CN101160013B - X射线发生装置 - Google Patents
X射线发生装置 Download PDFInfo
- Publication number
- CN101160013B CN101160013B CN2007101418698A CN200710141869A CN101160013B CN 101160013 B CN101160013 B CN 101160013B CN 2007101418698 A CN2007101418698 A CN 2007101418698A CN 200710141869 A CN200710141869 A CN 200710141869A CN 101160013 B CN101160013 B CN 101160013B
- Authority
- CN
- China
- Prior art keywords
- ray
- ray tube
- output window
- protective case
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001681 protective effect Effects 0.000 claims abstract description 57
- 238000001816 cooling Methods 0.000 claims abstract description 13
- 238000010894 electron beam technology Methods 0.000 claims abstract description 10
- 230000001678 irradiating effect Effects 0.000 claims abstract description 3
- 229920002379 silicone rubber Polymers 0.000 claims description 2
- 230000003068 static effect Effects 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 238000009825 accumulation Methods 0.000 abstract description 2
- 230000035508 accumulation Effects 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910000833 kovar Inorganic materials 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
- H01J35/18—Windows
- H01J35/186—Windows used as targets or X-ray converters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/025—Means for cooling the X-ray tube or the generator
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
- H05G1/02—Constructional details
- H05G1/04—Mounting the X-ray tube within a closed housing
- H05G1/06—X-ray tube and at least part of the power supply apparatus being mounted within the same housing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/122—Cooling of the window
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
Landscapes
- X-Ray Techniques (AREA)
- Elimination Of Static Electricity (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25678096A JP3839528B2 (ja) | 1996-09-27 | 1996-09-27 | X線発生装置 |
| JP256780/96 | 1996-09-27 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB971228213A Division CN100438717C (zh) | 1996-09-27 | 1997-09-27 | X射线发生器及使用该发生器的光电离器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101160013A CN101160013A (zh) | 2008-04-09 |
| CN101160013B true CN101160013B (zh) | 2012-09-05 |
Family
ID=17297351
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100057076A Expired - Fee Related CN101232768B (zh) | 1996-09-27 | 1997-09-27 | X射线发生装置 |
| CN2008101674148A Expired - Fee Related CN101370347B (zh) | 1996-09-27 | 1997-09-27 | X射线发生器 |
| CNB971228213A Expired - Fee Related CN100438717C (zh) | 1996-09-27 | 1997-09-27 | X射线发生器及使用该发生器的光电离器 |
| CN2007101418698A Expired - Fee Related CN101160013B (zh) | 1996-09-27 | 1997-09-27 | X射线发生装置 |
Family Applications Before (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100057076A Expired - Fee Related CN101232768B (zh) | 1996-09-27 | 1997-09-27 | X射线发生装置 |
| CN2008101674148A Expired - Fee Related CN101370347B (zh) | 1996-09-27 | 1997-09-27 | X射线发生器 |
| CNB971228213A Expired - Fee Related CN100438717C (zh) | 1996-09-27 | 1997-09-27 | X射线发生器及使用该发生器的光电离器 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5949849A (enExample) |
| EP (1) | EP0833365B1 (enExample) |
| JP (1) | JP3839528B2 (enExample) |
| KR (2) | KR100465345B1 (enExample) |
| CN (4) | CN101232768B (enExample) |
| DE (1) | DE69726535T2 (enExample) |
| TW (1) | TW344841B (enExample) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3594716B2 (ja) * | 1995-12-25 | 2004-12-02 | 浜松ホトニクス株式会社 | 透過型x線管 |
| JP3514568B2 (ja) * | 1995-12-25 | 2004-03-31 | 浜松ホトニクス株式会社 | X線管の製造方法 |
| JP3839528B2 (ja) * | 1996-09-27 | 2006-11-01 | 浜松ホトニクス株式会社 | X線発生装置 |
| US5802140A (en) | 1997-08-29 | 1998-09-01 | Varian Associates, Inc. | X-ray generating apparatus with integral housing |
| US6361208B1 (en) * | 1999-11-26 | 2002-03-26 | Varian Medical Systems | Mammography x-ray tube having an integral housing assembly |
| US6430263B1 (en) * | 2000-12-01 | 2002-08-06 | Koninklijke Philips Electronics, N.V. | Cold-plate window in a metal-frame x-ray insert |
| US7447298B2 (en) * | 2003-04-01 | 2008-11-04 | Cabot Microelectronics Corporation | Decontamination and sterilization system using large area x-ray source |
| JP4223863B2 (ja) * | 2003-05-30 | 2009-02-12 | 浜松ホトニクス株式会社 | X線発生装置 |
| KR100512129B1 (ko) * | 2003-08-14 | 2005-09-05 | (주)선재하이테크 | 연 엑스선을 이용한 정전기 제거장치 |
| CN1316545C (zh) * | 2003-11-17 | 2007-05-16 | 釜山科技园财团法人 | 利用软x射线的防静电装置 |
| US20050213710A1 (en) * | 2004-03-29 | 2005-09-29 | Lawrence Brian L | System and method for laser X-ray generation |
| JP4589062B2 (ja) * | 2004-09-02 | 2010-12-01 | 浜松ホトニクス株式会社 | X線源 |
| KR100785620B1 (ko) * | 2005-03-15 | 2007-12-12 | 오므론 가부시키가이샤 | 제전 방법, 제전 장치, 유리 기판의 대전 방지 방법 및유리 기판의 대전 방지 장치 |
| KR100680760B1 (ko) * | 2005-04-19 | 2007-02-08 | (주)선재하이테크 | 가요형 연엑스선 이오나이저 |
| EP1950788B1 (en) * | 2005-10-07 | 2014-12-10 | Hamamatsu Photonics Kabushiki Kaisha | X-ray tube and x-ray source including same |
| KR100676527B1 (ko) * | 2006-10-16 | 2007-01-30 | (주)선재하이테크 | 연엑스선을 이용한 이오나이저 및 대전물체의 전하 제거방법 |
| KR100823990B1 (ko) * | 2007-03-19 | 2008-04-22 | (주)선재하이테크 | 광 이오나이저 |
| KR100902946B1 (ko) * | 2007-05-15 | 2009-06-15 | (주)에이치시티 | 소프트 엑스레이 광이온화 하전기 |
| US7796727B1 (en) | 2008-03-26 | 2010-09-14 | Tsi, Incorporated | Aerosol charge conditioner |
| US8559599B2 (en) * | 2010-02-04 | 2013-10-15 | Energy Resources International Co., Ltd. | X-ray generation device and cathode thereof |
| JP5825892B2 (ja) * | 2011-07-11 | 2015-12-02 | キヤノン株式会社 | 放射線発生装置及びそれを用いた放射線撮影装置 |
| JP6039282B2 (ja) * | 2011-08-05 | 2016-12-07 | キヤノン株式会社 | 放射線発生装置及び放射線撮影装置 |
| WO2013111255A1 (ja) * | 2012-01-23 | 2013-08-01 | キヤノン株式会社 | 放射線ターゲット及びその製造方法 |
| JP5899006B2 (ja) * | 2012-03-02 | 2016-04-06 | 浜松ホトニクス株式会社 | X線照射源 |
| CN102956419A (zh) * | 2012-11-27 | 2013-03-06 | 公安部第一研究所 | 软x射线管及其制造方法及具有该射线管的光离子静电消除器 |
| JP2014154423A (ja) * | 2013-02-12 | 2014-08-25 | Toshiba Corp | X線発生装置 |
| US9173279B2 (en) | 2013-03-15 | 2015-10-27 | Tribogenics, Inc. | Compact X-ray generation device |
| US9282622B2 (en) | 2013-10-08 | 2016-03-08 | Moxtek, Inc. | Modular x-ray source |
| KR101471382B1 (ko) * | 2013-10-15 | 2014-12-10 | (주)선재하이테크 | 진공챔버용 연엑스선 제전장치 |
| JP2015111504A (ja) | 2013-12-06 | 2015-06-18 | 株式会社東芝 | X線管及びx線管の製造方法 |
| CN105758872A (zh) * | 2014-12-17 | 2016-07-13 | 中国科学院高能物理研究所 | X射线检测装置及其出束密封窗口保护装置 |
| KR101686821B1 (ko) | 2015-05-18 | 2016-12-15 | (주)선재하이테크 | X선 발생기 |
| JP6611490B2 (ja) * | 2015-07-02 | 2019-11-27 | キヤノン株式会社 | X線発生装置及びこれを用いたx線撮影システム |
| TWI620470B (zh) * | 2017-02-24 | 2018-04-01 | 禪才高科技股份有限公司 | 改善用電子聚焦 x 射線管 |
| KR102065655B1 (ko) | 2018-04-24 | 2020-01-13 | 주식회사 태영이앤티 | X선 발생장치 |
| CN110379588B (zh) * | 2019-07-12 | 2021-11-16 | 上海埃斯凯变压器有限公司 | 一种用于变压器设备的倍压板组件和变压器设备 |
| KR20210021668A (ko) | 2019-08-19 | 2021-03-02 | (주)선재하이테크 | 360도 방사형 광 이오나이저 |
| KR20210145471A (ko) * | 2020-05-25 | 2021-12-02 | (주)선재하이테크 | 회전형 모듈 결합형 이오나이저 |
| CN114286485B (zh) * | 2021-12-27 | 2025-09-26 | 中国科学院国家空间科学中心 | 用于空间x射线探测器标定的微型无阴极x射线发生器 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4034251A (en) * | 1976-02-23 | 1977-07-05 | North American Philips Corporation | Transmission x-ray tube |
| US4969173A (en) * | 1986-12-23 | 1990-11-06 | U.S. Philips Corporation | X-ray tube comprising an annular focus |
| CN2098736U (zh) * | 1991-06-07 | 1992-03-11 | 刘振琴 | X-射线管 |
| CN1079843A (zh) * | 1992-04-08 | 1993-12-22 | 株式会社东芝 | 旋转阳极x射线管 |
| CN2203496Y (zh) * | 1994-02-05 | 1995-07-12 | 周仕涛 | X射线管 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2307612A (en) * | 1941-02-18 | 1943-01-05 | Gen Electric | High voltage apparatus |
| FR2333344A1 (fr) * | 1975-11-28 | 1977-06-24 | Radiologie Cie Gle | Tube radiogene a cathode chaude avec anode en bout et appareil comportant un tel tube |
| JPS5539104A (en) * | 1978-09-12 | 1980-03-18 | Toshiba Corp | X-ray generator |
| JPS5916254A (ja) * | 1983-06-03 | 1984-01-27 | Toshiba Corp | 携帯用x線装置 |
| CN85102523B (zh) * | 1985-04-10 | 1988-01-27 | 北京市理化分析测试中心 | X-射线发生器 |
| US4827371A (en) * | 1988-04-04 | 1989-05-02 | Ion Systems, Inc. | Method and apparatus for ionizing gas with point of use ion flow delivery |
| EP0553912B1 (en) * | 1992-01-27 | 1998-01-07 | Koninklijke Philips Electronics N.V. | X-ray tube with improved temperature control |
| WO1994005138A1 (fr) * | 1992-08-14 | 1994-03-03 | Takasago Netsugaku Kogyo Kabushiki Kaisha | Appareil et procede permettant de produire des ions gazeux par l'utilisation de rayons x, et differents appareils et structures les utilisant |
| JP2710913B2 (ja) * | 1993-06-18 | 1998-02-10 | 浜松ホトニクス株式会社 | X線発生管 |
| JPH0750594A (ja) * | 1993-08-06 | 1995-02-21 | Mitsubishi Electric Corp | エラー訂正方法 |
| CN2203521Y (zh) * | 1994-11-14 | 1995-07-12 | 上海国嘉光电有限公司 | 低剂量x射线发生器 |
| JP3839528B2 (ja) * | 1996-09-27 | 2006-11-01 | 浜松ホトニクス株式会社 | X線発生装置 |
-
1996
- 1996-09-27 JP JP25678096A patent/JP3839528B2/ja not_active Expired - Lifetime
-
1997
- 1997-09-26 EP EP97307598A patent/EP0833365B1/en not_active Expired - Lifetime
- 1997-09-26 KR KR1019970049277A patent/KR100465345B1/ko not_active Ceased
- 1997-09-26 US US08/937,921 patent/US5949849A/en not_active Expired - Lifetime
- 1997-09-26 DE DE69726535T patent/DE69726535T2/de not_active Expired - Lifetime
- 1997-09-27 CN CN2008100057076A patent/CN101232768B/zh not_active Expired - Fee Related
- 1997-09-27 CN CN2008101674148A patent/CN101370347B/zh not_active Expired - Fee Related
- 1997-09-27 CN CNB971228213A patent/CN100438717C/zh not_active Expired - Fee Related
- 1997-09-27 CN CN2007101418698A patent/CN101160013B/zh not_active Expired - Fee Related
- 1997-09-27 TW TW086114157A patent/TW344841B/zh not_active IP Right Cessation
-
2004
- 2004-11-05 KR KR1020040089634A patent/KR100465346B1/ko not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4034251A (en) * | 1976-02-23 | 1977-07-05 | North American Philips Corporation | Transmission x-ray tube |
| US4969173A (en) * | 1986-12-23 | 1990-11-06 | U.S. Philips Corporation | X-ray tube comprising an annular focus |
| CN2098736U (zh) * | 1991-06-07 | 1992-03-11 | 刘振琴 | X-射线管 |
| CN1079843A (zh) * | 1992-04-08 | 1993-12-22 | 株式会社东芝 | 旋转阳极x射线管 |
| CN2203496Y (zh) * | 1994-02-05 | 1995-07-12 | 周仕涛 | X射线管 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101370347B (zh) | 2012-01-18 |
| CN101232768B (zh) | 2012-09-05 |
| DE69726535D1 (de) | 2004-01-15 |
| TW344841B (en) | 1998-11-11 |
| KR100465346B1 (ko) | 2005-01-13 |
| KR100465345B1 (ko) | 2005-04-13 |
| CN101232768A (zh) | 2008-07-30 |
| CN100438717C (zh) | 2008-11-26 |
| DE69726535T2 (de) | 2004-10-14 |
| JP3839528B2 (ja) | 2006-11-01 |
| CN101370347A (zh) | 2009-02-18 |
| CN101160013A (zh) | 2008-04-09 |
| EP0833365A1 (en) | 1998-04-01 |
| JPH10106463A (ja) | 1998-04-24 |
| CN1183022A (zh) | 1998-05-27 |
| US5949849A (en) | 1999-09-07 |
| EP0833365B1 (en) | 2003-12-03 |
| KR19980025059A (ko) | 1998-07-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120905 Termination date: 20160927 |