CN101084324A - Sb-Te系合金烧结体靶及其制造方法 - Google Patents
Sb-Te系合金烧结体靶及其制造方法 Download PDFInfo
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- CN101084324A CN101084324A CNA2005800439126A CN200580043912A CN101084324A CN 101084324 A CN101084324 A CN 101084324A CN A2005800439126 A CNA2005800439126 A CN A2005800439126A CN 200580043912 A CN200580043912 A CN 200580043912A CN 101084324 A CN101084324 A CN 101084324A
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- 238000005245 sintering Methods 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims description 28
- 229910001215 Te alloy Inorganic materials 0.000 title abstract description 16
- 230000008569 process Effects 0.000 title description 3
- 239000002245 particle Substances 0.000 claims abstract description 71
- 239000000843 powder Substances 0.000 claims abstract description 60
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000001301 oxygen Substances 0.000 claims abstract description 36
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 36
- 238000005477 sputtering target Methods 0.000 claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 claims abstract description 17
- 239000000956 alloy Substances 0.000 claims description 45
- 229910045601 alloy Inorganic materials 0.000 claims description 43
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 238000005336 cracking Methods 0.000 abstract 1
- 230000003628 erosive effect Effects 0.000 abstract 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 239000012798 spherical particle Substances 0.000 abstract 1
- 201000008827 tuberculosis Diseases 0.000 description 26
- 208000037656 Respiratory Sounds Diseases 0.000 description 19
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 238000005452 bending Methods 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 10
- 239000002994 raw material Substances 0.000 description 10
- 238000009689 gas atomisation Methods 0.000 description 9
- 238000004080 punching Methods 0.000 description 9
- 239000007921 spray Substances 0.000 description 9
- 229910000952 Be alloy Inorganic materials 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 230000000803 paradoxical effect Effects 0.000 description 8
- 229910052786 argon Inorganic materials 0.000 description 6
- 239000000470 constituent Substances 0.000 description 6
- 238000005507 spraying Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000001000 micrograph Methods 0.000 description 4
- 238000010891 electric arc Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- -1 this Chemical compound 0.000 description 1
Images
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C12/00—Alloys based on antimony or bismuth
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/06—Metallic powder characterised by the shape of the particles
- B22F1/068—Flake-like particles
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C28/00—Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B7/2433—Metals or elements of Groups 13, 14, 15 or 16 of the Periodic Table, e.g. B, Si, Ge, As, Sb, Bi, Se or Te
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/266—Sputtering or spin-coating layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
- B22F2998/10—Processes characterised by the sequence of their steps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24308—Metals or metalloids transition metal elements of group 11 (Cu, Ag, Au)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/2431—Metals or metalloids group 13 elements (B, Al, Ga, In)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24312—Metals or metalloids group 14 elements (e.g. Si, Ge, Sn)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24314—Metals or metalloids group 15 elements (e.g. Sb, Bi)
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
- G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
- G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
- G11B2007/24302—Metals or metalloids
- G11B2007/24316—Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Powder Metallurgy (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
单位 | 实施例1 | 实施例2 | 比较例1 | 比较例2 | 比较例3 | 比较例4 | |
材料 | GST | AIST | GST | GST | GST | AIST | |
冲压压力 | kgf/cm2 | 150 | 200 | 75 | 150 | 150 | 200 |
冲压温度 | 600 | 500 | 600 | 500 | 600 | 400 | |
扁平率(≥0.6) | % | 80 | 85 | 30 | 20 | 30 | 20 |
原料粉形状 | G.A | G.A | G.A | G.A | 机械粉碎 | G.A | |
G.A氧浓度 | wtppm | 250 | 140 | 250 | 250 | N.A | 120 |
靶的氧浓度 | wtppm | 350 | 160 | 350 | 350 | 1800 | 160 |
组织扁平方位比例 | % | 90 | 80 | 70 | 60 | 35 | 70 |
相对密度 | % | 100 | 95 | 81 | 85 | 99 | 80 |
抗弯强度 | MPa | 70 | 72 | 52 | 55 | 60 | 48 |
到100kWh的平均P数 | 个/wafer | 30 | 21 | 102 | 85 | 150 | 90 |
结核数量 | 个/靶 | 50 | 35 | ≥300 | 240 | ≥300 | ≥300 |
Claims (7)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP373058/2004 | 2004-12-24 | ||
JP2004373058 | 2004-12-24 | ||
PCT/JP2005/021871 WO2006067937A1 (ja) | 2004-12-24 | 2005-11-29 | Sb-Te系合金焼結体ターゲット及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101084324A true CN101084324A (zh) | 2007-12-05 |
CN101084324B CN101084324B (zh) | 2010-06-09 |
Family
ID=36601542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005800439126A Active CN101084324B (zh) | 2004-12-24 | 2005-11-29 | Sb-Te系合金烧结体靶及其制造方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7943021B2 (zh) |
EP (2) | EP1829985B1 (zh) |
JP (1) | JP4642780B2 (zh) |
KR (1) | KR100939473B1 (zh) |
CN (1) | CN101084324B (zh) |
TW (1) | TW200622018A (zh) |
WO (1) | WO2006067937A1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105917021A (zh) * | 2014-03-25 | 2016-08-31 | 捷客斯金属株式会社 | Sb-Te基合金烧结体溅射靶 |
CN112739847A (zh) * | 2018-11-20 | 2021-04-30 | 三菱综合材料株式会社 | 溅射靶 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4708361B2 (ja) * | 2004-11-30 | 2011-06-22 | Jx日鉱日石金属株式会社 | Sb−Te系合金焼結体スパッタリングターゲット |
US8882975B2 (en) | 2006-10-13 | 2014-11-11 | Jx Nippon Mining & Metals Corporation | Sb-Te base alloy sinter sputtering target |
WO2008081585A1 (ja) * | 2007-01-05 | 2008-07-10 | Kabushiki Kaisha Toshiba | スパッタリングターゲットとその製造方法 |
KR101175091B1 (ko) * | 2007-09-13 | 2012-08-21 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | 소결체의 제조 방법, 소결체, 당해 소결체로 이루어지는 스퍼터링 타겟 및 스퍼터링 타겟-백킹 플레이트 조립체 |
KR101249153B1 (ko) * | 2008-03-17 | 2013-03-29 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | 소결체 타겟 및 소결체의 제조 방법 |
US9299543B2 (en) | 2009-05-27 | 2016-03-29 | Jx Nippon Mining & Metals Corporation | Target of sintered compact, and method of producing the sintered compact |
WO2011136120A1 (ja) | 2010-04-26 | 2011-11-03 | Jx日鉱日石金属株式会社 | Sb-Te基合金焼結体スパッタリングターゲット |
US9555473B2 (en) * | 2011-10-08 | 2017-01-31 | The Boeing Company | System and method for increasing the bulk density of metal powder |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2970813B2 (ja) | 1989-11-20 | 1999-11-02 | 株式会社東芝 | スパッタリングターゲットおよびその製造方法,およびそのターゲットを用いて形成された記録薄膜,光ディスク |
JPH1081962A (ja) | 1996-09-06 | 1998-03-31 | Sumitomo Metal Mining Co Ltd | Ge−Te−Sb系スパッタリング用ターゲット材の製造方法 |
JP3113639B2 (ja) | 1998-10-29 | 2000-12-04 | トヨタ自動車株式会社 | 合金粉末の製造方法 |
JP3703648B2 (ja) * | 1999-03-16 | 2005-10-05 | 山陽特殊製鋼株式会社 | Ge−Sb−Te系スパッタリング用ターゲット材の製造方法 |
JP2001098366A (ja) | 1999-07-26 | 2001-04-10 | Sanyo Special Steel Co Ltd | Ge−Sb−Te系スパッタリングターゲット材の製造方法 |
JP2001123266A (ja) | 1999-10-21 | 2001-05-08 | Sanyo Special Steel Co Ltd | Ge−Sb−Te系スパッタリングターゲット材の製造方法 |
JP2001123267A (ja) | 1999-10-26 | 2001-05-08 | Sanyo Special Steel Co Ltd | Ge−Sb−Te系スパッタリングターゲット材の製造方法 |
US6632583B2 (en) * | 1999-12-07 | 2003-10-14 | Mitsubishi Chemical Corporation | Optical recording medium and production method of the same |
JP2001342505A (ja) | 2000-05-31 | 2001-12-14 | Sanyo Special Steel Co Ltd | 低融点ターゲット材およびその製造方法 |
JP2001342559A (ja) | 2000-05-31 | 2001-12-14 | Sanyo Special Steel Co Ltd | Te系合金ターゲット材の製造方法 |
US20020160305A1 (en) * | 2001-03-08 | 2002-10-31 | Mitsubishi Chemical Corporation | Optical recording medium, method of writing and erasing information using the same, and process of producing the same |
JP2002358699A (ja) * | 2001-06-01 | 2002-12-13 | Nikko Materials Co Ltd | 相変化型光ディスク保護膜形成用スパッタリングターゲット及び該ターゲットを使用して相変化型光ディスク保護膜を形成した光記録媒体 |
WO2003071531A1 (en) | 2002-02-25 | 2003-08-28 | Nikko Materials Company, Limited | Sputtering target for phase-change memory, film for phase change memory formed by using the target, and method for producing the target |
JP2004162109A (ja) * | 2002-11-12 | 2004-06-10 | Nikko Materials Co Ltd | スパッタリングターゲット及び同製造用粉末 |
TWI365914B (en) | 2003-07-03 | 2012-06-11 | Mitsubishi Materials Corp | Phase change recording film having high electrical resistance and sputtering target for forming phase change recording film |
JP4708361B2 (ja) | 2004-11-30 | 2011-06-22 | Jx日鉱日石金属株式会社 | Sb−Te系合金焼結体スパッタリングターゲット |
CN101103134B (zh) | 2005-01-18 | 2010-07-07 | 日矿金属株式会社 | 烧结用Sb-Te系合金粉末及其制造方法和烧结该粉末得到的烧结体溅射靶 |
US8882975B2 (en) | 2006-10-13 | 2014-11-11 | Jx Nippon Mining & Metals Corporation | Sb-Te base alloy sinter sputtering target |
-
2005
- 2005-11-29 US US11/722,218 patent/US7943021B2/en active Active
- 2005-11-29 WO PCT/JP2005/021871 patent/WO2006067937A1/ja active Application Filing
- 2005-11-29 CN CN2005800439126A patent/CN101084324B/zh active Active
- 2005-11-29 KR KR1020077014176A patent/KR100939473B1/ko active IP Right Grant
- 2005-11-29 JP JP2006548750A patent/JP4642780B2/ja active Active
- 2005-11-29 EP EP05811469.5A patent/EP1829985B1/en active Active
- 2005-11-29 EP EP10183276.4A patent/EP2264216B1/en active Active
- 2005-12-05 TW TW094142757A patent/TW200622018A/zh unknown
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105917021A (zh) * | 2014-03-25 | 2016-08-31 | 捷客斯金属株式会社 | Sb-Te基合金烧结体溅射靶 |
CN105917021B (zh) * | 2014-03-25 | 2018-04-17 | 捷客斯金属株式会社 | Sb‑Te基合金烧结体溅射靶 |
CN112739847A (zh) * | 2018-11-20 | 2021-04-30 | 三菱综合材料株式会社 | 溅射靶 |
Also Published As
Publication number | Publication date |
---|---|
TWI317385B (zh) | 2009-11-21 |
EP1829985A1 (en) | 2007-09-05 |
EP1829985B1 (en) | 2013-10-16 |
TW200622018A (en) | 2006-07-01 |
WO2006067937A1 (ja) | 2006-06-29 |
CN101084324B (zh) | 2010-06-09 |
KR100939473B1 (ko) | 2010-01-29 |
US20100025236A1 (en) | 2010-02-04 |
EP2264216A2 (en) | 2010-12-22 |
US7943021B2 (en) | 2011-05-17 |
EP2264216B1 (en) | 2017-10-18 |
EP1829985A4 (en) | 2008-06-04 |
KR20070086537A (ko) | 2007-08-27 |
JPWO2006067937A1 (ja) | 2008-06-12 |
EP2264216A3 (en) | 2012-03-21 |
JP4642780B2 (ja) | 2011-03-02 |
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