CN101053090B - 图案化有机材料以同时形成绝缘体和半导体的方法以及由此制成的器件 - Google Patents
图案化有机材料以同时形成绝缘体和半导体的方法以及由此制成的器件 Download PDFInfo
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- CN101053090B CN101053090B CN2005800379638A CN200580037963A CN101053090B CN 101053090 B CN101053090 B CN 101053090B CN 2005800379638 A CN2005800379638 A CN 2005800379638A CN 200580037963 A CN200580037963 A CN 200580037963A CN 101053090 B CN101053090 B CN 101053090B
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- precursor
- light
- pentacene
- heating
- exposed
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- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000004065 semiconductor Substances 0.000 title claims abstract description 31
- 239000012212 insulator Substances 0.000 title claims abstract description 16
- 238000000059 patterning Methods 0.000 title description 8
- 239000011368 organic material Substances 0.000 title description 6
- 239000002243 precursor Substances 0.000 claims abstract description 63
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 29
- UFCVADNIXDUEFZ-UHFFFAOYSA-N pentacene-6,13-dione Chemical compound C1=CC=C2C=C3C(=O)C4=CC5=CC=CC=C5C=C4C(=O)C3=CC2=C1 UFCVADNIXDUEFZ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims description 21
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 claims description 12
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 description 13
- 230000008859 change Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- NMGSDTSOSIPXTN-UHFFFAOYSA-N cyclohexa-1,2-diene Chemical compound C1CC=C=CC1 NMGSDTSOSIPXTN-UHFFFAOYSA-N 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 229920003026 Acene Polymers 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 238000005698 Diels-Alder reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002796 luminescence method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 125000005582 pentacene group Chemical group 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 125000004151 quinonyl group Chemical group 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/211—Changing the shape of the active layer in the devices, e.g. patterning by selective transformation of an existing layer
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Thin Film Transistor (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US62567204P | 2004-11-05 | 2004-11-05 | |
US60/625,672 | 2004-11-05 | ||
PCT/IB2005/053583 WO2006048833A1 (en) | 2004-11-05 | 2005-11-02 | Method for patterning an organic material to concurrently form an insulator and a semiconductor and device formed thereby |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101053090A CN101053090A (zh) | 2007-10-10 |
CN101053090B true CN101053090B (zh) | 2010-12-22 |
Family
ID=35708430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005800379638A Expired - Fee Related CN101053090B (zh) | 2004-11-05 | 2005-11-02 | 图案化有机材料以同时形成绝缘体和半导体的方法以及由此制成的器件 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8030124B2 (zh) |
EP (1) | EP1815501A1 (zh) |
JP (1) | JP5175102B2 (zh) |
KR (1) | KR101184366B1 (zh) |
CN (1) | CN101053090B (zh) |
TW (1) | TWI456658B (zh) |
WO (1) | WO2006048833A1 (zh) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI469224B (zh) | 2008-10-20 | 2015-01-11 | Ind Tech Res Inst | 有機薄膜電晶體及其製造方法 |
JP5455110B2 (ja) * | 2009-02-03 | 2014-03-26 | 独立行政法人科学技術振興機構 | ペンタセンキノン誘導体及びその製造方法 |
US20110108411A1 (en) * | 2009-11-11 | 2011-05-12 | Popik Vladimir V | Methods for labeling a substrate using a hetero-diels-alder reaction |
US9090542B2 (en) | 2009-11-11 | 2015-07-28 | University Of Georgia Research Foundation, Inc. | Methods for labeling a substrate using a hetero-diels-alder reaction |
US10464172B2 (en) | 2013-02-21 | 2019-11-05 | Nlight, Inc. | Patterning conductive films using variable focal plane to control feature size |
WO2014130089A1 (en) | 2013-02-21 | 2014-08-28 | Nlight Photonics Corporation | Non-ablative laser patterning |
WO2014130895A1 (en) | 2013-02-21 | 2014-08-28 | Nlight Photonics Corporation | Laser patterning multi-layer structures |
US9842665B2 (en) | 2013-02-21 | 2017-12-12 | Nlight, Inc. | Optimization of high resolution digitally encoded laser scanners for fine feature marking |
US10618131B2 (en) | 2014-06-05 | 2020-04-14 | Nlight, Inc. | Laser patterning skew correction |
CN105720463B (zh) | 2014-08-01 | 2021-05-14 | 恩耐公司 | 光纤和光纤传输的激光器中的背向反射保护与监控 |
US9837783B2 (en) | 2015-01-26 | 2017-12-05 | Nlight, Inc. | High-power, single-mode fiber sources |
US10050404B2 (en) | 2015-03-26 | 2018-08-14 | Nlight, Inc. | Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss |
US10520671B2 (en) | 2015-07-08 | 2019-12-31 | Nlight, Inc. | Fiber with depressed central index for increased beam parameter product |
US11179807B2 (en) | 2015-11-23 | 2021-11-23 | Nlight, Inc. | Fine-scale temporal control for laser material processing |
WO2017091606A1 (en) | 2015-11-23 | 2017-06-01 | Nlight, Inc. | Predictive modification of laser diode drive current waveform in high power laser systems |
EP3380266B1 (en) | 2015-11-23 | 2021-08-11 | NLIGHT, Inc. | Fine-scale temporal control for laser material processing |
US10295820B2 (en) | 2016-01-19 | 2019-05-21 | Nlight, Inc. | Method of processing calibration data in 3D laser scanner systems |
US10423015B2 (en) | 2016-09-29 | 2019-09-24 | Nlight, Inc. | Adjustable beam characteristics |
US10730785B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Optical fiber bending mechanisms |
US10732439B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Fiber-coupled device for varying beam characteristics |
KR102611837B1 (ko) | 2017-04-04 | 2023-12-07 | 엔라이트 인크. | 검류계 스캐너 보정을 위한 광학 기준 생성 |
CN111384268B (zh) * | 2018-12-29 | 2021-06-18 | Tcl科技集团股份有限公司 | 量子点发光二极管的制备方法及量子点墨水 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999010939A2 (en) * | 1997-08-22 | 1999-03-04 | Koninklijke Philips Electronics N.V. | A method of manufacturing a field-effect transistor substantially consisting of organic materials |
JP2001102172A (ja) | 1999-09-30 | 2001-04-13 | Idemitsu Kosan Co Ltd | 有機エレクトロルミネッセンス素子 |
USH2084H1 (en) | 1999-12-16 | 2003-10-07 | The United States Of America As Represented By The Secretary Of The Navy | Pentacene derivatives as red emitters in organic light emitting devices |
US6500604B1 (en) | 2000-01-03 | 2002-12-31 | International Business Machines Corporation | Method for patterning sensitive organic thin films |
KR20040044998A (ko) | 2001-09-27 | 2004-05-31 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 치환 펜타센 반도체 |
US6963080B2 (en) | 2001-11-26 | 2005-11-08 | International Business Machines Corporation | Thin film transistors using solution processed pentacene precursor as organic semiconductor |
JP4281325B2 (ja) * | 2002-10-24 | 2009-06-17 | コニカミノルタホールディングス株式会社 | 有機薄膜トランジスタ素子 |
JP2004165427A (ja) * | 2002-11-13 | 2004-06-10 | Konica Minolta Holdings Inc | 有機薄膜トランジスタ素子 |
US7053401B2 (en) | 2002-12-20 | 2006-05-30 | International Business Machines Corporation | Synthesis and application of photosensitive pentacene precursor in organic thin film transistors |
CN1761639A (zh) * | 2003-03-18 | 2006-04-19 | 皇家飞利浦电子股份有限公司 | 前体低聚苯的制备方法 |
-
2005
- 2005-11-02 TW TW094138482A patent/TWI456658B/zh not_active IP Right Cessation
- 2005-11-02 CN CN2005800379638A patent/CN101053090B/zh not_active Expired - Fee Related
- 2005-11-02 JP JP2007539684A patent/JP5175102B2/ja not_active Expired - Fee Related
- 2005-11-02 WO PCT/IB2005/053583 patent/WO2006048833A1/en active Application Filing
- 2005-11-02 US US11/718,332 patent/US8030124B2/en not_active Expired - Fee Related
- 2005-11-02 KR KR1020077010087A patent/KR101184366B1/ko active IP Right Grant
- 2005-11-02 EP EP05798958A patent/EP1815501A1/en not_active Withdrawn
Non-Patent Citations (5)
Title |
---|
A. R. Brown, A. Pomp, C. M. Hart, D. M. de Leeuw.Logic gates made from polymer transistors and their use in ringoscillators.Science270.1995,270972-974. * |
Oana D. Jurchescu, Jacob Baas, and Thomas T. M. Palstra.Effect of impurites on the mobility of single crystal pentacene.Applied Physics Letters84 16.2004,84(16),3063. |
Oana D. Jurchescu, Jacob Baas, and Thomas T. M. Palstra.Effect of impurites on the mobility of single crystal pentacene.Applied Physics Letters84 16.2004,84(16),3063. * |
Peter T. Herwig and Klaus Mullen.A soluble pentacene precursor: synthesis, solid-stateconversion into pentacene and application in a field-effecttransistor.Advanced Materials11 6.1999,11(6),480-481. * |
PeterT.HerwigandKlausMullen.Asolublepentaceneprecursor:synthesis solid-stateconversion into pentacene and application in a field-effecttransistor.Advanced Materials11 6.1999 |
Also Published As
Publication number | Publication date |
---|---|
KR20070083946A (ko) | 2007-08-24 |
JP2008519451A (ja) | 2008-06-05 |
KR101184366B1 (ko) | 2012-09-20 |
JP5175102B2 (ja) | 2013-04-03 |
CN101053090A (zh) | 2007-10-10 |
US8030124B2 (en) | 2011-10-04 |
US20080246024A1 (en) | 2008-10-09 |
TW200633062A (en) | 2006-09-16 |
WO2006048833A1 (en) | 2006-05-11 |
TWI456658B (zh) | 2014-10-11 |
EP1815501A1 (en) | 2007-08-08 |
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