CN101241228B - 微振荡元件及微振荡元件阵列 - Google Patents

微振荡元件及微振荡元件阵列 Download PDF

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Publication number
CN101241228B
CN101241228B CN2008100833221A CN200810083322A CN101241228B CN 101241228 B CN101241228 B CN 101241228B CN 2008100833221 A CN2008100833221 A CN 2008100833221A CN 200810083322 A CN200810083322 A CN 200810083322A CN 101241228 B CN101241228 B CN 101241228B
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CN
China
Prior art keywords
electrode
comb
teeth
frame
oscillation
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Expired - Fee Related
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CN2008100833221A
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English (en)
Chinese (zh)
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CN101241228A (zh
Inventor
高马悟觉
壶井修
曾根田弘光
上田知史
佐胁一平
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Fujitsu Ltd
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Fujitsu Ltd
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Publication of CN101241228A publication Critical patent/CN101241228A/zh
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Publication of CN101241228B publication Critical patent/CN101241228B/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN2008100833221A 2004-12-02 2005-11-18 微振荡元件及微振荡元件阵列 Expired - Fee Related CN101241228B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004-349793 2004-12-02
JP2004349793 2004-12-02
JP2004349793A JP4138736B2 (ja) 2004-12-02 2004-12-02 マイクロ揺動素子

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNB2005101250857A Division CN100383594C (zh) 2004-12-02 2005-11-18 微振荡元件

Publications (2)

Publication Number Publication Date
CN101241228A CN101241228A (zh) 2008-08-13
CN101241228B true CN101241228B (zh) 2011-07-20

Family

ID=36573416

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2008100833221A Expired - Fee Related CN101241228B (zh) 2004-12-02 2005-11-18 微振荡元件及微振荡元件阵列
CNB2005101250857A Expired - Fee Related CN100383594C (zh) 2004-12-02 2005-11-18 微振荡元件

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNB2005101250857A Expired - Fee Related CN100383594C (zh) 2004-12-02 2005-11-18 微振荡元件

Country Status (5)

Country Link
US (2) US20060119216A1 (https=)
JP (1) JP4138736B2 (https=)
KR (2) KR100811703B1 (https=)
CN (2) CN101241228B (https=)
TW (1) TWI286611B (https=)

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JP4138736B2 (ja) * 2004-12-02 2008-08-27 富士通株式会社 マイクロ揺動素子
JP4365308B2 (ja) * 2004-12-02 2009-11-18 富士通株式会社 マイクロ揺動素子
JP4477659B2 (ja) 2007-06-29 2010-06-09 富士通株式会社 マイクロ揺動素子およびマイクロ揺動素子アレイ
CN101827781B (zh) 2007-10-31 2012-05-30 富士通株式会社 微型可动元件以及微型可动元件阵列
JP2009113128A (ja) * 2007-11-02 2009-05-28 Fujitsu Ltd マイクロ揺動素子およびマイクロ揺動素子製造方法
JP5223381B2 (ja) 2008-03-04 2013-06-26 富士通株式会社 マイクロ可動素子、光スイッチング装置、およびマイクロ可動素子製造方法
JP2009258631A (ja) * 2008-03-26 2009-11-05 Fujitsu Ltd 電極およびミラー駆動装置
DE102008001058A1 (de) * 2008-04-08 2009-10-15 Robert Bosch Gmbh Mikromechanische Elektrodenstruktur, entsprechendes Herstellungsverfahren und Mikroaktuatorvorrichtung
JP5056633B2 (ja) * 2008-07-14 2012-10-24 富士通株式会社 マイクロ揺動素子、マイクロ揺動素子アレイ、および光スイッチング装置
JP5029551B2 (ja) * 2008-09-18 2012-09-19 富士通株式会社 マイクロ揺動素子、マイクロ揺動素子アレイ、および光スイッチング装置
DE102008043796B4 (de) * 2008-11-17 2023-12-21 Robert Bosch Gmbh Drehratensensor
JP5444746B2 (ja) 2009-02-13 2014-03-19 富士通株式会社 マイクロ可動素子および光干渉計
DE102009026507A1 (de) * 2009-05-27 2010-12-02 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
DE102009028924A1 (de) * 2009-08-27 2011-03-03 Robert Bosch Gmbh Kapazitiver Sensor und Aktor
JP2011180534A (ja) * 2010-03-03 2011-09-15 Furukawa Electric Co Ltd:The Ｍｅｍｓ素子、可動式ミラー、および光スイッチ装置
JP5560806B2 (ja) * 2010-03-19 2014-07-30 セイコーエプソン株式会社 ジャイロ素子、ジャイロセンサー、および電子機器
DE102013225364A1 (de) * 2013-12-10 2015-06-11 Robert Bosch Gmbh Kammantrieb mit einem verschwenkbaren Spiegelelement
CN105712288B (zh) * 2014-12-02 2017-10-27 无锡华润上华半导体有限公司 Mems扭转式静电驱动器的制作方法
US10523134B2 (en) * 2015-03-12 2019-12-31 Mems Drive, Inc. Comb drive with non-parallel overlapping comb fingers
CN107188108B (zh) * 2017-05-23 2023-07-21 深迪半导体(绍兴)有限公司 一种mems器件及其防吸附方法
US10895713B2 (en) * 2018-10-18 2021-01-19 Microsoft Technology Licensing, Llc Actuator frame for scanning mirror
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Also Published As

Publication number Publication date
US8049394B2 (en) 2011-11-01
CN1782779A (zh) 2006-06-07
US20100231087A1 (en) 2010-09-16
JP4138736B2 (ja) 2008-08-27
CN100383594C (zh) 2008-04-23
US20060119216A1 (en) 2006-06-08
TW200628835A (en) 2006-08-16
KR20060061885A (ko) 2006-06-08
KR100808999B1 (ko) 2008-03-05
CN101241228A (zh) 2008-08-13
KR20070114671A (ko) 2007-12-04
JP2006162663A (ja) 2006-06-22
KR100811703B1 (ko) 2008-03-11
TWI286611B (en) 2007-09-11

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Granted publication date: 20110720