CN101209437B - 流体喷嘴 - Google Patents
流体喷嘴 Download PDFInfo
- Publication number
- CN101209437B CN101209437B CN2007101949470A CN200710194947A CN101209437B CN 101209437 B CN101209437 B CN 101209437B CN 2007101949470 A CN2007101949470 A CN 2007101949470A CN 200710194947 A CN200710194947 A CN 200710194947A CN 101209437 B CN101209437 B CN 101209437B
- Authority
- CN
- China
- Prior art keywords
- fluid
- plate body
- stream
- soup
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
- B05C5/0212—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
- B05C5/0216—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nozzles (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020060136306 | 2006-12-28 | ||
KR10-2006-0136306 | 2006-12-28 | ||
KR1020060136306A KR100828665B1 (ko) | 2006-12-28 | 2006-12-28 | 유체 분사노즐 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101209437A CN101209437A (zh) | 2008-07-02 |
CN101209437B true CN101209437B (zh) | 2010-12-01 |
Family
ID=39609792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2007101949470A Active CN101209437B (zh) | 2006-12-28 | 2007-12-05 | 流体喷嘴 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100828665B1 (zh) |
CN (1) | CN101209437B (zh) |
TW (1) | TWI329036B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110020507A (ko) * | 2009-08-24 | 2011-03-03 | 주식회사 디엠에스 | 유체 분사 장치 |
CN103472693B (zh) * | 2013-08-28 | 2016-01-20 | 清华大学深圳研究生院 | 一种用于芯片显影工艺的工艺喷嘴 |
KR102156740B1 (ko) * | 2013-11-25 | 2020-09-16 | 세메스 주식회사 | 노즐 및 이를 갖는 기판 처리 장치 |
CN107433233A (zh) * | 2017-08-18 | 2017-12-05 | 武汉华星光电技术有限公司 | 一种显影装置及其喷嘴 |
KR102045828B1 (ko) * | 2018-07-04 | 2019-11-18 | 주식회사 디엠에스 | 기판 처리장치 |
JP2021154195A (ja) * | 2020-03-26 | 2021-10-07 | ノードソン コーポレーションNordson Corporation | ノズル、接着剤塗布ヘッド、接着剤塗布装置及びおむつ製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1575858A (zh) * | 2003-06-27 | 2005-02-09 | 显示器生产服务株式会社 | 用于处理平面显示板的表面的流体喷射器 |
CN1608740A (zh) * | 2003-10-17 | 2005-04-27 | 显示器生产服务株式会社 | 液体注入喷嘴 |
CN1757441A (zh) * | 2004-10-04 | 2006-04-12 | 大日本网目版制造株式会社 | 基板处理装置以及基板处理方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005349280A (ja) | 2004-06-09 | 2005-12-22 | Tokyo Ohka Kogyo Co Ltd | スリットノズル |
KR20060012958A (ko) * | 2004-08-05 | 2006-02-09 | 삼성전자주식회사 | 도포 장치용 노즐 |
TWI263542B (en) * | 2004-10-04 | 2006-10-11 | Dainippon Screen Mfg | Apparatus for and method of processing substrate |
JP2006106422A (ja) | 2004-10-06 | 2006-04-20 | Noritsu Koki Co Ltd | 感光材料処理装置 |
-
2006
- 2006-12-28 KR KR1020060136306A patent/KR100828665B1/ko active IP Right Grant
-
2007
- 2007-11-16 TW TW096143409A patent/TWI329036B/zh active
- 2007-12-05 CN CN2007101949470A patent/CN101209437B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1575858A (zh) * | 2003-06-27 | 2005-02-09 | 显示器生产服务株式会社 | 用于处理平面显示板的表面的流体喷射器 |
CN1608740A (zh) * | 2003-10-17 | 2005-04-27 | 显示器生产服务株式会社 | 液体注入喷嘴 |
CN1757441A (zh) * | 2004-10-04 | 2006-04-12 | 大日本网目版制造株式会社 | 基板处理装置以及基板处理方法 |
Non-Patent Citations (3)
Title |
---|
JP特开2005-349280A 2005.12.22 |
JP特开2006-106422A 2006.04.20 |
JP特开平6-190845A 1994.07.12 |
Also Published As
Publication number | Publication date |
---|---|
KR100828665B1 (ko) | 2008-05-09 |
TW200827034A (en) | 2008-07-01 |
CN101209437A (zh) | 2008-07-02 |
TWI329036B (en) | 2010-08-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140226 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140226 Address after: Gyeonggi Do, South Korea Patentee after: Display Production Service Co., Ltd. Patentee after: Weihai dianmei Shiguang electromechanical Co Ltd Address before: Gyeonggi Do, South Korea Patentee before: Display Production Service Co., Ltd. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |