JP2006062024A - Mist generation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably maintain mist discharge pressure corresponding to the change of an oil hole diameter accompanying the replacement of a tool, to additionally increase mist discharge quantity adapted to the large sized tool, and to enable minimum quantity lubrication (MQL) working of a small diameter drill, etc. <P>SOLUTION: This device is provided with an injector 11 for generating mist by receiving gas from a gas supply source 20 and supply of liquid within a container 1 and injecting the mist into the container 1, and a conduit 7 for leading out the mist within the container 1 from the container 1. In the device, an auxiliary mist generation part 40 is provided on the downstream side of the injector 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a mist generating device that supplies gas and liquid to generate mist in a container, and transports the generated mist through a transport channel and sprays it toward an object, and in particular, a machining center, a lathe, etc. The present invention relates to a mist generating device used for generating mist for cooling and lubricating a tool or a workpiece of a machine tool.

  Mist (liquid fine particles contained in gas) is widely used in various technical fields such as inhalers in the field of medicine, humidifiers in the field of daily life, application to cleaning or coating agents, and the like. Mist is also used to cool and lubricate machine tool tools and workpieces. For example, in machining, a high frictional force acts between a tool and a workpiece during machining, and a large amount of heat is generated by this frictional force. It is therefore necessary to reduce the friction between these members using a cooling lubricating medium (cooling lubricant), whereby these members are cooled simultaneously.

  In the past, this type of lubrication and cooling typically used a method of injecting a relatively large amount of the main cooling lubricant toward the processing point. However, in this case, on the other hand, the excessively supplied cooling lubricant scatters to the surroundings, deteriorating the working environment, and a large amount of cooling lubricant is consumed. On the other hand, for environmental reasons, the used cooling lubricant has to be disposed of in a complex and costly manner.

In order to cope with such problems, so-called minimum amount lubrication (MQL) processing has been put into practical use in recent years, and a mist generating device that generates mist for cooling and lubricating tools and workpieces has been developed. Has been.
This type of mist generating apparatus generally includes an injector that receives supply of gas and liquid (cooling lubricant) and generates mist in a container, and a conduit that guides the mist from the container. Is sprayed from a nozzle or an oil hole of a tool to a processing point through a mist conveying flow path connected to the conduit.

FIG. 7 is a so-called system curve in which the above-described characteristic curve of the mist generating device and the resistance curve of the transfer channel are written together, and shows an example when the mist generating device is operated under appropriate operating conditions.
7, the solid line curve, the characteristic curve of the mist generating device showing a relationship in a case where the gas supply pressure to the injector and the P _1, discharged air volume and pressure in the container the mist generating device (discharge pressure) A ₁ is shown. Further, dashed curve shows the relationship between the air volume and the pressure loss of the transport channel indicates the resistance curve R ₁ obtained by combining the resistance of the oil hole of the passage and the nozzle or tool.

In this case, the operating point of the mist generating device is an intersection (operating point C ₁ ) that is a balance point between the characteristic curve A ₁ and the resistance curve R ₁ , and the container internal pressure (discharge pressure) of the mist generating device is P ₂ , mist air volume to be injected into the container from the mist air volume and injector ejected from the mist generating device, both the Q _1.

  When the mist generating device described above is used in a machine tool such as a machining center, the machine tool injects the mist to the processing point through the oil hole of the tool and automatically changes the tool for each processing. Yes. For this reason, the diameter of the oil hole of the tool is different every time the size of the tool is different, and the discharge pressure and the injection speed of the mist injected from the oil hole of the tool to the machining point change.

FIG. 8 shows a case where the mist generating device is operated by replacing the tool with a large oil hole diameter from the proper operation state shown in FIG. 7, that is, the resistance (resistance curve R ₂ ) of the transfer channel is from the proper operation state. The case where it becomes small is shown. Gas supply pressure P ₁ and the resistance curve R ₁ to the injector is the same as in FIG. At this time, the mist generating device is driven at a driving point C _2, container internal pressure (discharge pressure) of the mist generator is injected into P _3, inside the container from the mist air volume and injector discharged from the mist generator device mist airflow that is, as in the case of FIG. 7, both the Q _1.

As can be seen with reference to FIG. 8, in this case, discharge pressure P ₃ of the mist to be injected into the processing point from the oil hole of the tool, is smaller than that discharged in the pressure P ₂ in the proper operating point End up. Therefore, the injection speed of the mist injected from the oil hole of the tool to the processing point becomes slow, and there arises a problem that the adherence of the mist to the processing point and the ability to exclude chips and the like are reduced. Further, particularly in the case of a large size tool, there is a problem that the amount of mist discharged is insufficient with respect to the tool size and may cause machining defects.

FIG. 9 shows a case where the mist generating device is operated by exchanging the tool with a small oil hole diameter from the proper operation state shown in FIG. 7, that is, the resistance (resistance curve R ₃ ) of the transfer channel is from the proper operation state. The case where it becomes large is shown. Gas supply pressure P ₁ and the resistance curve R ₁ to the injector is the same as in FIG. At this time, the mist generating device is operated at the operating point C ₃ , and the container internal pressure (discharge pressure) of the mist generating device is P ₄ , and the amount of mist air discharged from the mist generating device and the injector is injected into the container. mist air volume that is, both the _{Q 2.}

As it can be seen with reference to FIG. 9, in this case, with respect to the gas supply pressure P ₁ to the injector, the ratio of the gas supply pressure P ₁ of the container pressure P ₄ is high becomes too (container pressure P ₄ P _{4 /} P ₁ is too large), sufficient gas flow rates required to mist generation can not be obtained by the injector inside. Therefore, thin inadequate mist concentrations in the injector only be generated, also, mist air volume Q ₂ to which is injected into the container from the injector also becomes smaller as compared with the mist air volume Q ₁ at the time of proper operation End up.

Therefore, the amount of mist (liquid fine particles) discharged from the mist generating device (product of mist air volume and concentration injected from the injector into the container) becomes very small, and it is used for tool cooling and lubrication. The problem arises that the cooling capacity and lubrication capacity are extremely reduced.
In such a case, for example, there is no problem as long as the oil hole diameter of the tool can be increased to reduce the resistance of the transfer flow path, but in the case of a tool with a thin outer diameter such as a small diameter drill, there are dimensional restrictions. For this reason, it is generally difficult to increase the oil hole diameter. Therefore, there are many cases where the minimum amount lubrication (MQL) processing cannot be applied to a small diameter drill or the like.

  The present invention has been made in view of the above circumstances, and stably maintains the mist discharge pressure in response to a change in the oil hole diameter accompanying the tool change, and is adapted to a large size tool. It is an object of the present invention to provide a mist generating apparatus that can increase the amount of the mist generation and enables minimum amount lubrication (MQL) processing such as a small diameter drill.

In order to achieve the above object, a mist generating apparatus according to the present invention is configured to receive a gas from a gas supply source and a liquid in a container to generate a mist and inject the mist into the container, and the mist in the container. In the mist generating apparatus provided with a conduit for discharging the gas from the container, an auxiliary mist generating part is provided on the downstream side of the injector.
By configuring the mist generating device as described above, the auxiliary mist generating unit additionally increases the amount of mist as necessary, thereby reducing the risk of machining defects due to insufficient mist for large tools and the like. It can be avoided.

It is preferable that the auxiliary mist generating unit is provided in a mist transporting channel that is connected to the conduit and transports mist. Thereby, an auxiliary mist generating unit can be additionally provided in an existing mist generating device as necessary, which is economical.
It is preferable that the auxiliary mist generating unit is composed of a connector having a jet port for spraying the carrier gas / liquid mixed fluid sent from the carrier gas / liquid mixing unit into the mist transporting channel. With such a simple configuration, the auxiliary mist generating part (connector) can be provided in the mist transport flow path inexpensively and easily.

  The carrier gas / liquid mixing unit includes a constant ratio pressure reducing valve or a constant pressure reducing valve for reducing the carrier gas to a constant ratio or a differential pressure with respect to the gas supply pressure to the injector, and the reduced carrier gas. It is preferable to have a positive displacement pump that injects liquid into the flow.

  By configuring the carrier gas / liquid mixing part in this way, the carrier gas to the auxiliary mist generating part is passed through the constant pressure reducing valve or the constant pressure reducing valve in accordance with the change of the gas supply pressure to the injector. The pressure automatically becomes the appropriate pressure. This eliminates the need for complicated adjustment of the carrier gas supply pressure, and improves the usability of the mist generating device. The ratio of the carrier gas supply pressure to the auxiliary mist generator and the gas supply pressure to the injector is somewhat different depending on the characteristics of the mist generator, but is preferably set to about 0.6 to 0.8. Further, the differential pressure between the carrier gas supply pressure to the auxiliary mist generator and the gas supply pressure to the injector is somewhat different depending on the characteristics of the mist generator, but is preferably set to about 0.15 to 0.25 MPa. .

  The auxiliary mist generating unit is branched and transferred from the gas supply path to the injector, and has a constant ratio or differential pressure with respect to the gas supply pressure to the injector via a constant ratio pressure reducing valve or a constant pressure reducing valve. It is preferable that the auxiliary mist is sprayed into the container in response to the supply of the carrier gas depressurized to the above pressure and the liquid in the container.

  With this configuration, the pressure of the carrier gas to the auxiliary mist generating unit is automatically set appropriately via the constant ratio pressure reducing valve or the constant ratio pressure reducing valve as the gas supply pressure to the injector is changed. Pressure. This eliminates the need for complicated adjustment of the carrier gas supply pressure, and improves the usability of the mist generating device. The ratio of the carrier gas supply pressure to the auxiliary mist generator and the gas supply pressure to the injector is somewhat different depending on the characteristics of the mist generator, but is preferably set to about 0.6 to 0.8. Further, the differential pressure between the carrier gas supply pressure to the auxiliary mist generator and the gas supply pressure to the injector is somewhat different depending on the characteristics of the mist generator, but is preferably set to about 0.15 to 0.25 MPa. .

  The auxiliary mist generating unit branches from a liquid supply path that supplies the liquid in the container to the injector, and is connected to an auxiliary liquid supply path that sucks the liquid in the container by suction. It is preferable that a valve device or a check valve is provided inside or on the outlet side.

  According to such a mist generating device, the supply amount of the liquid to the injector and the auxiliary mist generating unit can be adjusted in conjunction, and the mist generating device can be manufactured at low cost. Further, when the pressure in the container becomes higher than the carrier gas supply pressure to the auxiliary mist generating unit, a check valve set on the valve device or the outlet side installed in the auxiliary liquid supply path is provided. By closing, the back pressure from the auxiliary mist generating part to the liquid supply path can be shut off.

  Another mist generating apparatus according to the present invention is configured to receive a gas from a gas supply source and a liquid in a container, generate a mist, and inject the mist in the container from the container. A relief flow path downstream of the injector, and a constant ratio or differential pressure with respect to the gas supply pressure to the injector in the relief flow path. A fixed ratio relief valve or a constant difference relief valve that operates is provided.

  According to such a mist generating device, even when the resistance of the transfer flow path is too large, the constant ratio relief valve or the constant difference relief valve installed in the relief flow path provided on the downstream side of the injector allows The pressure (discharge pressure) automatically becomes an appropriate pressure, whereby an effective mist with a high concentration is generated, and minimum amount lubrication (MQL) processing such as a small diameter drill can be performed satisfactorily. The ratio between the operating pressure of the constant ratio relief valve and the gas supply pressure to the injector is slightly different depending on the characteristics of the mist generating device, but is preferably set to about 0.6 to 0.8. Further, the differential pressure between the operating pressure of the differential pressure relief valve and the gas supply pressure to the injector is slightly different depending on the characteristics of the mist generating device, but is preferably set to about 0.15 to 0.25 MPa.

Still another mist generating apparatus according to the present invention includes an injector that receives supply of gas from a gas supply source and liquid in a container to generate mist and injects the mist into the container, and the mist in the container from the container. In the mist generating apparatus including the conduit to be led out, the injector includes a Laval nozzle having a liquid inlet provided immediately after the throat.
In this way, the gas flow for generating mist inside the injector (Laval nozzle) can be obtained by configuring the injector with a Laval nozzle (Suehiro nozzle) provided immediately after the throat (the narrowest part of the nozzle) at the liquid inlet. It is possible to generate a high-concentration mist with a fine particle diameter by dividing the liquid supplied into the injector at a supersonic speed and atomizing it.

You may arrange | position the foaming board comprised by the open cell in the position facing the exit of the said injector. Thereby, the mist having a fine particle diameter out of the mist injected from the injector flows through the foamed plate or is deflected and floats in the container. It is absorbed and condensed by the foam plate and falls into the container. Therefore, a mist is generated in which the particle size distribution is concentrated at a high density on a very small diameter.
In addition, it is preferable that the said foaming board is a flat sponge of the three-dimensional network structure using only the bone | frame part (removing a film | membrane) of a foam.

  Still another mist generating apparatus according to the present invention includes an injector that receives supply of gas from a gas supply source and liquid in a container to generate mist and injects the mist into the container, and the mist in the container from the container. In the mist generating apparatus including the conduit for leading out, the injector is configured to suck the liquid in the container into the injector by suction through the liquid supply path, and in the liquid supply path A float type flow meter and a sensor for detecting float float are provided.

  According to such a mist generating device, it is possible to confirm that the liquid is sucked into the injector by detecting the floating of the float of the flow meter by the sensor. Furthermore, the fact that the liquid is sucked into the injector means that the gas for generating mist is flowing inside the injector, thereby indirectly generating mist normally in the injector. Thus, it is possible to remotely monitor the discharge from the mist generating device, and the reliability of the mist generating device can be improved.

  According to the mist generating device of the present invention, by providing an auxiliary mist generating portion on the downstream side of the injector, it is possible to automatically discharge properly to a tool such as a drill having a large oil hole diameter (low flow resistance). It is possible to operate at high pressure, which improves usability and increases the amount of mist as required, so that the application range of minimum amount lubrication (MQL) machining for large tools Spread.

  Further, according to the mist generating apparatus of the present invention, a constant ratio relief valve or a constant difference relief valve is provided in the relief flow path branched from the mist transport flow path so that the pressure in the container (discharge pressure) is automatically appropriate. By creating a high pressure mist, it automatically operates at an appropriate discharge pressure for a tool such as a drill with a small oil hole diameter (large flow path resistance). Can do. As a result, a sufficient mist discharge amount can be obtained even for a tool having a large flow path resistance such as a small diameter drill, and the application range of the minimum amount lubrication (MQL) processing to a small diameter drill or the like is expanded.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a diagram showing a schematic configuration of a mist generating apparatus according to a first embodiment of the present invention. This mist generating device has a container 1 that houses a liquid supply source (oil source) 2 for supplying a liquid cooling lubricant such as oil in the lower part thereof. The container 1 is configured as a pressure container covered with a cover 3.

  In a space 4 in the container 1 formed above the oil source 2, an injector 11 is fixedly provided on the cover 3, and receives supply of pressurized air (gas) and oil (liquid). The mist injected from the injector 11 stays in the space 4. In this example, a Laval nozzle (a divergent nozzle) in which a liquid inlet 14 is provided immediately after a throat (narrowest portion) 12 is used as the injector 11. That is, the pressurized air (gas) is supplied to the injector 11 through the gas supply path 5. Then, after the pressurized air passes through the throat 12 of the injector 11, the pressure becomes minimum, and then the pressure rapidly rises and then gradually rises to the outlet 13 of the injector 11. As a result, a suction force is generated in the liquid inlet 14 provided immediately after the throat 12 of the injector 11, and oil is sucked from the oil source 2 into the injector 11 through the liquid supply path 6 by this suction force. The

  In this way, by configuring the injector 11 with a Laval nozzle (a divergent nozzle) in which the liquid inlet 14 is provided immediately after the throat 12, the gas flow for generating mist inside the injector (Laval nozzle) 11 is supersonic. The liquid supplied from the liquid inlet 14 into the injector 11 can be divided and atomized at a supersonic speed to generate a high-concentration mist with a small particle diameter.

The injector 11 mixes the pressurized air and oil in the expansion pipe 15 and injects it as mist. Below the outlet 13 of the injector 11, for example, a foam plate 16 made of a flat sponge composed of open cells of a three-dimensional network structure using only the bone part of the foam (removing the film) is disposed. ing. The foam plate 16 is suspended and held from the cover 3 by a suspension rod 17. As a result, the mist having a fine particle diameter out of the mist injected from the injector 11 flows through the foam plate 16 while being deflected and floats in the container 1. It is absorbed and condensed by the plate 16 and falls into the container 1. Therefore, a mist is generated in which the particle size distribution is concentrated at a high density on a very small diameter.
The cover 3 is provided with a conduit 7 for leading the mist in the space 4 from the container 1 and a pressure gauge 60 for confirming the pressure (discharge pressure) in the container.

  A float type flow meter 8 is provided in the liquid supply path 6 extending from the oil source 2 to the injector 11. The flow meter 8 is provided with a flow rate instruction unit 8a and a backflow prevention mechanism 8b. The liquid supply path 6 is provided with a variable throttle valve 9 for adjusting the flow rate of the oil supplied to the injector 11 and a sensor 10 for detecting the floating of the float 8c of the flow meter 8.

  Thus, by providing the flowmeter 8 with the backflow prevention mechanism 8b, the oil in the liquid supply path 6 is prevented from returning to the oil source 2 when the mist generating device is stopped, and the liquid supply path 6 is always filled with oil. It can be in the state that was done. Further, as described above, the injector 11 is configured to suck the oil in the container 1 through the liquid supply path 6 into the injector 11 by a suction action, and a float type is provided in the liquid supply path 6. By providing the flow meter 8 and the sensor 10 that detects the floating of the float 8c, it is possible to remotely monitor that the mist generating device normally generates mist. The sensor 10 is, for example, a proximity switch or a transmissive photoelectric switch, and is selected according to the surrounding environment.

  Gas (pressurized air) is supplied to the injector 11 from a gas supply source (pressurized air supply source) 20 through a gas supply path in which a filter 21, a pressure reducing valve 22, a pressure gauge 23, and a two-port solenoid valve 24 are installed. 5 through. Note that the 2-port solenoid valve 24 is for operating the mist generator to operate and stop, and may be a 2-port manual valve depending on the application.

  One end of a mist transport channel 50 is connected to the conduit 7, and the other end of the mist transport channel 50 is connected to a rotary joint 51 of a machine tool. As a result, the mist 55a is processed from the oil hole 54a of a tool such as a drill 53a having a large oil hole diameter (low flow path resistance) through the mist conveyance flow path 50, the rotary joint 51 of the machine tool and the hollow main shaft 52. It can be injected into.

  A coupler 40 as an auxiliary mist generating unit is installed in the mist transport flow path 50. The spout 41 of the coupler (auxiliary mist generating section) 40 branches from the gas supply path 5 on the downstream side of the two-port solenoid valve 24 to a carrier gas supply path 31 extending inside the carrier gas / liquid mixing section 30. The carrier gas (pressurized air) or the carrier gas / liquid mixed fluid is jetted (sprayed) into the mist transport channel 50 from the jet nozzle 41. A constant ratio pressure reducing valve 32 and a check valve 33 are installed inside the carrier gas supply path 31.

  Here, the pressure reducing valve 22 serves to control the supply pressure of the gas (pressurized air) supplied from the gas supply source 20 to the injector 11, and the constant ratio pressure reducing valve 32 reduces the pressure from the gas supply source 20. It plays the role of controlling the supply pressure of the carrier gas (pressurized air) supplied to the spout 41 of the coupler (auxiliary mist generating unit) 40 via the valve 22. The constant ratio pressure reducing valve 32 is configured to control the secondary pressure of the pressure reducing valve 22 to a pressure reduced to a certain ratio, for example, about 0.6 to 0.8.

  Thereby, with the change of the gas supply pressure to the injector 11, the carrier gas supply pressure to the jet port 41 of the coupler (auxiliary mist generating unit) 40 is automatically set to an appropriate pressure (the gas supply pressure is kept constant). Pressure reduced by the ratio). Thereby, the complicated adjustment of the carrier gas supply pressure to the jet nozzle 41 of the coupler (auxiliary mist generating part) 40 becomes unnecessary, and the usability of the mist generating device can be improved.

  The carrier gas / liquid mixing unit 30 includes a check valve 35 and a positive displacement pump 36 inside, and an oil injection path 34 connected to an oil tank 37. The oil injection path 34 is connected to the check valve 33. The carrier gas supply path 31 merges with the jet port 41 of the container (auxiliary mist generating unit) 40. Thus, by driving the positive displacement pump 36, the oil stored in the oil tank 37 is injected into the carrier gas (pressurized air) flowing along the carrier gas supply path 31.

Next, the case where the machining is performed using the large-diameter drill (tool) 53a in the mist generating apparatus having the above configuration will be described.
Here, when the 2-port solenoid valve 24 is opened and the mist generating device is operated, the pressurized air having the pressure set by the pressure reducing valve 22 flows into the injector 11 through the gas supply path 5 and the constant ratio pressure reducing valve 32. The pressurized air (carrier gas) decompressed to a predetermined ratio with respect to the secondary side pressure of the pressure reducing valve 22 through the carrier gas supply path 31 through the ejection port 41 of the coupler (auxiliary mist generating unit) 40 To be supplied.

  As the pressurized air that has flowed into the injector 11 passes through the throat 12, a suction force is generated at the liquid inlet 14, and the oil in the container 1 is supplied to the oil source 2 through the liquid supply path 6 by this suction force. To the injector 11. In the expansion tube 15, the injector 11 divides oil into fine particles at supersonic speed, mixes pressurized air and oil particles, and injects them as mist. The mist having a fine particle diameter out of the injected mist floats in the space 4 in the container 1, and the mist having a relatively large particle diameter is absorbed and condensed by the foam plate 16 to be the oil source 2 at the lower part of the container 1. Fall into. Therefore, a mist is generated in which the particle size distribution is concentrated at a high density on a very small diameter. The amount of mist (liquid fine particles) generated can be changed by controlling the flow rate of oil flowing into the injector 11 by adjusting the variable throttle valve 9 while looking at the indicated value of the flow meter 8. Used in the minimum amount required. The mist discharged from the conduit 7 is transferred through the internal pressure of the container 1.

The pressurized air (carrier gas) ejected from the ejection port 41 of the coupler (auxiliary mist generating unit) 40 automatically adjusts the internal pressure of the container 1 to an appropriate pressure, and converts the mist in the space 4 into the conduit 7. Accelerate toward the direction of derivation. The operating state of the mist generating device in this case is as follows, the operating point C ₄ next to FIG. 2, mist generating device is operated at a proper operating point, the density of the full play to the ability of the injector 11 Mist is discharged from the conduit 7, and the mist 55a from the oil hole 54a of the large-diameter drill 53a passes through the mist conveyance flow path 50, the coupler 40, the rotary joint 51, and the hollow main shaft 52 at a good injection speed. Be injected.

  If the large-diameter drill 53a is a particularly large drill and the mist discharge amount is insufficient, the positive displacement pump 36 of the carrier gas / liquid mixing unit 30 is driven. Then, the oil in the oil tank 37 is injected into the carrier gas supply path 31 by the positive displacement pump 36, and additional mist is injected from the ejection port 41 of the coupler (auxiliary mist generating unit) 40 in the mist conveying direction, The amount of mist 55a injected from the oil hole 54a of the diameter drill 53a is increased. Here, the adjustment of the additional mist amount is performed by controlling the discharge amount of the positive displacement pump 36 by a control circuit (not shown).

  Thus, the risk of processing defects due to a shortage of mist for a large size tool or the like can be avoided by additionally increasing the amount of mist as required by the coupler (auxiliary mist generating unit) 40. it can.

FIG. 2 is an example of a system curve in the mist generating apparatus shown in FIG. 1, and a case where a drill 53a having a large oil hole diameter is used as a tool, that is, a case where the resistance (resistance curve R ₂ ) of the transfer channel is small. Show. 2, the solid curve A ₂ is a characteristic curve of the mist generating device. The gas supply pressure P ₁ to the injector 11 and the resistance curves R ₁ and R ₂ are the same as in FIG. Here, the constant ratio pressure reducing valve 32 is configured to control the secondary pressure of the pressure reducing valve 22 to a pressure reduced to a certain ratio, for example, about 0.6 to 0.8. Therefore, the ratio P ₂ / P _{1 of} the in-container pressure P _{2 to} the gas supply pressure P ₁ becomes constant (for example, 0.6 to 0.8), and the gas supply pressure P ₁ to the injector 11 is set. Te, container pressure P ₂ becomes automatically optimum pressure.

At this time, the mist generating device is driven at a driving point C _4, container internal pressure (discharge pressure) P ₅ of the mist generator is approximately equal to the container internal pressure _{P 2 (P 5 ≒ P 2} ) becomes. That is, even if the use of tools (drills) oil hole diameter is changed, the pressure P ₅ discharge always optimum mist can be maintained.

Here, the mist flow rate ejected from the mist generating device becomes Q _3. Further, mist air volume to be injected into the container 1 from the injector 11, the imaginary line curve (carrier gas supply pressure to the auxiliary mist generation unit 40 is the characteristic curve of the case of 0) of intersection between container internal pressure P ₂ the _{Q 1} is an air volume. The air volume difference Q ₃ -Q ₁ is an accelerating air volume of mist generated by supplying the carrier gas to the auxiliary mist generating unit 40. This acceleration air volume can increase the spray speed of the mist 55a from the oil hole 54a of the drill (tool) 53a, improve the adhesion of the mist to the processing point, and increase the ability to exclude chips and the like. .

In the example shown in FIG. 1, a constant ratio pressure reducing valve 32 is provided, and the secondary pressure of the pressure reducing valve 22 is controlled to a pressure reduced to a constant ratio. This constant ratio pressure reducing valve 32 is replaced with a constant pressure reducing valve, and the differential pressure reducing valve controls the secondary pressure of the pressure reducing valve 22 to a constant pressure difference, for example, a pressure reduced to about 0.15 to 0.25 MPa. You may make it do. Also by this, the gas supply pressure to the injector 11 is set such that the differential pressure P ₁ -P _{2 of the} internal pressure P ₂ with respect to the gas supply pressure P ₁ is constant (for example, 0.15 to 0.25 MPa). with the setting of the P _1, can be made to vessel pressure P ₂ is automatically optimum pressure.

  FIG. 3 is a diagram showing a schematic configuration of a mist generating apparatus according to the second embodiment of the present invention. 3, parts denoted by the same reference numerals as those in FIG. 1 indicate the same or corresponding parts. The mist generating apparatus of this embodiment has a container 1 that houses a liquid supply source (oil source) 2 that supplies a liquid cooling lubricant such as oil in the lower part thereof. The container 1 is configured as a pressure container covered with a cover 3.

  In a space 4 in the container 1 formed above the oil source 2, an injector 11 is fixedly provided on the cover 3, and receives supply of pressurized air (gas) and oil (liquid). The mist injected from the injector 11 stays in the space 4. In this example, a Laval nozzle (a divergent nozzle) in which a liquid inlet 14 is provided immediately after a throat (narrowest portion) 12 is used as the injector 11. That is, the pressurized air (gas) is supplied to the injector 11 through the gas supply path 5. Then, after the pressurized air passes through the throat 12 of the injector 11, the pressure becomes minimum, and then the pressure rapidly rises and then gradually rises to the outlet 13 of the injector 11. As a result, a suction force is generated in the liquid inlet 14 provided immediately after the throat 12 of the injector 11, and oil is sucked from the oil source 2 into the injector 11 through the liquid supply path 6 by this suction force. The

  The injector 11 mixes the pressurized air and oil in the expansion pipe 15 and injects it as mist. Below the outlet 13 of the injector 11, for example, a foam plate 16 made of a flat sponge composed of open cells of a three-dimensional network structure using only the bone part of the foam (removing the film) is disposed. ing. The foam plate 16 is suspended and held from the cover 3 by a suspension rod 17. The cover 3 is provided with a conduit 7 for leading the mist in the space 4 from the container 1 and a pressure gauge 60 for confirming the pressure (discharge pressure) in the container.

  A float type flow meter 8 is provided in the liquid supply path 6 extending from the oil source 2 to the injector 11. The flow meter 8 is provided with a flow rate instruction unit 8a and a backflow prevention mechanism 8b. The liquid supply path 6 is provided with a variable throttle valve 9 for adjusting the flow rate of the oil supplied to the injector 11 and a sensor 10 for detecting the floating of the float 8c of the flow meter 8.

  Thus, by providing the flowmeter 8 with the backflow prevention mechanism 8b, the oil in the liquid supply path 6 is prevented from returning to the oil source 2 when the mist generating device is stopped, and the liquid supply path 6 is always filled with oil. It can be in the state that was done. Furthermore, by providing the sensor 10 for detecting the floating of the float 8c, it is possible to remotely monitor that the mist generating device normally generates mist. The sensor 10 is a proximity switch or a transmissive photoelectric switch, and is selected according to the surrounding environment.

  Gas (pressurized air) is supplied to the injector 11 from a gas supply source (pressurized air supply source) 20 through a gas supply path in which a filter 21, a pressure reducing valve 22, a pressure gauge 23, and a two-port solenoid valve 24 are installed. 5 through. Note that the 2-port solenoid valve 24 is for operating the mist generator to operate and stop, and may be a 2-port manual valve depending on the application.

  One end of a mist transport channel 50 is connected to the conduit 7, and the other end of the mist transport channel 50 is connected to a rotary joint 51 of a machine tool. As a result, the mist 55b is processed from the oil hole 54b of a tool such as a drill 53b having a small oil hole diameter (large flow path resistance) through the mist transfer flow path 50, the rotary joint 51 of the machine tool, and the hollow main shaft 52. It can be injected into.

  A relief channel 61 is connected to the mist transport channel 50 by branching from the middle. In the relief flow path 61, a constant ratio relief valve 62 and a filter 64 that operate at a constant ratio to the gas supply pressure to the injector 11, for example, a pressure of about 0.6 to 0.8 times. A drain pot 65 is installed. The pilot pressure of the constant ratio relief valve 62 branches from the downstream side of the two-port solenoid valve 24 in the gas supply path 5 from the gas supply source 20 to the injector 11 and is connected to the pilot port 62 a of the constant ratio relief valve 62. The pilot pipe 63 is configured to be guided. The relief flow path 61 may be connected to the space 4 in the container 1.

Next, in the mist generating apparatus having the above configuration, a case where machining is performed using a small diameter drill (tool) 53b will be described.
Here, when the two-port solenoid valve 24 is opened and the mist generating device is operated, pressurized air having a pressure set by the pressure reducing valve 22 flows into the injector 11 via the gas supply path 5 to generate mist. At this time, when the internal pressure of the container 1 rises and reaches a predetermined ratio, for example, about 0.7 times the pressure of the pressurized air (gas) supply pressure to the injector 11, the constant ratio relief valve is automatically set. 62 is operated, and a part of the mist flowing in the mist transporting channel 50 is relieved through the relief channel 61, whereby the pressure in the container 1 is maintained at an appropriate pressure. Here, the mist relieved through the relief channel 61 is separated into air and oil by the filter 64, and the separated air is discharged from the exhaust port 64a. The oil separated by the filter 64 is collected in the drain pot 65 and reused.

The operating state of the mist generating device in this case is as follows, the operating point C ₅ next to FIG. 4, mist generating device is operated at a proper operating point, and sufficient air volume relative to the small diameter drill from the conduit 7 Concentration mist is discharged, and mist 55b is injected from the oil hole 54b of the small-diameter drill 53b to the processing point via the mist conveying flow path 50, the rotary joint 51, and the hollow main shaft 52, and good processing can be performed.

FIG. 4 is an example of a system curve in the mist generating apparatus shown in FIG. 3, and when the drill 53b having a small oil hole diameter is used as a tool, that is, when the resistance (resistance curve R ₃ ) of the transfer channel is too large. to, the stoichiometric relief valve 62 described above, showing the system curve also shown resistance curve of the characteristic curve a ₁ and the conveying passage of the mist generating device at the time of optimizing the pressure (discharge pressure) in the container. In FIG. 4, the gas supply pressure P ₁ to the injector and the resistance (resistance curve R ₃ ) of the transport channel are the same as those shown in FIG. Further, a resistance curve R ₄ in FIG. 4 is a combined resistance curve obtained by synthesizing the resistance of the constant ratio relief valve 62 and the resistance of the transfer channel (resistance curve R ₃ ).

Here, the constant ratio relief valve 62 is configured to operate at a pressure at a constant ratio relative to the gas supply pressure to the injector 11, for example, about 0.6 to 0.8 times. Therefore, the ratio P ₆ / P _{1 of} the in-container pressure P _{6 to} the gas supply pressure P ₁ becomes constant (for example, 0.6 to 0.8), and the gas supply pressure P ₁ to the injector 11 is set. container pressure P ₆ Te becomes automatically optimum pressure.

At this time, the mist generating device is driven at a driving point C _5, container internal pressure (discharge pressure) P ₆ of the mist generating device is always substantially constant. That is, even if the use of tools (drills) oil hole diameter is changed, the pressure P ₆ discharge always optimum mist can be maintained. As a result, a sufficient gas flow rate necessary for generating mist is obtained inside the injector 11, and the mist generated by the injector 11 is excellent in concentration.

Here, the mist flow rate to be injected into the container 1 from the injector 11 is Q _1. Further, the mist generating apparatus, through the mist conveying passage 50, the air volume of the mist 55b ejected from the oil hole 54b of the tool such as a small-diameter drill 53b is container pressure P ₆ and the resistance curve R ₃ of the mist generator device the wind amount Q ₄ at the intersection of the. The air volume difference Q ₁ -Q ₄ is the air volume of the gas released from the constant ratio relief valve 62 to the outside of the container.

4 and FIG. 9, in the case of FIG. 4, the air volume Q _{4 of the} mist 55 b injected from the oil hole 54 b of the tool such as the small-diameter drill 53 b through the mist transport channel 50 from the mist generating device is as shown in FIG. It is slightly reduced from the case of 9. However, the amount of mist air Q ₁ injected from the injector 11 into the container 1 is increased, and a sufficient gas flow rate necessary for generating mist is obtained inside the injector 11. Mist is generated. As a result, the amount of mist (liquid fine particles) discharged from the oil hole 54b of a tool such as a small-diameter drill 53b from the mist generating device 50 through the mist conveying channel 50 (from the mist generating device through the conveying channel). The product of the mist air volume and concentration injected from the oil hole of a tool such as a small diameter drill increases. As a result, a sufficient amount of mist discharge can be obtained for processing of the small diameter drill 53b and the like.

In the example shown in FIG. 3, an example is shown in which the relief flow path 61 is provided with a constant ratio relief valve 62 that operates at a constant pressure relative to the gas supply pressure to the injector 11. The constant ratio relief valve 62 may be replaced with a constant differential relief valve that operates with a constant differential pressure, for example, a differential pressure of about 0.15 to 0.25 MPa, with respect to the gas supply pressure P ₁ to the injector 11. . Also by this, the gas supply pressure to the injector 11 is set such that the differential pressure P ₁ -P _{6 of} the in-container pressure P ₆ with respect to the gas supply pressure P ₁ is constant (for example, 0.15 to 0.25 MPa). with the setting of P _1, it is possible to make container pressure P ₆ is automatically optimum pressure.

  FIG. 5 is a diagram showing a schematic configuration of a mist generating apparatus according to the third embodiment of the present invention. In FIG. 5, the same reference numerals as those in FIG. 1 denote the same or corresponding parts. The mist generating apparatus of this embodiment has a container 1 that houses a liquid supply source (oil source) 2 that supplies a liquid cooling lubricant such as oil in the lower part thereof. The container 1 is configured as a pressure container covered with a cover 3.

  In a space 4 in the container 1 formed above the oil source 2, an injector 11 is fixedly provided on the cover 3, and receives supply of pressurized air (gas) and oil (liquid). The mist injected from the injector 11 stays in the space 4. In this example, a Laval nozzle (a divergent nozzle) in which a liquid inlet 14 is provided immediately after a throat (narrowest portion) 12 is used as the injector 11. That is, the pressurized air (gas) is supplied to the injector 11 through the gas supply path 5. Then, after the pressurized air passes through the throat 12 of the injector 11, the pressure becomes minimum, and then the pressure rapidly increases and then gradually increases to the outlet 13 of the injector 11. As a result, a suction force is generated in the liquid inlet 14 provided immediately after the throat 12 of the injector 11, and oil is sucked from the oil source 2 into the injector 11 through the liquid supply path 6 by this suction force. The

  In this way, by configuring the injector 11 with a Laval nozzle (a divergent nozzle) in which the liquid inlet 14 is provided immediately after the throat 12, the gas flow for generating mist inside the injector (Laval nozzle) 11 is supersonic. The liquid supplied from the liquid inlet 14 into the injector 11 can be divided and atomized at a supersonic speed to generate a high-concentration mist with a small particle diameter.

The injector 11 mixes the pressurized air and oil in the expansion pipe 15 and injects it as mist. Below the outlet 13 of the injector 11, for example, a foam plate 16 made of a flat sponge composed of open cells of a three-dimensional network structure using only the bone part of the foam (removing the film) is disposed. ing. The foam plate 16 is suspended and held from the cover 3 by a suspension rod 17. As a result, the mist having a fine particle diameter out of the mist injected from the injector 11 flows through the foam plate 16 while being deflected and floats in the container 1. It is absorbed and condensed by the plate 16 and falls to the oil source 2 in the container 1. Therefore, a mist is generated in which the particle size distribution is concentrated at a high density on a very small diameter.
The cover 3 is provided with a conduit 7 for leading the mist in the space 4 from the container 1 and a pressure gauge 60 for confirming the pressure (discharge pressure) in the container.

  A float type flow meter 8 is provided in the liquid supply path 6 extending from the oil source 2 to the injector 11. The flow meter 8 is provided with a flow rate instruction unit 8a and a backflow prevention mechanism 8b. The liquid supply path 6 is provided with a variable throttle valve 9 for adjusting the flow rate of the oil supplied to the injector 11 and a sensor 10 for detecting the floating of the float 8c of the flow meter 8.

  Thus, by providing the flowmeter 8 with the backflow prevention mechanism 8b, the oil in the liquid supply path 6 is prevented from returning to the oil source 2 when the mist generating device is stopped, and the liquid supply path 6 is always filled with oil. It can be in the state that was done. Further, as described above, the injector 11 is configured to suck the oil in the container 1 through the liquid supply path 6 into the injector 11 by a suction action, and a float type is provided in the liquid supply path 6. By providing the flow meter 8 and the sensor 10 that detects the floating of the float 8c, it is possible to remotely monitor that the mist generating device normally generates mist. The sensor 10 is, for example, a proximity switch or a transmissive photoelectric switch, and is selected according to the surrounding environment.

  Gas (pressurized air) is supplied to the injector 11 from a gas supply source (pressurized air supply source) 20 through a gas supply path in which a filter 21, a pressure reducing valve 22, a pressure gauge 23, and a two-port solenoid valve 24 are installed. 5 through. Note that the 2-port solenoid valve 24 is for operating the mist generator to operate and stop, and may be a 2-port manual valve depending on the application.

  One end of a mist transport channel 50 is connected to the conduit 7, and the other end of the mist transport channel 50 is connected to a rotary joint 51 of a machine tool. As a result, the mist 55a is processed from the oil hole 54a of a tool such as a drill 53a having a large oil hole diameter (low flow path resistance) through the mist conveyance flow path 50, the rotary joint 51 of the machine tool and the hollow main shaft 52. It can be injected into.

  Inside the container 1, a gas (pressurized air) supplied from a gas supply source 20 is used as a carrier gas, and the auxiliary mist is sprayed into the container 2 by receiving supply of the carrier gas and oil in the container 2. An auxiliary mist generating unit 71 is provided. The supply of carrier gas to the auxiliary mist generator 71 branches off from the gas supply path 5 on the downstream side of the 2-port solenoid valve 24, and a 2-port solenoid valve 81, a constant ratio pressure reducing valve 82, and a check valve 83 are installed inside. This is performed through the carrier gas supply path 80. Then, the carrier gas supplied into the auxiliary mist generating unit 71 passes through the throttle unit 72 and is sprayed from the outlet 73.

Here, the pressure reducing valve 22 serves to control the supply pressure of the gas (pressurized air) supplied from the gas supply source 20 to the injector 11, and the constant ratio pressure reducing valve 82 reduces the pressure from the gas supply source 20. It plays the role of controlling the supply pressure of the carrier gas (pressurized air) supplied to the auxiliary mist generator 71 via the valve 22. The constant ratio pressure reducing valve 82 is configured to control the secondary side pressure of the pressure reducing valve 22 to a pressure reduced to a certain ratio, for example, about 0.6 to 0.8.
The constant ratio pressure reducing valve 82 is replaced with a constant pressure reducing valve, and with this pressure difference reducing valve, the pressure on the secondary side of the pressure reducing valve 22 is reduced to a certain differential pressure, for example, about 0.15 to 0.25 MPa. The control may be performed in the same manner as described above.

  As a result, the carrier gas supply pressure to the auxiliary mist generating unit 71 automatically becomes an appropriate pressure (a pressure obtained by reducing the gas supply pressure at a constant ratio) with the change of the gas supply pressure to the injector 11. . Thereby, complicated adjustment of the carrier gas supply pressure to the auxiliary mist generating unit 71 is not required, and usability of the mist generating device can be improved.

The supply of liquid to the auxiliary mist generating unit 71 branches from the liquid supply path 6 on the downstream side of the variable throttle valve 9 and is connected to the liquid inlet 74 of the auxiliary mist generating unit 71 on the downstream side of the throttle unit 74. This is done through the auxiliary liquid supply path 90. In the auxiliary liquid supply path 90, the carrier gas supply pressure to the auxiliary mist generation unit 71 and the pressure in the container 1 are set as pilot pressures, and the carrier gas supply pressure to the auxiliary mist generation unit 71 is larger than the pressure in the container 1. A pilot on-off valve 91 is provided which is opened only in the case. Thereby, when the pressure in the container 1 becomes higher than the carrier gas supply pressure to the auxiliary mist generating unit 71, the pilot on-off valve 91 is automatically closed, and the liquid supply path 6 from the auxiliary mist generating unit 71 is closed. The back pressure to can be shut off.
In place of the pilot opening / closing valve 91, valve means such as a check valve or a solenoid valve may be used.

Next, the case where the machining is performed using the large-diameter drill (tool) 53a in the mist generating apparatus having the above configuration will be described.
Here, when the mist generating device is operated by opening the two-port solenoid valves 24 and 81, the pressurized air having the pressure set by the pressure reducing valve 22 flows into the injector 11 through the gas supply path 5, and the constant ratio pressure reduction. Pressurized air (carrier gas) decompressed to a predetermined ratio with respect to the secondary pressure of the pressure reducing valve 22 by the valve 82 is supplied to the auxiliary mist generating unit 71 via the carrier gas supply path 80.

  As the pressurized air that has flowed into the injector 11 passes through the throat 12, a suction force is generated at the liquid inlet 14, and the oil in the container 1 is supplied to the oil source 2 through the liquid supply path 6 by this suction force. To the injector 11. In the expansion tube 15, the injector 11 divides oil into fine particles at supersonic speed, mixes pressurized air and oil particles, and injects them as mist. The mist having a fine particle diameter out of the injected mist floats in the space 4 in the container 1, and the mist having a relatively large particle diameter is absorbed and condensed by the foam plate 16 to be the oil source 2 at the lower part of the container 1. Fall into. Therefore, a mist is generated in which the particle size distribution is concentrated at a high density on a very small diameter. The amount of mist (liquid fine particles) generated can be changed by controlling the flow rate of oil flowing into the injector 11 by adjusting the variable throttle valve 9 while looking at the indicated value of the flow meter 8. Used in the minimum amount required. The mist discharged from the conduit 7 is transferred via the internal pressure of the container 1.

  The pressurized air (carrier gas) ejected from the outlet 73 of the auxiliary mist generating unit 71 automatically adjusts the internal pressure of the container 1 to an appropriate pressure, and moves the mist in the space 4 toward the lead-out direction of the conduit 7. Accelerate. Further, when the pressurized air (carrier gas) flowing into the auxiliary mist generating unit 71 passes through the throttle unit 72, a suction force is generated due to the expansion of the cross-sectional area, and the oil branches from the liquid supply path 6 by this suction force. The liquid is sucked into the auxiliary mist generating unit 71 through the auxiliary liquid supply path 90. The auxiliary mist generating unit 71 mixes pressurized air (carrier gas) and oil at the outlet 73 and injects the mixed air as mist (auxiliary mist). As a result, the increased amount of mist is discharged from the conduit 7 at an appropriate pressure, and the mist 55a is processed from the oil hole 54a of the large-diameter drill 53a via the mist transport channel 50, the rotary joint 51, and the hollow main shaft 52. Injected at a good injection speed.

FIG. 6 is a diagram showing a schematic configuration of a mist generating apparatus according to the fourth embodiment of the present invention. The example shown in FIG. 6 is different from the example shown in FIG. 5 in that a check valve 76 is provided on the outlet side of the auxiliary mist generator 71 instead of the pilot on-off valve 91 in the mist generator of the example shown in FIG. It is in. The other configuration is the same as that of the example shown in FIG.
In this example, when the pressure in the container 1 becomes higher than the carrier gas supply pressure to the auxiliary mist generating unit 71, the check valve 76 is automatically closed and the liquid supply path from the auxiliary mist generating unit 71 is closed. The back pressure to 6 can be shut off.

It is a figure which shows schematic structure of the mist production | generation apparatus of the 1st Embodiment of this invention. In the mist production | generation apparatus shown in FIG. 1, it is a figure which shows an example of a system curve at the time of using a drill with a large oil hole diameter as a tool. It is a figure which shows schematic structure of the mist production | generation apparatus of the 2nd Embodiment of this invention. FIG. 4 is a diagram showing an example of a system curve when a drill having a small oil hole diameter is used as a tool in the mist generating apparatus shown in FIG. 3. It is a figure which shows schematic structure of the mist production | generation apparatus of the 3rd Embodiment of this invention. It is a figure which shows schematic structure of the mist production | generation apparatus of the 4th Embodiment of this invention. It is a figure which shows a system curve in case the mist production | generation apparatus is drive | operated by the normal driving | running state. It is a figure which shows a system curve in case the mist production | generation apparatus is drive | operated in the state in which the resistance of the conveyance flow path became small. It is a figure which shows a system curve in case the mist production | generation apparatus is drive | operated in the state in which the resistance of the conveyance flow path became large.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Container 2 Oil source 5 Gas supply path 6 Liquid supply path 7 Conduit 8 Flowmeter 8a Flow instruction | indication part 8b Backflow prevention mechanism 8c Float 10 Sensor 11 Injector 12 Throat 14 Liquid inlet 16 Foam plate 20 Gas supply source 21 Filter 22 Pressure reduction Valve 23 Pressure gauge 30 Carrier gas / liquid mixing part 31 Carrier gas supply path 32 Constant ratio pressure reducing valve (constant pressure reducing valve)
34 Oil injection path 36 Positive displacement pump 37 Oil tank 40 Coupler (auxiliary mist generating part)
41 Jet outlet 50 Mist conveyance flow path 51 Rotary joint 52 Hollow main shaft 53a, 53b Drill (tool)
54a, 54b Oil holes 55a, 55b Mist 60 Pressure gauge 61 Relief flow path 62 Constant ratio relief valve (constant difference release valve)
63 Pilot port 64 Filter 65 Drain pot 71 Auxiliary mist generating section 72 Throttle section 80 Carrier gas supply path 82 Constant ratio pressure reducing valve 83 Check valve 90 Auxiliary fluid supply path 91 Pilot on / off valve

Claims (10)

In a mist generating apparatus, comprising: an injector that receives supply of gas from a gas supply source and liquid in a container to generate mist and injects the mist into the container; and a conduit that guides the mist in the container from the container. ,
A mist generating device, wherein an auxiliary mist generating part is provided on the downstream side of the injector.   2. The mist generating apparatus according to claim 1, wherein the auxiliary mist generating unit is provided in a mist transporting channel that is connected to the conduit and transports mist.   3. The auxiliary mist generating unit includes a connector having a jet port for spraying a carrier gas / liquid mixed fluid sent from a carrier gas / liquid mixing unit into the mist transporting channel. The mist generating apparatus of description.   The carrier gas / liquid mixing unit includes a constant ratio pressure reducing valve or a constant pressure reducing valve for reducing the carrier gas to a constant ratio or a differential pressure with respect to the gas supply pressure to the injector, and the reduced carrier gas. 4. A mist generating apparatus according to claim 3, further comprising a positive displacement pump for injecting liquid into the flow of water.   The auxiliary mist generating unit is branched and transferred from the gas supply path to the injector, and has a constant ratio or differential pressure with respect to the gas supply pressure to the injector via a constant ratio pressure reducing valve or a constant pressure reducing valve. 2. The mist generating apparatus according to claim 1, wherein the mist generating device is configured to spray the auxiliary mist into the container in response to the supply of the carrier gas decompressed to the pressure of the liquid and the liquid in the container.   The auxiliary mist generating unit branches from a liquid supply path that supplies the liquid in the container to the injector, and is connected to an auxiliary liquid supply path that sucks the liquid in the container by suction. The mist generating device according to claim 5, wherein a valve device or a check valve is provided inside or on the outlet side. In a mist generating apparatus, comprising: an injector that receives supply of gas from a gas supply source and liquid in a container to generate mist and injects the mist into the container; and a conduit that guides the mist in the container from the container. ,
A constant flow relief valve or a constant pressure relief valve which is provided at a downstream side of the injector and operates at a constant ratio or differential pressure with respect to the gas supply pressure to the injector in the relief flow path. A mist generating device characterized in that is installed. In a mist generating apparatus, comprising: an injector that receives supply of gas from a gas supply source and liquid in a container to generate mist and injects the mist into the container; and a conduit that guides the mist in the container from the container. ,
2. The mist generating apparatus according to claim 1, wherein the injector includes a Laval nozzle provided with a liquid inlet immediately after the throat.   The mist generating apparatus according to claim 8, wherein a foam plate made of open cells is disposed at a position facing the outlet of the injector. In a mist generating apparatus, comprising: an injector that receives supply of gas from a gas supply source and liquid in a container to generate mist and injects the mist into the container; and a conduit that guides the mist in the container from the container. ,
The ejector is configured to suck the liquid in the container into the ejector through a liquid supply path by a suction action, and detects a float type flow meter and float float in the liquid supply path. A mist generating device comprising a sensor.

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