4. coating unit as claimed any one in claims 1 to 3, is characterized in that, has all the time described detection means force application component when the described locating part application of force usual.
5. the coating unit as described in any one in claim 1 to 4, is characterized in that, described detection means is become can swing by pivotal support at its position of centre of gravity.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013008510A JP5714616B2 (en) | 2013-01-21 | 2013-01-21 | Coating equipment |
| JP2013-008510 | 2013-01-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103934165A true CN103934165A (en) | 2014-07-23 |
| CN103934165B CN103934165B (en) | 2016-01-13 |
Family
ID=51182190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310064345.9A Active CN103934165B (en) | 2013-01-21 | 2013-02-28 | Coating unit |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5714616B2 (en) |
| KR (1) | KR101561336B1 (en) |
| CN (1) | CN103934165B (en) |
| TW (1) | TWI519352B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7316331B2 (en) * | 2021-09-02 | 2023-07-27 | 株式会社Ｓｃｒｅｅｎホールディングス | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1739865A (en) * | 2004-08-27 | 2006-03-01 | 大日本网目版制造株式会社 | Base plate processing device |
| JP2006198460A (en) * | 2005-01-18 | 2006-08-03 | Toppan Printing Co Ltd | Coater and coating method |
| JP2006224089A (en) * | 2005-01-18 | 2006-08-31 | Toppan Printing Co Ltd | Device and method for coating |
| CN1919767A (en) * | 2005-08-23 | 2007-02-28 | 东京应化工业株式会社 | Applying device |
| JP2008107217A (en) * | 2006-10-26 | 2008-05-08 | Seiko Epson Corp | Foreign matter detection method, foreign matter detecting device, and droplet discharge device |
| JP2009061395A (en) * | 2007-09-06 | 2009-03-26 | Tokyo Ohka Kogyo Co Ltd | Coating device and method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4490779B2 (en) * | 2004-10-04 | 2010-06-30 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP2008151603A (en) * | 2006-12-15 | 2008-07-03 | Chugai Ro Co Ltd | Foreign matter detection device |
-
2013
- 2013-01-21 JP JP2013008510A patent/JP5714616B2/en active Active
- 2013-02-19 KR KR1020130017383A patent/KR101561336B1/en active IP Right Grant
- 2013-02-21 TW TW102105999A patent/TWI519352B/en active
- 2013-02-28 CN CN201310064345.9A patent/CN103934165B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1739865A (en) * | 2004-08-27 | 2006-03-01 | 大日本网目版制造株式会社 | Base plate processing device |
| JP2006198460A (en) * | 2005-01-18 | 2006-08-03 | Toppan Printing Co Ltd | Coater and coating method |
| JP2006224089A (en) * | 2005-01-18 | 2006-08-31 | Toppan Printing Co Ltd | Device and method for coating |
| CN1919767A (en) * | 2005-08-23 | 2007-02-28 | 东京应化工业株式会社 | Applying device |
| JP2008107217A (en) * | 2006-10-26 | 2008-05-08 | Seiko Epson Corp | Foreign matter detection method, foreign matter detecting device, and droplet discharge device |
| JP2009061395A (en) * | 2007-09-06 | 2009-03-26 | Tokyo Ohka Kogyo Co Ltd | Coating device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201429558A (en) | 2014-08-01 |
| JP2014138917A (en) | 2014-07-31 |
| CN103934165B (en) | 2016-01-13 |
| TWI519352B (en) | 2016-02-01 |
| JP5714616B2 (en) | 2015-05-07 |
| KR20140094402A (en) | 2014-07-30 |
| KR101561336B1 (en) | 2015-10-16 |
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