CN101045294A

CN101045294A - Multi-direction type grab

Info

Publication number: CN101045294A
Application number: CN 200610067495
Authority: CN
Inventors: 杨天德; 徐嘉彬; 吕世建
Original assignee: MJC Probe Inc
Current assignee: MJC Probe Inc
Priority date: 2006-03-29
Filing date: 2006-03-29
Publication date: 2007-10-03
Anticipated expiration: 2026-03-29
Also published as: CN100546774C

Abstract

A multidirectional grasp tool for taking or releasing a workpiece is composed of a main grasp body with a rotary axle and the grasp arms able to be moved around said rotary axle in different directions, and a drive unit consisting of vertical drive set, a horizontal drive set and a rotation drive set for driving said main grasp body to do horizontal and vertical movements and rotation.

Description

Multi-direction type grab

Technical field

The present invention relates to a kind of multi-direction type grab, be particularly related to and a kind ofly can in the processing operation process, get the material or the grabbing device of positioning operation simultaneously, can shorten the processing procedure time, promote production efficiency, be applicable to the manufacturing industry field that to repeat to get material, processing, as the wafer manufacturing industry.

Background technology

According to product performance or processing mode difference, be not the continuous processing operation that all products all can carry out different processing procedures, for example wafer manufacturing, its part procedure for processing must repeat to get the action of material, processing, mainly includes the following step:

1, at first by grabbing devices such as mechanical arms with wafer to be processed by taking out in the magazine;

2, wafer to be processed is placed in processes operation on the machine table;

3, after operation to be processed is finished, will process wafer by taking out on the machine table by grabbing device again;

4, will process wafer returns to magazine and stores;

5, grabbing device grasps another wafer to be processed again to carry out procedure for processing.

Repeat above-mentioned material, the processing steps of getting so again and again, person in addition, required in response to different wafer processing sections, the part procedure for processing still must carry out the wafer positioning step before wafer enters machine table, in order to described section processing operation processing procedure.

Above-mentioned action seems coherent, so in fact but exist one seriously to lack, that is, when wafer is processed operation, grabbing device is to be in static waiting state and not have any action, carry out taking out wafer to be processed and work as grabbing device by magazine, the wafer location, or take off by machine table and to process wafer, send magazine back to, when grasping a succession of action such as next wafer to be processed again, described machine table then is in idle state, wasted many times virtually, and general dealer's improvement countermeasure only limits to how to accelerate to get material, put the material action, or improve the board operating speed, cause production efficiency can't effectively promote all the time.

Therefore, how can effectively utilize process time, make the highest mechanical efficiency of grabbing device performance, and can shorten procedure for processing, raising production capacity, be the big problem that relevant dealer presses for solution.

Summary of the invention

The objective of the invention is to propose a kind of multi-direction type grab, can in the processing operation process, get material or other required action simultaneously, can shorten the processing procedure time, effectively promote production capacity.

For achieving the above object, the present invention proposes a kind of multi-direction type grab, and it comprises:

One grasps main body, and it has a rotating shaft, is that the center branch is provided with crawl arm towards different directions with described rotating shaft;

Driving mechanism drive to grasp main body and does vertical, horizontal displacement or rotation.

Preferably, it more comprises a sensing apparatus, is in order to the sensing location of workpiece.

Preferably, described sensing apparatus is to be arranged to grasp on the main body.

Preferably, after described sensing apparatus detects the location of workpiece, can produce detection signal and grasp the workpiece that is detected with the control crawl arm.

Preferably, described sensing apparatus comprises two sensors, and the sensing direction of described two sensors is to intersect vertically mutually.

Preferably, described crawl arm is the rotating shaft that is symmetrical in described extracting main body, divides to be horizontally disposed with towards rightabout.

Preferably, described crawl arm is to be communicated with vacuum withdraw device to produce pull of vacuum.

Preferably, on the face of described crawl arm in order to grabbing workpiece at least one hole is set, described hole is communicated in vacuum withdraw device, makes by this between described crawl arm and the workpiece to have absorption affinity.

Preferably, described crawl arm is that the level extension is tabular.

Preferably, the outboard end of described crawl arm has a groove, and the outboard end of described crawl arm is " U " shape.

Preferably, described driving mechanism comprises:

One vertical drive group is to grasp the motion of main body vertical linearity in order to drive;

One horizontal drive group is to grasp the motion of main body horizontal linearity in order to drive;

One rotation driving group is to grasp the main body rotation in order to drive.

Preferably, described vertical drive group comprises:

One railroad, it is by a vertically disposed slide rail, and a pedestal that is sheathed on the described slide rail and can slides on described slide rail constitutes, described slide rail top is that confession is provided with described extracting main body;

Power set are in order to providing power to above-mentioned described slide rail, can move up and down in order to drive described slide rail, and then drive and grasp main body and move.

Preferably, described railroad is ball spline (Ball Spline), and described slide rail is a splined shaft, and described pedestal then is a splined sleeve.

Preferably, described horizontal drive group comprises:

One screw device, it is by a horizontally disposed screw rod, and one be arranged on the described screw rod and can be made of by the axially movable driven member of parallel screw screw drive, described driven member is for the setting of extracting main body thereon;

CD-ROM drive motor is to move on screw rod for driving described screw rod rotation and driving driven member, drives the extracting main body that is arranged on the driven member then and moves.

Preferably, described rotation driving group comprises:

One driving member, described driving member are to connect the rotating shaft that grasps main body;

One power take-off mechanism to driving member, drives the rotating shaft rotation of grasping main body by described driving member in order to outputting power again.

Preferably, described power take-off mechanism is a motor deceleration group.

Preferably, described driving member is a belt.

Further understand and approval in order to have for structure purpose of the present invention and effect, cooperate diagram to describe in detail as after.

Description of drawings

Fig. 1 is the perspective view of extracting main body of the present invention preferred embodiment;

Fig. 2 is the perspective view that extracting main body preferred embodiment of the present invention cooperates driving mechanism, magazine and positioner;

Fig. 3 to Fig. 8 is the vertical view that preferred embodiment of the present invention picks and places the continuous action of workpiece.

Description of reference numerals: 1-grasps main body; The 11-rotating shaft; 12,13-crawl arm; 121,131-upper surface; 122,132-groove; 123,133-hole; The 14-sensing apparatus; 141,142-sensor; 2-vertical drive group; The 21-railroad; The 211-splined shaft; The 212-splined sleeve; The 22-support; 3-horizontal drive group; The 31-screw device; The 311-screw rod; The 32-CD-ROM drive motor; 4-rotation driving group; The 41-belt; 42-motor deceleration group; The 43-belt pulley; The 5-workpiece; The 6-magazine; The 61-slot; The 7-positioner; The 71-rotating seat; The 72-positioning seat; The 8-machine table; 9,9a-wafer; 91-truncation limit; The A-screw rod axially; The B-machine direction.

The specific embodiment

For reaching employed technological means of purpose and effect, and following graphic cited embodiment only is an aid illustration hereinafter with reference to the graphic the present invention of description who encloses, but that the technological means of this case is not limited to is cited graphic.

See also the perspective view of multi-direction type grab preferred embodiment provided by the invention shown in Figure 1, it comprises that one grasps main body 1, described extracting main body 1 has a rotating shaft 11, on described rotating shaft 11, be arranged with two groups and be

flat crawl arm

12,13, described two groups of crawl arms 12, the 13rd, be the center with described rotating shaft 11, be provided with towards the rightabout horizontal-extending respectively, its upper surface 121, the 131st, can carry workpiece 5, in described two groups of

crawl arms

12,13 outboard ends away from rotating shaft 11 are provided with groove 122,132, make described two groups of

crawl arms

12,13 outboard end is " U " shape, about described groove 122,132 effect will be specified in the back segment explanation.

Corresponding to workpiece 5 in the upper surface 121,131 of described two groups of

crawl arms

12,13 again puts positions and is provided with hole 123,133, described hole the 123, the 133rd is in order to be communicated with outside vacuum withdraw device (not shown), make described hole 123,133 have suction by described vacuum withdraw device, make workpiece 5 can firmly be adsorbed in the upper surface 121,131 of described

crawl arm

12,13, avoid workpiece 5 to drop, can to comply with the workpiece overall dimensions that grasped different and decide as for be provided with position and the quantity of described hole 123,133, are not limited to illustrate aspect.

Secondly, be provided with sensing apparatus 14 in described extracting main body 1 again, described sensing apparatus 14 comprises two sensors 141,142, and described two sensors 141,142 sensing direction intersects vertically mutually, described sensor 141 has the sensing direction of a level towards described extracting main body 1 outside, when described extracting main body 1 moves, can be by the location of workpiece in its moving direction the place ahead of described sensor 141 sensings, and described sensor 142 has a vertical sensing direction towards described extracting main body 1 top, when described extracting main body 1 moves up and down, but whether the top of described sensor 142 its mobile routes of sensing has outstanding workpiece, to avoid described extracting main body 1 and workpiece to produce bump, so, by sensor 141,142 can detect the tram of workpiece, and can produce detection signal with

control crawl arm

12,13 grasp the workpiece that is detected, can comply with the difference of the workpiece overall dimensions that grasped or processing environment as for the kind of described sensing apparatus 14 and quantity thereof and decide, known reflective optical sensor, ultrasound sensors or the like dissimilar sensor, all can reach the purpose of the detecting location of workpiece, this belongs to the application of prior art, so do not repeat them here.

Please continue consult shown in Figure 2, the present invention comprises a driving mechanism in addition, described driving mechanism comprises a vertical drive group 2, a horizontal drive group 3 and a rotation driving group 4, uses and drives that described extracting main body 1 can be done vertically, horizontal linearity motion and rotating, to reach the purpose that picks and places workpiece.

Described vertical drive group 2 comprises a railroad 21, in present embodiment, described railroad 21 is a ball spline (Ball Spline), it comprises a vertically disposed splined shaft 211, an and splined sleeve 212 that is sheathed on the described splined shaft 211 and can on described splined shaft 211, slides, described splined shaft 211 and splined sleeve 212 are to be arranged on the

support

22,1 of described extracting main body is arranged at splined shaft 211 tops, described splined shaft 211 is to be controlled by a power set (not shown), by described power set outputting power to described splined shaft 211, can drive described splined shaft 211 and make lifting action, and then drive the linear displacement that described extracting main body 1 can be made vertical direction, mandatory declaration be, the enforcement aspect of described railroad 21 is not limited to the ball spline of above-mentioned splined shaft 211 and splined sleeve 212 formations, the slide rail of known other different kenels, known members such as device fitted bearing such as screw mandrel also can reach identical purpose.

Secondly, described horizontal drive group 3 is made of a screw device 31 and a CD-ROM drive motor 32, described screw device 31 has a horizontally disposed screw rod 311, can drive described screw rod 311 by described CD-ROM drive motor 32 outputting powers rotates, then can drive a driven member (not shown) that is arranged on the screw rod 311 moves horizontally along the axial A of screw rod 311, therefore, the above-mentioned support 22 that vertical drive group 2 is set can be connected with driven member, or directly with described support 22 as driven member, can drive and grasp main body 1 and do the horizontal linearity motion.

Consult described rotation driving group 4 shown in Figure 2 again, it is as driving member by a belt 41, described belt 41 is sheathed on a motor deceleration group 42, and a belt pulley 43, described belt pulley 43 be interlock in the rotating shaft 11 that grasps main body 1, organize 42 outputting powers to belt 41 by described motor deceleration, can drive belt pulley 43 by belt 41 rotates, and then can drive rotating shaft 11 rotations, therefore, the extracting main body 1 that is arranged at rotating shaft 11 tops also can be rotated synchronously.

Take a broad view of said structure as can be known, described extracting main body 1 is by described vertical drive group 2, the driving of horizontal drive group 3 and rotation driving group 4, can do vertical, horizontal linearity moves and rotates, and can control vertical drive group 2 by control program, the start that cooperatively interacts of horizontal drive group 3 and rotation driving group 4, as for grasping the vertical of main body 1, the horizontal throw and the anglec of rotation thereof, can be according to the workpiece type, size, processing environment, space or board are arranged different and the different aspects of implementing are arranged, for example the structure of above-mentioned described vertical drive group 2 and horizontal drive group 3 can be exchanged, or change splined shaft 211 and screw rod 311 length, it is the transformation applications of constructed means, still belongs to category of the present invention.

See also Fig. 2 and Fig. 3 to shown in Figure 8, to specify the continuous actuator state that the present invention picks and places workpiece.

Magazine 6 as shown in Figure 2, it has the slot 61 of plural layer, each slot 61 all can insert (Fig. 2 only shows the state of a wafer 9 of planting) for wafer 9 levels, after described horizontal drive group 3, be provided with a location device 7, described positioner 7 centers are provided with a rotating seat 71 with suction, in described rotating seat 71 peripheries around be provided with the plural number positioning seat 72, described rotating seat 71 and positioning seat 72 can be put thereon and position for wafer 9, so that wafer 9 has the required directionality of processing operation, machine table 8 as shown in Figure 3 again, it provides wafer 9 and can put thereon to process operation, described magazine 6, positioner 7 and machine table 8 are to cooperate the stroke of described extracting main body 1 and be provided with, in embodiment illustrated in fig. 3, described magazine 6, positioner 7 and machine table 8 are rotating shaft 11 peripheral settings the around described extracting main body 1.

As shown in Figures 3 and 4, at first by being arranged at wafer to be processed 9 positions of being put in the sensing apparatus 14 detecting magazines 6 that grasp on the main body 1, and rear drive is grasped main body 1 with rotating shaft 11 rotate to an angle (near 90 degree), so that crawl arm 12 is towards magazine 6, and stretch into wafer 9 bottoms (as shown in Figure 4).

As Fig. 4 and shown in Figure 5, crawl arm 12 is stretched into wafer 9 bottoms and contact with wafer 9 bottoms, owing to being provided with, crawl arm 12 connects the hole 123 that the external vacuum draw-out device has suction, therefore wafer 9 is adsorbed on the crawl arm 12, and main body 1 slow astern set a distance is grasped in rear drive, with wafer 9 (as shown in Figure 5 by taking-up in the magazine 6, this moment, the truncation limit 91 of described wafer 9 was to be askew status), drive extracting main body 1 again and rotate to an angle (near 90 degree), make crawl arm 12 be positioned at positioner 7 tops.

As Fig. 5 and shown in Figure 6, after crawl arm 12 rotates to positioner 7 tops, interrupt the pull of vacuum of the hole 123 of crawl arm 12 earlier, drive again and grasp main body 1 decline, wafer on the crawl arm 12 9 is placed on the positioning seat 72 of positioner 7, can position described wafer 9, because crawl arm 12 outboard ends are provided with groove 122, when being placed in wafer 9 on rotating seat 71 and the positioning seat 72 when crawl arm 12 declines, can avoid crawl arm 12 and rotating seat 71 to interfere mutually, shown in figure six, described positioner 7 recoverable wafers 9 make its truncation limit 91 towards specific machine direction B, and when crawl arm 12 rotated to positioner 7 tops, the crawl arm 13 that is symmetrical in described crawl arm 12 settings just can rotate to the wafer 9a below of machine table 8.

As Figure 6 and Figure 7, when the wafer 9 of positioner 7 is finished the location, the wafer 9a of machine table 8 also finishes the processing operation, drive this moment and grasp main body 1 rising,

crawl arm

12,13 can hold up

wafer

9,9a simultaneously, by hole set on the

crawl arm

12,13 123,133

wafer

9,9a are attached on the

crawl arm

12,13 really with suction, driving extracting main body 1 again rotates to an angle, make crawl arm 13 towards magazine 6, and the wafer 9a that will process insertion magazine 6, as shown in Figure 7.

As shown in Figures 7 and 8, behind the wafer 9a insertion magazine 6 that crawl arm 13 will have been processed, driving extracting main body 1 again rotates to an angle, the wafer to be processed 9 that makes crawl arm 12 will finish the location is put into machine table 8, carry out the processing operation of wafer 9, grasp main body 1 and can be returned to state shown in Figure 3 again, the material of getting that carries out next wafer to be processed moves, and so goes round and begins again.

In sum, multi-direction type grab provided by the present invention, crawl arm design by its different azimuth, when workpiece processing operation, can get material or other required action simultaneously, can effectively utilize process time, make the highest mechanical efficiency of grabbing device and board performance, and can shorten procedure for processing, raising production capacity.

The above only is a most preferred embodiment of the present invention, when can not with the scope implemented of qualification the present invention.Promptly the equalization of doing according to claim of the present invention generally changes and modifies, and all should still belong in the scope that patent of the present invention contains.

Claims

1. a multi-direction type grab is to supply to pick and place workpiece, it is characterized in that, comprising:

2. multi-direction type grab as claimed in claim 1 is characterized in that: more comprise a sensing apparatus in order to the sensing location of workpiece.

3. multi-direction type grab as claimed in claim 2 is characterized in that: described sensing apparatus is to be arranged to grasp on the main body.

4. multi-direction type grab as claimed in claim 2 is characterized in that: described sensing apparatus comprises two sensors, and the sensing direction of described two sensors is to intersect vertically mutually.

5. multi-direction type grab as claimed in claim 1 is characterized in that: described crawl arm is the rotating shaft that is symmetrical in described extracting main body, divides to be horizontally disposed with towards rightabout.

6. multi-direction type grab as claimed in claim 1 is characterized in that: described crawl arm is to be communicated with vacuum withdraw device.

7. multi-direction type grab as claimed in claim 6, it is characterized in that: it is on the face of described crawl arm in order to grabbing workpiece at least one hole to be set, described hole is communicated in vacuum withdraw device, makes by this between described crawl arm and the workpiece to have absorption affinity.

8. multi-direction type grab as claimed in claim 1 is characterized in that: described crawl arm is that the level extension is tabular.

9. multi-direction type grab as claimed in claim 8 is characterized in that: the outboard end of described crawl arm has a groove, and the outboard end of described crawl arm is " U " shape.

10. multi-direction type grab as claimed in claim 1 is characterized in that: described driving mechanism comprises:

One vertical drive group drives and grasps the motion of main body vertical linearity;

One horizontal drive group drives and grasps the motion of main body horizontal linearity;

One rotation driving group drives and grasps the main body rotation.

11. multi-direction type grab as claimed in claim 10 is characterized in that: described vertical drive group comprises:

One railroad, it is by a vertically disposed slide rail, and one be sheathed on the described slide rail and the pedestal that slides on described slide rail constitutes, described slide rail top is provided with described extracting main body;

Power set provide power to above-mentioned described slide rail.

12. multi-direction type grab as claimed in claim 11 is characterized in that: described railroad is a ball spline, and described slide rail is a splined shaft, and described pedestal then is a splined sleeve.

13. multi-direction type grab as claimed in claim 10 is characterized in that: described horizontal drive group comprises:

One screw device, it is by a horizontally disposed screw rod, and one be arranged on the described screw rod and the axially movable driven member of parallel screw constitutes by screw drive, described driven member grasps the main body setting thereon;

CD-ROM drive motor drives described screw rod rotation and drives driven member and moves on screw rod.

14. multi-direction type grab as claimed in claim 10 is characterized in that: described rotation driving group comprises:

One power take-off mechanism, outputting power is to driving member.

15. multi-direction type grab as claimed in claim 14 is characterized in that: described power take-off mechanism is a motor deceleration group.

16. multi-direction type grab as claimed in claim 14 is characterized in that: described driving member is a belt.