200916201 八、 本案若有化學式時，請揭示最能顯示發 徵的化學式： # 九、 發明說明： 【發明所屬之技術領域】 本發明疋關於塗佈塗佈液於基板（311|：)3_^&1；6)上之塗佈 裝置（coating apparatus)及其塗佈方法。 【先前技術】 在液晶顯示器（liquid crystal display)或電漿顯示 Is (plasma display)等的平面面板顯示器（fla1： panel display)使用有在玻璃基板（giass substrate)上塗佈有 光阻（resist)液者（稱為塗佈基板該塗佈基板是藉由均 勻地塗佈光阻液之塗佈裝置形成。 亦即塗佈裝置具有：承載玻璃基板的平台（stage); 吐出光阻液之開縫喷嘴（s 1 i t η ο z z 1 e )，將該開趋喷嘴支撐· 於平台上’並且沿著平台使其移動之門型的台架（gantry)， 藉由一邊由開縫喷嘴的開縫（slit)吐出光阻液，一邊使台 架移動於沿著玻璃基板的方向’以形成形成有預定厚度的 光阻液膜之塗佈基板。而且’在藉由這種塗佈裝置形成有 塗佈基板後’進行塗佈不均的檢測之塗佈膜的檢查被進 行。具體上’在藉由塗佈裝置進行預定片數的塗佈基板的生 產後’在與塗佈製程不同的塗佈膜檢查製程中被進行塗佈 基板的檢查》 5 200916201 這種塗佈裝置的台架疋在承載平台的基台上設置有延 伸於一方向的石材製的導軌’沿著該導軌移動而構成。近年 來’伴隨著平面面板顯示器的大型化，為了生產大型的塗 佈基板，平台的大型化及導轨的長條化是不可避免的。但 是’因若導軌被長條化’則伴隨著石材製的導軌的長條化 之加工界限的問題或塗佈裝置的運送上的問題就無法避 免’故在下述專利文獻1中揭示有藉由連結複數個導軌零件 構成導軌之塗佈裝置。 [專利文獻1 ]日本國特開2006-95665號公報 【發明内容】 如上述專利文獻1所示般，在藉由導執連結導執零件 而構成的情形下’在台架通過導軌的接縫，亦即導軌的不 連續面（分割部分）時台架變動，由於其影響而有產生塗佈 不均，不良基板容易被生產之問題。但是，在一旦不良基板 被生產的情形下’到在後製程的塗佈膜檢查製程不良基板被 檢測出為止之間，塗佈被以同一條件進行。亦即，因在產生 塗佈不均的條件下’預定片數的塗佈基板原封不動地被繼續 生產，故有不良基板被大量生產之問題。 本發8月乃4監於上述的問題點所進行的創作，其目的為 提供一種塗佈裝置’即使是導引台架的行走（running)之導 軌被刀割的情形也能抑制不良基板被大量生產，可提高塗 佈基板的良率（yield)。 ’本發明的塗佈裝置，包含·. 為了解決上述課題 刖 檢 斷 產 200916201 基台，配設有保持基板的爭台； 導軌，於在前述基台上延伸於特定方向 設’被複數地分割；以及 塗佈單元’沿著前述導軌對前述基板相對 佈塗佈液於前述基板， 其特徵為：配設有檢測前述塗佈單元的動 變動檢測手段’藉由該變動檢測手段的檢測結 的塗佈液的塗佈狀態被判斷。 依照上述塗佈裝置，因配設檢測塗佈塗佈 塗佈單元的動作的變動之變動檢測手段，故可 變動檢測手段的檢測結果判斷不良塗佈基板是 亦即，因在塗佈單元通過導軌的連結部分的情 單元的動作產生擾動（turbulence)，故可藉由 的擾動判斷是否產生塗佈不均。因此，即使是 的情形，因可在塗佈動作中檢測塗佈不均的產 以往般在生產預定片數的塗佈基板後，藉由別 佈膜檢查製程檢測塗佈不均的情形比較，可避免 大量生產之問題，可提高良率。 上述塗佈狀態的判斷中的具體的態樣能 述塗佈裝置更包含控制裝置，該控制裝置是 測手段的檢測結果判斷基板上的塗佈狀態 為塗佈狀態為不適當時，使前述塗佈單元 依照該構成，在塗佈單元進行像應被視 生塗佈不均之動作的情形下，彳自動地使 的狀態下配 地行走，塗 作的變動之 果’基板上 液於基板之 藉由監視該 否被生產。 形下，塗佈 檢測該動作 導軌被分割 生，故與如 的製程的塗 不良基板被 如下之構成： 由前述變動 良否，當判 止。 不良基板而 佈單元的動 200916201 作停止。因此，可防止不良基板被大量生產。 而且’前述變動檢測手段的具體的態樣也能以如下之 構成：前述變動檢測手段是檢測前述塗佈單元的行走速度 之速度檢測手段’由藉由該速度檢測手段檢測的塗佈單元的 行走速度的變化，塗佈狀態之良否被判斷。 依照該構成，可藉由以前述速度檢測手段檢測塗佈單 元通過導軌的分割部分時的行走速度的變化，檢測塗佈不 均的產生。因此，不配設用以檢測塗佈不均的複雜的裝置， 可使用習知的塗佈裝置中的既存的設備檢測塗佈不均的產 生。 而且’前述變動檢測手段之別的具體的態樣也能以如 下之構成：在前述塗佈單元包含有藉由供給空氣至導軌的 表面’使塗佈單元由導軌浮起來之軸承部，在供給空氣至 該軸承部的管路配設有檢測管路内的空氣的壓力的變化之 壓力檢測手段，前述變動檢測手段包含該壓力檢測手段， 藉由該壓力檢測手段由所檢測的塗佈單元的壓力的變化， 塗佈狀態之良否被判斷。 依照該構成，可藉由以前述壓力檢測手段檢測塗佈單 元通過導軌的分割部分時的前述管路内的空氣的壓力的變 化’檢測塗佈不均的產生。因此，不配設用以檢測塗佈不 均的複雜的裝置就能檢測塗佈不均的產生。 而且，前述變動檢測手段之再別的具體的態樣也能以 如下之構成：在前述塗佈單元包含有藉由供給空氣至導軌 的表面，使塗佈單元由導軌浮起來之軸承部，在供給空氣 8 至 之 段 化 元 化 均 供 部 氣 量 力 走 段 設 當 保 地 邊 本發明的塗佈方 200916201 該軸承部的管路配設有檢測管路内的空氣的流 流量檢測手段’前述變動檢測手段包含該流 ’藉由該流量檢測手段由所檢測的塗佈單元的 ’塗佈狀態之良否被判斷。 依照該構成，可藉由以前述流量檢測手段檢 通過導軌的分割部分時的前述管路内的空氣的 ’檢測塗佈不均的產生。因此，不配設用以檢 的複雜的裝置就能檢測塗佈不均的產生。 而且，也能以如下之構成：在前述塗佈單元包 給空氣至導執的表面，使塗佈單元由導軌浮起 ’在供給空氣至該軸承部的管路配設有：檢測管 的壓力的變化之壓力檢測手段；檢測管路内的 的變化之流量檢測手段，前述變動檢測手段包 檢測手段與前述流量檢測手段與檢測前述塗佈 速度之速度檢測手段，當此等速度檢測手段、壓 μ里榀測手段之中至少一個檢測手段的檢測結 疋的範圍時’被判斷為基板上的塗佈狀態為不由 依照該構成，可提高基板上的塗佈狀態被邦 之可靠度（reliability)。 為了解決上述課題 ，工·τ 〜 /¾ ； 持於基台上的平台，沿著延伸於特定方向 刀°彳之導軌對前述基板一邊相對地使塗佈 吐出塗佈液，塗佈塗佈液於基板上， 其特徵為:藉由檢測前述塗佈單元的動竹 量的變化 量檢測手 流量的變 測塗佈軍 流量的變 測塗佈不 含有藉由 來之軸承 路内的空 空氣的流 含前述壓 單元的行 力檢測手 果脫離所 !當。 斷為不適 由使基板 且被複數 行走，一 動之變動 9 200916201 檢測手段檢測吐出塗佈液於基板之前述塗佈單元的動作之 變動，根據該檢測結果，基板上的塗佈液的塗佈狀態被判斷。 依照上述塗佈方法，因即使是塗佈單元行走的導執被 分割的情形，也能在塗佈動作中檢測塗佈不均的產生，故 與如以往般在生產預定片數的塗佈基板後，藉由別的製程 的塗佈膜檢查製程檢測塗佈不均❸情形比較，可冑免不U 板被大量生產之問題，可提高良率。 土 而且也此以如下之構成：在前述塗佈單元包含有藉 供給空氣至導軌的表面，使塗佈單元由導軌浮起來之= :，在供給空氣至該轴承部的管路配設有:檢測管路… 〜 之壓力檢測手段；檢測管路内的空氣的户 Ϊ的變化之流量檢測手段，_ 〜 ^ , j予奴，別述變動檢測手段包含前述壓 力檢測手段與前述流量拾 娶 /、丨手奴與檢測前述塗佈單元的 走速度之速度檢測手段，者 丁 ρ 、Α θ认 田此4速度檢測手段、壓力檢漁J手 #又、b丨!_ 1Ε檢測手段之中$小 予 ^ ^ . r ^ ± 夕一個檢測手段的檢測結果脫離& β又疋的fe圍時，被判斷A ^ 反W斷為基板上的塗佈狀態為不適當。 依照該構成，可提离其 當之可靠度。 β 土板上的塗佈狀態被判斷為不適 【發明的功效】 可避免不良塗# 依照本發明的塗佈裝置及塗佈方法 基板被大量生產之問題，可提高良率。 【實施方式】 10 200916201 使用圖面說明與本發明有關的實施的形態。 疋』丁本發月的_實施形態中的塗佈裝置1之斜視 圖。圖2是概略地顯示 ,..^ z佈裝置1的空氣軸承（air bear 1 ng) 1 4中的空翁糸姑> _ '、、之圖，圖3是顯示塗佈單元5的 單元支撐部7附近之圖。 如圖1〜圖3所示，塗Λ θ .、姑 完佈裝置1疋塗佈藥液或光阻 (res 1st)等的液狀物（以下 卜稱為塗佈液）於所供給的薄板狀 的基板2。該塗佈裝置1且供 一備··基台3 ;用以承载基板2之平 台4;對該平台4可移舍 、、特疋方向而構成之塗佈單元5。 此外，在以下的說明中杲 _200916201 VIII. If there is a chemical formula in this case, please disclose the chemical formula that best shows the levy: # 九, invention description: [Technical Field of the Invention] The present invention relates to a coating coating liquid on a substrate (311|:) 3_^ <1;6) Coating apparatus and coating method thereof. [Prior Art] A flat panel display (fla1: panel display) such as a liquid crystal display or a plasma display is coated with a photoresist on a giass substrate. Liquid (referred to as a coated substrate, the coated substrate is formed by a coating device that uniformly coats the photoresist. That is, the coating device has: a stage carrying the glass substrate; and the opening of the photoresist is spouted a nozzle (s 1 it η ο zz 1 e ) that supports the gantry of the open nozzle on the platform and moves it along the platform, with one side being opened by a slit nozzle Slit discharges the photoresist while moving the gantry in the direction along the glass substrate to form a coated substrate on which a photoresist film having a predetermined thickness is formed. And 'is formed by such a coating device After the application of the substrate, the inspection of the coating film for detecting the unevenness of the coating is performed. Specifically, 'after the production of a predetermined number of coated substrates by the coating device', the coating is different from the coating process. The film inspection process is carried out Inspection of the cloth substrate" 5 200916201 The gantry of the coating device is provided on the base of the carrying platform with a stone guide rail extending in one direction and moving along the guide rail. In recent years, along with the flat panel In order to increase the size of the display, it is inevitable to increase the size of the platform and the length of the guide rail in order to produce a large-sized coated substrate. However, if the guide rail is elongated, it is accompanied by the strip of the stone guide rail. The problem of the processing limit or the problem of the conveyance of the coating device cannot be avoided. Therefore, Patent Document 1 discloses a coating device that forms a guide rail by connecting a plurality of rail members. [Patent Document 1] According to the above-described Patent Document 1, in the case where the guide member is connected by the guide, the joint between the gantry and the guide rail, that is, the discontinuous surface of the guide rail ( When the partition is changed, the gantry is changed, and uneven coating occurs due to the influence thereof, and the defective substrate is easily produced. However, in the case where the defective substrate is produced, it is 'after The coating film inspection process of the process is detected until the substrate is detected, and the coating is performed under the same conditions. That is, the coated substrate of the predetermined number of sheets is continuously stopped under the condition of uneven coating. Production, so there is a problem that the defective substrate is mass-produced. The present in August is a creation of the above-mentioned problem, and the purpose thereof is to provide a coating device 'even if the guiding gantry is running. When the guide rail is cut, the defective substrate can be suppressed from being mass-produced, and the yield of the coated substrate can be improved. 'The coating device of the present invention includes ······················· Providing a table for holding the substrate; the guide rail is disposed in a plurality of directions extending in the specific direction on the base, and the coating unit is configured to apply a coating liquid to the substrate along the guide rail. It is characterized in that the application state of the coating liquid for detecting the knot detected by the fluctuation detecting means is determined by the dynamic fluctuation detecting means for detecting the coating unit. According to the coating apparatus described above, since the fluctuation detecting means for detecting the fluctuation of the operation of the coating and coating unit is disposed, the detection result of the variable detecting means determines that the defective coating substrate is the same, because the coating unit passes the guide rail. The action of the connected unit of the connected portion produces a turbulence, so that it is possible to determine whether or not uneven coating is caused by the disturbance. Therefore, even in the case where the coating unevenness can be detected in the coating operation, after the predetermined number of coated substrates are produced, the coating unevenness is detected by the film inspection process. The problem of mass production can be avoided and the yield can be improved. In a specific aspect of the determination of the coating state, the coating apparatus further includes a control device that determines the coating state on the substrate to be a coating state when the coating state is inappropriate, and the coating is performed. According to this configuration, when the coating unit performs an operation such as uneven application of the image, the ground is automatically moved in the state of the coating, and the effect of the coating is changed. It is produced by monitoring whether it is. In the case of the coating, the operation of the guide rail is divided, and the defective substrate of the process is as follows: Whether the above variation is good or not, is determined. The substrate is broken and the movement of the unit is 200916201. Therefore, it is possible to prevent the defective substrate from being mass-produced. Further, the specific aspect of the above-described fluctuation detecting means may be configured such that the fluctuation detecting means is a speed detecting means for detecting the traveling speed of the coating unit "the traveling of the coating unit detected by the speed detecting means The change in speed, the quality of the coating state is judged. According to this configuration, the occurrence of coating unevenness can be detected by detecting the change in the traveling speed when the coating unit passes through the divided portion of the guide rail by the speed detecting means. Therefore, a complicated device for detecting coating unevenness is not provided, and the occurrence of coating unevenness can be detected using an existing device in a conventional coating device. Further, the specific aspect of the above-described change detecting means may be configured such that the coating unit includes a bearing portion that floats the coating unit by the guide rail by supplying air to the surface of the guide rail, and supplies the same. a pressure detecting means for detecting a change in the pressure of the air in the pipe is disposed in the pipe of the air to the bearing portion, and the fluctuation detecting means includes the pressure detecting means, and the pressure detecting means is used by the detected coating unit The change in pressure, the quality of the coating state is judged. According to this configuration, the occurrence of coating unevenness can be detected by detecting the change in the pressure of the air in the conduit when the coating unit passes through the divided portion of the guide rail by the pressure detecting means. Therefore, the occurrence of coating unevenness can be detected without providing a complicated device for detecting coating unevenness. Further, in still another specific aspect of the fluctuation detecting means, the coating unit may include a bearing portion that floats the coating unit by the guide rail by supplying air to the surface of the guide rail. The supply air 8 to the segmentation unit is supplied to the gas volume section. The coating side of the present invention is 200916201. The pipeline of the bearing portion is provided with a flow rate detecting means for detecting the air in the pipeline. The fluctuation detecting means includes the flow 'by the flow rate detecting means being judged by the quality of the coating state of the detected coating unit. According to this configuration, it is possible to detect the occurrence of coating unevenness by the air in the duct when the flow rate detecting means detects the divided portion of the guide rail. Therefore, the occurrence of coating unevenness can be detected without a complicated device for inspection. Further, it is also possible to provide a coating unit in which the air is supplied to the surface of the guide, and the coating unit is floated by the guide rail. The piping for supplying air to the bearing portion is disposed: the pressure of the detecting tube a pressure detecting means for detecting a change; a flow detecting means for detecting a change in the pipe, the fluctuation detecting means detecting means, the flow detecting means, and a speed detecting means for detecting the coating speed, wherein the speed detecting means and the pressure When the detection range of at least one of the detecting means is determined to be "the coating state on the substrate is not in accordance with this configuration, the reliability of the coating state on the substrate can be improved." In order to solve the above problem, the trajectory is applied to the substrate on the substrate, and the coating liquid is applied to the substrate along the guide rail extending in the specific direction, and the coating liquid is applied. The substrate is characterized in that: the detection of the hand flow is detected by detecting the amount of change in the amount of movement of the coating unit, and the measurement of the applied flow rate does not include the flow of air in the bearing path. The force detection test containing the aforementioned pressure unit is separated from the hand! In the case of discomfort, the substrate is moved in plural, and the movement is changed. 9 200916201 The detection means detects the fluctuation of the operation of the coating unit that discharges the coating liquid on the substrate, and the coating state of the coating liquid on the substrate is determined based on the detection result. Be judged. According to the above-described coating method, even if the guide on which the coating unit travels is divided, the occurrence of coating unevenness can be detected during the coating operation, so that a predetermined number of coated substrates are produced as in the related art. After that, by comparing the coating unevenness detection method by the coating film inspection process of another process, the problem that the U-plate is not mass-produced can be avoided, and the yield can be improved. The soil is also composed of the following: the coating unit includes a surface on which the air is supplied to the guide rail, and the coating unit is floated by the guide rail: :, in the pipeline for supplying air to the bearing portion: Detecting the pressure of the pipeline ... ~; means for detecting the flow of the change of the air in the pipeline, _ 〜 ^ ^, j 奴 slave, the variable detection means includes the pressure detecting means and the flow rate pick / , 丨 奴 slave and the speed detection means for detecting the walking speed of the coating unit, Ding ρ, Α θ recognising the 4 speed detection means, pressure detection fishing J hand #又, b丨! _ 1Ε detection means Xiao Yu ^ ^ . r ^ ± When the detection result of one detection means is deviated from the & β and fe fe circumference, it is judged that the A ^ inverse W is the coating state on the substrate is inappropriate. According to this configuration, the reliability can be removed. The coating state on the β soil plate was judged to be uncomfortable. [Effect of the Invention] The poor coating can be avoided. The coating device and the coating method according to the present invention The substrate is mass-produced, and the yield can be improved. [Embodiment] 10 200916201 An embodiment of an embodiment related to the present invention will be described using the drawings.斜 丁 丁 发 发 发 的 斜 斜 。 。 。 。 。 。 。 。 。 斜 斜 斜Fig. 2 is a view schematically showing the air bearing 1 ng of the air bearing 1 ng 1 in FIG. 2, and FIG. 3 is a view showing the unit of the coating unit 5. A picture near the support portion 7. As shown in Fig. 1 to Fig. 3, a liquid material (hereinafter referred to as a coating liquid) such as a coating liquid or a photoresist (res 1st) is applied to the supplied sheet. Shaped substrate 2. The coating apparatus 1 is provided with a substrate 3; a platform 4 for carrying the substrate 2; and a coating unit 5 which is configured to move the platform 4 in a specific direction. In addition, in the following description 杲 _
T疋U塗佈早凡5移動的方向為X 轴方向，以與X轴方向在h J仕水千面上正交的方向為γ軸方向， 以正交於X軸及Y軸方向之罅古沾七A 4 I雙方的方向為z軸方向來進行說 明。 在前述基台3承載有各構成構件，例如平台4、導軌13 及塗佈單元5。 前述平台4是將所搬進的基板2承載於其表面而保持。 具體上，在平台4形成有開設於其表面的複數個吸引孔（未 圖示）此專及引孔與真空果（vacuum pump)9(參照圖4)是 連通而連接。而且，藉由於在平台4的表面承載有基板2 的狀態下使真空泵9動作，在吸引孔產生吸引力，使基板2 被吸引至平台4的表面側而被吸附保持。 而且，在平台4配設有使基板2進行升降動作之基板升 降機構（未圖示）。亦即，在平台4的表面形成有複數個銷孔 (Pin hole)，在該銷孔埋設有可在Z軸方向進行升降動作之 200916201 頂出銷（lift pin)。據此’藉由於在平台4的 2的狀態下使頂出銷上升或下降，於頂出銷的尖端部分：接 基板2的狀態下’可進行基板2的升降動作及可保持基板2 於預定的高度位置。 前述導轨13為導引塗佈單元5的行走，延伸配設於〉 軸方向。在本實施形態中’一對導軌13是在平台4的Y轴 方向兩側沿著平台4配設。料軌13是藉由連結有複數個 導軌零件13a而構成’在顯示於圖i的例子中，兩個導軌零 件13a是在連結部13b被連結。亦即’連結部1儿是位於導 軌13的X軸方向之約略中央。 導軌零件13a具有平坦且平滑的導面 face) 13c。該導面13c是形成於與後述的塗佈單元5的空氣 軸承14(本發明的軸承部）對向的位置。亦即在本實施2離 中’在各個導軌零件13a形成㈣z軸方向^直的方向和 與Y軸方向呈垂直的方向之兩處。而且，使導軌零件⑴ 連結’在組裝了導軌13的狀態下’形成該導面i3c連續延 伸於特定方向（X軸方向）的狀離。 J ^ 而且，在導執零件13a彼 此的接縫，亦即連結部】φ县夂加播 丨Ub中疋各個導軌零件13a的導面 W彼此連續，被連結成略平坦狀。據此，使塗佈單 順地移動於導軌1 3上。The direction in which the T疋U coating is as early as 5 is the X-axis direction, and the direction orthogonal to the X-axis direction on the surface of the H J is the γ-axis direction, and is orthogonal to the X-axis and the Y-axis direction. The direction of both sides of the ancient dip 7 A 4 I is explained in the z-axis direction. Each of the constituent members, such as the platform 4, the guide rail 13, and the coating unit 5, is carried on the base 3 described above. The aforementioned stage 4 is held by carrying the carried substrate 2 on its surface. Specifically, the platform 4 is formed with a plurality of suction holes (not shown) formed on the surface thereof, and the dedicated holes are connected to and connected to a vacuum pump 9 (see Fig. 4). In addition, when the vacuum pump 9 is operated in a state where the substrate 2 is carried on the surface of the stage 4, an attraction force is generated in the suction hole, and the substrate 2 is attracted to the surface side of the stage 4 to be adsorbed and held. Further, a substrate elevating mechanism (not shown) for moving the substrate 2 up and down is disposed on the stage 4. That is, a plurality of pin holes are formed in the surface of the stage 4, and a 200916201 lift pin which can be lifted and lowered in the Z-axis direction is embedded in the pin hole. According to this, by raising or lowering the ejector pin in the state of the stage 2 of the platform 4, in the state where the tip end portion of the ejector pin is connected to the substrate 2, the lifting operation of the substrate 2 can be performed and the substrate 2 can be held in advance. Height position. The guide rail 13 guides the coating unit 5 and extends in the axial direction. In the present embodiment, the pair of guide rails 13 are disposed along the stage 4 on both sides of the stage 4 in the Y-axis direction. The rail 13 is constructed by connecting a plurality of rail members 13a. In the example shown in Fig. i, the two rail members 13a are coupled to each other at the connecting portion 13b. That is, the joint portion 1 is located approximately at the center of the X-axis direction of the guide rail 13. The rail member 13a has a flat and smooth guide surface 13c. This guide surface 13c is formed at a position opposed to the air bearing 14 (the bearing portion of the present invention) of the coating unit 5 to be described later. That is, in the present embodiment, the two rail members 13a are formed in two places in which the z-axis direction is straight and the direction perpendicular to the Y-axis direction. Further, the rail member (1) is coupled to the state in which the guide rail 13 is assembled, and the guide surface i3c is continuously extended in a specific direction (X-axis direction). J ^ Further, in the joint of the guide member 13a, that is, the joint portion, the guide faces W of the respective guide rail members 13a of the φ 夂 夂 播 丨 b Ub are continuous with each other, and are connected to be slightly flat. According to this, the coating is smoothly moved on the guide rail 13.
刖述塗佈單元5是用Li膝洽V & AJU 疋用以將塗佈液塗佈於被承載於平台 的基板2’具有:延伸於一方向，吐出塗佈液之開縫喷嘴部 6,配設於該開縫喷嘴部6的兩端部分之單元支撐部卜 前述單元支樓部7是用以升降動作可能地支擇開 12 200916201 嘴部6 ’並且使該開縫噴嘴部6移動於χ軸方向。亦即，該 單元支樓部1 2 3 4 5具有：使開縫喷嘴部6進行升降動作之升降裝 置20 ;使開縫喷嘴部6行走之行走裝置1 〇。 升降裝置20是使開縫喷嘴部6進行升降動作，具有： 延伸於Z軸方向之導軌（guide rai 1)21 ;與開縫噴嘴部6 連結之滑塊（slider)22。在該導軌21，滑塊22是沿著導軌 21被滑動自如地安裝。而且，在滑塊22安裝有藉由伺服馬 達23驅動的滾珠螺桿（baU screw)機構，藉由驅動控制該 伺服馬達23使滑塊22移動於z軸方向，並且可在任意的位 置知止。據此’使開縫喷嘴部6朝Z轴方向的升降動作被驅 動控制’對平台4可接離（attach and detach)地動作。 行走裝置1 0如圖3所示是用以使開缝噴嘴部6行走於 X轴方向’具有滑塊支撐部11與線性馬達（linear motor) 1 2 ° 13 1 亥滑塊支擇部61是藉由配設於與導軌1 3之間的空氣軸 承14(本發明的轴承部）支撐於導執13上。而且，藉由驅動 控制安裝於滑塊支撐部丨丨之線性馬達1 2，使滑塊支撐部i丄 移動於X轴方向。具體上如圖2、圖3所示，在配設於滑塊 2 支撐部7的空氣軸承14透過管路81連接有壓縮機 3 (compressor)80 ’藉由使該壓縮機8〇動作，使空氣由空氣 4 轴承14供給至導面l3c側。而且，藉由在空氣軸承14與導 5 面1 3c之間供給有空氣，使滑塊支撐部〗丨被維持於由導面 6 13c '于起來的狀態。而且，藉由在滑塊支撐部11浮起來的 7 狀態下使線性馬達丨2驅動，使滑塊支撐部丨丨移動於X軸方 200916201 向。亦即’塗佈單元. 疋在藉由使線性馬達12驅動，使空 氣轴承14由導軌13+ 々'起來的狀態下可沿著X軸方向行走。 而且在管路81，备―々， 各個空氣軸承1 4配設有計測供給 至空氣抽承“的空氣的壓力之壓力言"2。而且，每一各個 空氣軸承14配設有計剛所供給的空氣的流量之流量計83。 此等壓力計82及流量斗 α 8 3疋連接於後述的控制裝置，計測 結果被取入控制裝置。 而且在滑塊支撐部 ― U，塗佈早兀5的χ軸方向中的位 置被檢測。亦即，在道# η 0 ^ 導執13上沿著導面丨&設有刻度 (scale)15b。而且，a说仏丄，此 在⑺塊支撐部11於與該刻度丨5b對向 的位置安裝有刻度讀取邱1 買取。P 1 5a，藉由以該刻度讀取部1 5a讀 取刻度1 5 b，即使塗佈罩开ς 冲早το 5為灯走中也能精度佳地檢測現 在的塗佈單元5的位置。吐冰 *1 * ^ ^ Α 罝此外，刻度瀆取部1 5a是與後述的 控制裝置連接，根據該位罟咨4 各& „ , 承X证罝貝訊使塗佈單元5的行走速度被 運算。據此，可經常檢測塗佈單元的行走速度。 刚述開縫喷嘴部6是塗佈塗佈液於基板2上。該開縫喷 嘴部6疋具有延伸於γ軸方向的形狀之柱狀構件，在與平台 4的表面對向之側形成有吐出塗佈液之喷嘴（n〇zzle)6i (參 照圖3)。該噴嘴61是突出於平台4的表面側，在該突出的 部分形成有延伸於γ軸方向的形狀之開縫（slit)。亦即，透 過該開縫使供給至開縫嘴嘴部6的塗佈液吐出至基板2的表 面。 接著’針對上述塗佈裝置1的控制系統之構成，使用圖 4所示的方塊圖來說明。 14 200916201 圖4是顯示配設於該塗佈裝置之控制裝置9 〇的控制系 統之方塊圖。如圖4所示’該塗佈裝置i配設有控制上述的 各種單元的驅動之控制裝置90。該控制裝置9〇具有.控制 本體部91、驅動控制部92、位置檢測部93、壓力檢測部94、 流量檢測部95、輸入/輸出裝置控制部96、外部裝置控制部 97 ° 控制本體部91具備：執行邏輯運算之週知的cpu;預先 記憶控制該CPU之種種的程式等之R〇M(Read-〇nly Mem〇ry : 唯讀記憶體）；在裝置動作中一時地記憶種種的資料（data) 之RAM(Random Access Memory:隨機存取記憶體）；記憶種 種的程式或OSCOperating System:作業系統）並且記憶生產 程式等的各種資料之HDD (Hard Disk:硬碟）等。而且，控制 本體部91具有：主控制部91a、判定部91b、記憶部9lc。 主控制部91 a為為了依照預先記憶的程式執行一連串 的塗佈動作，透過驅動控制部92驅動控制各種單元的驅動 裝置等’並且在該塗佈動作中進行必要的各種運算。在本實 施形態中，可根據來自刻度讀取部1 5a之位置資訊運算塗佈 單元5的行走速度。 判&。卩91 b為在塗佈單元5行走，塗佈塗佈液至基板2 的塗佈動作時’判定塗佈單元5的行走速度、供給至空氣軸 的二氣的壓力及空氣的流量是否適當。亦即，針對塗 ^ 、行走速度’是根據藉由刻度讀取部1 5 a檢測的位 f貝吼判斷藉由主控制部91 a運算的行走速度是否滿足預 疋的條件。而且，針對空氣的壓力及流量是判斷藉由壓力計 15 200916201 ^ 机叶83檢測的檢測壓力P及檢測流量F是否滿足預 ，的條件。具體上，在後述的記憶部9 1 c記憶有產生塗佈不 均的障$之條件（塗佈不均產生條件），判斷所檢測的行走速 檢/則壓力p、檢測流量F是否在該塗佈不均產生條件 :範圍内。亦即’對行走速度V、檢測壓力p及檢測流量F , 有臨界值（thresho 1 d va 1 ue )，當超過該臨界值 判斷為產生塗佈不均。在本實施形態中，當行走速度V、 壓力P檢測流量F之任一個超過所設定的臨界值時， 判斷為產生塗佈不均，主控制部9 i &透過驅動控制部Μ使 各伺服馬達23、線性馬達12等的驅動停止，並且發出警告。 — 圮憶部91 c是用以儲存有各種資料，並且一時地儲存運 算'、’《果、叶測結果等。在本實施形態中，隨時記憶有依照刻 度讀取部15a的檢測結果而運算的行走速度v，並且隨時記 隱有藉由壓力計8 2、流量計8 3檢測的檢測壓力p、檢測流 量F。具體上’在行走速度v、檢測壓力p、檢測流量F被 賦予與藉由刻度讀取部i 5 a讀取的刻度位置s (刻度1 5匕上 的塗佈單元5的位置）有關聯的狀態下被記憶。 而且，在該記憶部91 c記憶有塗佈不均產生條件。該塗 佈不均產生條件是藉由產生的塗佈不均在容限（t〇lerance) 内的情形之最大值、最小值、變動值等的臨界值構成，例如 以超過臨界值的情形或以由此等複數個臨界值設定的範圍 脫離的情形當作塗佈不均產生條件而設定。該塗佈不均產生 條件是藉由依照預先進行塗佈裝置丨的塗佈動作而求得的 實驗條件設定。此外，記憶於該記憶部9 1 c之塗佈不均產生 200916201 條件可由鍵盤（keyboard)98或觸控面板（t〇uch panei)99 變更。 驅動控制部9 2是根據來自主控制部9丨&的控制信號驅 動控制線性馬達1 2、伺服馬達2 3等。具體上，藉由控制線 性馬達12及飼服馬達23使塗佈單元5中的行走裝置1〇及 升降裝置20被驅動控制。 位置檢測部93是藉由刻度讀取部丨5a讀取刻度丨5b， 檢測塗佈單元5的位置。該檢測結果是隨時藉由記憶部91c §己憶。而且，根據該檢測結果透過主控制部9丨a運算塗佈 單元5的行走速度V。 壓力檢測部94是檢測藉由壓力計82計測的壓力。該被 檢測的檢測壓力p是隨時藉由記憶部91c記憶。 流量檢測部9 5疋檢測藉由流量計8 3計測的流量。該被 檢測的檢測流量F是隨時藉由記憶部9丨c記憶。The coating unit 5 is a method in which a coating solution is applied to a substrate 2' carried on a stage by a Li knee contact V & AJU 具有 having a slit nozzle portion 6 which is extended in one direction and discharges a coating liquid. The unit support portion disposed at both end portions of the slit nozzle portion 6 is for the up-and-down operation to selectively open the mouth portion 6' of the 12 200916201 and to move the slit nozzle portion 6 χ axis direction. That is, the unit branch portion 1 2 3 4 5 has a lifting device 20 for moving the slit nozzle portion 6 up and down, and a traveling device 1 for moving the slit nozzle portion 6. The lifting device 20 is configured to perform a lifting operation of the slit nozzle portion 6, and has a guide rail (21) extending in the Z-axis direction and a slider 22 coupled to the slit nozzle portion 6. In the guide rail 21, the slider 22 is slidably mounted along the guide rail 21. Further, a slider mechanism (baU screw) driven by the servo motor 23 is attached to the slider 22, and the servo motor 23 is driven to move the slider 22 in the z-axis direction, and can be recognized at any position. According to this, the "lifting operation of the slit nozzle portion 6 in the Z-axis direction is driven to control" and the platform 4 can be attached and detached. As shown in FIG. 3, the traveling device 10 is configured to move the slit nozzle portion 6 in the X-axis direction. The slider support portion 11 has a linear motor 1 2 ° 13 1 The slider portion 61 is The air bearing 14 (the bearing portion of the present invention) disposed between the guide rail 13 and the guide rail 13 is supported by the guide 13. Further, the slider supporting portion i is moved in the X-axis direction by driving the linear motor 1 2 attached to the slider supporting portion 控制. Specifically, as shown in FIG. 2 and FIG. 3, the air bearing 14 disposed on the support portion 7 of the slider 2 is connected to a compressor 3 via a line 81 to drive the compressor 8 to operate the compressor 8 The air is supplied from the air 4 bearing 14 to the side of the guide surface l3c. Further, by supplying air between the air bearing 14 and the guide surface 1 3c, the slider support portion is maintained in a state in which the guide surface 6 13c' is lifted. Further, the linear motor 丨2 is driven in the state in which the slider supporting portion 11 floats, and the slider supporting portion 丨丨 is moved to the X-axis side 200916201. That is, the coating unit can be moved in the X-axis direction while the air bearing 14 is driven by the guide rail 13+ by driving the linear motor 12. Further, in the pipe line 81, each of the air bearings 14 is provided with a pressure gauge for measuring the pressure of the air supplied to the air pumping unit. Moreover, each of the air bearings 14 is provided with a metering station. The flow rate of the supplied air flow rate 83. The pressure gauge 82 and the flow hopper α 8 3疋 are connected to a control device to be described later, and the measurement result is taken into the control device. Moreover, the slider support portion ― U is coated early. The position in the x-axis direction of 5 is detected. That is, a scale 15b is provided along the guide surface amp& on the guide # η 0 ^ guide 13 and, a says, this is in the (7) block. The support portion 11 is mounted with a scale reading position at a position opposite to the scale 丨 5b. P 1 5a, by reading the scale 1 5 b with the scale reading portion 15a, even if the coating cover is opened It is also possible to accurately detect the position of the current coating unit 5 when the lamp is in the middle of the lamp. The spouting *1 * ^ ^ Α 罝 In addition, the scale capturing portion 15a is connected to a control device to be described later, according to the position罟 4 4 Each & „ , 承 X 罝 讯 使 使 使 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布According to this, the traveling speed of the coating unit can be frequently detected. The slit nozzle portion 6 is a coating liquid applied to the substrate 2. The slit nozzle portion 6A has a columnar member having a shape extending in the γ-axis direction, and a nozzle (i〇zzle) 6i for discharging the coating liquid is formed on the side opposite to the surface of the stage 4 (refer to Fig. 3). The nozzle 61 protrudes from the surface side of the stage 4, and a slit which is formed in a shape extending in the γ-axis direction is formed in the protruding portion. That is, the coating liquid supplied to the slit nozzle portion 6 is discharged to the surface of the substrate 2 through the slit. Next, the configuration of the control system for the above coating apparatus 1 will be described using a block diagram shown in Fig. 4 . 14 200916201 Fig. 4 is a block diagram showing a control system of the control unit 9 配 disposed in the coating apparatus. As shown in Fig. 4, the coating device i is provided with a control device 90 for controlling the driving of the various units described above. The control unit 9 includes a control main unit 91, a drive control unit 92, a position detecting unit 93, a pressure detecting unit 94, a flow rate detecting unit 95, an input/output device control unit 96, and an external device control unit 97. It is equipped with a well-known cpu that performs logical operations; R〇M (Read-〇nly Mem〇ry: read-only memory) that stores various programs of the CPU in advance; and memorizes various kinds of data at a time during device operation. (data) RAM (Random Access Memory); memory of various programs or OSCOperating System: operating system) and memory HDD (Hard Disk) of various materials such as production programs. Further, the control main unit 91 includes a main control unit 91a, a determination unit 91b, and a storage unit 91c. The main control unit 91a is a drive device or the like that drives and controls various units through the drive control unit 92 in order to execute a series of coating operations in accordance with a program stored in advance, and performs various calculations necessary for the coating operation. In the present embodiment, the traveling speed of the coating unit 5 can be calculated based on the position information from the scale reading unit 15a. Judging &卩91 b is a determination of whether the traveling speed of the coating unit 5, the pressure of the two air supplied to the air shaft, and the flow rate of the air are appropriate when the coating unit 5 is moved and the application operation of the coating liquid to the substrate 2 is applied. In other words, the coating speed and the traveling speed ' are based on the position f predicted by the scale reading unit 15 a to determine whether or not the traveling speed calculated by the main control unit 91 a satisfies the predetermined condition. Further, the pressure and the flow rate of the air are conditions for judging whether or not the detected pressure P and the detected flow rate F detected by the pressure gauge 15 are satisfied. Specifically, in the memory unit 9 1 c to be described later, a condition (a coating unevenness generation condition) in which the coating unevenness is generated is stored, and it is determined whether or not the detected traveling speed/time pressure p and the detected flow rate F are in the Coating unevenness conditions: within the range. That is, there is a critical value (thresho 1 d va 1 ue ) for the traveling speed V, the detected pressure p, and the detected flow rate F, and when it exceeds the critical value, it is judged that uneven coating is caused. In the present embodiment, when any one of the traveling speed V and the pressure P detection flow rate F exceeds the set threshold value, it is determined that coating unevenness has occurred, and the main control unit 9 i & transmits the servo unit through the drive control unit The driving of the motor 23, the linear motor 12, and the like is stopped, and a warning is issued. — The memory section 91 c is used to store various materials and to store the operation ', ', fruit, leaf test results, etc. at one time. In the present embodiment, the traveling speed v calculated in accordance with the detection result of the scale reading unit 15a is stored at any time, and the detection pressure p and the detected flow rate F detected by the pressure gauge 8 and the flow meter 83 are hidden at any time. . Specifically, the traveling speed v, the detected pressure p, and the detected flow rate F are associated with the scale position s (the position of the coating unit 5 on the scale 15 5 ) read by the scale reading unit i 5 a . The state is remembered. Further, a coating unevenness generation condition is stored in the memory portion 91c. The coating unevenness generation condition is constituted by a critical value of a maximum value, a minimum value, a variation value, and the like of a case where the coating unevenness is within a tolerance, for example, a case where the critical value is exceeded or The case where the range set by the plurality of threshold values is separated is set as the coating unevenness generation condition. The coating unevenness generation condition is set by the experimental conditions obtained in accordance with the coating operation of the coating apparatus 预先 in advance. Further, the unevenness of the coating stored in the memory portion 9 1 c is generated by the keyboard 98 or the touch panel 99. The drive control unit 92 drives the linear motor 1 2, the servo motor 23, and the like in response to a control signal from the main control unit 9 & Specifically, the traveling device 1A and the lifting device 20 in the coating unit 5 are driven and controlled by controlling the linear motor 12 and the feeding motor 23. The position detecting unit 93 reads the scale 丨5b by the scale reading unit 丨5a, and detects the position of the coating unit 5. The detection result is always recalled by the memory unit 91c. Then, based on the detection result, the traveling speed V of the coating unit 5 is calculated by the main control unit 9a. The pressure detecting unit 94 detects the pressure measured by the pressure gauge 82. The detected detection pressure p is memorized by the memory unit 91c at any time. The flow rate detecting unit 9 5 detects the flow rate measured by the flow meter 83. The detected detected flow rate F is memorized by the memory unit 9丨c at any time.
號進行外部裝置的驅動控制。 琢來自主控制部91 a的控制信 在本實施形態中藉由與壓縮機 200916201 80連接，使該壓縮機80驅動，以供給空氣至空氣軸承i4。 接著，針對該塗佈裝置1中的塗佈動作，一邊參照圖s 所不的流程圖，一邊說明。此外，在本實施形態中，塗佈不 均產生條件為塗佈單元5的行走速度V的最大值Va與最小 值Vb、檢測壓力p的最大值Pa與最小值扑、檢測流量f 的最大值Fa與最小值Fb分別當作臨界值而設定，針對當此 等行走速度V、檢測壓力p、檢測流量F由以臨界值設定的 範圍（以最大值與最小值設定的範圍）脫離時，判斷為塗佈不 均產生之情形來說明。 首先’在步驟S1中基板2的保持被進行。具體上，在 由平台4的表面突出複數根頂出銷的狀態下待機，基板2 被承載於此荨頂出銷的尖端部分。而且，藉由使頂出銷下降 將基板2承載於平台4的表面，在此狀態下使真空泵9動 作，在吸引孔產生吸引力，使基板2吸附保持於平台4的 表面上。 接著，開始塗佈單元5的行走（步驟S2)。具體上，在 藉由由壓縮機80供給空氣至空氣軸承14，使塗佈單元5浮 起來的狀態下，透過驅動控制線性馬達丨2使開縫喷嘴部6 行走至基板2上的預定位置。 接著’開始行走速度V、檢測壓力p、檢測流量f的監 視（步驟S3)。具體上，由來自刻度讀取部15a的塗佈單元5 的位置資訊運算塗佈單元5的行走速度v，該被運算的行走 逮度V被s己憶於記憶部91 c。而且，藉由壓縮機8 〇供給至 空氣軸承14的空氣的壓力透過壓力計82檢測，並且空氣的 200916201 流篁透過流量計8 3檢測，該被檢測的壓力值p及被檢測的 流量值F被記憶於記憶部91 c。 而且接著’塗佈液被塗佈於基板上（步驟S4)。具體上， 在監視行走速度V等的狀態下，使塗佈單元5行走至預定位 置。而且’藉由若塗佈單元5到達預定位置，則透過驅動控 制升降裝置20使開縫喷嘴部6由基板2的位置成為預定的 回度位置而設定’由此狀態驅動控制線性馬達1 2，使開縫 噴嘴邠6行走於X轴方向。亦即，藉由一邊由開缝噴嘴部6 的開缝吐出塗佈液，一邊使開縫喷嘴部6行走，使塗佈液被 以均勻厚度塗佈於基板2上。此時，行走速度V、檢測壓力 p、檢測流量F分別被記憶於記憶部91 c。 接著’判斷塗佈不均是否產生（步驟S5)。具體上，根 據行走速度V、檢測壓力p、檢測流量F是否由以臨界值設 定的範圍（最大值（Va，Pa, Fa)至最小值（Vb，Pb，Fb)的範 圍）脫離來判斷。此處，圖6是顯示行走速度v、檢測壓力p、 f測流量F的計測結果與刻度位置s的關係之圖，圖6(a) 是顯示行走速度v與刻度位置s的關係之圖，圖6(b)是顯 示檢測壓力p與刻度位置S的關係之圖，圖6(c)是顯示檢 測流量F與刻度位置s的關係之圖。 如該圖6(a)〜圖6(c)所示，在塗佈單元5行走於導軌 1 3的導面1 3c的狀態下，行走速度v、檢測壓力p、檢測流 量F是顯示大約一定值，惟在導軌13的連結部13b(刻度位 置S的中央部分So)中，在行走速度v、檢測壓力p、檢測 流量F產生擾動。亦即，由於塗佈單元5通過導軌13的連 19 200916201 結部13b(不連續面）時的塗佈單s 5的動作的擾動，且 氣轴承14朝導軌13供給的空氣的擾動’使得行走速 檢測壓力P、檢剛流量F變化。而且，在已變化的行：卢 V、檢測壓力P、檢测流量F超過以臨界值設定的 ： 判斷為具有塗佈不均。亦即，在圖6所示的例子中，因超 設定有連結部13b附近中的行走速度v的臨界值（Va ° °， 故在判定部91 b中坐丨i 1 ,a ’ J斷為具有塗佈不均。而且，藉由當 為具有塗佈不均時’前進到步驟S6，在觸控面板99上 警告顯示，催促警告给操作者，使塗佈裝置i停止。π 而且，在步驟S5中藉由不滿足塗佈不均產生條件，亦 即’行走速度V、檢測壓力ρ、檢測流量F均在以臨界值設 疋的範圍内，當判斷為不產生塗佈不均時，前進到步驟S7， 塗佈基板2被排出。而且，預定片數的塗佈基板2是否被生 產的判斷被進行，當未達到預定片數時，重複來自步驟S1 的處理（步驟S 8 )。 如此，依照本實施形態中的塗佈裝置1，可藉由監視塗 佈動作中的塗佈單元5的行走速度v、供給至空氣; 的空氣的壓力值Ρ、流量值F判斷不良塗佈基板是否被生 產。因此，即使是為了生產大型塗佈基板而不得已進行導軌 的分割的情形，因可在塗佈動作中檢測塗佈不均的產生，故 與如Μ彺般在生產預定片數的塗佈基板後，藉由別的製程的 塗佈膜檢查製程檢測塗佈不均的情形比車交，可冑免不良基板 被大量生產之問題，可提高良率。 而且，在上述實施形態中關於塗佈不均產生條件雖然是 20 200916201 針對以行走速度V、檢測壓力P、檢測流量F各自的最大值 及最小值當作臨界值而設定的例子來說明，惟不限定於此。 即使是例如僅以最大值當作臨界值，當超過該臨界值時，判 斷為產生塗佈不均者也可以。 而且’即使是在當行走速度V、空氣的檢測壓力P、檢 測流量F顯示預定的變化量時產生塗佈不均的情形下，以該 變化量當作臨界值而設定者也可以。具體上，即使是針對所 檢測的行走速度V運算其微分成分，當該微分成分超過預先 設定的微分成分（臨界值）時，判斷為產生塗佈不均者也可 以。據此，因可連續地監視塗佈單元5的變動，故與以最大 值及最小值‘作臨界值設定的情形比較，即使是塗佈單元已 微小地變動的情形也能有效地檢測塗佈不均的產生。因此， 伴隨著塗佈裝置的組裝之高精度化’連結部13b中的導執 1 3彼此的間隔變成一點點而已，對塗佈單元5的變動變成 微小的情形特別有效。 而且，在上述實施形態中雖然是針對當行走速度v、檢 測壓力P、檢測流量F之任一個脫離以臨界值設定的範圍 時，判斷為產生塗佈不均的例子來說明，惟即使是例如當檢 測壓力P與檢測流量F之兩方脫離以臨界值設定的範圍時， 判斷為產生塗佈不均者也可以"亦即’即使是當由行走迷声 V:檢測壓力P、檢測流量F選擇的兩個以上的要素脫心 臨界值設定的範圍時，判斷為產生塗佈不均者也可以。 對塗佈不均產生條件 過操作者適宜變更者 而且’在上述實施形態中雖然是針 在初期階段被設定的情形來說明，惟透 200916201 也可以。例如，儘管產生塗佈不均的不良塗佈基板被生產， 在塗佈動作未被停止的情形下，藉由透過操作者由觸控面板 99輸入生產有該不良塗佈基板之塗佈不均產生條件，更新 各臨界值’使其反映於之後的塗佈基板的生產者也可以。據 此，僅藉由被初期設定的塗佈不均產生條件就能避免不良塗 佈基板被大量生產之問題。 圖 圖式簡單說明】 1是顯示本發明的—實施形態中的塗饰裝置之斜視 圖 圖2疋概略地顯不上述塗佈裝置的空氣轴承中的空氣 系統之圖。 :::顯不上途塗佈裴置的單元支撐部附近之圖。 圖5是顯示上述塗4置置的：糸統之方塊圖。 圖⑽、⑻士)二置？作之流程圖。 v、檢測壓力p、檢測流量=述塗佈裳置中的行走速度 係之圖’ ® 6(a)是顯示行速：測結果與刻度位置S的關 圖，圖6⑻是顯示檢測 與刻度位置$的關係之 圖6(c)是顯示檢測流量 '刻度位置S的關係之圖， F與刻度位置S的關係之圖。 【主要元件符號說明】 1:塗佈裝置 2:基板 22 200916201 3 :基台 4 :平台 5 :塗佈單元 6 :開縫喷嘴部 7 :單元支撐部 9 :真空泵 I 0:行走裝置 II :滑塊支撐部 1 2 :線性馬達 13 :導執 13a:導執零件 13b:連結部 1 3c :導面 1 4 :空氣軸承 15a:刻度讀取部 15b:刻度 1 5c :導面 20:升降裝置 21 :導軌 2 2 :滑塊 2 3 :伺服馬達 6 1 :喷嘴 8 0 :壓縮機 81 :管路 23 200916201 82··壓力計 8 3 :流量計 90:控制裝置 9 1 :控制本體部 9 1 a :主控制部 9 1 b 判定部 91 c :記憶部 92:位置檢測部 9 3 :壓力檢測部 9 4 :流量檢測部 9 5 :流量檢測部 96:輸入/輸出裝置控制部 9 7 :外部裝置控制部 98 :鍵盤 9 9 :觸控面板 F :檢測流量 P :檢測壓力 V :行走速度No. Drive control of the external device. The control signal from the main control unit 91a is connected to the compressor 200916201 80 in the present embodiment, and the compressor 80 is driven to supply air to the air bearing i4. Next, the coating operation in the coating device 1 will be described with reference to the flowchart of FIG. Further, in the present embodiment, the coating unevenness generation condition is the maximum value Va and the minimum value Vb of the traveling speed V of the coating unit 5, the maximum value Pa of the detected pressure p, the minimum value, and the maximum value of the detected flow rate f. The Fa and the minimum value Fb are set as the critical values, respectively, and when the traveling speed V, the detected pressure p, and the detected flow rate F are deviated from the range set by the critical value (the range set by the maximum value and the minimum value), it is judged. It is explained for the case where uneven coating occurs. First, the holding of the substrate 2 is performed in step S1. Specifically, in a state in which a plurality of ejector pins are protruded from the surface of the stage 4, the substrate 2 is carried on the tip end portion of the dome-out pin. Further, by lowering the ejector pin, the substrate 2 is carried on the surface of the stage 4, and in this state, the vacuum pump 9 is operated to generate an attraction force in the suction hole, and the substrate 2 is adsorbed and held on the surface of the stage 4. Next, the walking of the coating unit 5 is started (step S2). Specifically, in a state where the air is supplied to the air bearing 14 by the compressor 80 and the coating unit 5 is floated, the slit nozzle portion 6 is moved to a predetermined position on the substrate 2 through the drive control linear motor 丨2. Then, the monitoring of the traveling speed V, the detected pressure p, and the detected flow rate f is started (step S3). Specifically, the traveling speed v of the coating unit 5 is calculated from the position information of the coating unit 5 from the scale reading unit 15a, and the calculated running speed V is recalled to the memory unit 91c. Further, the pressure of the air supplied to the air bearing 14 by the compressor 8 is detected by the pressure gauge 82, and the 200916201 flow of the air is detected by the flow meter 83, the detected pressure value p and the detected flow rate value F. It is memorized in the memory unit 91 c. Then, the coating liquid is applied onto the substrate (step S4). Specifically, the coating unit 5 is moved to a predetermined position in a state where the traveling speed V or the like is monitored. Further, when the coating unit 5 reaches the predetermined position, the slitting nozzle unit 6 is set to a predetermined return position by the position of the substrate 2 through the drive control lifting device 20, and the linear motor 1 2 is driven by the state. The slit nozzle 6 is moved in the X-axis direction. In other words, the slitting nozzle portion 6 is moved while the coating liquid is discharged from the slit of the slit nozzle portion 6, and the coating liquid is applied onto the substrate 2 with a uniform thickness. At this time, the traveling speed V, the detected pressure p, and the detected flow rate F are respectively stored in the memory unit 91c. Next, it is judged whether or not coating unevenness is generated (step S5). Specifically, it is judged based on whether the traveling speed V, the detected pressure p, and the detected flow rate F are deviated from the range set by the critical value (the range of the maximum value (Va, Pa, Fa) to the minimum value (Vb, Pb, Fb)). Here, FIG. 6 is a view showing a relationship between the measurement result of the traveling speed v, the detected pressure p, and the f flow rate F, and the scale position s, and FIG. 6(a) is a view showing the relationship between the traveling speed v and the scale position s. Fig. 6(b) is a view showing the relationship between the detected pressure p and the scale position S, and Fig. 6(c) is a view showing the relationship between the detected flow rate F and the scale position s. As shown in FIG. 6(a) to FIG. 6(c), in the state where the coating unit 5 travels on the guide surface 13c of the guide rail 13, the traveling speed v, the detected pressure p, and the detected flow rate F are approximately constant. However, in the connection portion 13b of the guide rail 13 (the central portion So of the scale position S), the traveling speed v, the detected pressure p, and the detected flow rate F cause disturbance. That is, the disturbance of the action of the coating sheet s 5 when the coating unit 5 passes through the junction 19 200916201 of the guide rail 13 (the discontinuous surface), and the disturbance of the air supplied by the air bearing 14 toward the guide rail 13 makes walking The speed detection pressure P and the detection flow rate F change. Further, in the changed line: Lu V, the detection pressure P, and the detected flow rate F exceeding the critical value: It is judged that there is uneven coating. In other words, in the example shown in Fig. 6, since the critical value (Va ° °) of the traveling speed v in the vicinity of the connecting portion 13b is set, the determining unit 91b sits 丨i 1 and a 'J is broken. There is uneven coating. Moreover, when there is unevenness in coating, the process proceeds to step S6, and a warning is displayed on the touch panel 99, prompting the warning to the operator to stop the coating device i. π And, In step S5, when the coating unevenness generation condition is not satisfied, that is, the 'walking speed V, the detection pressure ρ, and the detected flow rate F are all within a range set by the critical value, when it is determined that no coating unevenness is generated, The process proceeds to step S7, and the coated substrate 2 is discharged. Further, the determination as to whether or not the predetermined number of coated substrates 2 are produced is performed, and when the predetermined number of sheets has not been reached, the process from step S1 is repeated (step S8). As described above, according to the coating device 1 of the present embodiment, it is possible to determine the defective coated substrate by monitoring the traveling speed v of the coating unit 5 during the coating operation, the pressure value Ρ of the air supplied to the air, and the flow rate value F. Is it produced? Therefore, even for the production of large coating bases However, in the case where the guide rail is divided, since the unevenness of the coating can be detected in the coating operation, the coating film by another process is produced after a predetermined number of coated substrates are produced as in the case of a crucible. In the inspection process, the unevenness of the coating is detected, and the problem that the defective substrate is mass-produced can be relieved, and the yield can be improved. Moreover, in the above embodiment, the coating unevenness generation condition is 20 200916201 An example in which the maximum value and the minimum value of the speed V, the detected pressure P, and the detected flow rate F are set as a critical value will be described, but is not limited thereto. Even if, for example, only the maximum value is regarded as a critical value, when the critical value is exceeded In the case of the value, it is determined that the coating unevenness may occur. Further, even when the traveling speed V, the air detection pressure P, and the detected flow rate F show a predetermined variation amount, uneven coating occurs. The amount of change may be set as a critical value. Specifically, even if the differential component is calculated for the detected walking speed V, when the differential component exceeds a predetermined differential component (critical In the case of the value, it is judged that the coating unevenness may occur. Accordingly, since the fluctuation of the coating unit 5 can be continuously monitored, it is compared with the case where the maximum value and the minimum value are set as the critical value, even if it is coated. In the case where the cloth unit has been slightly changed, the occurrence of coating unevenness can be effectively detected. Therefore, the accuracy of the assembly of the coating device is improved, and the interval between the guides 1 3 in the connecting portion 13b becomes a little bit. It is particularly effective in the case where the fluctuation of the coating unit 5 is minute. Further, in the above-described embodiment, it is determined that when any one of the traveling speed v, the detection pressure P, and the detected flow rate F is deviated from the critical value. In order to produce an example of coating unevenness, even if, for example, when the detection pressure P and the detected flow rate F are separated from each other by a threshold value, it is judged that the coating unevenness is generated. Even when it is determined by the walking noise V: the detection pressure P and the detection flow rate F that the two or more element decentering threshold values are set, it is determined that the coating unevenness is generated. The conditions for the application of the coating unevenness are appropriately changed by the operator. In the above-described embodiment, the case where the needle is set at the initial stage is described, but the 200916201 may be used. For example, in the case where a poorly coated substrate having uneven coating is produced, in the case where the coating operation is not stopped, the uneven coating is produced by the operator inputting the defective coated substrate by the touch panel 99. It is also possible to produce a condition and update each critical value 'to reflect the producer of the coated substrate afterwards. Accordingly, the problem that the poorly coated substrate is mass-produced can be avoided only by the conditions of uneven coating which are initially set. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a coating device in an embodiment of the present invention. Fig. 2 is a view schematically showing an air system in an air bearing of the above coating device. ::: A diagram showing the vicinity of the unit support portion of the coating device. Fig. 5 is a block diagram showing the above-described coating 4: a system. Figure (10), (8) Shi) two sets? Flow chart. v, detection pressure p, detection flow rate = the travel speed system diagram of the coating skirt ' ® 6 (a) is the display line speed: the measurement results and the scale position S, Figure 6 (8) is the display detection and scale position Fig. 6(c) of the relationship of $ is a graph showing the relationship between the detected flow rate 'scale position S' and the relationship between F and the scale position S. [Description of main component symbols] 1: Coating device 2: Substrate 22 200916201 3 : Abutment 4 : Platform 5 : Coating unit 6 : Slot nozzle portion 7 : Unit support portion 9 : Vacuum pump I 0 : Travel device II : Slip Block support portion 1 2 : Linear motor 13 : Guide 13a: Guide member 13b: Connection portion 1 3c : Guide surface 1 4 : Air bearing 15a: Scale reading portion 15b: Scale 1 5c : Guide surface 20: Lifting device 21 : Guide rail 2 2 : Slider 2 3 : Servo motor 6 1 : Nozzle 8 0 : Compressor 81 : Piping 23 200916201 82 · Pressure gauge 8 3 : Flowmeter 90: Control device 9 1 : Control body part 9 1 a Main control unit 9 1 b Judging unit 91 c : Memory unit 92 : Position detecting unit 9 3 : Pressure detecting unit 9 4 : Flow rate detecting unit 9 5 : Flow rate detecting unit 96 : Input/output device control unit 9 7 : External device Control unit 98: keyboard 9 9 : touch panel F: detection flow rate P: detection pressure V: walking speed