JPS61270519A - Protective device of gas bearing - Google Patents

Protective device of gas bearing

Info

Publication number
JPS61270519A
JPS61270519A JP11368685A JP11368685A JPS61270519A JP S61270519 A JPS61270519 A JP S61270519A JP 11368685 A JP11368685 A JP 11368685A JP 11368685 A JP11368685 A JP 11368685A JP S61270519 A JPS61270519 A JP S61270519A
Authority
JP
Japan
Prior art keywords
gas
gas bearing
lubricating oil
bearing
pot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11368685A
Other languages
Japanese (ja)
Other versions
JPH0242128B2 (en
Inventor
Teruhiro Nakamura
彰宏 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP11368685A priority Critical patent/JPS61270519A/en
Publication of JPS61270519A publication Critical patent/JPS61270519A/en
Publication of JPH0242128B2 publication Critical patent/JPH0242128B2/ja
Granted legal-status Critical Current

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To prevent seizure phenomenon due to the shortage of gas in the captioned gas bearing by supplying lubricating oil, in case of shortage of gas in the gas bearing, into the gas bearing for operating said gas bearing as a lubricating oil bearing. CONSTITUTION:Gas is supplied into a gas bearing 1 through duct lines B, B-2, B-3. A duct line B-1, at one end thereof, is intercommunicated with a duct line B-3 while at the other end thereof with the upper end part of a pot 2 through a check valve C-2 and a duct line B-4, at one end thereof, is intercommunicated with the lower end part of the pot 2 while at the other end thereof with a duct line B through a check valve C-1. The upper part of the pot 2 serves as an air chamber 2a while the lower part thereof, as a receiver of lubricating oil 3. In this case, liquid surface of lubricating oil 4 is set at a lower position, to a predetermined distance l, than that of a junction P between the gas bearing 1 and the conduct line B.

Description

【発明の詳細な説明】 「産業上の利用分野」 この発明は、気体軸受の焼き付は現象を防止する気体軸
受の保護装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a gas bearing protection device for preventing seizure of a gas bearing.

「従来の技術」 気体軸受において、軸の回転中に気体流型が減少したり
、気体圧力が低下したりすると、軸受と軸の隙間で焼き
付は現象が起こる。そこで、従来の保護装置は、このよ
うな場合に予備の気体ホルダから気体を補充し、焼き付
は現象を回避するようにしていた。
``Prior Art'' In gas bearings, when the gas flow rate or the gas pressure decreases while the shaft is rotating, seizure occurs in the gap between the bearing and the shaft. Therefore, in the conventional protection device, in such a case, gas is replenished from a spare gas holder to avoid the seizure phenomenon.

「発明が解決しようとする問題点」 しかしながら、気体ホルダからの気体補充は、軸の回転
中には充分おこなわれないことが多く、特に、軸精度が
高いとこの現象はいっそう顕著になって問題であった。
``Problems to be Solved by the Invention'' However, gas replenishment from the gas holder is often not performed sufficiently while the shaft is rotating, and this phenomenon becomes even more pronounced when the shaft accuracy is high. Met.

したがって、従来の保護装置は、焼き付は現象を充分に
回避し得ないという欠点があった。
Therefore, the conventional protection device has the disadvantage that the phenomenon of burn-in cannot be sufficiently avoided.

この発明は、」二連した事情に鑑みてなされたちので、
焼き付は現象を充分に回避するごとができる気体軸受の
保護装置を提供ずろことを目的としている。
This invention was made in view of two consecutive circumstances.
It is an object of the present invention to provide a gas bearing protection device that can sufficiently avoid the phenomenon of seizure.

「問題点を解決するための手段−1 この発明は上述した問題点を解決するために、気体軸受
の保護装置において、前記気体軸受内の気体が不足した
際には、前記気体軸受内に潤滑M1を供給し、前記気体
軸受を潤滑4[j軸受として動作させる潤滑413供給
部を具備している。
"Means for Solving the Problems-1" In order to solve the above-mentioned problems, the present invention provides a protection device for a gas bearing, in which when the gas in the gas bearing is insufficient, the gas bearing is lubricated. A lubrication 413 supply unit is provided that supplies M1 and causes the gas bearing to operate as a lubrication 4[j bearing.

「作用 」 気体軸受内の気体が不足すると、直ちに、前記気体軸受
が潤滑油軸受として動作する。
"Operation" When the gas in the gas bearing becomes insufficient, the gas bearing immediately operates as a lubricating oil bearing.

「実施例」 以下、図面を参照してこの発明の実施例について説明す
る。
"Embodiments" Hereinafter, embodiments of the present invention will be described with reference to the drawings.

第1図は、この発明の一実施例の構成を示す概略構成図
である。
FIG. 1 is a schematic configuration diagram showing the configuration of an embodiment of the present invention.

図において、1は気体軸受であり、管路B、 B−2,
13−3を介して気体が供給されろようにな−〕でいる
。次に、B−1は一端が管路B−3に連通し、他DM:
が逆止弁C−、、2を介してボット2の上端部?こ連通
している管路てあり、また、l3−4は−・端がボット
2の下端部に連通し、他端が逆止弁C−1を介して管路
Bに連通している管路である。
In the figure, 1 is a gas bearing, and pipes B, B-2,
13-3 so that the gas is supplied. Next, B-1 has one end connected to conduit B-3, and the other DM:
is the upper end of the bot 2 through the check valve C-, 2? 13-4 is a pipe whose end communicates with the lower end of the bot 2 and whose other end communicates with the pipe B via the check valve C-1. It is a road.

」−記ボット2の」一部は空気室2aとなっており、ま
た、ボット2の[パ部には潤滑油3が入れられている。
A part of the bot 2 serves as an air chamber 2a, and a lubricating oil 3 is placed in the bot 2.

この場合、潤滑AI+ 3の液面(」気体軸受Iと管路
Bとの接合点より、所定距離θだけ低い位置Pに設定さ
れている。
In this case, the liquid level of the lubrication AI+3 is set at a position P lower by a predetermined distance θ than the junction point between the gas bearing I and the conduit B.

」二足構成において、管路B−3に気体が送り込まれる
と、この気体が管路B −2−C−3−管路Bなろ経路
を経て気体軸受1に送り込まれろとともに、管路B−1
−・逆止弁C−2を経て空気室2aに送り込まれろ。こ
の場合、各管路B、B−1〜B−4内の圧力と空気室2
a内の圧力とは略同−となり、また、潤滑r41] 3
の液面は接合点Pより低い位置に設定されているから、
この潤滑油3が逆止弁C−1を介して流出することはな
い。また、−3= 多少の圧力変動があっても、潤滑油3の液面が低く設定
されているから、不要な潤滑油が流出することはない。
In the two-legged configuration, when gas is fed into the pipe B-3, this gas is fed into the gas bearing 1 through the route B-2-C-3-Pipe B, and also into the gas bearing 1 through the pipe B-3. 1
- Sent into the air chamber 2a via the check valve C-2. In this case, the pressure in each pipe B, B-1 to B-4 and the air chamber 2
The pressure in a is approximately the same as that in a, and the lubrication r41] 3
Since the liquid level is set lower than the junction point P,
This lubricating oil 3 will not flow out via the check valve C-1. -3 = Even if there is some pressure fluctuation, the liquid level of the lubricating oil 3 is set low, so unnecessary lubricating oil will not flow out.

すなわち、この状態においては、気体軸受1内には気体
のみが供給される。
That is, in this state, only gas is supplied into the gas bearing 1.

一方、気体軸受Iの回転中に、何等かの原因で管路B−
3への気体供給が断たれろと、管路B、B〜1〜B−3
内の圧力が空気室2a内の圧力に対して低い圧力となり
、この結果、ボット2内の潤滑油3が空気室2aの圧力
によって押し出され、逆止弁(、−1、管路Bを介して
気体軸受1に流入する。すなわち、この実施例において
は、気体軸受1内の圧力が低下すると、即座に潤滑油3
が流入し、これによって、気体軸受1を潤滑油軸受とし
て動作させる。
On the other hand, during the rotation of the gas bearing I, for some reason the pipe B-
3, the gas supply to pipes B, B~1~B-3 is cut off.
The pressure inside becomes lower than the pressure inside the air chamber 2a, and as a result, the lubricating oil 3 inside the bot 2 is pushed out by the pressure of the air chamber 2a, and the lubricating oil 3 inside the bot 2 is pushed out through the check valve (, -1, pipe B). In other words, in this embodiment, when the pressure inside the gas bearing 1 decreases, the lubricating oil 3 immediately flows into the gas bearing 1.
flows in, thereby causing the gas bearing 1 to operate as a lubricating oil bearing.

第2図は、この実施例の一変形例の構成を示す概略構成
図であり、第1図の各部と対応する部分には同一の符号
を付しその説明を省略する。
FIG. 2 is a schematic configuration diagram showing the configuration of a modified example of this embodiment, and parts corresponding to those in FIG.

この変形例が上記実施例と異なる点は、逆止弁C−1に
代えて電磁弁5を設け、この電磁弁5の開閉を管路B−
2内の圧力を検出する圧力検出器6、あるいは、図示せ
ぬ停電検出器によって制御ずろようにした点である。こ
の場合、圧力検出器6(J管路B−2内の圧力(すなわ
ち、気体軸受I内の圧力)が設定圧力以下になったとき
に切替わるスイッチを有しており、このスイッチが切替
わった時に、電磁弁5を開状態とするようになっている
。また、停電検出回路によって停電が検出された場合に
も電磁弁5を開状態にするようになっているが、人為的
に電源スイッチが切られた場合には、バッテリ等1こよ
って電磁弁5の駆動をバックアップし、これによって電
磁弁5を開状態としないようになっている。
This modification differs from the above embodiment in that a solenoid valve 5 is provided in place of the check valve C-1, and the opening and closing of this solenoid valve 5 is controlled by the pipe B-1.
2 or a power outage detector (not shown). In this case, the pressure detector 6 has a switch that is switched when the pressure in the J pipe B-2 (that is, the pressure in the gas bearing I) falls below the set pressure. When a power failure occurs, the solenoid valve 5 is opened.Also, when a power failure is detected by the power failure detection circuit, the solenoid valve 5 is opened. When the switch is turned off, the battery or the like 1 backs up the driving of the solenoid valve 5, thereby preventing the solenoid valve 5 from opening.

この変形例においては、電磁弁5を用いる電気的な開閉
制御であるため、制御の確実性が高いという利点が得ら
れる。
In this modification, since the opening/closing control is electrical using the solenoid valve 5, there is an advantage that the control is highly reliable.

なお、上記各実施例において、逆止弁C−1の出側、あ
るいは、電磁弁5の出側?こ噴霧ノズル等を設け、潤滑
油3をオイルミスト状にして気体軸受1内に供給するよ
うにしてもよい。
In each of the above embodiments, the outlet side of the check valve C-1 or the outlet side of the solenoid valve 5? A spray nozzle or the like may be provided to supply the lubricating oil 3 in the form of oil mist into the gas bearing 1.

さらに、」−述したボット2等の潤滑油供給手段に代え
て、ポンプ、電動ピストン等を用いて電気的に潤滑油を
供給する液体供給装置を設(プるようにしてらよい。
Furthermore, instead of the lubricating oil supplying means such as the bot 2 described above, a liquid supplying device that electrically supplies lubricating oil using a pump, an electric piston, etc. may be provided.

「発明の効果、1 以」二説明したように、この発明によれば、気体′軸受
の保護装置において、前記気体軸受内の気体が不足した
際には、前記気体軸受内に潤滑7111をイバ給し、1
1訂記気体軸受を潤滑油軸受として動作させろ潤滑油供
給部を具備したので、緊急時においては、気体軸受を瞬
時に潤滑油軸受とすることができ、気体軸受の保護動作
が極めて確実となる利点が得られろとともに、以下に述
べろ種々の効果を有している。
As explained in "Effects of the Invention, 1 and 2", according to the present invention, in the gas bearing protection device, when the gas in the gas bearing is insufficient, the lubricant 7111 is automatically inserted into the gas bearing. supply, 1
1st Edition Make the gas bearing operate as a lubricant bearing.Since it is equipped with a lubricant supply section, in an emergency, the gas bearing can instantly be used as a lubricant bearing, making the protective operation of the gas bearing extremely reliable. In addition to the advantages, it also has various effects as described below.

■簡易な部品の組み合わせによって構成可能であるとと
もに、既存の製品に取りイζ]けろことが容易である。
■It can be configured by combining simple parts, and can be easily adapted to existing products.

■潤滑油軸受として動作したのちにおいて、長時間が経
過しても、その動作が安定しており信頼性が高い。
■Even after operating as a lubricant bearing, its operation is stable and highly reliable even after a long period of time.

■保守管理が容易である。■Easy to maintain and manage.

■清ff1な潤滑油を用いれば、再び気体軸受として使
用する際においても、手間が入らない。
■If you use clean lubricating oil, it will not take much effort even when you use it as a gas bearing again.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例の構成を示す概略構成図、
第2図(J同実施例の一変形例を示す概略構成図である
。 2・・・ポット(潤滑油供給部)、3・ ・潤滑油、5
 ・電磁弁(潤滑油供給部)、6 ・・・圧力検出器(
潤滑油供給部)、C−1、(、−2、C−3−・・逆止
弁(潤滑油供給部)。
FIG. 1 is a schematic configuration diagram showing the configuration of an embodiment of the present invention;
FIG. 2 (J is a schematic configuration diagram showing a modified example of the same embodiment. 2... Pot (lubricating oil supply section), 3... Lubricating oil, 5
・Solenoid valve (lubricating oil supply part), 6...pressure detector (
Lubricating oil supply section), C-1, (, -2, C-3-... Check valve (lubricating oil supply section).

Claims (3)

【特許請求の範囲】[Claims] (1)気体軸受の保護装置において、前記気体軸受内の
気体が不足した際には、前記気体軸受内に潤滑油を供給
し、前記気体軸受を潤滑油軸受として動作させる潤滑油
供給部を具備することを特徴とする気体軸受の保護装置
(1) The gas bearing protection device includes a lubricating oil supply unit that supplies lubricating oil into the gas bearing and causes the gas bearing to operate as a lubricant bearing when the gas in the gas bearing is insufficient. A gas bearing protection device characterized by:
(2)前記潤滑油供給部は、上部に空間を残すようにし
て潤滑油が入れられているポットと、このポットの上端
部と気体供給管路との間を連通する第1の管路と、前記
ポットの下端部と前記気体軸受の気体吸入口との間を連
通する第2の管路と、前記第1の管路に設けられ前記空
間内の気体が前記気体供給管路に流れないようにする逆
止弁とを具備することを特徴とする特許請求の範囲第1
項記載の気体軸受の保護装置。
(2) The lubricating oil supply section includes a pot containing lubricating oil with a space left in the upper part, and a first pipe line communicating between the upper end of the pot and the gas supply pipe line. , a second conduit communicating between the lower end of the pot and the gas inlet of the gas bearing; and a second conduit provided in the first conduit so that the gas in the space does not flow into the gas supply conduit. Claim 1 characterized in that it comprises a check valve that makes the
Protective device for gas bearings as described in section.
(3)前記潤滑油供給部は、前記気体軸受に供給される
潤滑油をオイルミスト状にする噴霧装置を具備すること
を特徴とする特許請求の範囲第1項記載の気体軸受の保
護装置。
(3) The gas bearing protection device according to claim 1, wherein the lubricating oil supply section includes a spraying device that turns the lubricating oil supplied to the gas bearing into an oil mist.
JP11368685A 1985-05-27 1985-05-27 Protective device of gas bearing Granted JPS61270519A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11368685A JPS61270519A (en) 1985-05-27 1985-05-27 Protective device of gas bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11368685A JPS61270519A (en) 1985-05-27 1985-05-27 Protective device of gas bearing

Publications (2)

Publication Number Publication Date
JPS61270519A true JPS61270519A (en) 1986-11-29
JPH0242128B2 JPH0242128B2 (en) 1990-09-20

Family

ID=14618608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11368685A Granted JPS61270519A (en) 1985-05-27 1985-05-27 Protective device of gas bearing

Country Status (1)

Country Link
JP (1) JPS61270519A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008238144A (en) * 2007-03-29 2008-10-09 Toray Eng Co Ltd Apparatus and method for applying coating liquid

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008238144A (en) * 2007-03-29 2008-10-09 Toray Eng Co Ltd Apparatus and method for applying coating liquid

Also Published As

Publication number Publication date
JPH0242128B2 (en) 1990-09-20

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